JPH0532904B2 - - Google Patents

Info

Publication number
JPH0532904B2
JPH0532904B2 JP57199091A JP19909182A JPH0532904B2 JP H0532904 B2 JPH0532904 B2 JP H0532904B2 JP 57199091 A JP57199091 A JP 57199091A JP 19909182 A JP19909182 A JP 19909182A JP H0532904 B2 JPH0532904 B2 JP H0532904B2
Authority
JP
Japan
Prior art keywords
wafer
groove
rotating shaft
rotation
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57199091A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5989432A (ja
Inventor
Takeshi Yoneyama
Mitsuo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP19909182A priority Critical patent/JPS5989432A/ja
Publication of JPS5989432A publication Critical patent/JPS5989432A/ja
Publication of JPH0532904B2 publication Critical patent/JPH0532904B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP19909182A 1982-11-15 1982-11-15 ウエハ−整列方法及びその整列装置 Granted JPS5989432A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19909182A JPS5989432A (ja) 1982-11-15 1982-11-15 ウエハ−整列方法及びその整列装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19909182A JPS5989432A (ja) 1982-11-15 1982-11-15 ウエハ−整列方法及びその整列装置

Publications (2)

Publication Number Publication Date
JPS5989432A JPS5989432A (ja) 1984-05-23
JPH0532904B2 true JPH0532904B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-18

Family

ID=16401956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19909182A Granted JPS5989432A (ja) 1982-11-15 1982-11-15 ウエハ−整列方法及びその整列装置

Country Status (1)

Country Link
JP (1) JPS5989432A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100226489B1 (ko) * 1996-12-28 1999-10-15 김영환 웨이퍼 지지 및 이송 기구

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5245155Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-08 1977-10-14
JPS53117977A (en) * 1977-03-25 1978-10-14 Hitachi Ltd Datum level direction aligner

Also Published As

Publication number Publication date
JPS5989432A (ja) 1984-05-23

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