JPH053205Y2 - - Google Patents

Description

[Detailed explanation of the invention] [Industrial application field] This invention exposes test objects, such as electronic equipment parts, which are dust-resistant, to a certain temperature and humidity under a certain air cleanliness, and then examines the Filter installation for gas purification Hepafilters used in environmental test equipment such as clean constant temperature and humidity chambers to check whether they can withstand certain temperature and humidity environments, electronic equipment parts that dislike dust, semiconductor manufacturing facilities, and other operating rooms. Regarding fixation devices in places.

[Prior art and its problems]

For example, in a clean constant temperature and humidity chamber, Hepa (High Efficiency Particulate Air, abbreviated as
A highly dust-collecting gas filter commonly known as a HEPA filter is generally used, and as shown in FIG.
1, and the surrounding frame is sandwiched and supported between a holding frame 72 provided at the top of the constant temperature and humidity chamber and a fixed frame 74 fitted with bolts 73 hanging from the holding frame. A sealing gasket 75 is sandwiched between the upper surface of the surrounding frame 71 and the holding frame 72.

However, according to this filter fixing means, the filter surrounding frame 71 and the sealing gasket 7
5 is placed inside the support bolt 73, so the effective area of the filter is narrowed inward.Because of the space occupied by the support bolt 73 and the fixing frame 74, the so-called dead zone where gas stagnates increases, and the gas that has passed through the filter There is a problem that the flow is disturbed and it is difficult to improve the cleanliness inside the tank.

Further, such problems occur not only when a Hepa filter is fixed in a clean constant temperature and humidity chamber, but also when a Hepa filter for gas purification is fixed in a clean room or the like.

Therefore, compared to such conventional filter fixing means, the present invention can increase the effective area of the filter, reduce the dead zone, make the gas flow uniform after passing through the filter, and fix the filter easily in a predetermined position with less effort. It is an object of the present invention to provide a fixing device for a gas purifying Hepa filter that can be used to clean a gas.

[Means for solving problems]

The gas purification Hepa filter fixing device of the present invention that achieves the above object comprises: a surrounding frame fixed around the gas purifying filter; a filter holding frame fixed to a filter mounting location in correspondence with the surrounding frame; the surrounding frame; It includes a sealing material sandwiched between the holding frames, and a male screw for fixing the surrounding frame to the filter holding frame while sandwiching the sealing material, and the surrounding frame is fixed to the filter holding frame. The frame has a U-shaped cross section and includes a back plate portion fixed to the back plate portion and upper and lower plate portions protruding from the upper and lower ends of the back plate portion to the side opposite to the filter, and the holding frame has a plurality of portions. A female screw portion is provided in the upper plate portion of the surrounding frame, and a male screw through hole corresponding to the female screw portion is provided in the upper plate portion of the surrounding frame and the sealing material, respectively, and a male thread through hole corresponding to the female screw portion is provided in the lower plate portion of the surrounding frame. A loose fitting hole for the screwdriver shaft is provided, and the male screw through hole in the upper plate of the surrounding frame is connected to the male screw head lower part through hole corresponding to the screwdriver shaft loose fitting hole and the male screw connected to the hole. The peripheral frame has a head through hole, and the peripheral frame is screwed into the female screw portion, and the male screw is passed through the male screw neck lower portion through hole of the upper plate portion and the male screw through hole of the sealing material. It is characterized in that it is fixed to the holding frame at.

The filter fixing device of the present invention can be applied not only to clean temperature and humidity chambers, but also to various environmental testing devices that require gas purification, electronic device parts, semiconductor manufacturing plants, and other operating rooms.

〔Example〕

Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

The illustrated filter 1 is a Hepa filter for a clean constant temperature and humidity chamber 10.

The clean constant temperature and humidity chamber 10 is an air conditioner 1 having a cooling device a, a heater b, a fan c, and a humidifier d.
The air from the air conditioner 101 passes through the Hepa filter 1 at the top of the constant temperature and humidity tank 102 and flows into the tank, and the air from the air conditioner 101 flows from the bottom of the tank.
It's starting to go back to.

The filter 1 has a continuous sheet-like filter medium 11 bent in a zigzag pattern, and a corrugated separator 12 (see FIG. 3) inserted between the filter mediums.

The filter 1 is surrounded by a frame 2 and is fixed to the frame. Gas flows down in the direction of arrow A in the figure.

In addition to the surrounding frame 2, the device for fixing this filter 1 to the upper part of the chamber of the clean constant temperature and humidity chamber 10 includes:
A filter holding frame 3 circumferentially fixed to the upper part of the tank so as to correspond to the surrounding frame, and the holding frame 3 and the surrounding frame 2.
It includes a sealing gasket 4 that is sandwiched between.

The peripheral frame 2 is made of a U-shaped cross section, and the filter 1 is fixed to the back plate portion 21 of the peripheral frame 2. The upper plate part 22 is provided with male screw through holes 220 at appropriate intervals along the peripheral frame, and the lower plate part 23 has a hole 231 at a position opposite to the holes 220 into which the screwdriver shaft 6 can be fitted loosely. is provided. The hole 220 is provided with a screw 5 as shown in FIG.
It consists of a male screw head through hole 221 through which the head 51 of the screw 5 can pass, and a hole 222 continuous with the male screw head through hole 221 through which only the lower neck portion 52 of the screw 5 can penetrate.

The sealing gasket 4 is provided with a hole 41 through which the screw 5 passes, and the filter holding frame 3 is provided with a female threaded portion 31 into which the screw 5 is screwed.

Each female threaded portion 31 extends upward from the filter holding frame 3, so that the gasket 4 can be brought into close contact with the flat upper surface of the surrounding frame 2 and the flat lower surface of the holding frame 5.

Attachment of the filter using the fixing device described above is performed as follows.

First, the gasket 4 is placed on the lower surface of the holding frame 3, and the screw 5 is passed through the screw hole 41 of the gasket and loosely screwed into the female threaded portion 31. In this case, Patsukin 4
can be fixed in advance to the lower surface of the holding frame 3 with adhesive or other suitable means.

Next, 22 of the holes 220 in the upper plate part of the surrounding frame 2
The screw head 51 is passed through one part, and then the peripheral frame 2 is slightly shifted and the lower neck part 52 of the screw 5 is fitted into the narrow part 222.

After the surrounding frame 2 is easily suspended from the screw head 51 in this way, the holes 23 of the lower plate part 23 of the surrounding frame 2 are
Insert the screwdriver shaft 6 from 1 and tighten the screw 5. In this way, the filter 1 is fixed at a predetermined position in the upper part of the constant temperature and humidity chamber.

According to this embodiment, the filter 1 can be easily fixed in a predetermined position, and no special space is required outside the surrounding frame 2, so the effective area of the filter 1 is increased accordingly, and the gas is There is less dead space in which to stagnate, and furthermore, the flow of gas that has passed through the filter 1 tends to be uniform.

[Effect of idea]

According to the gas purification Hepa filter fixing device of the present invention, no special space is required outside the filter surrounding frame, so compared to conventional gas purification filter fixing means, the effective area of the filter can be larger.
The dead zone can be reduced, the gas flow after passing through the filter can be made uniform, the degree of gas purification can be improved as a whole, and the Hepa filter can be easily fixed in a predetermined position with less effort.

[Brief explanation of the drawing]

Fig. 1 is a schematic cross-sectional view of a clean constant temperature and humidity chamber to which an embodiment of the present invention is applied, Fig. 2 is a cross-sectional view of a portion of an embodiment of the present invention, and Fig. 3 is a schematic cross-sectional view of a separator in a filter. FIG. 4 is a plan view of the hole in the upper plate of the surrounding frame, and FIG. 5 is an explanatory diagram of a conventional example. 1... Hepa filter, 2... Surrounding frame, 21...
Back plate part, 22... Upper plate part, 23... Lower plate part, 22
0...Male screw through hole, 221...Male screw head through hole, 222...Male screw neck lower part through hole, 231...
...Screwdriver shaft loose fitting hole, 3...Filter holding frame, 31...Female thread part, 4...Sealing gasket, 41...Male thread through hole, 5...Male thread, 6...
...Screwdriver shaft, 10...Clean temperature and humidity chamber.

Claims (1)

[Scope of utility model registration request] a surrounding frame fixed around the gas purifying filter; a filter holding frame fixed to a filter mounting location in correspondence with the surrounding frame; a sealing material sandwiched between the surrounding frame and the holding frame; and a male screw for fixing the peripheral frame to the filter holding frame while sandwiching the sealing material, and the peripheral frame includes a back plate portion fixed to the filter and upper and lower portions of the back plate portion. It is a U-shaped frame in cross section including upper and lower plate parts protruding from each end to the side opposite to the filter, and the holding frame is provided with female threaded parts at a plurality of places, and The upper plate portion and the sealing material are each provided with a male screw through hole corresponding to the female screw portion, and the lower plate portion of the surrounding frame is provided with a loose fitting hole for a screwdriver shaft, and the The male screw through hole in the upper plate part of the surrounding frame consists of a male screw head lower part through hole corresponding to the screwdriver shaft loose fitting hole and a male screw head through hole continuous to the hole, while being fixed to the holding frame by the male screw passing through the male screw neck lower portion through hole of the upper plate portion and the male screw through hole of the sealing material. A gas purifying hepafilter fixing device characterized by: