JPH0532825Y2 - - Google Patents
Info
- Publication number
- JPH0532825Y2 JPH0532825Y2 JP15542288U JP15542288U JPH0532825Y2 JP H0532825 Y2 JPH0532825 Y2 JP H0532825Y2 JP 15542288 U JP15542288 U JP 15542288U JP 15542288 U JP15542288 U JP 15542288U JP H0532825 Y2 JPH0532825 Y2 JP H0532825Y2
- Authority
- JP
- Japan
- Prior art keywords
- spring
- deflection element
- optical deflection
- spring constant
- wide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15542288U JPH0532825Y2 (en, 2012) | 1988-11-29 | 1988-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15542288U JPH0532825Y2 (en, 2012) | 1988-11-29 | 1988-11-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0275620U JPH0275620U (en, 2012) | 1990-06-11 |
| JPH0532825Y2 true JPH0532825Y2 (en, 2012) | 1993-08-23 |
Family
ID=31433040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15542288U Expired - Lifetime JPH0532825Y2 (en, 2012) | 1988-11-29 | 1988-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0532825Y2 (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4982814B2 (ja) * | 2009-07-01 | 2012-07-25 | 独立行政法人産業技術総合研究所 | 光ビーム走査装置 |
-
1988
- 1988-11-29 JP JP15542288U patent/JPH0532825Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0275620U (en, 2012) | 1990-06-11 |
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