JPH05340708A - Instrument for automatically measuring thickness of film in small-diameter pipe by remote control - Google Patents

Instrument for automatically measuring thickness of film in small-diameter pipe by remote control

Info

Publication number
JPH05340708A
JPH05340708A JP4150715A JP15071592A JPH05340708A JP H05340708 A JPH05340708 A JP H05340708A JP 4150715 A JP4150715 A JP 4150715A JP 15071592 A JP15071592 A JP 15071592A JP H05340708 A JPH05340708 A JP H05340708A
Authority
JP
Japan
Prior art keywords
head
pipe
sensor
thickness
small
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4150715A
Other languages
Japanese (ja)
Other versions
JP3079777B2 (en
Inventor
Nobuyuki Shiokawa
信幸 塩川
Tadashi Hamaoka
正 浜岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP04150715A priority Critical patent/JP3079777B2/en
Publication of JPH05340708A publication Critical patent/JPH05340708A/en
Application granted granted Critical
Publication of JP3079777B2 publication Critical patent/JP3079777B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

Abstract

PURPOSE:To improve the accuracy of the thickness of a metallic film formed in a small-diameter pipe by fitting an eddy-current film thickness sensor to a head fixed in the pipe. CONSTITUTION:A paste thickness discriminating curve is obtained by correcting a previously prepared correlation curve between actually measured thicknesses by means of a dial gauge and voltage values detected by means of a sensor 17 by performing calibration tests. A head 11 is fixed on the axis of a pipe by advancing a head fixing pin 15 in the radial direction of the pipe. Under such a condition, the thickness of a metallic film 7 at the fixing point is obtained by advancing the sensor 17 in the radial direction of the pipe. Then, after the head 11 is released from the fixed state by retreating the sensor 17 and pin 15, the thickness of the film 7 is measured at numerous points by moving the head 11 in the inner peripheral and axial directions of the pipe by means of a driving mechanism 13. The measuring interval is set at about 1mm in the axial direction and 1 deg. in the peripheral direction and measured results are displayed by controlling the movement of the sensor 17 and pin 15 by means of a personal computer 31. Namely, fluctuation-free measured values can be obtained by freely moving the eddy-current film thickness sensor 17.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は小口径管の内壁面に形成
される金属膜の厚さを測定するための装置に係り、特に
金属膜の厚さの検出精度を高めることのできる小口径管
内遠隔自動膜厚測定装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring the thickness of a metal film formed on the inner wall surface of a small-diameter pipe, and particularly to a small-diameter pipe capable of increasing the detection accuracy of the thickness of the metal film. The present invention relates to an in-tube remote automatic film thickness measuring device.

【0002】[0002]

【従来の技術】原子炉容器の底部には中性子を検出する
計装を案内するためにインコアハウジングが設けられて
いる。図8に示するように、このインコアハウジングは
原子炉容器1の底部を形成する下鏡2に挿入支持された
ステンレス製小口径管3で構成されており、この小口径
管3は下鏡2に形成された開口部4に挿入されて溶接に
より取り付けられている。小口径管3は外周部から溶接
されて開口部4に取り付けられるため、その溶接部5の
近傍の小口径管3の内壁面6には劣化等の進行を防止す
るためにCr,Ni等の混合粉末がペースト状に塗布さ
れ、さらにこのペースト状金属膜7はレーザー照射され
て硬質な金属膜となる。
2. Description of the Related Art An in-core housing is provided at the bottom of a reactor vessel to guide instrumentation for detecting neutrons. As shown in FIG. 8, this in-core housing is composed of a stainless small-diameter tube 3 inserted and supported in a lower mirror 2 forming the bottom of the reactor vessel 1. It is inserted into the opening 4 formed in and is attached by welding. Since the small diameter pipe 3 is welded from the outer peripheral portion and attached to the opening 4, the inner wall surface 6 of the small diameter pipe 3 in the vicinity of the welded portion 5 is made of Cr, Ni or the like in order to prevent the progress of deterioration or the like. The mixed powder is applied in a paste form, and the paste-like metal film 7 is irradiated with laser to become a hard metal film.

【0003】このように管内壁面6に混合粉末によるペ
ーストを塗布してこれにレーザー照射する場合、ペース
トの厚さをコントロールしないと最終的な金属膜が得ら
れないため、ペーストの厚さ管理を要する。
When the paste of mixed powder is applied to the inner wall surface 6 of the tube and the paste is irradiated with a laser beam as described above, a final metal film cannot be obtained unless the thickness of the paste is controlled. It costs.

【0004】[0004]

【発明が解決しようとする課題】従来、電磁式センサで
ペースト状金属膜7が測定されており、この電磁式セン
サは金属膜7に接触するプローブに交流を流すとその周
囲に磁界が発生し、これに比例した電流が二次側コイル
に流れるため、ペースト厚に応じた二次側コイルの二次
電流の変化から膜厚を測定するものである。電磁式セン
サによる膜厚の測定においてはプローブの接触部が不安
定になり、二次電流の測定値にバラツキが発生し、信頼
性に欠ける問題があった。
Conventionally, the pasty metal film 7 has been measured by an electromagnetic sensor. In this electromagnetic sensor, when an alternating current is applied to a probe in contact with the metal film 7, a magnetic field is generated around it. Since a current proportional to this flows in the secondary coil, the film thickness is measured from the change in the secondary current of the secondary coil according to the paste thickness. In the measurement of the film thickness by the electromagnetic sensor, the contact portion of the probe becomes unstable, the measured value of the secondary current varies, and there is a problem of lack of reliability.

【0005】本発明は上記問題点を有効に解決すべく創
案されたものである。
The present invention was devised to effectively solve the above problems.

【0006】本発明は小口径管内に形成されるに金属膜
厚の検出精度を高めることのできる小口径管内遠隔自動
膜厚測定装置を提供することを目的とする。
An object of the present invention is to provide a remote automatic film thickness measuring apparatus for small-diameter pipes capable of enhancing the detection accuracy of the metal film thickness formed in the small-diameter pipes.

【0007】[0007]

【課題を解決するための手段】本発明は小口径管の内壁
面に形成される金属膜の厚さを測定するための装置にお
いて、上記小口径管内に管軸方向にかつ管内周方向に移
動自在に挿入されるヘッドと、そのヘッドに周方向に配
置されると共に管径方向に進退移動自在に設けられ、先
端部が上記内壁面に当接して管内にヘッドを固定保持す
るためのヘッド固定ピンと、上記ヘッドに管径方向に進
退移動自在に設けられ、上記内壁面に形成された上記金
属膜に当接して膜厚を検出するための渦電流式膜厚検出
センサとから構成したものである。
SUMMARY OF THE INVENTION The present invention is an apparatus for measuring the thickness of a metal film formed on the inner wall surface of a small-diameter pipe, which is moved in the small-diameter pipe in the pipe axial direction and in the pipe inner peripheral direction. A head that is freely inserted, and a head that is arranged in the head in the circumferential direction and is movable in the pipe radial direction so that the tip portion abuts the inner wall surface to fix and hold the head in the pipe. A pin, and an eddy current type film thickness detection sensor that is provided on the head so as to be movable back and forth in the pipe radial direction, and contacts the metal film formed on the inner wall surface to detect the film thickness. is there.

【0008】[0008]

【作用】このように小口径管内に固定されるヘッドに渦
電流式膜厚検出センサが取り付けられるため、膜厚の検
出精度を高めることができる。
Since the eddy current type film thickness detection sensor is attached to the head fixed in the small-diameter pipe as described above, the film thickness detection accuracy can be improved.

【0009】[0009]

【実施例】以下、本発明の一実施例を添付図面に基づい
て詳述する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

【0010】図1に示すように、原子炉容器1の底部を
形成する下鏡2にはインコアモニターハウジングとして
ステンレス製小口径管3が鉛直方向に挿入され、この小
口径管3は溶接により下鏡2に形成された開口部4に保
持されている。その溶接部5の近傍の小口径管3の内壁
面6には内壁面6を覆って劣化の進行を阻止すべくC
r,Ni等の混合粉末がペースト状に塗布された金属被
膜7が形成され、この金属膜7はレーザー照射されて硬
化されるものである。すなわち、非磁性体金属上にペー
スト状の磁性体金属膜を形成することになる。
As shown in FIG. 1, a lower mirror 2 forming the bottom of a reactor vessel 1 is vertically inserted with a small-diameter stainless steel pipe 3 as an in-core monitor housing. It is held in an opening 4 formed in the mirror 2. The inner wall surface 6 of the small-diameter pipe 3 near the welded portion 5 is covered with C in order to cover the inner wall surface 6 and prevent the progress of deterioration.
A metal coating 7 is formed by applying a mixed powder of r, Ni or the like in a paste form, and the metal film 7 is irradiated with a laser to be cured. That is, a paste-like magnetic metal film is formed on the non-magnetic metal.

【0011】特に、レーザー照射に先立って管内壁面6
に形成されるペースト状金属膜7の厚さを検出するため
の装置として小口径管3内には管軸方向にかつ管内周方
向に所定ピッチで移動可能なヘッド11が挿入される。
このヘッド11には下方にロッド12が延出されてお
り、ロッド12にはヘッド11を小口径管3内で管軸方
向にかつ管内周方向に所定ピッチで移動させるために図
示されないモータ等を有する駆動機構13が設けられて
いる。駆動機構13にはヘッド11の移動を遠隔操作す
るためのコントローラ14が接続されている。
In particular, prior to laser irradiation, the inner wall surface 6 of the pipe is
As a device for detecting the thickness of the paste-like metal film 7 formed in the above, a head 11 is inserted into the small diameter tube 3 so as to be movable in the tube axis direction and in the tube inner peripheral direction at a predetermined pitch.
A rod 12 extends downwardly from the head 11, and a motor (not shown) or the like for moving the head 11 in the small-diameter pipe 3 in the pipe axis direction and the pipe inner peripheral direction at a predetermined pitch is provided on the rod 11. A drive mechanism 13 having is provided. A controller 14 for remotely controlling the movement of the head 11 is connected to the drive mechanism 13.

【0012】具体的には小口径管3内に挿入されるヘッ
ド11の先端部には図2に示すように、また、ヘッド1
1の基端部には図3に示すように、それぞれヘッド11
を小口径管3内に保持するためにヘッド固定ピン15が
進退移動自在に設けられる。このヘッド固定ピン15は
ヘッド11の周方向に等ピッチで設けられており、図4
に示すように、ヘッド固定ピン15はヘッド11の周方
向に120度毎に3つ配置されている。図2および図3
において、各ヘッド固定ピン15を進退移動させるべく
ヘッド11内には上下端部にそれぞれエアシリンダ16
が収容され、このエアシリンダ16はエア供給管16a
から供給される圧気により各ヘッド固定ピン15を同時
に等しい移動量だけ前進させあるいは同時に後退させる
ようになっている。したがって、ヘッド固定ピン15を
前進させると小口径管3の内壁面6にヘッド固定ピン1
5の先端部が当接して小口径管3内にヘッド11が固定
保持され、ヘッド固定ピン15を後退させるとヘッド1
1の固定が解除されることになる。
Specifically, as shown in FIG. 2, at the tip of the head 11 inserted into the small-diameter tube 3, the head 1 is also inserted.
As shown in FIG.
A head fixing pin 15 is provided so as to be capable of advancing and retracting in order to hold the inside of the small diameter tube 3. The head fixing pins 15 are provided at equal pitches in the circumferential direction of the head 11, as shown in FIG.
As shown in FIG. 3, three head fixing pins 15 are arranged every 120 degrees in the circumferential direction of the head 11. 2 and 3
In order to move the head fixing pins 15 back and forth, the air cylinders 16 are respectively provided at the upper and lower ends in the head 11.
The air cylinder 16 is housed in the air supply pipe 16a.
The head fixing pins 15 are simultaneously moved forward or backward by the same amount by the pressure air supplied from Therefore, when the head fixing pin 15 is moved forward, the head fixing pin 1 is attached to the inner wall surface 6 of the small diameter tube 3.
When the head 11 is fixedly held in the small-diameter tube 3 by abutting the tip portion of the head 5 and the head fixing pin 15 is retracted, the head 1
The fixation of 1 will be released.

【0013】また、ヘッド11には小口径管3の内壁面
6に形成される金属膜7の厚さを検出するための渦電流
式膜厚検出センサ17が設けられ、このセンサ17はヘ
ッド11に管径方向に進退移動自在に設けられている。
すなわち、図2および図5に示すようにヘッド11には
センサ17の進退移動を許容する開口部18が形成され
ると共にセンサ17の移動を案内するガイド19が設け
られており、かつ、センサ17を管径方向に進退移動さ
せる移動機構が設けられている。移動機構はヘッド11
内にピン21を中心に揺動自在に支持されたレバー部材
22とを有すると共にのレバー部材22に連結されるエ
アシリンダ23を有する。レバー部材22は一端部に形
成される長穴24内にピン25を係合させてセンサ17
の後端部に連結されると共に、レバー部材22の他端部
はLの字状に折り返されてエアシリンダ23のロッド2
6に連結されている。したがって、エアシリンダ23に
接続されるエア供給管27から供給される圧気によりロ
ッド26が後退すると、ピン21を中心にレバー部材2
2が図中左回りに回動し、センサ17は管内壁面6に向
けて移動してペースト状金属膜7に当接することにな
り、これとは反対に、ロッド26の前進移動はセンサ1
7を後退させることになる。図5において28はスプリ
ングであり、このスプリング28はセンサ17を後退方
向に付勢するようになっている。
Further, the head 11 is provided with an eddy current type film thickness detection sensor 17 for detecting the thickness of the metal film 7 formed on the inner wall surface 6 of the small diameter tube 3, and this sensor 17 is the head 11 Is provided so as to be movable back and forth in the pipe radial direction.
That is, as shown in FIGS. 2 and 5, the head 11 is provided with an opening 18 for allowing the sensor 17 to move back and forth, and is provided with a guide 19 for guiding the movement of the sensor 17, and the sensor 17 is also provided. There is provided a moving mechanism for moving the tube in the radial direction. The moving mechanism is the head 11
There is a lever member 22 supported swingably around the pin 21 and an air cylinder 23 connected to the lever member 22. The lever member 22 engages with a pin 25 in an elongated hole 24 formed at one end portion of the sensor member 17 and
The lever member 22 is connected to the rear end portion thereof, and the other end portion of the lever member 22 is folded back into an L shape so that the rod 2 of the air cylinder 23.
It is connected to 6. Therefore, when the rod 26 retreats due to the compressed air supplied from the air supply pipe 27 connected to the air cylinder 23, the lever member 2 is rotated about the pin 21.
2 rotates counterclockwise in the figure, the sensor 17 moves toward the pipe inner wall surface 6 and comes into contact with the paste-like metal film 7. On the contrary, the forward movement of the rod 26 causes the sensor 1 to move forward.
7 will be set back. In FIG. 5, 28 is a spring, and this spring 28 urges the sensor 17 in the backward direction.

【0014】駆動機構13には図1に示すようにヘッド
固定ピン15およびセンサ17の進退移動をコントロー
ルするためにパソコン31が接続される。このパソコン
31にはリアルタイムに金属膜厚が記録が表示され、か
つ、記録はプリンタ32で記録紙に表示されるようにな
っている。
As shown in FIG. 1, a personal computer 31 is connected to the drive mechanism 13 in order to control the forward / backward movement of the head fixing pin 15 and the sensor 17. A record of the metal film thickness is displayed on the personal computer 31 in real time, and the record is displayed on the recording paper by the printer 32.

【0015】次に上記実施例の作用について説明する。Next, the operation of the above embodiment will be described.

【0016】実際の金属膜厚を測定するに先立って校正
試験がなされる。先ず、ペースト状金属膜厚の異なる基
準テストピースを作製し、実厚をダイヤルゲージで測定
する。次いで、渦電流式膜厚検出センサにより実厚の測
定点近傍の電圧を測定し、ダイヤルゲージによる実厚と
センサによる電圧値との相関曲線を作成し、これを所定
値補正してペースト厚判定曲線とする。
A calibration test is performed prior to measuring the actual metal film thickness. First, reference test pieces having different paste-like metal film thicknesses are prepared, and the actual thickness is measured with a dial gauge. Next, measure the voltage near the actual thickness measurement point with an eddy current type film thickness detection sensor, create a correlation curve between the actual thickness by the dial gauge and the voltage value by the sensor, correct this value to a predetermined value and determine the paste thickness. Use a curved line.

【0017】具体的には図6に示す如き基準テストピー
ス41が作製される。このテストピース41は小口径管
と同様な非磁性体金属の管状母材42の内壁面43に周
方向にリング溝44を形成し、そのリング溝44内に管
状母材42の内径に等しい磁性体金属のペースト45を
塗布する。ペースト45にはダイヤルゲージによる測定
のための測定穴46が形成される。このように構成され
たテストピース41において測定点Aにダイヤルゲージ
をセットしてペースト厚dを測定した後、測定点Bに渦
電流式センサを当て発生電圧を測定すると、ダイヤルゲ
ージによるペースト厚dを電圧に換算できる。ダイヤル
ゲージによる多数のペースト厚の測定値から電圧値を得
ると、図7に示すごとき校正曲線を得ることができる。
Specifically, a reference test piece 41 as shown in FIG. 6 is produced. In this test piece 41, a ring groove 44 is formed in a circumferential direction on an inner wall surface 43 of a tubular base material 42 made of a non-magnetic metal similar to that of a small-diameter tube, and the ring groove 44 has a magnetic property equal to the inner diameter of the tubular base material 42. A body metal paste 45 is applied. A measuring hole 46 for measuring with a dial gauge is formed in the paste 45. After the dial gauge is set at the measurement point A and the paste thickness d is measured in the test piece 41 configured as described above, the eddy current sensor is applied to the measurement point B to measure the generated voltage. Can be converted to voltage. When a voltage value is obtained from a large number of measured values of the paste thickness by a dial gauge, a calibration curve as shown in FIG. 7 can be obtained.

【0018】図7は縦軸にダイヤルゲージで得られたペ
ースト厚を、横軸に渦電流センサで得られた測定値をと
り、ダイヤルゲージによる実厚とセンサによる電圧値と
の相関曲線を示すと共にこれを所定値補正したペースト
厚判定曲線を示す。ペースト厚が所定範囲にある場合が
合格ペースト厚である。このような校正試験に基づいて
実際に小口径管3内にセットされる渦電流式膜厚検出セ
ンサ17で得られる電圧値を校正試験で得られたダイヤ
ルゲージによる測定値に換算してこれを金属膜厚とす
る。
FIG. 7 shows the correlation curve between the actual thickness of the dial gauge and the voltage value of the sensor, with the vertical axis representing the paste thickness obtained with the dial gauge and the horizontal axis representing the measured value obtained with the eddy current sensor. A paste thickness determination curve obtained by correcting this with a predetermined value is also shown. The case where the paste thickness is within the predetermined range is the acceptable paste thickness. Based on such a calibration test, the voltage value obtained by the eddy current type film thickness detection sensor 17 actually set in the small-diameter tube 3 is converted into the measured value by the dial gauge obtained in the calibration test, and this is converted into The metal film thickness.

【0019】実際に金属膜厚を測定するには図1に示す
ように管径方向にヘッド固定ピン15を前進させて管軸
上にヘッド11を固定保持する。ヘッド11が固定保持
された状態においてセンサ17を管径方向に前進させて
そのヘッド固定保持地点の金属膜厚が得られる。次い
で、センサ17およびヘッド固定ピン15を後退させて
ヘッド11の固定を解除した後、ヘッド11を管内周方
向および管軸方向に測定箇所を移動させて管内周方向お
よび管軸方向の多数点の金属膜厚を測定する。例えば、
軸方向に1mmピッチ、管内周方向に1度ピッチで測定
される。金属膜厚の変化に応じて渦電流の強さが変化す
るため、膜厚の増大に応じて検出される電圧値も大きく
なる。これらセンサ17およびヘッド固定ピン15の進
退移動はパソコン31により操作され、検出結果はパソ
コン31に表示されると共に必要に応じて記録紙32に
記録される。
To actually measure the metal film thickness, as shown in FIG. 1, the head fixing pin 15 is advanced in the pipe radial direction to fix and hold the head 11 on the pipe axis. With the head 11 fixedly held, the sensor 17 is advanced in the pipe radial direction to obtain the metal film thickness at the head fixed / holding point. Next, the sensor 17 and the head fixing pin 15 are retracted to release the fixation of the head 11, and then the head 11 is moved to a measurement position in the pipe inner peripheral direction and the pipe axial direction to remove a large number of points in the pipe inner peripheral direction and the pipe axial direction. Measure the metal film thickness. For example,
It is measured at a pitch of 1 mm in the axial direction and at a pitch of 1 degree in the inner circumferential direction of the pipe. Since the strength of the eddy current changes according to the change of the metal film thickness, the detected voltage value also increases as the film thickness increases. The forward / backward movement of the sensor 17 and the head fixing pin 15 is operated by the personal computer 31, and the detection result is displayed on the personal computer 31 and recorded on the recording paper 32 as necessary.

【0020】なお、実際のペースト状金属膜厚が合格範
囲を逸脱して検出された場合にはその金属膜7は除去さ
れ、小口径管3の内壁面6には再度ペースト状金属膜7
が塗布されれることになる。
When the actual paste-like metal film thickness is detected outside the acceptable range, the metal film 7 is removed, and the paste-like metal film 7 is again formed on the inner wall surface 6 of the small diameter pipe 3.
Will be applied.

【0021】このように本発明は小口径管3内に管軸方
向かつ管内周方向に移動可能なヘッド11からヘッド固
定ピン15および渦電流式膜厚検出センサ17を管径方
向に進退移動自在に設けるため、渦電流式膜厚検出セン
サ17の安定した固定保持をなし得ると共に、渦電流式
膜厚検出センサ17によりバラツキのない測定値を得る
ことができ、金属膜厚の測定精度を高めることができ
る。
As described above, according to the present invention, the head fixing pin 15 and the eddy current type film thickness detection sensor 17 can be moved forward and backward in the small diameter tube 3 from the head 11 which is movable in the tube axial direction and the tube inner peripheral direction. Since the eddy current type film thickness detection sensor 17 can be stably fixed and held, the eddy current type film thickness detection sensor 17 can obtain a measured value without variation, thereby improving the measurement accuracy of the metal film thickness. be able to.

【0022】[0022]

【発明の効果】以上要するに本発明によれば、小口径管
内に管軸方向かつ管内周方向に移動可能なヘッドからヘ
ッド固定ピンおよび渦電流式膜厚検出センサを管径方向
に進退移動自在に設けるため、センサの安定した固定保
持をなし得ると共に、渦電流式膜厚検出センサによりバ
ラツキのない測定値を得ることができ、膜厚の測定精度
を高めることができる。
In summary, according to the present invention, the head fixing pin and the eddy current type film thickness detection sensor can be moved back and forth in the pipe diameter direction from the head movable in the pipe axis direction and the pipe inner peripheral direction in the small diameter pipe. Since the sensor is provided, the sensor can be stably fixed and held, and the eddy current type film thickness detection sensor can obtain a measured value without variation, and the film thickness measurement accuracy can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の膜厚検出装置を示す図である。FIG. 1 is a diagram showing a film thickness detection device of the present invention.

【図2】ヘッドの先端部を示す断面図である。FIG. 2 is a cross-sectional view showing a tip portion of a head.

【図3】ヘッドの基端部を示す図である。FIG. 3 is a diagram showing a base end portion of a head.

【図4】図2のX−X線矢視図である。FIG. 4 is a view taken along line XX of FIG.

【図5】図2のY−Y線矢視図である。5 is a view taken along the line YY of FIG.

【図6】テストピースを示す図である。FIG. 6 is a diagram showing a test piece.

【図7】校正曲線を示す図である。FIG. 7 is a diagram showing a calibration curve.

【図8】小口径管を示す図である。FIG. 8 is a view showing a small diameter tube.

【符号の説明】[Explanation of symbols]

3 小口径管 6 内壁面 7 金属膜 11 ヘッド 15 ヘッド固定ピン 17 渦電流式膜厚検出センサ 3 Small diameter tube 6 Inner wall surface 7 Metal film 11 Head 15 Head fixing pin 17 Eddy current type film thickness detection sensor

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 小口径管の内壁面に形成される金属膜の
厚さを測定するための装置において、上記小口径管内に
管軸方向にかつ管内周方向に移動自在に挿入されるヘッ
ドと、該ヘッドに周方向に配置されると共に管径方向に
進退移動自在に設けられ、先端部が上記内壁面に当接し
て管内にヘッドを固定保持するためのヘッド固定ピン
と、上記ヘッドに管径方向に進退移動自在に設けられ、
上記内壁面に形成された上記金属膜に当接して膜厚を検
出するための渦電流式膜厚検出センサとを備えたことを
特徴とする小口径管内遠隔自動膜厚測定装置。
1. An apparatus for measuring the thickness of a metal film formed on an inner wall surface of a small-diameter pipe, comprising a head movably inserted into the small-diameter pipe in a pipe axial direction and in a pipe inner peripheral direction. A head fixing pin that is arranged in the head in the circumferential direction and is movable in the tube radial direction so as to move forward and backward, and a tip portion abuts against the inner wall surface to fix and hold the head in the tube; It is installed so that it can move back and forth in any direction.
An eddy-current type film thickness detection sensor for contacting the metal film formed on the inner wall surface to detect the film thickness, and a remote automatic film thickness measuring apparatus for small-diameter pipes.
JP04150715A 1992-06-10 1992-06-10 Remote automatic film thickness measuring device in small diameter pipe Expired - Lifetime JP3079777B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04150715A JP3079777B2 (en) 1992-06-10 1992-06-10 Remote automatic film thickness measuring device in small diameter pipe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04150715A JP3079777B2 (en) 1992-06-10 1992-06-10 Remote automatic film thickness measuring device in small diameter pipe

Publications (2)

Publication Number Publication Date
JPH05340708A true JPH05340708A (en) 1993-12-21
JP3079777B2 JP3079777B2 (en) 2000-08-21

Family

ID=15502828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04150715A Expired - Lifetime JP3079777B2 (en) 1992-06-10 1992-06-10 Remote automatic film thickness measuring device in small diameter pipe

Country Status (1)

Country Link
JP (1) JP3079777B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003057002A (en) * 2001-08-08 2003-02-26 Central Res Inst Of Electric Power Ind Inspection method for coating thickness
CN1327190C (en) * 2006-01-25 2007-07-18 北京航空航天大学 Radial/axial six-position integrated electric eddy transducer
US7807726B2 (en) 2005-03-11 2010-10-05 3M Innovative Properties Company Recovery of fluorinated surfactants from a basic anion exchange resin having quaternary ammonium groups
JP2016136830A (en) * 2015-01-20 2016-07-28 セイコーインスツル株式会社 Stepping motor, timepiece movement, timepiece, and manufacturing method of stepping motor
JP2020537133A (en) * 2017-10-11 2020-12-17 ウエスチングハウス・エレクトリック・カンパニー・エルエルシー Implantation and recovery methods and equipment for mass production of radioisotopes
CN117054333A (en) * 2023-10-13 2023-11-14 天津尚源金属表面处理有限公司 Metal pipe fitting galvanization surface property detection device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003057002A (en) * 2001-08-08 2003-02-26 Central Res Inst Of Electric Power Ind Inspection method for coating thickness
JP4591989B2 (en) * 2001-08-08 2010-12-01 財団法人電力中央研究所 Coating thickness inspection method
US7807726B2 (en) 2005-03-11 2010-10-05 3M Innovative Properties Company Recovery of fluorinated surfactants from a basic anion exchange resin having quaternary ammonium groups
CN1327190C (en) * 2006-01-25 2007-07-18 北京航空航天大学 Radial/axial six-position integrated electric eddy transducer
JP2016136830A (en) * 2015-01-20 2016-07-28 セイコーインスツル株式会社 Stepping motor, timepiece movement, timepiece, and manufacturing method of stepping motor
JP2020537133A (en) * 2017-10-11 2020-12-17 ウエスチングハウス・エレクトリック・カンパニー・エルエルシー Implantation and recovery methods and equipment for mass production of radioisotopes
CN117054333A (en) * 2023-10-13 2023-11-14 天津尚源金属表面处理有限公司 Metal pipe fitting galvanization surface property detection device
CN117054333B (en) * 2023-10-13 2023-12-12 天津尚源金属表面处理有限公司 Metal pipe fitting galvanization surface property detection device

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