JPH0533018Y2 - - Google Patents
Info
- Publication number
- JPH0533018Y2 JPH0533018Y2 JP7081587U JP7081587U JPH0533018Y2 JP H0533018 Y2 JPH0533018 Y2 JP H0533018Y2 JP 7081587 U JP7081587 U JP 7081587U JP 7081587 U JP7081587 U JP 7081587U JP H0533018 Y2 JPH0533018 Y2 JP H0533018Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- silicon substrate
- oxide film
- gauge
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 37
- 229910052710 silicon Inorganic materials 0.000 claims description 23
- 239000010703 silicon Substances 0.000 claims description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 14
- 238000005259 measurement Methods 0.000 claims description 10
- 239000010408 film Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 10
- 238000005530 etching Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7081587U JPH0533018Y2 (da) | 1987-05-12 | 1987-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7081587U JPH0533018Y2 (da) | 1987-05-12 | 1987-05-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63178353U JPS63178353U (da) | 1988-11-18 |
| JPH0533018Y2 true JPH0533018Y2 (da) | 1993-08-23 |
Family
ID=30912794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7081587U Expired - Lifetime JPH0533018Y2 (da) | 1987-05-12 | 1987-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533018Y2 (da) |
-
1987
- 1987-05-12 JP JP7081587U patent/JPH0533018Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63178353U (da) | 1988-11-18 |
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