CN1327190C - Radial/axial six-position integrated electric eddy transducer - Google Patents
Radial/axial six-position integrated electric eddy transducer Download PDFInfo
- Publication number
- CN1327190C CN1327190C CNB2006100112765A CN200610011276A CN1327190C CN 1327190 C CN1327190 C CN 1327190C CN B2006100112765 A CNB2006100112765 A CN B2006100112765A CN 200610011276 A CN200610011276 A CN 200610011276A CN 1327190 C CN1327190 C CN 1327190C
- Authority
- CN
- China
- Prior art keywords
- radial
- axial
- detection
- displacement
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 66
- 238000001514 detection method Methods 0.000 claims abstract description 54
- 239000000523 sample Substances 0.000 claims description 39
- 239000013078 crystal Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims 1
- 239000000725 suspension Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000338 in vitro Methods 0.000 description 1
- 238000012623 in vivo measurement Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 235000019640 taste Nutrition 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Images
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The present invention relates to a radial/axial six-position integrated eddy current sensor. The present invention is characterized in that the present invention is composed of a six-position integrated eddy current sensor and detection bodies, wherein radial detection gaps and axial detection gaps are formed between sensor detection heads and the detection bodies; the six-position integrated eddy current sensor has six passages, the sensor detection heads and preamplifiers of the six passages are all integrated in a sensor seat, and the sensor detection heads are composed of radial displacement detection heads, axial displacement detection heads, preprocessors and power supply signal output leading wires; four radial displacement detection heads are used for respectively detecting displacement signals of the X and the Y directions which are mutually vertical, and other two axial displacement detection heads are used for detecting displacement signal of the Z direction; the preamplifiers and the detection heads of the six passages are integrated as a whole, and the radial/axial six-position integrated eddy current sensor with a detection surface which is arranged outside (a detection surface which is arranged inside) can be designed according to the structure need. Eddy current sensors of the six passages are integrated as a whole so that the present invention can detect the displacement signals of the three directions which are orthogonal and vertical. The detection precision and the stability are improved, the volume is obviously reduced, and the weight is lightened.
Description
Technical field
The present invention relates to a kind of non-contact eddy current sensor, particularly a kind of multidigit integrated electric eddy transducer can be used as magnetically levitated flywheel, magnetic suspension control torque gyroscope etc. have strict demand to the aspects such as volume, weight and precision of system non-contact displacement sensor.
Background technology
Magnetic bearing has no mechanical friction and wear, does not need lubricated and advantages such as maintenance, the rotation of permission rotor high-speed, therefore be applied in the satellite attitude control system, be used to support flywheel and control-moment gyro, to replace mechanical bearing, to eliminate mechanical friction, improve the rotating speed of rotor, thereby can improve the control accuracy of flywheel and control-moment gyro, prolong attitude control system serviceable life, reduced the power consumption of system.In suspension of five-freedom degree magnetic flywheel and magnetic suspension control torque gyroscope, usually need to survey the displacement signal of five degree of freedom, if use current vortex sensor, then each degree of freedom needs a non-contact displacement sensor, for improving the precision of sensor, usually take difference structure, at this moment each magnetic suspension system just needs a plurality of current vortex sensors, and existing magnetic bearing just will be popped one's head on single passage usually with sensor and prime amplifier carries out integrated or carry out integrated in radial direction, therefore, existing current vortex sensor volume, weight and power consumption are big, structure is not compact, assembly precision is low, thereby causes the volume of magnetically levitated flywheel or magnetic suspension control torque gyroscope, weight and power consumption are big, and control accuracy is low.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome the deficiencies in the prior art, a kind of magnetically levitated flywheel and magnetic suspension control torque gyroscope radial/axial six-position integrated electric eddy sensor is provided, significantly reduced current vortex sensor and and volume, weight and the power consumption of system, improve assembling, detection and control accuracy.
Technical solution of the present invention is: 1, the radial/axial six-position integrated electric eddy sensor, it is characterized in that: it by two group of four path surveying XY direction radial displacement signal to displacement sensor probe and four road prime amplifiers, surveying Z surveys and two-way prime amplifier composition to the two-way shaft position sensor of axial displacement signal, No. six displacement transducers are surveyed and six road prime amplifiers all are integrated in the sensor holder, wherein two radial displacement transducer probes partner, the both direction that lays respectively at X-axis becomes 180 ° of angles, survey the displacement signal of directions X simultaneously, in addition two radial displacement transducers probes form that another is right, the both direction that lays respectively at Y-axis becomes 180 ° of angles, survey the displacement signal of Y direction simultaneously, all form difference structure output between every pair of prime amplifier in two groups, survey rotatablely moving of magnetically levitated flywheel or magnetic suspension control torque gyroscope, promptly test surface is circle; The both direction that two-way shaft position sensor probe is positioned at the Z axle becomes 180 ° of angles, survey the displacement signal of Z simultaneously to direction, through the output of two-way prime amplifier, survey the translational motion of magnetically levitated flywheel or magnetic suspension control torque gyroscope again, promptly test surface is the plane.
Principle of the present invention is: the present invention all is integrated in the displacement sensor probe and the prime amplifier of six passages in the sensor holder, has the telefault of detection resonant circuit in the prime amplifier, carry out distance detecting by the eddy current mutual inductance effect between telefault and the detection body, and at two detection telefault composition difference structures that adopt two identical prime amplifiers in the radial direction, and circuit design is also identical, make the temperature in two loops float and suppress mutually, thereby improved the temperature and the time stability of displacement transducer in time to float as common-mode signal.Uniform four probes on the circumference in sensor holder, form two groups of difference structures, detect the radial displacement signal, on end face, arrange two probes, detect axial displacement signal, form algebraic sum eliminating the error that axial detection bodies deflection causes by mathematical operation, thereby realized surveying the displacement of three orthogonal vertical direction X, Y and Z direction.
The present invention's advantage compared with prior art is: sensor probe and prime amplifier that the present invention will survey three orthogonal vertical directions all are integrated in the sensor holder, two groups of difference structures on radial direction X and Y, have been formed, at axial direction two probes are arranged, with the signal of its detection formation algebraic sum that performs mathematical calculations, can eliminate because the error that the rotation of axial detection body causes; And existing current vortex sensor is connected by lead with prime amplifier owing to sensor probe, though and the current vortex sensor that has integrates sensor probe and prime amplifier, detecting at needs just needs a plurality of current vortex sensors in the system of a plurality of displacement signals, thereby cause weight, volume and the power consumption of sensor to increase, assembly precision reduces.And, need a sensor usually to the detection of axial displacement, but can not detect when being detected the body center when sensor probe, because the deflection meeting of detection body position causes measuring error.The present invention the is integrated radial and axial displacement transducer of six passages, therefore can improve the assembly precision of current vortex sensor, significantly reduce the volume and weight of sensor, and saved power consumption, improve detection accuracy, particularly eliminated the error of radial and axial detection displacement.
Description of drawings
Structure master when Fig. 1 surveys in-vivo measurement for the present invention is positioned at looks synoptic diagram;
Fig. 2 is Fig. 1 structure schematic top plan view;
Structure master when Fig. 3 surveys in-vitro measurements for the present invention is positioned at looks synoptic diagram;
Fig. 4 is the schematic top plan view of Fig. 3;
Fig. 5 is the composition synoptic diagram of each prime amplifier of the present invention;
Fig. 6 is the multiplication of voltage detecting circuit principle schematic of each prime amplifier of the present invention;
Fig. 7 tastes circuit theory diagrams for the benefit of every pair of prime amplifier difference structure of the present invention.
Embodiment
As Fig. 1～shown in Figure 4, six road displacement sensor probes (T1～T6) form integrated electric turbine sensor with six road prime amplifiers, whole electric turbine sensor can be for surveying external structure, be that electric turbine sensor is positioned at the inboard of surveying body, four radial displacement transducer probe (T1～T4) be distributed on the excircle of sensor holder, (T5 T6) is positioned on the end face of sensor holder, as depicted in figs. 1 and 2 two displacement sensor probes; Can also be for surveying embedding structure, be that electric turbine sensor is positioned at the outside of surveying body, four radial displacement transducer probes (T1～T4) be distributed on the inner periphery of sensor holder, two displacement sensor probe (T5, T6) be positioned on the end face of sensor holder, as shown in Figure 3 and Figure 4.No matter be to survey embedding structure or survey the external structure position, displacement sensor probe (T1～T4) and radially survey to form between the body 1 and radially survey gap 2, displacement sensor probe (T1, T2) and form axial detection gap 4 between the axial detection body 3 respectively, radially survey gap 6 and be generally 0.25mm～1.25mm, the axial detection gap is generally 0.5mm～1.5mm.Two radial displacement transducer probe (T1, T3) partner, the both direction that lays respectively at X-axis becomes 180 ° of angles, survey the displacement signal of directions X simultaneously, other is two radial displacement transducers probe (T2, T4) form that another is right, the both direction that lays respectively at Y-axis becomes 180 ° of angles, survey the displacement signal of Y direction simultaneously, i.e. four radial displacement transducers probe (T1～T4) respectively at an angle of 90, two-way shaft position sensor probe (T5, T6) both direction that is positioned at the Z axle becomes 180 ° of angles, survey the displacement signal of Z simultaneously to direction, the both direction that two-way shaft position sensor probe is positioned at the Z axle becomes 180 ° of angles, survey the displacement signal of Z simultaneously to direction, the displacement signal of two shaft position sensor probe detections forms algebraic sum through mathematical operation, can eliminate because the error that the deflection of axial detection body 4 causes, radial/axial six-position integrated sensor of the present invention is fixed by mechanical interface 8 (keyway or flange), carries out electric signal output by power supply signal transmission line 7.
As shown in Figure 5, each prime amplifier mainly is made up of crystal oscillator, AGC network, magnetic test coil resonant circuit, position pressure detecting circuit, filtering adjustment and power amplifier output circuit, crystal oscillator joins through the input end of AGC network and magnetic test coil circuit, be used for the magnetic test coil resonant circuit is provided the pumping signal of a frequency stabilization, fixed ampllitude, the output of magnetic test coil resonant circuit is through the displacement signal of multiplication of voltage detection, filtering adjustment and power amplifier output actual detected.Multiplication of voltage detection in the prime amplifier is carried out detection and is amplified C the vibration displacement signal that detects as shown in Figure 6
1, C
2-detection electric capacity, D
1, D
2-detector diode, R-bleeder resistance, V
1-input voltage, V
2-output voltage.
As shown in Figure 7, two groups of displacement sensor probes of the present invention (all form difference structure between every pair of prime amplifier among the T1～T4), promptly adopt identical and symmetrical circuit structure, make the temperature in two loops float and suppress mutually, thereby improved the temperature and the time stability of sensor in time to float as common-mode signal.And radially two groups of every pair of prime amplifiers adopt crystal oscillator and AGC network altogether, axially adopt crystal oscillator and AGC network altogether in every pair of prime amplifier, to reduce whole volume.
Carry out distance detecting by the eddy current mutual inductance effect between detection body among the present invention and the hot-wire coil in the sensor probe, the material of surveying body directly influences performances such as the sensitivity of sensor, precision, the material of surveying body on the principle can be all electrically conductive materials, but for improving the stability of sensor, it is surveyed body material and is up to and not only conducts electricity but also the material of magnetic conduction, as 45
#Steel or 40Cr etc.The shape of surveying body should be divided into disc and plane according to detected object, and when detection rotatablely moved, test surface was a disc; And when surveying translation, test surface is the plane.Whole integrated sensor does not comprise the detection body.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100112765A CN1327190C (en) | 2006-01-25 | 2006-01-25 | Radial/axial six-position integrated electric eddy transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100112765A CN1327190C (en) | 2006-01-25 | 2006-01-25 | Radial/axial six-position integrated electric eddy transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1800773A CN1800773A (en) | 2006-07-12 |
| CN1327190C true CN1327190C (en) | 2007-07-18 |
Family
ID=36810909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100112765A Expired - Fee Related CN1327190C (en) | 2006-01-25 | 2006-01-25 | Radial/axial six-position integrated electric eddy transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1327190C (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100398996C (en) * | 2006-12-14 | 2008-07-02 | 北京航空航天大学 | An integrated, five-degree-of-freedom eddy-current sensor |
| CN104457555A (en) * | 2013-09-12 | 2015-03-25 | 珠海格力节能环保制冷技术研究中心有限公司 | Shaft suspension center detection method and device for magnetic suspension system |
| CN103900617B (en) * | 2014-04-14 | 2016-05-25 | 上海瑞视仪表电子有限公司 | A kind of manufacture method of current vortex sensor probe |
| CN105716515A (en) * | 2014-12-04 | 2016-06-29 | 珠海格力节能环保制冷技术研究中心有限公司 | Current vortex sensor |
| CN105987657B (en) | 2015-02-12 | 2018-12-07 | 珠海格力电器股份有限公司 | Eddy current sensor for rotating shaft and rotating shaft device |
| CN105066857B (en) * | 2015-05-27 | 2018-05-18 | 珠海格力节能环保制冷技术研究中心有限公司 | Shaft position detection device and magnetic suspension motor |
| CN105509684A (en) * | 2015-11-24 | 2016-04-20 | 珠海格力节能环保制冷技术研究中心有限公司 | Detection method, apparatus, and system for axial displacement |
| CN105783692B (en) * | 2016-05-17 | 2018-08-24 | 广东省智能制造研究所 | A kind of eddy current displacement sensor and implementation method |
| CN108151637B (en) * | 2017-10-24 | 2020-04-14 | 珠海格力节能环保制冷技术研究中心有限公司 | Displacement detection device, magnetic suspension bearing and displacement detection method thereof |
| CN107968540A (en) * | 2017-12-27 | 2018-04-27 | 北京信息科技大学 | Magnetic suspension brshless DC motor axial displacement and rotor-position integrated sensor |
| CN108880119B (en) * | 2018-06-25 | 2019-11-08 | 深圳麦格动力技术有限公司 | A kind of eddy current sensor preparation process |
| CN111434942B (en) * | 2019-01-14 | 2021-12-28 | 坎德拉（深圳）科技创新有限公司 | Flywheel energy storage device, magnetic bearing and eddy current sensor assembly thereof |
| CN110441058A (en) * | 2019-08-07 | 2019-11-12 | 东北大学秦皇岛分校 | A kind of on-line measuring device of the bush(ing) bearing abrasion loss based on pressure detecting |
| CN110361194A (en) * | 2019-08-07 | 2019-10-22 | 东北大学秦皇岛分校 | A kind of on-line measuring device of the bush(ing) bearing abrasion loss based on inductance measurement |
| CN110441059A (en) * | 2019-08-07 | 2019-11-12 | 东北大学秦皇岛分校 | A kind of bush(ing) bearing abrasion loss on-line measuring device |
| CN110749278A (en) * | 2019-10-29 | 2020-02-04 | 贵州航天控制技术有限公司 | High-overload-resistant four-channel integrated angle detection mechanism and detection method |
| CN111141207B (en) * | 2019-11-12 | 2021-06-22 | 西安邮电大学 | A three-dimensional eddy current sensor probe |
| CN111023957B (en) * | 2019-12-20 | 2021-05-28 | 北京航空航天大学 | A high temperature resistant radial displacement sensor device |
| CN113639625B (en) * | 2021-07-14 | 2022-12-13 | 南京理工大学 | Dynamic testing system for seat ring clearance of large-scale rotating machinery |
| CN113566887B (en) * | 2021-07-26 | 2022-09-23 | 山东大学 | Suspension motor rotor suspension position, deflection angle and rotating speed integrated detection system and application |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2030713U (en) * | 1988-02-10 | 1989-01-11 | 许卫星 | Multi-functional eddy-current measuring instrument |
| JPH05340708A (en) * | 1992-06-10 | 1993-12-21 | Ishikawajima Harima Heavy Ind Co Ltd | Remote automatic film thickness measuring device in small diameter pipe |
| US5493921A (en) * | 1993-09-29 | 1996-02-27 | Daimler-Benz Ag | Sensor for non-contact torque measurement on a shaft as well as a measurement layer for such a sensor |
| CN2359663Y (en) * | 1998-03-09 | 2000-01-19 | 卜建宇 | Integral electric vortex displacement transducer |
-
2006
- 2006-01-25 CN CNB2006100112765A patent/CN1327190C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2030713U (en) * | 1988-02-10 | 1989-01-11 | 许卫星 | Multi-functional eddy-current measuring instrument |
| JPH05340708A (en) * | 1992-06-10 | 1993-12-21 | Ishikawajima Harima Heavy Ind Co Ltd | Remote automatic film thickness measuring device in small diameter pipe |
| US5493921A (en) * | 1993-09-29 | 1996-02-27 | Daimler-Benz Ag | Sensor for non-contact torque measurement on a shaft as well as a measurement layer for such a sensor |
| CN2359663Y (en) * | 1998-03-09 | 2000-01-19 | 卜建宇 | Integral electric vortex displacement transducer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1800773A (en) | 2006-07-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1327190C (en) | Radial/axial six-position integrated electric eddy transducer | |
| CN100398996C (en) | An integrated, five-degree-of-freedom eddy-current sensor | |
| WO2016188330A1 (en) | Shaft position detection device and magnetic levitation motor | |
| US4587741A (en) | Ball inclinometer | |
| EP2324325A2 (en) | Improvements in or relating to vibrating structure gyroscopes | |
| CN102151341A (en) | Magnetic suspension artificial heart pump | |
| CN106969750B (en) | Magnetic liquid omnibearing horizontal inclination angle sensor | |
| CN111623700B (en) | Magnetic suspension bearing inductance type displacement sensor | |
| CN102252592A (en) | Axial displacement measuring device and method of rotor of artificial heart pump | |
| CN107314737B (en) | A kind of magnetic suspension rotor axial displacement radial measurement method | |
| CN113833757A (en) | Five-degree-of-freedom rotor axial displacement self-sensing magnetic suspension bearing | |
| CN102829709A (en) | Radial magnetic bearing electrical vortex sensor integrated structure for magnetic levitation high-speed electric machine | |
| CN106679557B (en) | A kind of device and measurement method measuring magnetic levitation ball micro-displacement | |
| WO2018187326A1 (en) | Miniature magnetic field detector | |
| CN103675350A (en) | Silicon micro electrostatically suspended accelerometer | |
| CN202153147U (en) | An electrostatic adsorption micromass sensor | |
| CN112162113A (en) | High-precision accelerometer | |
| CN208432333U (en) | A kind of table top assembly | |
| CN112963449B (en) | Aerostatic spindle based on acoustic levitation and variable throttling | |
| CN111442771B (en) | Flat resonance gyro | |
| JP2008157816A (en) | Rotation angle detector and torque detector | |
| CN202128743U (en) | Magnetically-suspended artificial heart pump | |
| CN113566887B (en) | Suspension motor rotor suspension position, deflection angle and rotating speed integrated detection system and application | |
| US5144251A (en) | Three-axis particle impact probe | |
| CN111025381A (en) | Piezoresistive geophone based on graphene |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070718 Termination date: 20190125 |