CN112162113A - High-precision accelerometer - Google Patents
High-precision accelerometer Download PDFInfo
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- CN112162113A CN112162113A CN202011255407.0A CN202011255407A CN112162113A CN 112162113 A CN112162113 A CN 112162113A CN 202011255407 A CN202011255407 A CN 202011255407A CN 112162113 A CN112162113 A CN 112162113A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/003—Details of instruments used for damping
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/133—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with piezoelectric counterbalancing means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
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Abstract
A high-precision accelerometer relates to the technical field of acceleration measurement and comprises a servo circuit board, a torquer stator assembly, a pendulum assembly and a shell; the shell is provided with a cylindrical inner cavity, one end of the inner cavity is closed, and the other end of the inner cavity is opened to form an opening; the torquer stator component is positioned in the inner cavity and arranged at intervals with the opening to form a suspended meter structure; the servo circuit board is positioned at the opening and is bonded and welded with the shell to seal the inner cavity. The high-precision accelerometer adopts multiple new technologies such as a unique suspended meter structure, a precise flexible supporting structure, a pendulum component mechanical structure, a high-sensitivity capacitive sensor, a feedback type integrated servo circuit and the like. The system has the characteristics of high product stability, high repeatability precision, small temperature coefficient, accurate temperature measurement, quick start, strong environmental adaptability and the like, and is particularly suitable for high-precision systems with high requirements on the precision, the temperature and the start time of an accelerometer, such as inertial navigation, navigation attitude, stable platform, missile steering engine control and the like.
Description
Technical Field
The invention relates to the technical field of acceleration measurement, in particular to a high-precision accelerometer.
Background
The quartz flexible accelerometer is a key element in an inertial system, and is widely applied to systems with higher precision, such as inertial navigation, navigation attitude, stable platform, missile steering engine, well drilling control and the like due to the characteristics of higher precision, high reliability, low power and the like. Along with the development of high precision of weapon equipment in recent years, many fields put forward higher requirements on accelerometers, and quartz flexible accelerometers are required to have high threshold and resolution precision, low power consumption, quick start and high reliability, and are also required to have high stability, high repeatability precision, low temperature coefficient, strong environment adaptability and accurate temperature measurement. Although the existing quartz flexible accelerometer has high threshold and resolution precision and quick start, the stability, repeatability precision and temperature coefficient are low, the temperature coefficient parameter of the system calibration compensation accelerometer is provided by a temperature sensor arranged outside the accelerometer, the internal temperature of a product cannot be accurately reflected, the accurate compensation cannot be realized, and the application of the system calibration compensation accelerometer in high-precision weaponry is limited. Therefore, it is necessary to develop a high-precision accelerometer capable of accurately measuring temperature: the threshold and resolution precision are high, the reliability and the power are equivalent to those of the existing quartz flexible accelerometer, but the stability and the repeatability precision are high, the temperature coefficient is small, and the temperature can be measured accurately.
At present, domestic documents, papers and patents on the quartz flexible accelerometer mainly focus on the analysis of the sealing, reliability and service life of the quartz flexible accelerometer structure, the improvement of the shock resistance, the coupling simulation analysis of the magnetic structure, the analysis of the safe use boundary, the temperature compensation, the dynamic modeling and compensation of the time domain, the error compensation model and other analysis local aspects, and the patents are blank at present in the aspects of the integral structure and the accurate temperature measurement of the high-precision quartz flexible accelerometer.
Disclosure of Invention
The invention aims to provide a high-precision accelerometer which is novel in structure and convenient to use and can meet the use requirements of high-precision weaponry. The temperature measurement device has the characteristics of accurate temperature measurement, stability, high repeatability precision, small temperature coefficient, quick start, low power, strong environment resistance and high reliability.
The embodiment of the invention is realized by the following steps:
a high-precision accelerometer comprises a servo circuit board, a torquer stator assembly, a pendulum assembly and a shell; the shell is provided with a cylindrical inner cavity, one end of the inner cavity is closed, and the other end of the inner cavity is opened to form an opening; the torquer stator assembly is positioned in the inner cavity and comprises a first stator assembly far away from the opening and a second stator assembly close to the opening, the first stator assembly and the second stator assembly are coaxially arranged, and the pendulum assembly is arranged between the first stator assembly and the second stator assembly; the second stator assembly and the opening are arranged at intervals to form a suspended meter structure; the servo circuit board is positioned at the opening and is bonded and welded with the shell to seal the inner cavity.
Further, in other preferred embodiments of the present invention, the interval between the second stator assembly and the opening is 4.5 to 5 mm.
Further, in other preferred embodiments of the present invention, a spacer ring is sleeved outside the second stator assembly, and the outer diameter of the spacer ring is slightly larger than that of the second stator assembly; the inner side surface of the isolating ring is bonded with the second stator assembly, and the outer side surface of the isolating ring is bonded with the shell.
Further, in other preferred embodiments of the present invention, the first stator assembly and the second stator assembly are spaced apart from each other and are connected to form a whole by a connection ring sleeved outside the first stator assembly and the second stator assembly; the pendulum assembly is located within a gap formed by the first stator assembly and the second stator assembly.
Further, in other preferred embodiments of the present invention, the first stator assembly and the second stator assembly are both provided with a cylindrical magnetic steel assembly, and the magnetic steel assembly is coaxially arranged with the first stator assembly/the second stator assembly; the swing assembly comprises a disc-shaped swing frame, a first coil skeleton assembly is arranged on one side of the swing frame facing the first stator assembly, and a second coil skeleton assembly is arranged on one side of the swing frame facing the second stator assembly; one side of the first coil framework assembly facing the first stator assembly and one side of the second coil framework assembly facing the second stator assembly are both inwards concave to form accommodating grooves for accommodating the magnetic steel assemblies, and torquer coils are uniformly wound in the accommodating grooves.
Further, in another preferred embodiment of the present invention, a first air gap is formed between the outer circumferential surface of the magnetic steel assembly and the inner wall of the accommodating groove, and the width of the first air gap is 0.25 to 0.3 mm.
Further, in other preferred embodiments of the present invention, a second air gap is formed between the outer peripheral surface of the first coil bobbin and the first stator assembly, and between the outer peripheral surface of the second coil bobbin and the second stator assembly, and the width of the second air gap is 0.25-0.3 mm.
Further, in other preferred embodiments of the present invention, the range of the working air gap for swinging of the pendulum assembly is 0.018-0.023 mm.
Further, in other preferred embodiments of the present invention, a compensation ring is sleeved outside the magnetic steel assembly, and the compensation ring is disposed adjacent to the first stator assembly and the second stator assembly.
Further, in other preferred embodiments of the present invention, the second stator assembly is located at a side close to the servo circuit board; one side of the second stator component facing the servo circuit board is provided with a temperature sensor.
The embodiment of the invention has the beneficial effects that:
the embodiment of the invention provides a high-precision accelerometer which comprises a servo circuit board, a torquer stator assembly, a pendulum assembly and a shell, wherein the servo circuit board is arranged on the shell; the shell is provided with a cylindrical inner cavity, one end of the inner cavity is closed, and the other end of the inner cavity is opened to form an opening; the torquer stator component is positioned in the inner cavity and arranged at intervals with the opening to form a suspended meter structure; the servo circuit board is positioned at the opening and is bonded and welded with the shell to seal the inner cavity. The high-precision accelerometer adopts multiple new technologies such as a unique suspended meter structure, a precise flexible supporting structure, a pendulum component mechanical structure, a high-sensitivity capacitive sensor, a feedback type integrated servo circuit and the like. The system has the characteristics of high product stability, high repeatability precision, small temperature coefficient, accurate temperature measurement, quick start, strong environmental adaptability and the like, and is particularly suitable for high-precision systems with high requirements on the precision, the temperature and the start time of an accelerometer, such as inertial navigation, navigation attitude, stable platform, missile steering engine control and the like.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is an exploded view of a high precision accelerometer according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a high precision accelerometer according to an embodiment of the invention;
FIG. 3 is a signal flow chart of a high precision accelerometer according to an embodiment of the present invention;
fig. 4 is a schematic wiring diagram of a high-precision accelerometer according to an embodiment of the present invention.
Icon: 100-high precision accelerometers; 110-a servo circuit board; 111-differential capacitance detector; 112-a current integrator; 113-transconductance/compensation amplifier; 114-a temperature sensor; 120-torquer stator assembly; 121-a first stator component; 122-a second stator assembly; 123-a spacer ring; 124-connecting ring; 125-a magnetic steel component; 126-compensation loop; 127-a second air gap; 130-a pendulum assembly; 131-a swing frame; 132-a first coil bobbin assembly; 133-a second coil armature assembly; 134-torquer coils; 135-a first air gap; 140-a housing; 141-lumen; 142-opening.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the equipment or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
Examples
The present embodiment provides a high precision accelerometer 100, which is shown with reference to fig. 1, and includes a servo circuit board 110, a torquer stator assembly 120, a pendulum assembly 130, and a housing 140.
As shown in fig. 1 and 2, the housing 140 has a cylindrical inner cavity 141, one end of the inner cavity 141 is closed, and the other end is open to form an opening 142; the torquer stator assembly 120 is positioned within the inner cavity 141, the torquer stator assembly 120 includes a first stator assembly 121 distal to the opening 142, and a second stator assembly 122 proximal to the opening 142, the first stator assembly 121, the second stator assembly 122 are coaxially disposed, and the pendulum assembly 130 is disposed between the first stator assembly 121 and the second stator assembly 122; the second stator assembly 122 and the opening 142 are arranged at intervals to form a suspended meter structure; the servo circuit board 110 is located at the opening 142, and is bonded and welded to the housing 140 to seal the cavity 141. Optionally, the joint between the servo circuit board 110 and the housing 140 is bonded by using DG-3S adhesive, and then sealed by using laser welding, so as to ensure reliability and sealing performance.
The interval between the second stator assembly 122 and the opening 142 is 4.5-5 mm. Preferably, the spacing between the second stator assembly 122 and the opening 142 is 4.6 mm. A spacer ring 123 is sleeved outside the second stator assembly 122, and the outer diameter of the spacer ring 123 is slightly larger than that of the second stator assembly 122; the inner side surface of the spacer ring 123 is bonded to the second stator assembly 122, and the outer side surface of the spacer ring 123 is bonded to the case 140, thereby fixing the second stator assembly 122. Optionally, the spacer ring 123 and the second stator assembly 122, and the spacer ring 123 and the housing 140 are bonded by using DS-3S adhesive, so as to ensure uniform stress of the cured label and stable axis, and to improve stability and repeatability.
As shown in fig. 1 and 2, the first stator assembly 121 and the second stator assembly 122 are spaced apart from each other and connected to each other by a connection ring 124 sleeved outside the first stator assembly 121 and the second stator assembly 122 to form a whole; the pendulum assembly 130 is positioned within the gap formed by the first stator assembly 121 and the second stator assembly 122. The outer diameter of the connecting ring 124 adopts a 45-degree chamfer structure, horizontal welding is achieved between the connecting ring and the first stator assembly 121 and the second stator assembly 122, and the welding seal reliability is improved.
The first stator assembly 121 and the second stator assembly 122 are each provided with a cylindrical magnetic steel assembly 125, and the magnetic steel assembly 125 is coaxially provided with the first stator assembly 121/the second stator assembly 122. The magnetic steel assembly 125 is sleeved with a compensation ring 126, and the compensation ring 126 is arranged close to the first stator assembly 121 and the second stator assembly 122. The first stator assembly 121, the second stator assembly 122 and the magnetic steel assembly 125 and the compensation ring 126 are bonded by HY-107 adhesive, so that the requirement of linear expansion coefficient in a full temperature range is met.
The first stator assembly 121 and the second stator assembly 122 adopt a push-pull structure, the first stator assembly 121 and the second stator assembly 122 in the torquer stator assembly 120 adopt an integral magnetizing mode, and the end surface magnetic density Bd' = 1020-1250 GS of the center point of the magnetized magnetic steel assembly 125 is obtained. The magnetic steel assembly 125 is connected in parallel with a thermosensitive magnetic shunt ring, the saturation magnetic induction intensity of the thermosensitive magnetic shunt ring is linearly and rapidly reduced along with the temperature rise in a certain temperature range, and the magnetic resistance is increased. When the temperature rises, the magnetic induction B of the magnetic steel assembly 125 with the reversible temperature coefficient is reduced, so that the magnetic induction of the working air gap is also reduced. Because the saturation magnetic induction intensity of the thermosensitive magnetic shunt ring is reduced more quickly along with the temperature rise, a part of the original magnetic flux shunted by the thermosensitive magnetic shunt ring can not pass through the working air gap but can only pass through the working air gap, and the magnetic induction intensity of the working air gap is also increased.
As shown in fig. 1 and 2, the pendulum assembly 130 includes a discoid pendulum frame 131, the pendulum frame 131 is provided with a first coil bobbin assembly 132 on a side facing the first stator assembly 121, and is provided with a second coil bobbin assembly 133 on a side facing the second stator assembly 122; one side of the first coil frame component 132 facing the first stator component 121 and one side of the second coil frame component 133 facing the second stator component 122 are both provided with an accommodating groove inwards for accommodating the magnetic steel component 125, and a torquer coil 134 is uniformly surrounded in the accommodating groove. A 0.02 mm boss is machined on the outer ring of the swing frame 131 to form a narrow gap with the soft magnetic parts of the first stator assembly 121 and the second stator assembly 122 so as to form a pair of air capacitors and proper damping.
The design idea of the capacitance sensor is that two pole plates of a capacitor are formed outside the torquer coil 134 and a gold-plated film plate on the quartz swing frame 131, the upper pole plate, the lower pole plate and a grounded torquer form a differential capacitor, and the displacement of the inertia detection mass deviating from the balance position can be directly measured. The capacitive sensor is a differential capacitive bridge, and the end face of the stator part of the torquer forms two air capacitors with the plating of the pendulum 131 and the air gap between them. When the swing frame 131 is in the middle position, the air gaps of the two air capacitors are equal, and thus the two capacitors are equal, and the capacitor bridge is in a balanced state. When the pendulum deviates from the middle position, the air gaps of the two air capacitors become unequal, the capacitance with large air gaps becomes smaller, and the capacitance with small air gaps becomes larger. This breaks the bridge balance and provides an output signal to the bridge.
The bias value of the high-precision accelerometer 100 mainly depends on the processing quality of the swing frame 131, and the key characteristics are the equal heights of two bosses and the symmetry of the sagging amount of the swing tongue towards two sides, the equal heights of the bosses are the consistent distance between the gold layer on the swing tongue and the positioning reference surface, if the consistent distances are not good, the distances between the gold-plated template and the capacitor formed on the end face of the torquer stator component 120 are inconsistent, the capacitance is inconsistent, and the differential capacitance sensor always has the capacitance tolerance, so that the zero output of the machine is not zero. If the symmetry of the drooping amount of the swing tongue is not good, the center plane of the flexible flat beam is not overlapped with the center plane of the swing frame 131, and the distance between the swing tongue and the end faces of the first stator assembly 121 and the second stator assembly 122 is not equal under the input state of 0 g, so that the deviation value is large, and the symmetry of the scale factor is poor. The offset value may be fine tuned during the set-up process by exchanging the pendulum assembly 130 or the first/second stator assembly 122.
The stability of the scaling factor of the high precision accelerometer 100 is related to the stress relief of the first stator assembly 121, the second stator assembly 122, the magnetic performance stability of the magnetic steel assembly 125, the stress relief of the pendulum 131, and the stress relief of the first/second coil bobbin assembly 133.
The repeatability of the calibration factor of the high precision accelerometer 100 is related to the quality of the machining of the pendulum 131 and the laser welding fastening of the first stator assembly 121 and the second stator assembly 122 to the pendulum assembly 130.
The consistency of the scale factor of the high-precision accelerometer 100 is related to the processing discreteness of parts, the magnetizing consistency of the first stator assembly 121 and the second stator assembly 122, the quality consistency of the pendulum assembly 130, the resistance consistency of the torquer coil 134, the drooping amount of the pendulum frame 131 and the like, and due to the fact that the influence factors are numerous and random, the process link needs to be strictly controlled. The consistency of the scale factor can be fine tuned during assembly by exchanging the pendulum assembly 130 or the upper and lower stator assemblies.
The key technology of the high-precision accelerometer 100 is the assembly of the pendulum assembly 130: the accuracy of the assembly of the pendulum assembly 130 directly affects the linearity, bias, stability, etc. of the instrument, and thus determines the accuracy of the instrument, and it is important to improve the accuracy of the assembly of the pendulum assembly 130. During assembly, the swing frame 131 is firstly installed on a special fixture with a boss (0.02 mm), the excircle reference of the swing frame 131 is converted to the excircle of the fixture, the excircle of the fixture is used for positioning, the coil framework assembly is adhered to the swing sheet by 326 glue by means of a tool, a small amount of glue is firstly coated near the center when the coil framework assembly is adhered, and then the coil framework assembly is slightly extruded by the fixture. The gluing range should be accurate to the concentric circle of size for a certain value, and the volume of gluing also should be held accurately, guarantees that the gluey does not spill over after the anchor clamps are extruded in place. The torquer coils 134 are uniformly and tightly wound in the slots, and the arrangement is regular, so that the phenomenon of crossing is not allowed to occur, and the influence of stray waveforms on the stability of the product is avoided.
Further, as shown in FIG. 2, the working air gap of the pendulum assembly 130 is in a range of 0.018-0.023 mm. A first air gap 135 is formed between the outer peripheral surface of the magnetic steel assembly 125 and the inner wall of the accommodating groove, and the width of the first air gap 135 is 0.25-0.3 mm. Second air gaps 127 are formed between the outer peripheral surface of the first coil framework and the first stator assembly 121 and between the outer peripheral surface of the second coil framework and the second stator assembly 122, and the width of each second air gap 127 is 0.25-0.3 mm.
As shown in fig. 3, the servo circuit board 110 includes a differential capacitance detector 111, a current integrator 112, a transconductance/compensation amplifier 113 and an analog-to-digital conversion module, wherein an acceleration signal generated by the torquer stator assembly 120 is converted into a capacitance signal and is input to the differential capacitance detector 111, the capacitance signal is converted into a current signal by the differential capacitance detector 111, the current signal is integrated by the current integrator 112 and then outputs a voltage, the voltage is amplified and converted into an output current by the transconductance/compensation amplifier 113, one path of the output current is fed back to the torquer stator assembly 120, and the other path of the output current outputs a digital signal by the analog-to-digital.
When acceleration ai acts along the direction of the input shaft of the accelerometer, the detection mass deflects under the action of the pendulous moment Mr, so that the differential capacitance sensor generates capacitance 2 x Delta C, a differential capacitance detector in the servo circuit detects the change and outputs current iD, the current is integrated by a current integrator 112 to output voltage Vi, and then the Vi is amplified by a transconductance/compensation amplifier 113 and converted into current i. The magnitude of the current i is proportional to the input acceleration, and the polarity depends on the direction of the input acceleration. The output current i is fed back to the torquer to generate a rebalancing torque Mt to balance the shimmy torque Mr caused by ai, wherein ai and Mr are continuous variables. The servo circuit operates in response to changes in capacitance of the differential capacitive sensor, which keeps Δ C at a minimum value at all times. At very high loop gain, the moment of inertia caused by ai will be continually balanced by the rebalancing moment. The current integrator 112 and the transconductance/compensation amplifier 113 together perform the frequency compensation function on the system, so that the required static and dynamic indexes are met.
Further, as shown in FIG. 1, a second stator assembly 122 is located on a side adjacent to the servo circuit board 110; the side of the second stator assembly 122 facing the servo circuit board 110 is provided with a temperature sensor 114. The temperature sensor 114 can accurately measure the temperature of the center of mass of the accelerometer, and the measurement precision of the accelerometer is improved. Alternatively, the temperature sensor 114 is a current type temperature sensor 114, which is a type AD590MF, and can obtain a required temperature value by measuring a current, directly output a current signal proportional to a thermodynamic temperature, and connect a resistor in series at an output terminal to convert the current signal into a voltage signal. In addition, the temperature sensor 114 also has the advantages of no reference point for measuring temperature, strong anti-interference capability, good interchangeability, etc. In the high precision accelerometer 100 of the present invention, the temperature at the centroid of the high precision accelerometer 100 is measured:
1) the output value of the temperature sensor 114 is 1 μ a/deg.c (273-45) ° c x 1 k Ω =228mV at-45 ℃;
2) the output value of the temperature sensor 114 is 1 μ a/deg.c (273 + 25) ° c x 1 k Ω =298mV at a temperature of 25 ℃;
3) at a temperature of 70 ℃, the output value of the temperature sensor 114 is 1 μ a/° c × (273 + 70) ° c × 1 k Ω =343 mV.
As shown in fig. 1 and 4, the second stator assembly 122 is provided with a plurality of first terminals for electrically connecting with the pads of the pendulum assembly 130 and the second terminals and pads on the servo circuit board 110. The second terminal marked as 9 on the servo circuit board 110 is the current output terminal (Iwo output terminal) of the temperature sensor 114, and the second terminal marked as 10 is the power supply terminal (15V terminal) of the temperature sensor 114. The temperature sensor 114 and the servo circuit board 110 are correspondingly connected by winding an insulated mounting wire with a teflon film, wherein one end of the temperature sensor is connected to the end 1105A of the servo circuit board, and the other end is connected to the end 1107A of the servo circuit board. The welding part of the pin of the temperature sensor 114 is coated with S31-11 polyurethane insulating paint for protection. The specific connection manner is shown in fig. 4, and the connection correspondence table can refer to table 1.
TABLE 1 Wiring definition relationship Table
In summary, the present embodiment provides a high-precision accelerometer 100, which includes a servo circuit board 110, a torquer stator assembly 120, a pendulum assembly 130, and a housing 140; the housing 140 has a cylindrical inner cavity 141, one end of the inner cavity 141 is closed, and the other end is open to form an opening 142; the torquer stator assembly 120 is positioned in the inner cavity 141 and is arranged at intervals with the opening 142 to form a suspended meter structure; the servo circuit board 110 is located at the opening 142, and is bonded and welded to the housing 140 to seal the cavity 141. The high-precision accelerometer 100 adopts multiple new technologies such as a unique suspended meter structure, a precise flexible supporting structure, a pendulum assembly 130 mechanical structure, a high-sensitivity capacitive sensor, a feedback integrated servo circuit and the like. The system has the characteristics of high product stability, high repeatability precision, small temperature coefficient, accurate temperature measurement, quick start, strong environmental adaptability and the like, and is particularly suitable for high-precision systems with high requirements on the precision, the temperature and the start time of an accelerometer, such as inertial navigation, navigation attitude, stable platform, missile steering engine control and the like.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A high-precision accelerometer is characterized by comprising a servo circuit board, a torquer stator assembly, a pendulum assembly and a shell; the shell is provided with a cylindrical inner cavity, one end of the inner cavity is closed, and the other end of the inner cavity is opened to form an opening; the torquer stator assembly is positioned in the inner cavity and comprises a first stator assembly far away from the opening and a second stator assembly close to the opening, the first stator assembly and the second stator assembly are coaxially arranged, and the pendulum assembly is arranged between the first stator assembly and the second stator assembly; the second stator assembly and the opening are arranged at intervals to form a suspended meter structure; the servo circuit board is located at the opening and is bonded and welded with the shell to seal the inner cavity.
2. The high accuracy accelerometer of claim 1, wherein a spacing between the second stator assembly and the opening is 4.5-5 mm.
3. The high accuracy accelerometer of claim 2, wherein the second stator assembly is jacketed with a spacer ring having an outer diameter slightly larger than the outer diameter of the second stator assembly; the inner side surface of the isolating ring is bonded with the second stator assembly, and the outer side surface of the isolating ring is bonded with the shell.
4. The high-precision accelerometer according to claim 3, wherein the first stator assembly and the second stator assembly are arranged at intervals and are connected into a whole through a connecting ring sleeved outside the first stator assembly and the second stator assembly; the pendulum assembly is located within a gap formed by the first stator assembly and the second stator assembly.
5. The high accuracy accelerometer of claim 4, wherein each of said first stator assembly and said second stator assembly is provided with a cylindrical magnetic steel assembly, said magnetic steel assembly being coaxially disposed with said first stator assembly/said second stator assembly; the pendulum assembly comprises a disc-shaped pendulum frame, a first coil skeleton assembly is arranged on one side of the pendulum frame facing the first stator assembly, and a second coil skeleton assembly is arranged on one side of the pendulum frame facing the second stator assembly; the first coil framework assembly faces one side of the first stator assembly, the second coil framework assembly faces one side of the second stator assembly, an accommodating groove used for accommodating the magnetic steel assembly is formed in the inwards concave mode, and torquer coils are uniformly wound in the accommodating groove.
6. The high-precision accelerometer according to claim 5, wherein a first air gap is formed between the outer circumferential surface of the magnetic steel assembly and the inner wall of the accommodating groove, and the width of the first air gap is 0.25-0.3 mm.
7. The high-precision accelerometer according to claim 6, wherein a second air gap is formed between the outer peripheral surface of the first coil framework and the first stator assembly and between the outer peripheral surface of the second coil framework and the second stator assembly, and the width of the second air gap is 0.25-0.3 mm.
8. The high accuracy accelerometer of claim 7, wherein said pendulum assembly has a pendulum working air gap in the range of 0.018 mm to 0.023 mm.
9. The high accuracy accelerometer of claim 8, wherein a compensation ring is disposed around the magnetic steel assembly, the compensation ring being disposed proximate to the first stator assembly and the second stator assembly.
10. The high accuracy accelerometer of claim 9, wherein said second stator assembly is located on a side proximate to said servo circuit board; and a temperature sensor is arranged on one side of the second stator assembly facing the servo circuit board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011255407.0A CN112162113A (en) | 2020-11-11 | 2020-11-11 | High-precision accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011255407.0A CN112162113A (en) | 2020-11-11 | 2020-11-11 | High-precision accelerometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113686359A (en) * | 2021-08-25 | 2021-11-23 | 西安航天精密机电研究所 | Quartz flexible accelerometer torquer stabilization processing method |
| CN114545029A (en) * | 2022-02-21 | 2022-05-27 | 陕西华燕航空仪表有限公司 | Small accelerometer |
-
2020
- 2020-11-11 CN CN202011255407.0A patent/CN112162113A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113686359A (en) * | 2021-08-25 | 2021-11-23 | 西安航天精密机电研究所 | Quartz flexible accelerometer torquer stabilization processing method |
| CN113686359B (en) * | 2021-08-25 | 2023-08-04 | 西安航天精密机电研究所 | Stability processing method for moment device of quartz flexible accelerometer |
| CN114545029A (en) * | 2022-02-21 | 2022-05-27 | 陕西华燕航空仪表有限公司 | Small accelerometer |
| CN114545029B (en) * | 2022-02-21 | 2024-01-19 | 陕西华燕航空仪表有限公司 | Small accelerometer |
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