JPH05333555A - Exposure method for printed circuit board - Google Patents

Exposure method for printed circuit board

Info

Publication number
JPH05333555A
JPH05333555A JP4161895A JP16189592A JPH05333555A JP H05333555 A JPH05333555 A JP H05333555A JP 4161895 A JP4161895 A JP 4161895A JP 16189592 A JP16189592 A JP 16189592A JP H05333555 A JPH05333555 A JP H05333555A
Authority
JP
Japan
Prior art keywords
mask holder
mask
printed circuit
circuit board
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4161895A
Other languages
Japanese (ja)
Inventor
Shigenori Kobayashi
茂法 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwasaki Denki KK
Original Assignee
Iwasaki Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwasaki Denki KK filed Critical Iwasaki Denki KK
Priority to JP4161895A priority Critical patent/JPH05333555A/en
Publication of JPH05333555A publication Critical patent/JPH05333555A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To provide the exposure method for printed circuit board which prevents position deviation from being generated and undercut from occuring at the time of development. CONSTITUTION:On the lower face of a rigid translucent board 3 of mask holder 2, the periphery of a mask film 1 is fixed in the completely air tight state by an adhesive tape 4, the mask holder 2 is dropped down in contact with a printed circuit board 7 mounted on an exposure stage 6 while adhering the mask film 1 to the translucent board 3 of the mask holder 2 by sucking air from the mask holder side, a space 11 between the mask holder 2 and the exposure stage 6 is sucked, suction on the mask holder side is stopped and after the space between the mask film 1 and the translucent board 3 of the mask holder 2 is opened to atmosphere, exposure is performed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はプリント基板の露光方法
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for exposing a printed circuit board.

【0002】[0002]

【従来の技術】プリント基板の製造工程において、プリ
ント基板上に銅箔により回路パターンが形成された後、
その上にソルダーレジストインキが全面に塗布され、次
にランド部分のソルダーレジスト層を除去するために、
マスクフィルムを置いて露光して現像し、露光されない
ために重合せず硬化しなかった部分のソルダーレジスト
インキを洗い流すようにされている。ソルダーレジスト
用プリント基板自動露光装置は、ソルダーレジストイン
キが全面に塗布されたプリント基板に上にマスクフィル
ムを置いて露光する装置である。
2. Description of the Related Art In a printed circuit board manufacturing process, after a circuit pattern is formed on a printed circuit board by a copper foil,
Solder resist ink is applied on the entire surface, and in order to remove the solder resist layer on the land,
A mask film is placed and exposed to light for development, and the solder resist ink on the portion that has not been polymerized and cured because it is not exposed is washed away. The printed circuit board automatic exposure device for solder resist is a device for exposing by exposing a mask film on a printed circuit board coated with solder resist ink.

【0003】ソルダーレジスト用プリント基板自動露光
装置には、いろいろな構造のものがあるが例えば図4の
ように、露光ステージ21とマスクホルダー22を有
し、露光ステージ21は位置合わせ装置23により平面
上においてX軸,Y軸方向に移動し、角度も変えられる
ようになされている。マスクホルダー22の上方には位
置合わせのためのCCDカメラ24、露光用紫外線ラン
プ25が配置されている。図5のように、マスクフィル
ム26はマスクホルダー22の透光板22cの下面に要
所要所で粘着テープ26aで固定され、さらに孔22a
から真空吸引されている。またマスクホルダー22の下
面の周囲にはゴムパッド22bが設けられている。
There are various types of automatic exposure apparatus for printed circuit boards for solder resist, but as shown in FIG. 4, for example, an exposure stage 21 and a mask holder 22 are provided, and the exposure stage 21 is planarized by a positioning device 23. The angle is changed by moving in the X-axis and Y-axis directions at the top. A CCD camera 24 for alignment and an exposure ultraviolet lamp 25 are arranged above the mask holder 22. As shown in FIG. 5, the mask film 26 is fixed to the lower surface of the translucent plate 22c of the mask holder 22 with an adhesive tape 26a at required points, and the hole 22a is further formed.
Vacuumed from. A rubber pad 22b is provided around the lower surface of the mask holder 22.

【0004】銅箔により回路パターンが形成され、その
上にソルダーレジストインキが全面に塗布されてソルダ
ーレジスト層27aが形成されているプリント基板27
は、搬入コンベヤー28によりソルダーレジスト用プリ
ント基板自動露光装置に送られてきて、搬入ハンドラー
29に吸着されて露光ステージ21上に載置される。マ
スクフィルム26が密着されたマスクホルダー22が途
中まで下降し、CCDカメラ24で位置決めマークを検
知しながら、位置決め装置23が移動してマスクフィル
ム26に対してプリント基板27を位置決めする。
A printed circuit board 27 on which a circuit pattern is formed of copper foil and a solder resist ink is applied on the entire surface to form a solder resist layer 27a.
Is sent to the solder resist printed circuit board automatic exposure device by the carry-in conveyor 28, adsorbed by the carry-in handler 29, and placed on the exposure stage 21. The mask holder 22 to which the mask film 26 is closely attached descends halfway, and while the CCD camera 24 detects the positioning mark, the positioning device 23 moves to position the printed board 27 with respect to the mask film 26.

【0005】次に図6のようにマスクホルダー22がさ
らに下降して、マスクフィルム26がプリント基板27
に接し、ゴムパッド22bが露光ステージ21に密着
し、露光ステージ21の穴21aから真空吸引がおこな
われてマスクフィルム26と露光ステージ21との間が
真空になされ、マスクフィルム26がプリント基板27
に密着せしめられ、この状態で露光用紫外線ランプ25
による露光が行われる。露光が終わったプリント基板2
7は、搬出ハンドラー30により吸着されて搬出コンベ
ヤー31に乗せられ次の現像工程に送られる。
Next, as shown in FIG. 6, the mask holder 22 is further lowered, and the mask film 26 is placed on the printed circuit board 27.
, The rubber pad 22b is brought into close contact with the exposure stage 21, vacuum suction is performed from the hole 21a of the exposure stage 21 to create a vacuum between the mask film 26 and the exposure stage 21, and the mask film 26 is placed on the printed circuit board 27.
UV lamp 25 for exposure in this state.
Exposure is performed. Printed circuit board 2 after exposure
7 is adsorbed by the carry-out handler 30, placed on the carry-out conveyor 31, and sent to the next developing step.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、プリン
ト基板27の面上は回路パターンの銅箔が形成された部
分とそうでない部分とで凹凸ができているので、その上
に塗布されたソルダーレジスト層27aの面も凹凸にな
っている。従って、マスクホルダー22が下降して、マ
スクフィルム26がソルダーレジスト層27aの面に接
し、露光ステージ21側から真空吸引がおこなわれてマ
スクフィルム26と露光ステージ21との間が真空にな
されても、プリント基板の面上の凹凸のためにマスクフ
ィルム26が完全にプリント基板に密着しない。
However, since the surface of the printed board 27 has irregularities in the portion where the copper foil of the circuit pattern is formed and the portion where the copper foil is not formed, the solder resist layer applied thereon is formed. The surface of 27a is also uneven. Therefore, even if the mask holder 22 descends, the mask film 26 comes into contact with the surface of the solder resist layer 27a, and vacuum suction is performed from the exposure stage 21 side to create a vacuum between the mask film 26 and the exposure stage 21. The mask film 26 does not completely adhere to the printed circuit board due to the unevenness on the surface of the printed circuit board.

【0007】よって、露光した時にソルダーレジスト層
が除去されるべきランド部分27bを取り囲む、ソルダ
ーレジスト層が除去されるべき部分の周縁(エッジ)2
7cがボケ、現像した時に周縁27cのソルダーレジス
ト層が垂直に区劃されて除去されずに、図7のようにソ
ルダーレジスト層の厚さ方向において、プリント基板面
27に近づくに従い広がり斜めに除去される、いわゆる
アンダーカットが起こる。
Therefore, the peripheral edge (edge) 2 of the portion where the solder resist layer is to be removed, which surrounds the land portion 27b where the solder resist layer is to be removed when exposed to light.
7c is defocused, the solder resist layer on the peripheral edge 27c is not vertically divided and is not removed when developed, and is removed obliquely as it approaches the printed circuit board surface 27 in the thickness direction of the solder resist layer as shown in FIG. The so-called undercut occurs.

【0008】そのため、隣のランド部分との間隔を広く
とらなければならなくなる。しかしプリント基板の回路
パターンはますます微細化し、ランド部分同士の間隔を
より狭くするという要求が強くなってきている。
Therefore, it is necessary to widen the space between the adjacent land portions. However, circuit patterns on printed circuit boards are becoming finer, and there is an increasing demand for narrower intervals between lands.

【0009】また、マスクフィルムとプリント基板との
密着を良くするために、透光板を柔らかい材質のものに
すると、プリント基板に密着する際に位置ずれが生ず
る。
If the light transmitting plate is made of a soft material in order to improve the close contact between the mask film and the printed circuit board, a displacement occurs when the transparent plate is brought into close contact with the printed circuit board.

【0010】本発明は、位置ずれが生ぜず、また現像し
た時にアンダーカットが起こらないような、プリント基
板の露光方法を提供することを目的としている。
It is an object of the present invention to provide a method of exposing a printed circuit board which does not cause a positional deviation and does not cause an undercut when developed.

【0011】[0011]

【課題を解決するための手段】本発明のプリント基板の
露光方法は、マスクホルダーの剛性の透光板の下面にマ
スクフィルムを粘着テープでその周囲を完全に気密状態
に固定し、マスクホルダー側から真空吸引してマスクフ
ィルムをマスクホルダーの透光板に密着させながら、マ
スクホルダーを露光ステージ上に載置されているプリン
ト基板に接するまで下降させ、マスクホルダーと露光ス
テージの間の空間を真空吸引すると共に、マスクホルダ
ー側の真空吸引を止め、マスクフィルムとマスクホルダ
ーの透光板との間の空間を大気に開放した後、露光する
ように構成した。
According to the method of exposing a printed circuit board of the present invention, a mask film is fixed to the lower surface of a rigid light-transmitting plate of a mask holder with an adhesive tape so that the periphery thereof is completely airtight. While vacuum suctioning the mask film to the transparent plate of the mask holder, lower the mask holder until it touches the printed circuit board placed on the exposure stage, and vacuum the space between the mask holder and the exposure stage. While sucking, the vacuum suction on the mask holder side was stopped, the space between the mask film and the light-transmitting plate of the mask holder was opened to the atmosphere, and then exposure was performed.

【0012】[0012]

【作用】マスクフィルムとマスクホルダーの透光板との
間の空間を大気に開放することにより、マスクフィルム
がプリント基板の面の凹凸に沿って完全に密着し、ソル
ダーレジスト層が除去されるべき部分の周縁(エッジ)
がボケず、現像した時にアンダーカットが起こらない。
By opening the space between the mask film and the light-transmitting plate of the mask holder to the atmosphere, the mask film completely adheres along the irregularities on the surface of the printed circuit board, and the solder resist layer should be removed. Edge of part
Is not blurred, and undercut does not occur when developed.

【0013】[0013]

【実施例】図1〜図3は、本発明方法を説明する図であ
って、マスクフィルム1は、マスクホルダー2の剛性の
透光板3の下面に粘着テープ4で、その全周を完全に気
密状態に固定する。その後、マスクホルダー側の吸引孔
5から真空吸引してマスクフィルム1をマスクホルダー
の透光板3の下面に密着させる。一方、露出ステージ6
上に載置されているプリント基板7には銅箔により回路
パターン8が形成され、その上にはソルダーレジスト層
9が形成されている。
1 to 3 are views for explaining the method of the present invention, in which a mask film 1 is covered with an adhesive tape 4 on the lower surface of a rigid transparent plate 3 of a mask holder 2, and the entire circumference thereof is completely covered. Secure to airtight. Then, vacuum suction is performed from the suction hole 5 on the mask holder side to bring the mask film 1 into close contact with the lower surface of the transparent plate 3 of the mask holder. On the other hand, the exposure stage 6
A circuit pattern 8 is formed of copper foil on the printed circuit board 7 placed thereon, and a solder resist layer 9 is formed thereon.

【0014】その状態でマスクホルダー2を、位置合わ
せ後、露出ステージ6上に載置されているプリント基板
7に接するまで下降させる。マスクホルダー2に設けら
れたゴムパッド10が露光ステージ6の上面に当接し、
マスクホルダー2と露光ステージ6の間に閉鎖された空
間11が形成される。この空間11を露光ステージ6側
の吸引孔12から真空吸引する。次に、マスクホルダー
2側の真空吸引を止め、吸引孔5を大気に開放する。
In this state, after the mask holder 2 is aligned, it is lowered until it comes into contact with the printed circuit board 7 mounted on the exposure stage 6. The rubber pad 10 provided on the mask holder 2 contacts the upper surface of the exposure stage 6,
A closed space 11 is formed between the mask holder 2 and the exposure stage 6. The space 11 is vacuum-sucked from the suction hole 12 on the exposure stage 6 side. Next, the vacuum suction on the mask holder 2 side is stopped, and the suction hole 5 is opened to the atmosphere.

【0015】すると、マスクフィルム1は、ソルダーレ
ジスト層9の面の凹凸に沿って密着する。その後、露光
し露光ステージ6側の吸引孔12から真空吸引を解除
し、マスクホルダー2を上昇させる。
Then, the mask film 1 adheres to the surface of the solder resist layer 9 along the irregularities. After that, exposure is performed and vacuum suction is released from the suction hole 12 on the exposure stage 6 side, and the mask holder 2 is raised.

【0016】[0016]

【発明の効果】本発明方法では、露光に先立ってマスク
フィルムとマスクホルダーの透光板との間の空間を大気
に開放するようにしたので、マスクフィルムがプリント
基板の面の凹凸に沿って完全に密着し、ソルダーレジス
ト層が除去されるべき部分の周縁(エッジ)がボケず、
現像した時にアンダーカットが起こらない。
In the method of the present invention, the space between the mask film and the light-transmitting plate of the mask holder is opened to the atmosphere prior to the exposure, so that the mask film follows the unevenness of the surface of the printed circuit board. Fully adhered, the edge of the part where the solder resist layer should be removed is not blurred,
Undercut does not occur when developed.

【0017】また、マスクホルダーの剛性の透光板にマ
スクフィルムを保持させ、粘着テープでその周囲を完全
に固定したので、プリント基板に密着させる際でもマス
クフィルムの位置ずれが起こらない。
Further, since the mask film is held by the rigid light-transmitting plate of the mask holder and the periphery thereof is completely fixed by the adhesive tape, the mask film is not displaced even when it is brought into close contact with the printed circuit board.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のプリント基板の露光方法を説明する
図。
FIG. 1 is a diagram illustrating a method of exposing a printed circuit board according to the present invention.

【図2】マスクホルダーが下降した状態を示す図。FIG. 2 is a view showing a state where a mask holder is lowered.

【図3】マスクフィルムとマスクホルダーの透光板との
間の空間が大気に開放された状態を示す図。
FIG. 3 is a diagram showing a state in which a space between a mask film and a transparent plate of a mask holder is open to the atmosphere.

【図4】ソルダーレジスト用プリント基板自動露光装置
の全体を示す図。
FIG. 4 is a diagram showing the entire solder resist printed circuit board automatic exposure apparatus.

【図5】従来方法でのマスクフィルムとマスクホルダー
部分を拡大した図。
FIG. 5 is an enlarged view of a mask film and a mask holder portion in a conventional method.

【図6】従来方法でマスクホルダーが下降した状態を示
す図。
FIG. 6 is a view showing a state where a mask holder is lowered by a conventional method.

【図7】アンダーカットされた状態を示す図。FIG. 7 is a view showing a state in which an undercut is made.

【符号の説明】[Explanation of symbols]

1 マスクフィルム 2 マスクホルダー 3 透光板 4 粘着テープ 5 吸引孔 6 露光ステージ 7 プリント基板 8 回路パターン 9 ソルダーレジスト層 10 ゴムパッド 11 空間 12 吸引孔 1 Mask Film 2 Mask Holder 3 Light-transmitting Plate 4 Adhesive Tape 5 Suction Hole 6 Exposure Stage 7 Printed Circuit Board 8 Circuit Pattern 9 Solder Resist Layer 10 Rubber Pad 11 Space 12 Suction Hole

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】マスクホルダーの剛性の透光板の下面にマ
スクフィルムを粘着テープでその周囲を完全に気密状態
に固定し、マスクホルダー側から真空吸引してマスクフ
ィルムをマスクホルダーの透光板に密着させながら、マ
スクホルダーを露光ステージ上に載置されているプリン
ト基板に接するまで下降させ、マスクホルダーと露光ス
テージの間の空間を真空吸引すると共に、マスクホルダ
ー側の真空吸引を止め、マスクフィルムとマスクホルダ
ーの透光板との間の空間を大気に開放した後、露光する
ことを特徴とするプリント基板の露光方法。
1. A mask film is fixed on a lower surface of a rigid light-transmitting plate of a mask holder with an adhesive tape so that the periphery thereof is completely airtight, and vacuum suction is applied from the mask holder side to remove the mask film from the light-transmitting plate of the mask holder. While adhering to the mask holder, lower the mask holder until it touches the printed circuit board placed on the exposure stage, vacuum suction the space between the mask holder and the exposure stage, and stop the vacuum suction on the mask holder side. A method for exposing a printed circuit board, which comprises exposing a space between a film and a light-transmitting plate of a mask holder to the atmosphere and then exposing.
JP4161895A 1992-05-29 1992-05-29 Exposure method for printed circuit board Pending JPH05333555A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4161895A JPH05333555A (en) 1992-05-29 1992-05-29 Exposure method for printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4161895A JPH05333555A (en) 1992-05-29 1992-05-29 Exposure method for printed circuit board

Publications (1)

Publication Number Publication Date
JPH05333555A true JPH05333555A (en) 1993-12-17

Family

ID=15744052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4161895A Pending JPH05333555A (en) 1992-05-29 1992-05-29 Exposure method for printed circuit board

Country Status (1)

Country Link
JP (1) JPH05333555A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030054444A (en) * 2001-12-26 2003-07-02 한맥전자 (주) Vacuum Chuck and Mask Carrier of Exposure System for Printed Circuit Boards Coated by Photosensitive Resist
JP2008111969A (en) * 2006-10-30 2008-05-15 Adtec Engineeng Co Ltd Exposure apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030054444A (en) * 2001-12-26 2003-07-02 한맥전자 (주) Vacuum Chuck and Mask Carrier of Exposure System for Printed Circuit Boards Coated by Photosensitive Resist
JP2008111969A (en) * 2006-10-30 2008-05-15 Adtec Engineeng Co Ltd Exposure apparatus

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