JPH07270321A - Irradiator for detecting defect of chip part - Google Patents

Irradiator for detecting defect of chip part

Info

Publication number
JPH07270321A
JPH07270321A JP6061597A JP6159794A JPH07270321A JP H07270321 A JPH07270321 A JP H07270321A JP 6061597 A JP6061597 A JP 6061597A JP 6159794 A JP6159794 A JP 6159794A JP H07270321 A JPH07270321 A JP H07270321A
Authority
JP
Japan
Prior art keywords
chip component
illuminator
corner
detecting
illuminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP6061597A
Other languages
Japanese (ja)
Inventor
Nobuyasu Oshima
信康 大島
Takamasa Masui
隆正 増井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP6061597A priority Critical patent/JPH07270321A/en
Publication of JPH07270321A publication Critical patent/JPH07270321A/en
Withdrawn legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To provide an irradiator for detecting defect of chip parts which can illuminate the chip parts with a proper brightness to detect a defect on the top surface of the chip parts and near the corner thereof. CONSTITUTION:This apparatus is provided with a first lighting device 30 which has four light sources 30a, 30b, 30c and 30d arranged above each of four corners 22a, 22b, 22c and 22d of a chip part 22 so that the angle theta1 to the normal 24 reaches 12 deg. and a second lighting device 40 which has four light sources 40a, 40b, 40c and 40d arranged obliquely above each of four corners 22a, 22b, 22c and 22d so that the angle theta2 to the normal 24 reaches 70 deg.. Light emitting surfaces of the light sources 30a, 30b, 30c, 30d, 40a, 40b, 40c and 40d are formed into slit-shape.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、チップ部品の外観検査
をするに当たってこのチップ部品を照明するチップ部品
欠陥検出用照明装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chip component defect detecting illuminating device for illuminating a chip component for visual inspection of the chip component.

【0002】[0002]

【従来の技術】図3、図4を参照して従来のチップ部品
欠陥検出用照明装置を説明する。図3はリング状の照明
具で上方からチップ部品を照明している状態を示す説明
図、図4は斜め上方からチップ部品を照明している状態
を示す説明図である。図3に示されるように、従来は位
置決め治具8に固定されたチップ部品10の上面10a
の欠陥を検出するために、チップ部品10の上方に配置
されたリング状の照明具12を用いて上面10aを照明
してCCDカメラ14でチップ部品10を撮像してい
る。また、図4に示されるように、位置決め治具8に固
定されたチップ部品10の上面の各辺が交わる部分(以
下、隅という)の近傍10bの欠陥や上面10aの凹凸
を検出するために、チップ部品10の斜め上方に配置さ
れた照明具16を用いて上面10aを照明してCCDカ
メラ14でチップ部品10を撮像している。
2. Description of the Related Art A conventional illuminating device for detecting chip component defects will be described with reference to FIGS. FIG. 3 is an explanatory view showing a state where the ring-shaped illuminator illuminates the chip component from above, and FIG. 4 is an explanatory diagram showing a state where the chip component is illuminated from obliquely above. As shown in FIG. 3, conventionally, the upper surface 10a of the chip component 10 fixed to the positioning jig 8 is used.
In order to detect such defects, the upper surface 10a is illuminated by using the ring-shaped illuminating device 12 arranged above the chip component 10 and the chip component 10 is imaged by the CCD camera 14. Further, as shown in FIG. 4, in order to detect a defect in the vicinity 10b of a portion (hereinafter, referred to as a corner) where each side of the upper surface of the chip component 10 fixed to the positioning jig 8 intersects, and unevenness of the upper surface 10a. The upper surface 10 a is illuminated by using the illuminator 16 arranged obliquely above the chip component 10 and the CCD camera 14 captures an image of the chip component 10.

【0003】[0003]

【発明が解決しようとする課題】図3に示される照明方
法ではチップ部品10をその上方から照明しているた
め、上面10aの欠陥は検出できるが、隅の近傍10b
の欠陥を検出できない。また、図4に示される照明方法
では、隅の近傍10bの欠陥を検出できるが、上面10
aの欠陥を検出できない。さらに、上記いずれの照明方
法でも、隅の近傍が丸みを帯びていると丸みを帯びた部
分で光が反射されるため、隅の近傍の欠陥を検出するこ
とは困難である。
In the illumination method shown in FIG. 3, since the chip component 10 is illuminated from above, defects on the upper surface 10a can be detected, but the vicinity of the corner 10b is detected.
Can not detect defects. In addition, in the illumination method shown in FIG. 4, although the defect in the vicinity 10b of the corner can be detected, the upper surface 10
The defect a cannot be detected. Further, in any of the above illumination methods, if the corner is rounded, the light is reflected by the rounded portion, so it is difficult to detect a defect near the corner.

【0004】本発明は、上記事情に鑑み、チップ部品の
上面とこの上面の隅の近傍の欠陥を検出するために適切
な明るさでチップ部品を照明できるチップ部品欠陥検出
用照明装置を提供することを目的とする。
In view of the above circumstances, the present invention provides a chip component defect detecting illuminating device capable of illuminating a chip component with appropriate brightness for detecting defects on the upper surface of the chip component and in the vicinity of the corners of the upper surface. The purpose is to

【0005】[0005]

【課題を解決するための手段】上記目的を達成する本発
明のチップ部品欠陥検出用照明装置は、上面に隅を有す
るチップ部品の外観検査をするためにチップ部品を照明
するチップ部品欠陥検出用照明装置において、隅の方向
から上面を斜めに照明する、スリット状の光出射面を有
する第1の照明具と、隅の方向から上面を第1の照明具
よりもさらに斜めに照明する、スリット状の光出射面を
有する第2の照明具とを備えたことを特徴とするもので
ある。
SUMMARY OF THE INVENTION A chip part defect detection illuminating device of the present invention for achieving the above object is for chip part defect detection for illuminating a chip part for visual inspection of a chip part having a corner on the upper surface. In a lighting device, a first illuminator having a slit-shaped light emitting surface that illuminates the upper surface obliquely from the corner direction, and a slit that illuminates the upper surface more obliquely than the first illuminator from the corner direction. And a second illuminator having a light emitting surface.

【0006】ここで、第1の照明具は10±5°の範囲
内の入射角で上面を照明し、第2の照明具は65±5°
の範囲内の入射角で上面を照明することが好ましい。
Here, the first illuminator illuminates the upper surface at an incident angle within the range of 10 ± 5 °, and the second illuminator 65 ± 5 °.
It is preferable to illuminate the top surface with an angle of incidence within the range.

【0007】[0007]

【作用】本発明のチップ部品欠陥検出用照明装置によれ
ば、チップ部品を外観検査するに当たって、第1の照明
具を用いて隅の方向から上面を斜めに照明すると共に第
2の照明具を用いて隅の方向から上面を第1の照明具よ
りもさらに斜めに照明するため、チップ部品の上面及び
隅の近傍を同時に認識できる。しかも、各照明具の光出
射面はリット状に形成されているため、隅の近傍の輝度
を必要以上に上げることなく欠陥部分を認識できる。
According to the illuminating device for detecting a chip component of the present invention, in visual inspection of a chip component, the first illuminator is used to illuminate the upper surface obliquely from the direction of the corner and the second illuminator is provided. Since the upper surface is illuminated more obliquely from the direction of the corner than the first illuminator, the upper surface of the chip component and the vicinity of the corner can be recognized at the same time. Moreover, since the light emitting surface of each illuminator is formed in a rit shape, the defective portion can be recognized without increasing the brightness near the corner more than necessary.

【0008】ここで、第1の照明具は10±5°の範囲
内の入射角で上面を照明し、第2の照明具は65±5°
の範囲内の入射角で上面を照明した場合は、一層明確に
上面及び隅の近傍の面を同時に認識できる。
Here, the first illuminator illuminates the upper surface at an incident angle within the range of 10 ± 5 °, and the second illuminator 65 ± 5 °.
When the upper surface is illuminated at an angle of incidence within the range, the upper surface and the surface near the corner can be recognized more clearly.

【0009】[0009]

【実施例】以下、図面を参照して本発明のチップ部品欠
陥検出用照明装置の一実施例を説明する。図1はチップ
部品欠陥検出用照明装置を示す模式図、図2は図1に示
されたチップ部品欠陥検出用照明装置の光源面を示す平
面図である。チップ部品欠陥検出用照明装置20は、直
方体のチップ部品22を照明する装置であり、4つの隅
22a,22b,22c,22dそれぞれの上方に、法
線24に対する角度θ1 が12°になるように配置され
た4つの光源30a,30b,30c,30dを有する
第1の照明具30と、4つの隅22a,22b,22
c,22dそれぞれの斜め上方に、法線24に対する角
度θ2 が70°になるように配置された4つの光源40
a,40b,40c,40dを有する第2の照明具40
とを備えて構成されている。また、光源30a,30
b,30c,30dの光を出射する光出射面32a,3
2b,32c,32dには、図2に示されるように、ス
リット34が形成されている。光源40a,40b,4
0c,40dの光出射面にも同様のスリットが形成され
ている。各光源から放出される光線の幅はこのスリット
により制限され、これにより欠陥を検出するために適切
な明るさでチップ部品を照明できる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a lighting device for detecting chip component defects according to the present invention will be described below with reference to the drawings. FIG. 1 is a schematic view showing a lighting device for detecting chip component defects, and FIG. 2 is a plan view showing a light source surface of the lighting device for detecting chip component defects shown in FIG. The illuminating device 20 for chip component defect detection is a device for illuminating a rectangular parallelepiped chip component 22, and an angle θ 1 with respect to a normal line 24 is 12 ° above each of the four corners 22a, 22b, 22c, 22d. A first illuminator 30 having four light sources 30a, 30b, 30c, 30d arranged at four corners 22a, 22b, 22
Four light sources 40 arranged obliquely above c and 22d such that the angle θ 2 with respect to the normal line 24 is 70 °.
Second illuminator 40 having a, 40b, 40c, 40d
And is configured. In addition, the light sources 30a, 30
Light emitting surfaces 32a, 3 for emitting light of b, 30c, 30d
Slits 34 are formed in 2b, 32c, and 32d, as shown in FIG. Light sources 40a, 40b, 4
Similar slits are formed on the light emitting surfaces of 0c and 40d. The width of the light beam emitted from each light source is limited by this slit, which allows the chip component to be illuminated with the appropriate brightness for detecting defects.

【0010】チップ部品欠陥検出用照明装置20を用い
てチップ部品22を照明すると、第1の照明具30はチ
ップ部品22の上面22eを適切な明るさで照明し、第
2の照明具40は隅22a,22b,22c,22dそ
れぞれの近傍を適切な明るさで照明する。このため、隅
22a,22b,22c,22dの近傍からの反射が抑
えられる。この結果、CCDカメラ等を用いてチップ部
品22の表面を明確に撮像でき、高精度の欠陥検出が行
えることとなる。
When the chip component 22 is illuminated using the illuminating device 20 for detecting chip component defects, the first illuminator 30 illuminates the upper surface 22e of the chip component 22 with an appropriate brightness, and the second illuminator 40 illuminates. The vicinity of each of the corners 22a, 22b, 22c, 22d is illuminated with appropriate brightness. Therefore, reflection from the vicinity of the corners 22a, 22b, 22c, 22d is suppressed. As a result, the surface of the chip component 22 can be clearly imaged by using a CCD camera or the like, and highly accurate defect detection can be performed.

【0011】[0011]

【発明の効果】以上説明したように本発明のチップ部品
欠陥検出用照明装置によれば、第1の照明具を用いて隅
の方向から上面を斜めに照明すると共に第2の照明具を
用いて隅の方向から上面を第1の照明具よりもさらに斜
めに照明するため、隅の近傍の面の輝度を上げることな
くチップ部品の上面及び隅の近傍を同時に認識できる。
しかも、各照明具の光出射面はリット状に形成されてい
るため、隅の近傍の輝度を必要以上に上げることなく欠
陥部分を認識できる。
As described above, according to the illuminating device for detecting chip component defects of the present invention, the first illuminator is used to illuminate the upper surface obliquely from the corner direction and the second illuminator is used. Since the upper surface is illuminated more obliquely than the first illuminator from the direction of the corner, the upper surface of the chip component and the vicinity of the corner can be recognized at the same time without increasing the brightness of the surface near the corner.
Moreover, since the light emitting surface of each illuminator is formed in a rit shape, the defective portion can be recognized without increasing the brightness near the corner more than necessary.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のチップ部品欠陥検出用照明装置の一実
施例を示す模式図である。
FIG. 1 is a schematic view showing an embodiment of a lighting device for detecting chip component defects of the present invention.

【図2】図1に示されたチップ部品欠陥検出用照明装置
の光源面を示す平面図である。
FIG. 2 is a plan view showing a light source surface of the illuminating device for detecting chip component defects shown in FIG.

【図3】従来のリング状の照明具で上方からチップ部品
を照明している状態を示す説明図である。
FIG. 3 is an explanatory diagram showing a state in which a conventional ring-shaped illuminator illuminates a chip component from above.

【図4】従来の照明具で斜め上方からチップ部品を照明
している状態を示す説明図である。
FIG. 4 is an explanatory diagram showing a state where a conventional illuminator illuminates a chip component from diagonally above.

【符号の説明】[Explanation of symbols]

20 チップ部品欠陥検出用照明装置 22 チップ部品 22a,22b,22c,22d 隅 30 第1の照明具 30a,30b,30c,30d,40a,40b,4
0c,40d 光源 34 スリット 40 第2の照明具
20 Chip Component Defect Detection Illumination Device 22 Chip Components 22a, 22b, 22c, 22d Corner 30 First Illuminator 30a, 30b, 30c, 30d, 40a, 40b, 4
0c, 40d light source 34 slit 40 second illuminator

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 上面に隅を有するチップ部品の外観検査
をするために該チップ部品を照明するチップ部品欠陥検
出用照明装置において、 前記隅の方向から前記上面を斜めに照明する、スリット
状の光出射面を有する第1の照明具と、 前記隅の方向から前記上面を前記第1の照明具よりもさ
らに斜めに照明する、スリット状の光出射面を有する第
2の照明具とを備えたことを特徴とするチップ部品欠陥
検出用照明装置。
1. A chip component defect detecting illuminating device for illuminating a chip component having a corner on the upper surface thereof, the slit illuminating device illuminating the upper surface obliquely from the direction of the corner. A first illuminator having a light emitting surface, and a second illuminator having a slit-shaped light emitting surface for illuminating the upper surface more obliquely from the direction of the corner than the first illuminating tool. An illuminating device for detecting a chip component defect.
JP6061597A 1994-03-30 1994-03-30 Irradiator for detecting defect of chip part Withdrawn JPH07270321A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6061597A JPH07270321A (en) 1994-03-30 1994-03-30 Irradiator for detecting defect of chip part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6061597A JPH07270321A (en) 1994-03-30 1994-03-30 Irradiator for detecting defect of chip part

Publications (1)

Publication Number Publication Date
JPH07270321A true JPH07270321A (en) 1995-10-20

Family

ID=13175729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6061597A Withdrawn JPH07270321A (en) 1994-03-30 1994-03-30 Irradiator for detecting defect of chip part

Country Status (1)

Country Link
JP (1) JPH07270321A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005201880A (en) * 2004-01-15 2005-07-28 Gmb Corp Apparatus for inspecting surface defect

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005201880A (en) * 2004-01-15 2005-07-28 Gmb Corp Apparatus for inspecting surface defect

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Effective date: 20010605