JP3064127U - Clean room return chamber floor structure - Google Patents

Abstract

(57) [Problem] To provide a clean room return chamber floor with good workability, easy change and expansion, no fear of outgassing, and easy maintenance. SOLUTION: A floor support (13) for a return chamber (4).
Then, a panel support plate (9) is attached. The panel support plate (9) has a laterally extending receiving portion (16). The floor panel (8) has a seat (12) so as to rest on the receiving part (16).
The floor panel (8) and the panel support plate (9) are made of aluminum.
Made of galvanized steel sheet. Receiving part (16) and seat part (1
2) Insert the screw (2) from the back side with the packing material (17)
Fixed at 0).

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a clean room used in a semiconductor manufacturing plant or the like, and more particularly to a structure of a return chamber floor for circulating air flowing down from the clean room through a return chamber. .

[0002]

[Prior art]

 Various configurations are known for the clean room. For example, in the case of a downflow type in which air enters a room from a ceiling and flows out from a floor, the air is formed below a raised floor. It is configured to flow to the side return space through the returned return chamber, and to circulate from the ceiling chamber through the fan filter unit (FFU) and the like into the clean room. Conventionally, as the floor of the return chamber, a slab or a utility floor is used as it is as a return chamber floor, or a dirty underfloor chamber is formed below the return chamber for passing piping, wiring, and the like. The chamber floor is made up of a panel floor.

[0003] A clean room in which the return chamber floor is made of a slab or the like as described above has good workability and can mount a heavy-weight manufacturing apparatus or the like, but the work period is long. It is difficult to change easily when extending the clean room. In the case of using a panel floor, a sandwich panel is generally used. Around the panel is filled with a sealant and arranged on a floor receiving material of a return chamber, and a screw is provided from the return chamber side. Since it is fixed to the floor support, etc., the chamber space can be changed and expanded easily, but the use of sealant causes outgassing problems, making maintenance from the side of the underfloor chamber difficult. there were.

[0004]

[Problems to be solved by the invention]

 The problem to be solved by the present invention is that the cleanability is improved so that the above-mentioned problems do not occur, the workability is good, the modification and expansion are easy, there is no fear of outgassing, and the maintenance from the back side is also easy. The provision of a return chamber floor structure.

[0005]

[Means for Solving the Problems]

 According to the present invention, the floor panel in which the periphery of the rectangular substrate portion is bent downward to provide an upright portion, the tip of the upright portion is bent laterally to provide a seat portion, and the side edge of the mounting portion is directed downward. The panel has a panel support plate having a receiving portion provided by bending the end thereof in a lateral direction, and the floor panel and the panel support plate are formed of an aluminum-zinc alloy-plated steel plate, and the panel support plate is provided. Attach it to the floor support of the return chamber, place the seat of the floor panel on the support of the panel support plate with the packing material interposed, and place the seat and the seat from the back side of the return chamber floor. The above-mentioned object is achieved by providing a clean room return chamber floor structure having a screwed portion.

[0006]

[Embodiment of the invention]

 FIG. 1 is a schematic diagram showing one embodiment of a clean room to which a return chamber floor of the present invention is applied. In the figure, the ceiling chamber (2) of the clean room (1) has an appropriate blower, filter, and FFU (3) in the figure, and the clean room (1) passes through the FFU (3). A raised floor (5) having a free access floor such as a grating is formed so that the air flowing into the inside flows out to the return chamber (4). On the side of the return chamber (4), return spaces (6) and (6) are provided so as to circulate the air passing through the return chamber to the ceiling chamber (2).

The return chamber floor (7) serving as the floor surface of the return chamber is composed of a floor panel (8) and a panel support plate (9). The floor panel (8) and the panel support plate (9) are formed of an aluminum-zinc alloy-plated steel plate, and have excellent chemical (acid) resistance, corrosion resistance, etc., can be used safely over a long period of time, and outgas. There is no problem of the occurrence.

The floor panel (8) has an upright portion (11) formed by bending the periphery of a rectangular substrate portion (10) downward, and a tip of the upright portion (11) bent laterally. It has a seat (12). In the figure, the bending direction of the seat (12) is bent inward on three sides of the seats (12a) and (12a) on the end face side of the substrate and the one seat (12b) on the side face. However, the other seat on the side surface is a receiving portion (12c) that is bent outward and extends outward, and as shown in FIG. 4, floor panels (8), (8),. When adjacent to each other, the seat (12b) of the other floor panel (8) is placed on the seat (12c) of the other floor panel (8).

The panel support plate (9) has a mounting portion (14) to be mounted on the floor support (13) of the return chamber, and both side edges of the mounting portion (14) are bent downward to form the bent portion ( It has a receiving portion (16) formed by bending the tip of 15) in the lateral direction.

A packing material (17) is provided so as to be sandwiched between joints of the floor panel (8) and the panel support plate (9). The packing material (17) is made of a synthetic resin foam or the like containing no harmful siloxane or DOP, and is attached to the back of the seat as shown in FIG. Or when inserting it.

As shown in FIG. 6, in the panel support plate (9), the mounting portion (14) is placed on the upper surface of the floor support (13) of the return chamber, and the screw (18) Then, it is fixed to the floor support (13). Since the floor receiving members (13) are provided in parallel at a predetermined interval, the seats (12a) and (12a) on the end face side of the floor panel (8) are respectively provided with panel support plates (9). ), And is fastened by screws (20) from the underfloor chamber (19) below the return chamber, that is, from the back side of the return chamber floor (FIG. 7). At this time, the packing material (17) is sandwiched between the seat portion (12) and the receiving portion (16), and the floor panel (8) and the panel support plate (9) are connected in an airtight state. The seat (12b) on the side of the floor panel (8) is placed on the seat (12c) of the other floor panel (8) with the packing material (17) sandwiched therebetween (see FIG. 8) If necessary, screws are screwed from the back side (not shown). In order to insert a pipe (21) or the like from the underfloor chamber (19) to the return chamber (4) side, a cutout hole (not shown) is formed in the substrate portion (10) of the floor panel (8). A packing material (17) or a low siloxane seal may be provided and supported around the piping (21).

[0012]

[Effect of the invention]

 The present invention is configured as described above, and the edge of the substrate portion is bent downward to provide an upright portion. The floor panel in which the tip of the upright portion is bent laterally to provide a seat portion, and the side edge of the mounting portion is lowered. A panel support plate having a receiving portion with its tip bent laterally, and the floor panel and the panel support plate are formed of an aluminum-zinc alloy-plated steel plate, and the panel support plate is Attached to the floor receiving material of the return chamber, the seat of the floor panel is placed on the receiving portion of the panel support plate with the packing material interposed, and the receiving portion and the seating portion are viewed from the back side of the return chamber. Can be easily installed, the return space can be easily changed and the design of the chamber space is easy, the processing is easy, the expandability is high, and the sealant is Because it is made of aluminum-zinc alloy plated steel sheet Outgassing is extremely low, chemical resistance, corrosion resistance, etc. are excellent, and maintenance can be performed from the underfloor chamber side below the return chamber, so workability is good, and when the floor panel is fixed with screws, Since the dust falls to the dirty underfloor chamber side, it does not contaminate the clean room, the construction period can be shortened, and it can be obtained economically.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a clean room.

FIG. 2 is a perspective view of a floor panel.

FIG. 3 shows a sectional view of a floor panel, (A) is a longitudinal sectional view,
(B) is a transverse sectional view.

FIG. 4 is an explanatory view when connecting floor panels.

FIG. 5 is an enlarged sectional view of a part of the floor panel.

FIG. 6 is a perspective view of a return chamber floor.

FIG. 7 is a sectional view taken along line AA of FIG. 6;

FIG. 8 is a sectional view taken along line BB of FIG. 6;

[Explanation of symbols]

4 Return chamber 7 Return chamber floor
8 Floor panel 9 Panel support plate 10 Substrate
12 Seat 13 Floor support 14 Mounting part 16
Receiving part 17 Packing material 18, 20 Screw
19 Underfloor chamber

Claims (2)

[Utility model registration claims] 1. A floor panel in which a peripheral portion of a rectangular substrate portion is bent downward to form an upright portion, a tip of the upright portion is bent laterally to provide a seat portion, and a side edge of a mounting portion is bent downward. A panel support plate having a receiving portion provided with its tip bent laterally; the floor panel and the panel support plate are formed of an aluminum-zinc alloy-plated steel plate; and the panel support plate is a floor of a return chamber. Mounting on the receiving member, placing the seat of the floor panel on the receiving portion of the panel support plate with the packing material interposed therebetween, and screwing the receiving portion and the seat from the back side of the return chamber floor. Characterized clean room return chamber floor structure. 2. A seat portion on one side of the floor panel is a seat portion extending outward, and a seat portion of another adjacent floor panel is placed on the seat portion with a packing material interposed therebetween. The structure of the clean room return chamber floor according to claim 1.