JPH05337899A - Punching device for stamper and the like - Google Patents

Punching device for stamper and the like

Info

Publication number
JPH05337899A
JPH05337899A JP16419192A JP16419192A JPH05337899A JP H05337899 A JPH05337899 A JP H05337899A JP 16419192 A JP16419192 A JP 16419192A JP 16419192 A JP16419192 A JP 16419192A JP H05337899 A JPH05337899 A JP H05337899A
Authority
JP
Japan
Prior art keywords
stamper
cutting
punching
less
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16419192A
Other languages
Japanese (ja)
Other versions
JP3229367B2 (en
Inventor
Shigeru Fujita
滋 藤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP16419192A priority Critical patent/JP3229367B2/en
Publication of JPH05337899A publication Critical patent/JPH05337899A/en
Application granted granted Critical
Publication of JP3229367B2 publication Critical patent/JP3229367B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/36Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/40Moulds for making articles of definite length, i.e. discrete articles with means for cutting the article
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B29C2043/023Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
    • B29C2043/025Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/36Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/40Moulds for making articles of definite length, i.e. discrete articles with means for cutting the article
    • B29C2043/403Moulds for making articles of definite length, i.e. discrete articles with means for cutting the article knife blades

Abstract

PURPOSE:To obviate the finish machining for deburring by specifying a clearance between an upper cutting edge and a lower cutting edge and the surface roughness-hardness of the respective cutting edges, and applying specified surface treatment to the respective cutting edges forming a cutting edge for punching a stamper used to form a disk like recording medium. CONSTITUTION:In a cutting device provided with a cutting edge for punching the center part and outer peripheral part of a stamper used for the transfer formation of a disk like recording medium such as a compact disk or a laser disk, the cutting edge is formed of an upper edge 1 and a lower edge 2, and a radial clearance between these upper and lower edges 1, 2 is set to be 8% or less of the wall thickness of a workpiece 3. The surface roughness Rmax of the respective cutting edges 1, 2 is set to be 0.1s or less, and the surface hardness of the respective cutting edges 1, 2 is set to be HV500 or more. In addition, the tips R of the respective cutting edges 1, 2 are set to be 0.05mm or less, and surface treatment by titanium nitride or ion nitriding is applied to the respective cutting edges 1, 2 in order to reduce the coefficient of friction.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はコンパクトディスク、レ
ーザディスクの転写成形に使用するスタンパ等の打抜き
装置の改良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improvements in punching devices such as stampers used for transfer molding of compact discs and laser discs.

【0002】[0002]

【従来の技術】コンパクトディスク(CD)、レーザデ
ィスク(LD)等のデジタル情報記録媒体、LPレコー
ド等のアナログ情報記録媒体としての円盤状記録媒体を
成形する際に使用する従来のスタンパの電鋳加工方法と
して、例えば図5ステップ(1)〜(5) にて行われるもの
がある。即ち、まずステップ(1) は所要サイズに円形カ
ットされ平面研磨を受けたガラス基板1を示し、ステッ
プ(2) においてこのガラス基板1上に信号溝深さに対応
して1,000〜2,000Åの厚さにフォトレジスト
2をスピンコートにより塗布し、ステップ(3) では図示
しない回転治具(ターンテーブル)上に吸着固定したガ
ラス基板1を回転させつつレーザ光を照射して感光させ
てから現像することにより記録情報に応じた微細な凹凸
を有したプリフォーマットパターンを得、ステップ(4)
ではこのプリフォーマットパターン上にスパッタリング
等により500〜1,000Åの導体化膜3を形成して
から、この導体化膜3を陰極としてNi電鋳を施して
0.2〜0.3m/m程度のNi電鋳板4を形成する。
ステップ(5) では、ガラス基板1を剥離してレジスト2
を除去洗浄することによりマスター4を形成する。この
マスター4に剥離被膜処理を施した後でNi電鋳を施す
ことによって得たNi層を剥離することによりマザーを
作成し、更に、このマザーに剥離被膜処理を施した後で
Ni電鋳を施すことにより0.2〜0.4m/m程度の
肉厚を有したスタンパ(サン)を得、このスタンパを用
いた射出成形によりプラスチックから成る上記記録媒体
を成形する。前記マザーを用いてスタンパは、中心孔の
穿孔及び外周形状の整形のために打抜き装置により打ち
抜かれることにより完成される。
2. Description of the Related Art Electroforming of a conventional stamper used when molding a disc-shaped recording medium as a digital information recording medium such as a compact disc (CD), a laser disc (LD) or an analog information recording medium such as an LP record. As a processing method, for example, there is a method performed in steps (1) to (5) in FIG. That is, first, step (1) shows a glass substrate 1 that has been circularly cut to a required size and subjected to flat polishing, and in step (2), 1,000 to 2, corresponding to the signal groove depth on this glass substrate 1. The photoresist 2 is applied to the thickness of 000Å by spin coating, and in step (3), the glass substrate 1 adsorbed and fixed on a rotating jig (turntable) not shown is rotated and irradiated with laser light to be exposed. From the step (4) to obtain a pre-format pattern with fine irregularities according to the recorded information by developing from
Then, a conductive film 3 of 500 to 1,000 liters is formed on the preformat pattern by sputtering or the like, and then Ni electroforming is performed using the conductive film 3 as a cathode to form about 0.2 to 0.3 m / m. The Ni electroformed plate 4 is formed.
In step (5), the glass substrate 1 is peeled off to remove the resist 2
Are removed and washed to form the master 4. A mother is prepared by peeling the Ni layer obtained by subjecting the master 4 to the release coating treatment and then performing the Ni electroforming, and further subjecting the mother to the release coating treatment and then performing the Ni electroforming. A stamper (sun) having a wall thickness of about 0.2 to 0.4 m / m is obtained by applying the stamper, and the recording medium made of plastic is molded by injection molding using this stamper. The stamper using the mother is completed by punching with a punching device for punching the central hole and shaping the outer peripheral shape.

【0003】一般に金属板のプレス抜き加工において
は、切刃による打抜き部分に形成されるバリの高さがお
おむね0.1mm以下であれば品質良好とされるが、上
記スタンパにあっては、5μm程度のバリであっても、
最終的に得られるプラスチック成形品の光学的性質(複
屈折)並びに機械的性質(ティルトmRad)にも重大
な影響を及ぼす虞れが高いため、バリの発生率及びバリ
高さを極限まで低減させることが厳格に要求される。ま
た、スタンパにおけるバリの存在は、スタンパを用いた
射出成形において、金型、プラスチック樹脂、スタンパ
間を剥離する際に不均一な剥離挙動をもたらす原因とな
り、最終的に得られる製品に流れピット、再衝突ピット
(ゴ−スト)を生成する原因となることが知られてい
る。
Generally, in press punching of a metal plate, it is considered that the quality is good if the height of the burr formed in the punching portion by the cutting edge is about 0.1 mm or less, but in the above stamper, it is 5 μm. Even if it is a burr of a degree,
Since the optical properties (birefringence) and mechanical properties (tilt mRad) of the finally obtained plastic molded product are highly likely to be seriously affected, the occurrence rate of burr and the burr height are reduced to the utmost limit. Is strictly required. Also, the presence of burrs on the stamper causes non-uniform peeling behavior when peeling between the mold, the plastic resin, and the stamper in injection molding using the stamper, resulting in flow pits in the final product. It is known to cause re-collision pits (ghosts).

【0004】このようなところから上記プレス抜き工程
の後に人手によってスタンパのエッジ部のバリ取り作業
を追加しているが、この仕上げ作業中に金属屑の記録面
への混入、スタンパの曲り及び変形、損傷、欠陥率の増
加等の不具合を招来する危険性が高くなる。図6は従来
の切刃による打抜き加工の状態を示す拡大図であり、ワ
ーク(スタンパ)3の中心孔或は外周部を切断するため
の上刃1と下刃2との間のクリアランスCL1をワーク
厚の9%以上に設定しているため、打抜き部の一部が塑
性破壊を生じてバリ部4を生成する。次に、図7では前
記クリアランスをワーク厚の8%以下に設定した状態で
打抜きを行った状態を示しているが、この場合剪断破壊
部の中央部にシェービング(擦りながら剪断)される領
域が生まれる。この状態は面圧を極端に高くして刃物の
損傷や、スタンパを構成するニッケルの凝着現象が発生
しやすい状況を生んでいる。また、シェービングされる
領域の上下部分には塑性変形ダレ部が形成される。
From this point of view, the deburring work of the edge part of the stamper is manually added after the above-mentioned press removing step. During this finishing work, metal chips are mixed into the recording surface, and the stamper is bent and deformed. The risk of causing defects such as damage and increase in defect rate increases. FIG. 6 is an enlarged view showing a state of punching with a conventional cutting blade, and shows a clearance CL1 between the upper blade 1 and the lower blade 2 for cutting the center hole or the outer peripheral portion of the work (stamper) 3. Since the work thickness is set to be 9% or more, a part of the punched portion is plastically fractured to form the burr portion 4. Next, FIG. 7 shows a state where punching is performed with the clearance set to 8% or less of the work thickness. In this case, a region to be shaving (shearing while rubbing) is formed in the center of the shear fracture part. to be born. In this state, the surface pressure becomes extremely high, which causes damage to the blade and a tendency to cause the adhesion phenomenon of nickel composing the stamper. Further, plastic deformation sagging portions are formed in the upper and lower portions of the shaving area.

【0005】また、光ディスクの中心穴径の精度は狙い
とする穴径に対してクリアランスを+5〜+15μmの
範囲とし、+公差としている。その一方で、射出成形金
型中においてスタンパの内径を押えるために使用する押
えリングは−15〜−25μmという−公差に設定され
る。このように+公差の範囲内で製造されるスタンパの
中心穴に−公差の範囲内で製造される内径押えリングを
挿入して押える場合には、最大で40μmの偏心が発生
する虞れがあり、メディアにおけるトラック振れ仕様値
(60μm以下)のマージンを狭ばめる結果を招来する
虞れがある。
The accuracy of the center hole diameter of the optical disk is defined as + tolerance by setting the clearance within the range of +5 to +15 μm with respect to the target hole diameter. On the other hand, the holding ring used for holding the inner diameter of the stamper in the injection molding die is set to have a tolerance of −15 to −25 μm. As described above, when the inner diameter pressing ring manufactured within the tolerance is inserted and pressed into the center hole of the stamper manufactured within the tolerance, the eccentricity of up to 40 μm may occur. However, there is a risk of narrowing the margin of the track deflection specification value (60 μm or less) in the medium.

【0006】次に、図8は、ダイ5とノックアウトプレ
ート6との間にスタンパ3を挟んだ状態でポンチ7によ
りスタンパ3の中心穴を打ち抜く状態を示しており、こ
の従来方法においてはノックアウトプレートとスタンパ
とが面接触状態にあり、しかも接触面積が大きくなって
いるため、バネ付勢したノックアウトプレート6とスタ
ンパ3との間に異物8が入り込みやすく、この状態で打
抜きを行うと、スタンパ3面に圧痕が形成されることと
なる。
Next, FIG. 8 shows a state in which the punch 7 punches the center hole of the stamper 3 with the stamper 3 sandwiched between the die 5 and the knockout plate 6. In this conventional method, the knockout plate is used. Since the stamper and the stamper are in surface contact with each other and the contact area is large, the foreign matter 8 easily enters between the spring-biased knockout plate 6 and the stamper 3, and when punching in this state, the stamper 3 An indentation will be formed on the surface.

【0007】[0007]

【発明の目的】本発明は上記に鑑みてなされたものであ
り、打抜き加工後におけるバリ取りのための仕上げ作業
を不要とし、しかもメディアの偏心量がスタンパと押え
リングの各公差によって決定されていたことに起因して
発生する不具合を解消することができるスタンパ等の打
抜き装置を提供することを目的としている。
SUMMARY OF THE INVENTION The present invention has been made in view of the above, and eliminates the need for finishing work for deburring after punching, and the eccentricity of the media is determined by the respective tolerances of the stamper and the pressing ring. It is an object of the present invention to provide a punching device such as a stamper that can eliminate the problems caused by the above.

【0008】[0008]

【発明の構成】上記目的を達成するため本願第1の発明
は、円盤上記録媒体を成型するためのスタンパの中心部
及び外周部を打ち抜くための切刃を備えた打抜き装置に
おいて、前記切刃を構成する上刃と下刃との間のクリア
ランスをスタンパの肉厚の8%以下に設定すると同時
に、上刃及び下刃の表面粗度Rmaxを0.1s以下と
し、更に各刃の表面硬度をHv500以上とし、且つ摩
擦係数低減のために各刃を窒化チタン(TiN)或はイ
オン窒化処理により表面処理したことを特徴とする。
To achieve the above object, the first invention of the present application is a punching device provided with a cutting blade for punching out a central portion and an outer peripheral portion of a stamper for molding a disk recording medium. The clearance between the upper and lower blades constituting the blade is set to 8% or less of the wall thickness of the stamper, and at the same time, the surface roughness Rmax of the upper and lower blades is set to 0.1 s or less, and the surface hardness of each blade is further set. Is Hv 500 or more, and each blade is surface-treated by titanium nitride (TiN) or ion nitriding treatment in order to reduce the friction coefficient.

【0009】本願第2の発明は、ポンチによるスタンパ
中心部の打抜き時に、ダイとの間でスタンパ中心部を挟
持するノックアウトプレートの中心穴周縁に断面楔状の
環状突条を形成し、該環状突条を圧接することによりス
タンパ中心部に環状の圧痕を形成し、更に射出成形時に
該スタンパを押える為の押えリングに設けた係止用環状
突条を該スタンパの圧痕に嵌合せしめた状態で固定する
ようにしたことを特徴とする。
According to a second aspect of the present invention, when punching the center of the stamper with a punch, a ring-shaped protrusion having a wedge-shaped cross section is formed on the periphery of the center hole of the knockout plate that holds the center of the stamper with the die. An annular indentation is formed in the center of the stamper by press-contacting the ridges, and a retaining ring-shaped ridge provided on the pressing ring for pressing the stamper during injection molding is fitted into the indentation of the stamper. The feature is that it is fixed.

【0010】本願第3の発明は、前記ノックアウトプレ
ートの前記環状突条の幅を0.5mm以下、先端Rを
0.05mm以下、高さを前記スタンパ厚みの1/4以
下としたことを特徴とする。
A third aspect of the present invention is characterized in that the width of the annular projection of the knockout plate is 0.5 mm or less, the tip R is 0.05 mm or less, and the height is 1/4 or less of the stamper thickness. And

【0011】本願第4の発明は、肉厚がtである前記ス
タンパの外周部を切断するための上刃の先端部の位置
を、該スタンパの中心部を切断するためのポンチの先端
部の位置よりも高さh(1/2t<h<t)分だけ上方
に配置することにより、外周部の切断途中に中心部の切
断を開始せしめ、切刃による外周部切断途中の増幅され
た切断エネルギーを利用してポンチによる切断力を増幅
せしめたことを特徴とする。
According to a fourth aspect of the present invention, the position of the tip of the upper blade for cutting the outer peripheral portion of the stamper having a wall thickness of t is the tip of the punch for cutting the center of the stamper. By arranging it by a height h (1 / 2t <h <t) above the position, the cutting of the central part is started during the cutting of the outer peripheral part, and the amplified cutting during the cutting of the outer peripheral part by the cutting blade. The feature is that the cutting force by the punch is amplified by using energy.

【0012】以下、添付図面により本発明を詳細に説明
する。図1(a) 及び(b) は本発明の好適な一実施例によ
るスタンパ中心孔或は外周部の打抜き状態を示す図であ
り、前記図7の場合と同様に上刃1と下刃2との間のラ
ジアル方向クリアランスをワーク3の肉厚の8%以下に
設定すると同時に、各切刃1、2の表面粗度Rmaxを
0.1s以下とし、更に各切刃の表面硬度をHv500
以上とし、且つ各切刃の先端Rを0.05mm以下に設
定し、更に摩擦係数低減のために各切刃を窒化チタン
(TiN)或はイオン窒化処理により表面処理してい
る。
The present invention will be described in detail below with reference to the accompanying drawings. 1 (a) and 1 (b) are views showing a punched state of a center hole or an outer peripheral portion of a stamper according to a preferred embodiment of the present invention. As in the case of FIG. 7, the upper blade 1 and the lower blade 2 are shown. The radial clearance between and is set to 8% or less of the wall thickness of the work 3, the surface roughness Rmax of each cutting edge 1 and 2 is set to 0.1 s or less, and the surface hardness of each cutting edge is set to Hv500.
The tip R of each cutting edge is set to 0.05 mm or less, and each cutting edge is surface-treated by titanium nitride (TiN) or ion nitriding treatment to reduce the friction coefficient.

【0013】この条件を備えた打抜き装置により繰り返
し打抜き実験を行ったところ、前記図7の場合のような
シェービングを形成することなく、200枚以上のワー
クを打ち抜き得る程度の寿命の長期化を図れることが判
明した。更に従来の打抜き装置によりスタンパの中心孔
と外周部分を同時に打抜きする場合には、中心孔打ち抜
き用の切刃と、外周部打抜き用の切刃との切断開始タイ
ミングを完全に一致させるように、各上刃の位置を同レ
ベルに設定した状態で各刃を切断装置の加圧手段に固定
している。このため、高速打抜きを行うためにはアキュ
ムレータ等を備えたプレス装置により高速化を図る必要
があったが、本発明では、図2に示す様に外周部打抜き
用の切刃10、11と、中心孔3aを打ち抜くための切
刃(ポンチ、ダイ)12、13による各切断開始位置を
ワーク3の厚さt未満であって、1/2以上の範囲内に
設定することにより、換言すれば図示の例では外周部を
切断するための上刃10の先端部の位置を、中心部を切
断するためのポンチ12の先端部の位置よりも高さh
(1/2t<h<t)分だけ下方に配置することによ
り、外周部の切断途中或は切断終了直前に中心部の切断
が開始されるように構成している。なお、図2中14は
ノックアウトプレートである。
Repeated punching experiments using the punching device provided with these conditions show that the life can be extended to the extent that 200 or more works can be punched without forming shaving as in the case of FIG. It has been found. Furthermore, when punching the center hole and the outer peripheral portion of the stamper at the same time by the conventional punching device, so that the cutting start timing of the central hole punching blade and the cutting edge for the outer peripheral punching are completely matched, The upper blades are fixed to the pressing means of the cutting device with the positions of the upper blades set to the same level. For this reason, in order to perform high-speed punching, it was necessary to increase the speed by using a press device equipped with an accumulator or the like, but in the present invention, as shown in FIG. By setting each cutting start position by the cutting blades (punches, dies) 12 and 13 for punching out the central hole 3a to be less than the thickness t of the work 3 and within a range of 1/2 or more, in other words, In the illustrated example, the position of the tip of the upper blade 10 for cutting the outer peripheral portion is higher than the position of the tip of the punch 12 for cutting the central portion by a height h.
By arranging the lower part by (1 / 2t <h <t), the cutting of the central portion is started during or immediately before the cutting of the outer peripheral portion. In addition, 14 in FIG. 2 is a knockout plate.

【0014】図2の実施例によれば、外周部の打抜き完
了タイミングよりも中心孔3aの抜き完了タイミングの
方が僅かに遅れるため、切刃10による外周部切断途中
或は終了直前の増幅された切断エネルギーを利用してポ
ンチ12による切断力を増幅せしめることができる。従
って例えばポンチによる中心部打抜きに通常必要とされ
る力が2tonであったとしても、本実施例によれば9
tonの加圧力を得ることができることとなる。この結
果、外周と中心部を切断するための各切刃の固定位置を
僅かにずらすだけで切断装置の加圧手段の出力を増大さ
せることなく高速打抜きが可能となる。この結果、中心
孔の打抜きにおいて塑性変形を防止して精度の高い真円
度を得ることができる。
According to the embodiment shown in FIG. 2, since the punching completion timing of the central hole 3a is slightly behind the punching completion timing of the outer peripheral portion, amplification is performed during the cutting of the outer peripheral portion by the cutting edge 10 or immediately before the end. The cutting force by the punch 12 can be amplified by using the cutting energy. Therefore, even if the force normally required for punching the central portion by the punch is 2 tons, according to the present embodiment,
It is possible to obtain the applied pressure of ton. As a result, it is possible to perform high-speed punching without increasing the output of the pressurizing means of the cutting device by only slightly shifting the fixed position of each cutting edge for cutting the outer periphery and the central portion. As a result, it is possible to prevent plastic deformation during punching of the central hole and obtain highly accurate roundness.

【0015】次に、図3(a) 及び(b) は本発明の他の実
施例であり、(a) は本発明の打抜き装置によりスタンパ
の中心孔を打抜きする状態を示す断面図、(b) はスタン
パに形成された凹所の形状を示す図である。この実施例
において特徴的なことは、スタンパ3の中心孔3a周縁
を押えるためのノックアウトプレート14の中心穴14
aの周縁に沿って穴14aと同心状に断面楔状の環状突
条14bを突設して、この環状突条14bをスタンパの
中心孔3aの周縁部に圧接させながらポンチ12により
打抜きを行うことにより、スタンパ3の中心孔3aの周
縁部に同心円状の圧痕3bを形成する様にした点であ
る。このようにノックアウトプレート14とスタンパ3
との間の接触面積を減縮することにより、異物巻き込み
の発生確率を減少するだけでなく、後述する様に積極的
に鋭角な楔形圧痕3bを形成し、この圧痕3bを利用し
て射出成形時における金型内でのスタンパの位置ずれ防
止を図っている。
Next, FIGS. 3 (a) and 3 (b) show another embodiment of the present invention, and FIG. 3 (a) is a sectional view showing a state where the center hole of the stamper is punched by the punching device of the present invention, b) is a view showing the shape of a recess formed in the stamper. A characteristic of this embodiment is that the center hole 14 of the knockout plate 14 for pressing the peripheral edge of the center hole 3a of the stamper 3 is pressed.
An annular projection 14b having a wedge-shaped cross section is provided so as to be concentric with the hole 14a along the peripheral edge of a, and punching is performed by the punch 12 while pressing the annular projection 14b against the peripheral edge of the center hole 3a of the stamper. Thus, the concentric indentations 3b are formed on the peripheral edge of the center hole 3a of the stamper 3. In this way, knockout plate 14 and stamper 3
By reducing the contact area between and, not only the probability of foreign matter entrapment is reduced, but also an acute-angled wedge-shaped indentation 3b is positively formed as will be described later, and this indentation 3b is used during injection molding. In order to prevent misalignment of the stamper in the mold.

【0016】図4(a) 及び(b) は上記圧痕を有したスタ
ンパを用いた射出成形の状態を示す説明図及び従来にお
ける射出成形の状態の説明図である。(b) に示す様に従
来は金型20、21間でスタンパ3を挟むと同時に押え
リング22をスタンパ3の中心孔3aに挿通した状態で
押えリングの先端部を一方の金型20に螺着固定してい
たが、従来の押えリングは先端部にネジ部を有した断面
T型の部材に過ぎないため、鍔状の押え部22aと中心
孔3aとの間の位置関係を固定させる手段は存しなかっ
た。換言すれば、押え部22aがスタンパと接する面は
平坦であるため、中心孔3aのサイズと押えリングの棒
状部22bの径との間の寸法誤差が大きい場合にはそこ
にガタが発生し、流路21aから導入される溶融樹脂の
流動圧によりスタンパが回転方向に動く虞れがある。ま
た、この動きによりスタンパ裏面に擦れが発生する。こ
の擦れはスタンパの寿命を短くする大きな原因となって
いる。
4 (a) and 4 (b) are an explanatory view showing a state of injection molding using the stamper having the above-mentioned indentation and an explanatory view of a conventional injection molding state. As shown in (b), conventionally, the stamper 3 is sandwiched between the molds 20 and 21, and at the same time, the pressing ring 22 is inserted into the center hole 3a of the stamper 3 and the tip of the pressing ring is screwed into one mold 20. Although the conventional presser ring is only a member having a T-shaped cross section with a threaded portion at the tip, it is a means for fixing the positional relationship between the collar-shaped presser part 22a and the central hole 3a. Didn't exist. In other words, since the surface of the pressing portion 22a in contact with the stamper is flat, if there is a large dimensional error between the size of the central hole 3a and the diameter of the rod-shaped portion 22b of the pressing ring, play will occur there. The stamper may move in the rotation direction due to the flowing pressure of the molten resin introduced from the flow path 21a. Further, this movement causes rubbing on the back surface of the stamper. This rubbing is a major cause of shortening the life of the stamper.

【0017】これに対して本発明の実施例では(a) に示
す様に押えリング22の押え部22aの下面(スタンパ
との接触面)に、スタンパに形成した前記楔形圧痕3b
内に密着嵌合する係止用環状突条22cを突設したの
で、該係止用環状突条22cにより楔形圧痕3bを押え
てスタンパ3のずれを防止することができた。この結
果、金型内におけるスタンパの回転方向ずれ(微小回
転)と、それに起因した裏面擦れを防止し、スタンパの
寿命を向上することができた。
On the other hand, in the embodiment of the present invention, as shown in (a), the wedge-shaped indentation 3b formed on the stamper is formed on the lower surface (contact surface with the stamper) of the pressing portion 22a of the pressing ring 22.
Since the locking annular ridge 22c that closely fits inside is provided so as to project, the wedge-shaped impression 3b can be pressed by the locking annular ridge 22c to prevent the stamper 3 from being displaced. As a result, it was possible to prevent the deviation of the stamper in the mold in the rotational direction (small rotation) and the back surface rubbing caused thereby, and to improve the life of the stamper.

【0018】なお、ノックアウトプレート14の環状突
条14bの形状、寸法の条件を、幅を0.5mm以下、
先端Rを0.05mm以下、高さをスタンパ3の肉厚の
1/4以下とすることにより、偏心20μm以下のディ
スクを得ることができた。この結果、高速回転仕様のデ
ィスクドライブ装置に対応することが可能となる。な
お、本発明の打抜き装置は、光ディスク、コンパクトデ
ィスク、光磁気ディスク等の円盤状記録媒体の製造に使
用する高精度、高洗浄ニッケルスタンパの製造工程にお
いて、スタンパを所定の内外径寸法に仕上げるためのプ
レス打抜き装置に適用可能である。
The condition of the shape and size of the annular protrusion 14b of the knockout plate 14 is that the width is 0.5 mm or less,
By setting the tip R to be 0.05 mm or less and the height to be 1/4 or less of the wall thickness of the stamper 3, a disk with an eccentricity of 20 μm or less could be obtained. As a result, it becomes possible to support a disk drive device of high speed rotation specification. The punching device of the present invention is designed to finish the stamper to have predetermined inner and outer diameters in the manufacturing process of a high-precision, high-cleaning nickel stamper used for manufacturing a disc-shaped recording medium such as an optical disc, a compact disc, and a magneto-optical disc. It can be applied to the press punching device.

【0019】[0019]

【発明の効果】以上のように本発明においては、打抜き
用の上下の切刃のラジアル方向クリアランスをワーク厚
みの8%以下としながらも、各切刃1、2の表面粗度R
maxを0.1s以下とし、更に各切刃の表面硬度をH
v500以上とし、且つ各切刃の先端Rを0.05mm
以下に設定し、更に摩擦係数低減のために各切刃を窒化
チタン(TiN)或はイオン窒化処理により表面処理し
たため、打抜き加工後におけるバリ取りのための仕上げ
作業を不要として歩留の向上を図ることができる。
As described above, in the present invention, the surface roughness R of each cutting edge 1 and 2 is maintained while the radial clearance of the upper and lower cutting edges for punching is 8% or less of the work thickness.
max is 0.1 s or less, and the surface hardness of each cutting edge is H
v500 or more and the tip R of each cutting edge is 0.05 mm
The following settings were made and each cutting edge was surface treated with titanium nitride (TiN) or ion nitriding to reduce the friction coefficient, so finishing work for deburring after punching is unnecessary and yield is improved. Can be planned.

【0020】また、ポンチによるスタンパ中心部の打抜
き時に、ダイとの間でスタンパ中心部を挟持するノック
アウトプレートの中心穴14a周縁に断面楔状の環状突
条14bを形成し、該環状突条を圧接することによりス
タンパ中心部に形成しようとする中心孔3aと同心円状
の環状の圧痕3bを形成し、更に射出成形時に押えリン
グ22に設けた係止用環状突条22cを該圧痕3bに嵌
合せしめた状態で固定するようにしたので、メディア
(ディスク)の偏心量がスタンパと押えリングの各公差
によって決定されることがなくなり、偏心量を最小限に
押えることができる。また、射出成形中におけるスタン
パの回転方向ずれを防止できるので、スタンパの寿命を
増大できる。
Further, when punching the center of the stamper with a punch, an annular ridge 14b having a wedge-shaped cross section is formed around the center hole 14a of the knockout plate that holds the center of the stamper between the die and the die. By doing so, an annular indentation 3b concentric with the center hole 3a to be formed in the center of the stamper is formed, and the locking annular projection 22c provided on the holding ring 22 during injection molding is fitted into the indentation 3b. Since the eccentricity of the medium (disk) is not determined by the respective tolerances of the stamper and the pressing ring, the eccentricity can be suppressed to a minimum because the eccentricity is fixed in the pressed state. Further, it is possible to prevent the stamper from being displaced in the rotational direction during the injection molding, so that the life of the stamper can be increased.

【0021】また、スタンパの外周部切削用切刃による
切断開始タイミングを、中心部切削用切刃による切断開
始タイミングよりも僅かに早くしたこと、具体的には外
周部を切断するための上刃の先端部の位置を、中心部を
切断するためのポンチの先端部の位置よりも高さh(1
/2t<h<t)分だけ下方に配置することにより、外
周部の切断途中或は切断終了直前に中心部の切断が開始
されることとなり、切刃による外周部切断途中或は終了
直前の増幅された切断エネルギーを利用してポンチによ
る切断力を増幅せしめることができる。従って切断装置
の加圧手段の出力を増大させることなく高速打抜きが可
能となる。この結果、中心孔の打抜きにおいて塑性変形
を防止して精度の高い真円度を得ることができる。
Further, the cutting start timing of the outer peripheral cutting edge of the stamper is set slightly earlier than the cutting start timing of the central cutting edge, specifically, the upper blade for cutting the outer peripheral portion. The position of the tip of the punch is higher than the position of the tip of the punch for cutting the center by a height h (1
By locating the lower part by / 2t <h <t), the cutting of the central portion is started during the cutting of the outer peripheral portion or immediately before the end of the cutting, and the cutting of the central portion during the cutting of the outer peripheral portion by the cutting blade or immediately before the end is completed. The cutting energy by the punch can be amplified by using the amplified cutting energy. Therefore, high-speed punching is possible without increasing the output of the pressurizing means of the cutting device. As a result, it is possible to prevent plastic deformation during punching of the central hole and obtain highly accurate roundness.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a) 及び(b) は本発明の好適な一実施例の打抜
き装置による打抜き状態を示す図である。
1A and 1B are views showing a punching state by a punching device according to a preferred embodiment of the present invention.

【図2】本発明の他の実施例による打抜き状態を示す図
である。
FIG. 2 is a diagram showing a punching state according to another embodiment of the present invention.

【図3】(a) 及び(b) は本発明の他の実施例による中心
部打抜き状態を示す図及び打抜き後のスタンパの形状を
示す図である。
3 (a) and 3 (b) are views showing a punching state of a central portion and a shape of a stamper after punching according to another embodiment of the present invention.

【図4】(a) 及び(b) は圧痕を有したスタンパを用いた
射出成形の状態を示す説明図及び従来における射出成形
の状態の説明図である。
4A and 4B are an explanatory view showing a state of injection molding using a stamper having an indentation and an explanatory view of a conventional injection molding state.

【図5】ステップ(1) 〜(5) は円盤状記録媒体を成形す
る際に使用する従来のスタンパの電鋳加工方法の説明図
である。
FIG. 5 is an explanatory diagram of a conventional electroforming method of a stamper used when molding a disk-shaped recording medium, in steps (1) to (5).

【図6】従来例による打抜き状態を示す説明図である。FIG. 6 is an explanatory view showing a punching state according to a conventional example.

【図7】上下の切刃間のラジアル方向クリアランスをワ
ーク肉厚の8%とした場合の打抜き状態を示す図であ
る。
FIG. 7 is a diagram showing a punching state when the radial clearance between the upper and lower cutting edges is 8% of the work thickness.

【図8】スタンパ中心部を打ち抜くための従来装置の概
略構成説明図である。
FIG. 8 is a schematic configuration explanatory view of a conventional device for punching out the center part of a stamper.

【符号の説明】[Explanation of symbols]

1 上刃、2 下刃、3 ワーク、3a 中心孔、3b
圧痕,10、11 切刃、12、13 切刃、14
ノックアウトプレート、14a 中心穴、14b20、
21 金型、22 押えリング、22a 鍔状の押え
部,22b 棒状部,22c 係止用環状突条,
1 Upper blade, 2 Lower blade, 3 Workpiece, 3a Center hole, 3b
Indentation, 10, 11 cutting edge, 12, 13 cutting edge, 14
Knockout plate, 14a center hole, 14b20,
21 mold, 22 pressing ring, 22a collar-shaped pressing portion, 22b rod-shaped portion, 22c locking annular ridge,

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成5年7月7日[Submission date] July 7, 1993

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0019[Name of item to be corrected] 0019

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0019】[0019]

【発明の効果】以上のように本発明においては、打抜き
用の上下の切刃のラジアル方向クリアランスをワーク厚
みの8%以下としながらも、各切刃1、2の表面粗度R
maxを0.1s以下とし、更に各切刃の表面硬度をH
v500以上とし、且つ各切刃の先端Rを0.05mm
以下に設定し、更に摩擦係数低減のために各切刃を窒化
チタン(TiN)或はイオン窒化処理により表面処理し
たため、スタンパ被加工部の品質を安定させることがで
き、特に打抜き加工後におけるバリ取りのための仕上げ
作業を不要として歩留の向上を図ることができる。また
抜き刃の寿命向上により再研磨コストの低減を図ること
ができる。
As described above, in the present invention, the surface roughness R of each cutting edge 1 and 2 is maintained while the radial clearance of the upper and lower cutting edges for punching is 8% or less of the work thickness.
max is 0.1 s or less, and the surface hardness of each cutting edge is H
v500 or more and the tip R of each cutting edge is 0.05 mm
Since the following settings were made and each cutting edge was surface-treated with titanium nitride (TiN) or ion nitriding treatment to reduce the friction coefficient, the quality of the stamper processed part can be stabilized, and especially burrs after punching It is possible to improve the yield without requiring finishing work for picking. Further, the life of the punching blade can be improved, and the re-polishing cost can be reduced.

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0020[Name of item to be corrected] 0020

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0020】また、ポンチによるスタンパ中心部の打抜
き時に、ダイとの間でスタンパ中心部を挟持するノック
アウトプレートの中心穴14a周縁に断面楔状の環状突
条14bを形成し、該環状突条を圧接することによりス
タンパ中心部に形成しようとする中心孔3aと同心円状
の環状の圧痕3bを形成し、更に射出成形時に押えリン
グ22に設けた係止用環状突条22cを該圧痕3bに嵌
合せしめた状態で固定するようにしたので、メディア
(ディスク)の偏心量がスタンパと押えリングの各公差
によって決定されることがなくなり、偏心量を最小限に
押えることができる。また、射出成形中におけるスタン
パの回転方向ずれを防止できるので、スタンパの寿命を
増大できる。これを換言すれば、成形時の樹脂射出力の
アンバランスに伴うスタンパ回転の防止が可能になり、
金型とスタンパ裏面に発生していた微小擦過傷がなくな
り、スタンパの寿命を大幅に向上できる。またノックア
ウトプレートの環状痕を利用することで成形中の偏心が
防止でき、ラジアル方向の面振れ加速度の小さいディス
クが安定して得られるようになる。
Further, when punching the center of the stamper with a punch, an annular ridge 14b having a wedge-shaped cross section is formed around the center hole 14a of the knockout plate that holds the center of the stamper between the die and the die. By doing so, an annular indentation 3b concentric with the center hole 3a to be formed in the center of the stamper is formed, and the locking annular projection 22c provided on the holding ring 22 during injection molding is fitted into the indentation 3b. Since the eccentricity of the medium (disk) is not determined by the respective tolerances of the stamper and the pressing ring, the eccentricity can be suppressed to a minimum because the eccentricity is fixed in the pressed state. Further, it is possible to prevent the stamper from being displaced in the rotational direction during the injection molding, so that the life of the stamper can be increased. In other words, it is possible to prevent the stamper rotation due to the imbalance of the resin spray output during molding.
The minute scratches that have occurred on the back surface of the die and stamper are eliminated, and the life of the stamper can be greatly improved. Further, by utilizing the annular mark of the knockout plate, it is possible to prevent eccentricity during molding, and it is possible to stably obtain a disk having a small surface wobbling acceleration in the radial direction.

【手続補正3】[Procedure amendment 3]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0021[Correction target item name] 0021

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0021】また、スタンパの外周部切削用切刃による
切断開始タイミングを、中心部切削用切刃による切断開
始タイミングよりも僅かに早くしたこと、具体的には外
周部を切断するための上刃の先端部の位置を、中心部を
切断するためのポンチの先端部の位置よりも高さh(1
/2t<h<t)分だけ下方に配置することにより、外
周部の切断途中或は切断終了直前に中心部の切断が開始
されることとなり、切刃による外周部切断途中或は終了
直前の増幅された切断エネルギーを利用してポンチによ
る切断力を増幅せしめることができる。従って切断装置
の加圧手段の出力を増大させることなく高速打抜きが可
能となる。この結果、中心孔の打抜きにおいて塑性変形
を防止して精度の高い真円度を得ることができる。換言
すれば低出力装置であっても、高速打抜きが可能とな
り、バリのない、且つ真円度のよい中心加工が可能とな
る。
Further, the cutting start timing of the outer peripheral cutting edge of the stamper is set slightly earlier than the cutting start timing of the central cutting edge, specifically, the upper blade for cutting the outer peripheral portion. The position of the tip of the punch is higher than the position of the tip of the punch for cutting the center by a height h (1
By locating the lower part by / 2t <h <t), the cutting of the central portion is started during the cutting of the outer peripheral portion or immediately before the end of the cutting, and the cutting of the central portion during the cutting of the outer peripheral portion by the cutting blade or immediately before the end is completed. The cutting energy by the punch can be amplified by using the amplified cutting energy. Therefore, high-speed punching is possible without increasing the output of the pressurizing means of the cutting device. As a result, it is possible to prevent plastic deformation during punching of the central hole and obtain highly accurate roundness. In other words, even with a low-power device, high-speed punching is possible and burrs-free center processing with good roundness is possible.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 // B29L 17:00 4F ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location // B29L 17:00 4F

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 円盤状記録媒体を成型するためのスタン
パの中心部及び外周部を打ち抜くための切刃を備えた打
抜き装置において、 前記切刃を構成する上刃と下刃との間のクリアランスを
スタンパの肉厚の8%以下に設定すると同時に、上刃及
び下刃の表面粗度Rmaxを0.1s以下とし、更に各
刃の表面硬度をHv500以上とし、且つ摩擦係数低減
のために各刃を窒化チタン(TiN)或はイオン窒化処
理により表面処理したことを特徴とするスタンパ等の打
抜き装置。
1. A punching device including a cutting blade for punching out a central portion and an outer peripheral portion of a stamper for molding a disk-shaped recording medium, wherein a clearance between an upper blade and a lower blade constituting the cutting blade is provided. Is set to 8% or less of the wall thickness of the stamper, at the same time the surface roughness Rmax of the upper and lower blades is set to 0.1 s or less, and the surface hardness of each blade is set to Hv500 or more. A punching device for a stamper or the like, wherein the blade is surface-treated by titanium nitride (TiN) or ion nitriding.
【請求項2】 ポンチによるスタンパ中心部の打抜き時
にダイとの間でスタンパ中心部を挟持するノックアウト
プレートの中心穴周縁に、断面楔状の環状突条を形成
し、該環状突条を圧接することによりスタンパ中心部に
環状の圧痕を形成し、更に射出成形時に該スタンパを押
える為の押えリングに設けた係止用環状突条を該スタン
パの圧痕に嵌合せしめた状態で固定するようにしたこと
を特徴とするスタンパを用いた射出成型方法。
2. An annular ridge having a wedge-shaped cross section is formed on the peripheral edge of the center hole of a knockout plate that holds the stamper center with the die when punching the stamper center, and the annular ridge is pressed against the die. An annular indentation is formed in the center of the stamper, and the locking annular projection provided on the pressing ring for pressing the stamper at the time of injection molding is fixed in the state of being fitted into the indentation of the stamper. An injection molding method using a stamper.
【請求項3】 前記ノックアウトプレートの前記環状突
条の幅を0.5mm以下、先端Rを0.05mm以下、
高さを前記スタンパ厚みの1/4以下としたことを特徴
とする請求項2記載の射出成型方法。
3. The width of the annular projection of the knockout plate is 0.5 mm or less, and the tip R is 0.05 mm or less,
The injection molding method according to claim 2, wherein the height is set to ¼ or less of the stamper thickness.
【請求項4】 肉厚がtである前記スタンパの外周部を
切断するための上刃の先端部の位置を、該スタンパの中
心部を切断するためのポンチの先端部の位置よりも高さ
h(1/2t<h<t)分だけ上方に配置することによ
り、外周部の切断途中に中心部の切断を開始せしめ、切
刃による外周部切断途中の増幅された切断エネルギーを
利用してポンチによる切断力を増幅せしめたことを特徴
とする請求項1記載のスタンパ等の打抜き装置。
4. The position of the tip of the upper blade for cutting the outer peripheral portion of the stamper having a wall thickness t is higher than the position of the tip of the punch for cutting the center of the stamper. By arranging it by h (1 / 2t <h <t) above, cutting of the central portion is started during cutting of the outer peripheral portion, and the amplified cutting energy during cutting of the outer peripheral portion by the cutting blade is utilized. A punching device for a stamper or the like according to claim 1, wherein the cutting force by the punch is amplified.
JP16419192A 1992-05-29 1992-05-29 Stamper punching equipment Expired - Fee Related JP3229367B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16419192A JP3229367B2 (en) 1992-05-29 1992-05-29 Stamper punching equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16419192A JP3229367B2 (en) 1992-05-29 1992-05-29 Stamper punching equipment

Publications (2)

Publication Number Publication Date
JPH05337899A true JPH05337899A (en) 1993-12-21
JP3229367B2 JP3229367B2 (en) 2001-11-19

Family

ID=15788419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16419192A Expired - Fee Related JP3229367B2 (en) 1992-05-29 1992-05-29 Stamper punching equipment

Country Status (1)

Country Link
JP (1) JP3229367B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2321653A (en) * 1997-02-03 1998-08-05 Kimberly Clark Co Creping doctor blades
WO1998055995A3 (en) * 1997-06-02 1999-03-18 Toolex Alpha Ab Semi-manufactured stamper
WO1999004393A3 (en) * 1997-07-16 1999-04-22 Toolex Alpha Ab Semi-manufactured stamper and method of manufacturing the same
WO2004029952A1 (en) * 2002-09-24 2004-04-08 Tdk Corporation Optical recording medium producing method, and optical recording medium producing device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2321653A (en) * 1997-02-03 1998-08-05 Kimberly Clark Co Creping doctor blades
GB2321653B (en) * 1997-02-03 2001-02-28 Kimberly Clark Co Method for creping tissue
WO1998055995A3 (en) * 1997-06-02 1999-03-18 Toolex Alpha Ab Semi-manufactured stamper
WO1999004393A3 (en) * 1997-07-16 1999-04-22 Toolex Alpha Ab Semi-manufactured stamper and method of manufacturing the same
WO2004029952A1 (en) * 2002-09-24 2004-04-08 Tdk Corporation Optical recording medium producing method, and optical recording medium producing device
US7625506B2 (en) 2002-09-24 2009-12-01 Tdk Corporation Optical recording medium producing method, and optical recording medium producing device

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Publication number Publication date
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