JPH05319538A - Transfer device using vibration element and manufacture thereof - Google Patents

Abstract

PURPOSE:To provide a method for manufacturing a transfer device capable of transferring a tube interior inspection device into a fine tube, and a method for manufacturing a transfer means used therefor. CONSTITUTION:A transfer device causes a pair of opposite plate springs 13 to resonate with each other at a reverse phase on the operation of a pair of rotating vibration elements 12. In this state, an expansion drive and vibration element 17 mounted on a transfer power transmission beam 15 connected to the end of the plate springs 13 is caused to expand and contract, thereby causing the jogging motion of the beam 15 for the transfer of a material M. A method for manufacturing the device is such that a transfer means is integrated therewith via the application of a film formation technology.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a transfer device and a method for manufacturing the same. More specifically, the present invention relates to a transfer device using a vibrating element and a manufacturing method thereof.

[0002]

2. Description of the Related Art Conventionally, as a transfer device, a transfer device which is a combination of a rack and a pinion, a transfer device which is a combination of a ball screw and an internal thread body screwed onto the ball screw, and the like have been used.

Although such a transfer device is driven by an electromagnetic motor, there is a limit to miniaturization of the electromagnetic motor. Therefore, there is a limit to downsizing of the transfer device using the same.

However, as has been seen in recent nuclear power plants, it is not uncommon for damage to the thin tube section to cause a major accident that leads to the shutdown of the power plant.
Therefore, it has become necessary to transfer the in-pipe inspection device to the inside of the thin tube in order to inspect the inside of the thin tube.

However, since the conventional transfer device has a limit in its downsizing, it cannot meet such a demand.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems of the prior art, and provides a transfer device capable of transferring an in-pipe inspection device into a thin tube and a method of manufacturing a transfer means used therein. It is an object.

[0007]

A transfer device of the present invention is a transfer device comprising a transfer means and a control means, wherein the transfer means includes (1) a base having a recess and (2) the base. A predetermined number of vibrating elements having a vibration transmitting portion, which are arranged in a predetermined array on the bottom surface of the recess, and (3) a plate-like elastic member having the same number as the vibrating elements extended from the predetermined position above the base into the recess. A member, (4) a connecting member formed on a surface of the plate-like elastic member facing the recess, and connected to the vibration transmitting portion, and (5) arranged at a predetermined position of the plate-like elastic member. A strain detecting element, and (6) an abutting protrusion that is disposed above the plate-like elastic member and has a central portion connected to the tip end of the plate-like elastic member and abutting the transferred member at the tip end. A transfer force transmitting member having a portion, and (7) disposed at a predetermined position of the transfer force transmitting member. Consists of a vibrating element constant, based on an input from said control means (1) the strain detection element,
It is characterized by at least including a vibrating element control circuit capable of outputting a control signal for matching the frequency of the vibrating element disposed on the bottom surface of the recess with the resonance frequency of the plate-like elastic member.

In the transfer device of the present invention, the number of vibrating elements disposed on the bottom surface of the recess of the base is two,
Further, the two vibrating elements may be arranged at a predetermined interval in the longitudinal direction of the concave portion, and the number of vibrating elements arranged on the bottom surface of the concave portion of the base body is four. Two of the vibration elements may be arranged at a predetermined interval in the longitudinal direction of the recess, and the remaining two may be arranged at a predetermined interval in the direction perpendicular to the longitudinal direction of the recess.

Further, in the transfer device of the present invention, the number of vibrating elements arranged in the transfer force transmitting member is two, and the two vibrating elements are the same as the longitudinal direction of the concave portion of the base. The number of vibrating elements arranged in the transfer force transmitting member may be four, and two of the four vibrating elements may be recessed longitudinally. It may be arranged at a predetermined interval in the same direction as the direction, and the other two may be arranged at a predetermined interval in the direction perpendicular to the longitudinal direction of the recess.

On the other hand, the manufacturing method of the transfer means of the present invention is as follows.
(1) A step of forming a recess in the base body, (2) a step of disposing a vibrating element in the recess, and (3) a transmission of vibration of the vibrating element with a filler in the recess in which the vibrating element is arranged. Filling a space in which a portion is formed, and (4) forming a plate-like elastic member in the space portion over the vibration transmitting portion of the vibrating element and a predetermined range of the filler from the upper surface of the base body. (5) a step of removing the filler, and (6)
A step of forming a strain detecting element on the plate-like elastic member,
(7) A step of applying a spacer agent on the plate-like elastic member and filling a filler between the plate-like elastic members, (8)
A step of disposing a vibrating element at a predetermined position of the spacer agent, and (9) a step of forming a protrusion at the tip of the vibrating element and a connecting member between the vibrating elements,
0) The step of removing the spacer agent and the filler is included.

[0011]

In the transfer device of the present invention, the driving force is obtained by the resonance of the vibrating element and the plate-like elastic member without using the electromagnetic motor, so that a large transfer force can be obtained in spite of being downsized. be able to. Further, according to the manufacturing method of the transfer means of the present invention, the transfer means can be integrally manufactured.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on embodiments with reference to the accompanying drawings, but the present invention is not limited to such embodiments.

FIG. 1 is a schematic view of a transfer device of the present invention, FIG. 2 is a perspective view of a transfer means, FIG. 3 is a block diagram of a control system of a vibration element, and FIG. 4 is an explanatory view of member transfer by the transfer device of the present invention. ,
5 is an explanatory view of a first mode of operation of the transfer means, FIG. 6 is an explanatory view of a second mode of operation of the transfer means, and FIGS. 7 to 11 are a combination of the first and second modes of operation of the transfer means. 12 to 25 are explanatory views of the manufacturing process of the transfer means, FIG. 26 is a schematic view of the laminated vibration element used for the transfer means, and FIGS. 27 to 37 are the strain detection elements used for the transfer means. It is explanatory drawing of a manufacturing process.

In the figure, 1 is a transfer means and 2 is a control means.

The transfer device of the present invention, as shown in FIG.
It comprises a transfer means 1 and a control means 2 for controlling the transfer means 1.

As shown in FIGS. 1 and 2, the transfer means 1 includes a base (substrate) 11 having a recess, and a predetermined number of vibrating elements (rotation-driving vibrating elements) arranged at predetermined positions on the bottom surface of the recess of the base 11. ) 12, a predetermined number of plate-like elastic members 13 extending horizontally from the upper predetermined position of the base 11 to the bottom surface of the concave portion in the inward direction of the base 11, and arranged at predetermined positions of the plate-like elastic member 13. Strain detecting element (strain sensor) 14
And a transfer force transmission member 15 connected to the tip of the plate-like elastic member 13.

The material of the base 11 is, for example, ceramics. The size of the substrate 11 is appropriately determined according to the size of the applied piping system and the required transfer force. As a specific example thereof, when transferring an object such as an inspection device in a piping system having a diameter of about 1 inch (25.4 mm), the size of the base 11 is 20 m in length.
m and the thickness is about 5 mm. The recess 11a provided in the base body 11 is formed in the center of the plate-like elastic member 13 in a range of about 15 mm in length so as to secure the length of the plate-like elastic member 13 described later. The depth of the recess 11a is set to about 5 mm in order to secure a space in which the vibrating element 12 described later is incorporated.

The number of vibrating elements 12 arranged on the bottom surface of the recess 11a, the position of the vibrating elements 12 and the frequency of the vibrating elements 12 are appropriately determined according to the moving direction of the member to be transferred and the required transfer force. As a specific example thereof, when the transferred member is transferred only in the longitudinal direction of the base 11, the vibrating element 1 is used.
The number of 2 is 2, and the vibrating elements 12 are arranged one at each end of the bottom surface of the recess 11a. Also, the base 1
When the transferred member is transferred in the direction perpendicular to the longitudinal direction of 1, the number of the vibrating elements 12 is still two, but the vibrating element 12 is provided on the side wall surface ( (See FIG. 1). The vibrating element 12 vibrates in the direction of the arrow in the figure. The frequency of the vibrating element 12 is the spring constant of the plate-like elastic member 13 and the transfer force transmitting member 15 including the intermediate portion 16, the vibrating element 17, and the protruding portion 18. In order to effectively transmit the driving force, it is preferable to set the resonance frequency to a resonance frequency determined by the moment of inertia and the contact state with the transferred member, and the resonance frequency is determined from the transfer speed and the driving force transmission efficiency. As the vibrating element 12, for example, an element in which piezoelectric ceramics are multiply stacked in terms of generated force and displacement amount is used. A vibration transmission portion 12a is formed in the center of the upper surface of the vibration element 12. This vibration transmission unit 12
a is required to transmit the expansion and contraction of the vibrating element 12 to the plate-like elastic body 13 and not restrain the relative rotation of the vibrating element 12 and the plate-like elastic body 13. It is made of ceramics and has a cross-sectional area that can withstand the transmission force, and has a length sufficient to ensure the required flexibility.

The material of the plate-like elastic member 13 that extends from the upper part of the base 11 to above the vibrating element 12 and extends toward the center of the recess 11a is ceramics.

The number of plate-like elastic members 13 is the same as that of the vibrating element 12, and the size thereof is such that the elastic coefficient of the material used, the required frequency, and the intermediate portion 16 are used to obtain a suitable resonance state with the vibrating element 12. And the moment of inertia of the transfer force transmission member including the vibrating element 17 and the protruding portion 18. With this configuration, the vibration of the vibrating element 12 is transmitted to the plate-shaped elastic member 13. In addition, the plate-like elastic member 13
A projecting portion 13b is formed at the tip end portion of the device for connection with the transfer force transmitting member 15 disposed above.

The transfer force transmitting member 15 connected to the tip end of the plate-like elastic member 13 has an intermediate portion 16 bridged between the tip ends of the plate-like elastic member 12 and one end thereof as described above. The vibrating element (stretching drive vibrating element) 17 connected to the intermediate portion 16 and the projecting portion 18 connected to the other end of the vibrating element 17 are included.

The intermediate portion 16 and the tip portion of the plate-like elastic member 13 are connected by appropriate means, and the material of the intermediate portion 16 may be ceramics, for example. The intermediate portion 16 may have a length capable of bridging the distal end portions of the plate-like elastic member 13, and the thickness of the intermediate portion 16 is set to a thickness required to have rigidity such that bending does not occur during rotational vibration. ing.

The number of vibrating elements 17 connected to the intermediate portion 16, the position of the vibrating elements 17 and the frequency of the vibrating elements 17 are appropriately determined according to the moving direction of the member to be transferred and the required transfer force. To give a specific example, the number of vibrating elements 17 is two and they are arranged so as to expand and contract in the longitudinal direction. The vibrating element 17 vibrates in the direction of the arrow in the figure, and its frequency is the same as that of the vibrating element 12. As the vibrating element 17, for example, one in which piezoelectric ceramics are laminated in the same manner as 12 is used.

The material of the protruding portion 18 connected to the vibrating element 17 is as follows:
For example, the base material is ceramics, and the contact portion with the transferred member is coated with metal. The top of the protrusion 18 is preferably arcuate for smooth transmission of the transfer force to the transferred member.

The strain detecting element 14 provided on the upper surface of the plate-like elastic member 13 includes a strain resistance element and a SAN element (surface elasticity). Further, since the purpose of installing the sensor is to measure the bending of the plate-shaped elastic member 13, the arrangement position thereof is preferably set to a portion (near the root) where the bending curvature of the plate-shaped elastic member 13 is the largest. ..

The control means 2 includes a vibrating element control circuit 21 as its constituent element. A block diagram of the control system of this vibrating element is shown in FIG. Here, the operation of this control system will be described with reference to FIG. The vibration state of the vibration system dynamics including the plate-shaped elastic member 13 and the transfer force transmission member 15 is detected by the strain detection element (strain sensor) 14 and input to the vibration state detection processing unit. Information relating to the resonance state with the vibration element (rotational driving vibration element) 12 is also input from the resonance control processing section to the vibration state detection processing section. The vibration state detection processing unit grasps the vibration state of the vibration system dynamics based on these inputs, and outputs an operation signal to each of the resonance control processing unit and the expansion / contraction processing unit. Each of the resonance control processing unit and the expansion / contraction processing unit outputs a drive signal to each of the rotation driving vibration element 12 and the expansion driving vibration element 17 based on the input operation signal. Thereby, a desired transfer force can be obtained in the transfer force transmission member 15. It is obvious that the function of the vibration element control circuit 21 can be easily realized by an existing electronic device such as a microcomputer or a voltage amplifier circuit.

The rest of the structure of the control means 2 is the same as that used in the conventional transfer device, so a detailed description of the structure will be omitted.

FIGS. 5 to 11 show the operation of the transfer device constructed as described above.

FIG. 5 is an explanatory view of the seesaw movement (partial rotation movement) of the transfer force transmitting member 15. In FIG. 5, when the vibrating elements 12A and 12B are expanded and contracted in opposite phases, the transfer force transmission member 15 causes a seesaw motion, that is, a partial rotational reciprocating motion. That is, when the vibrating element 12A is extended and the vibrating element 12B is contracted, the tip of the plate-shaped elastic member 13A descends,
The tip of the plate-like elastic member 13B moves up. Thereby,
The protrusion 18A of the transfer force transmitting member 15 descends, and the protrusion 18B rises. Here, when the vibration elements 12A and 12B are expanded and contracted at the resonance frequency determined by the moment of inertia of the transfer force transmission member 15 and the spring constant of the plate-like elastic member 13,
The transfer force transmission member 15 causes a seesaw movement at a magnification larger than a mere geometrical lever ratio.

FIG. 6 is an explanatory view of the expansion / contraction motion of the transfer force transmission member 15. In FIG. 6, when the vibrating elements 17A and 17B are expanded / contracted in the same phase, the transfer force transmission member 15 causes an expansion / contraction motion.

7 to 11 are explanatory views of the operation when the transfer force transmitting member 15 is expanded and contracted in synchronization with the seesaw movement of the transfer force transmitting member 15.

FIG. 7 shows that the vibrating elements 17A and 17B are raised while the protrusion 18A is raised and the protrusion 18B is lowered.
It is explanatory drawing of the operation | movement in the state which contracted. In this case, the tip of the protruding portion 18A is 1/4 in the direction of the arrow in the figure.
Move while drawing an arc of, the tip of the protrusion 18B
Move while drawing a quarter arc in the direction of the arrow in the figure.

In FIG. 8, the protrusion 18A is further raised from the horizontal state by the operation of FIG.
8B is an explanatory diagram of an operation in a state where the vibrating elements 17A and 17B are extended while lowering 8B. FIG. In this case, the tip of the protrusion 18A moves while drawing a 1/4 arc in the direction of the arrow in the figure, and the tip of the protrusion 18B moves while drawing a 1/4 arc in the direction of the arrow in the figure. Moving.

In the state shown in FIG. 9 in which the protrusion 18A reaches the uppermost position and the protrusion 18B reaches the lowermost position by the operation of FIG. 8, the protrusion 18A is lowered and the protrusion 18B is raised while the vibrating element 17A, It is explanatory drawing of operation in the state which extended 17B. In this case, the tip of the protrusion 18A moves while drawing a 1/4 circular arc in the direction of the arrow in the figure, and the tip of the protrusion 18B moves 1/4 in the direction of the arrow in the figure.
Move while drawing the arc of.

FIG. 10 is an explanatory view of the operation in the state where the vibrating elements 17A and 17B are contracted while the projection 18A is further lowered and the projection 18B is raised from the horizontal state by the operation of FIG. .. In this case, the tip of the protrusion 18A moves while drawing a 1/4 arc in the direction of the arrow in the figure, and the tip of the protrusion 18B moves while drawing a 1/4 arc in the direction of the arrow in the figure. Moving.

By the series of operations shown in FIGS. 7 to 10, the tips of the protrusions 18A and 18B form an arc. This is shown in FIG.

The operation performed by the transfer force transmitting member 15 through the series of operations shown in FIGS. 7 to 10 is defined as "measurement movement" in this specification.

The transfer table T is transferred by the measuring movement of the transfer force transmitting member 15, and the transferred member (child module M) is sent out and collected.

12 to 25 show one embodiment of the manufacturing method of the transfer means.

An embodiment of the manufacturing method of the transfer means of the present invention will be described below with reference to FIGS.

Step 1: Prepare a substrate made of silicon single crystal. (See Figure 12)

Step 2: The substrate is processed into a predetermined size and shape (U-shaped cross section) by anisotropic etching using a corrosive liquid or plasma. (See FIG. 13) At this time, the machined surface is mirror-finished. After processing, to remove foreign matter, it is washed with a single substance or a mixed liquid of acid, alkali and solvent.

Step 3: A thin film electrode for a vibration element is laminated in a predetermined area on the bottom surface of the recess of the substrate by vacuum vapor deposition or sputtering. (See FIG. 14) As the electrode material,
Metals such as aluminum, gold and platinum, and conductive ceramics such as ITO are used.

Step 4: The vibrating body is set at a predetermined interval.
The thin film electrode is laminated on the thin film electrode by sputtering so as to have orientation in a direction perpendicular to the electrode surface. (See FIG. 15) As the material of the vibrating body, a piezoelectric thin film such as ZnO or PZT is used.

Step 5: A thin film electrode is laminated on the vibrating body by vacuum vapor deposition or sputtering. (See Figure 16)
As the electrode material, the same metal or conductive ceramic as described above is used. Also, vacuum deposition and sputtering are performed in the same manner as above.

Step 6: Steps 4 to 5 are repeated to produce a laminated vibration element. (See FIG. 26) At this time, the vibration transmitting portion is also formed.

Step 7: Filling the concave portion of the substrate with the filler, leaving a space for forming the connecting member of the plate-like elastic member on the upper surface of the vibrating element. (See FIG. 17) This filling is performed by vacuum vapor deposition or sputtering.

Step 8: A plate-like elastic member is formed in a predetermined shape from a predetermined position on the upper surface of the substrate to a predetermined range of the filler. This formation is performed by growing a silicon single crystal by a chemical vapor deposition method. (See Figure 18)

Step 9: The filler is removed by etching. (See FIG. 19) This removal is done by etching using a corrosive liquid or plasma. The remover used is appropriately selected according to the material of the filler. As a specific example, when a metal is used as the filler, a simple substance or a mixed liquid of acid and alkali is used as the remover.

Step 10: A strain detecting element is formed at a predetermined position on the upper surface of the plate-like elastic member. (See FIG. 20) The strain detection element is formed by forming a strain detection material into a film by sputtering or the like and etching the material into a required shape.

Step 11: A spacer agent is applied to the upper surface of the plate-shaped elastic member. (See FIG. 21) As the spacer agent,
Metal is used.

Step 12: A predetermined position on the upper surface of the spacer material is oriented in the same direction as the upper surface of the plate-like elastic member,
The vibrating body is formed by sputtering. (See FIG. 22) A piezoelectric thin film such as ZnO or PZT is used as the material of the vibrating body.

Step 13: Thin film electrodes are laminated on the front and rear surfaces of the vibrating body by sputtering or vacuum deposition to form a vibrating element. (See FIG. 23) As the electrode material, a metal such as aluminum, gold or platinum, or a conductive ceramic such as ITO is used.

Step 14: A plate-like elastic member is completed by forming a protrusion between the vibrating element and the tip of the vibrating element. (See FIG. 24) The formation of the intermediate body and the protruding portion is performed by growing a silicon single crystal by a chemical vapor deposition method. The protrusion is processed by anisotropic etching using corrosive liquid or plasma.

Step 15: Remove the filler with a remover. (See FIG. 25) This removal is done by etching using a corrosive liquid or plasma.
The remover used is appropriately selected according to the material of the filler. As a specific example, when a metal is used as the filler, a simple substance or a mixed liquid of acid and alkali is used as the remover.

This completes the production of the transfer means.

27 to 37 show an embodiment of a method of manufacturing the strain detecting element arranged on the upper surface of the plate-like elastic member of the transfer means of the present invention.

An embodiment of the method for manufacturing the strain detecting element will be described below with reference to FIGS.

Step 1: The surface of the substrate is polished by an automatic polishing machine to have a surface roughness of about 0.01 μm. (See Figure 27)

Step 2: The surface of the substrate is surface-treated by abrasive polishing, and the silicon oxide insulating layer is thermally oxidized to 1
The film is formed to a thickness of about μm. (See Figure 28)

Step 3: An aluminum electrode is formed on the silicon oxide insulating layer by vacuum vapor deposition to a thickness of about 0.1 μm. (See Figure 29)

Step 4: A photoresist is applied on the aluminum electrode by a spinner to a thickness of about 1 μm.
(See Figure 30)

Step 5: The substrate coated with the photoresist is carried into an electric furnace and the photoresist is heat-treated.
(See Figure 31)

Step 6: The photoresist is exposed to light using a photomask. (See FIG. 32) This exposure is performed by irradiating the photoresist with ultraviolet rays through a photomask.

Step 7: The photosensitive resist is developed.
(See FIG. 33) This development is performed by immersing in a photoresist developing solution.

Step 8: The electrodes are patterned by wet etching. (See FIG. 34) This wet etching is performed by etching using a corrosive liquid or plasma.

Step 9: The residual resist is removed.
(See FIG. 35) This residual resist is removed by immersing it in a photoresist stripping solution.

Step 10: A C-axis oriented zinc oxide film having a thickness of 20 μm is formed by sputtering at a predetermined position on the substrate on which the electrode pattern is formed. (See Figure 36)

Step 11: Connect lead wires to the electrodes at both ends by bonding. (See Figure 37)

In this way, the production of the strain detecting element is completed. The strain detecting element may be incorporated in the plate-shaped elastic member.

[0071]

As described above, according to the present invention, the transfer force is generated by utilizing the resonance between the vibration element and the transfer member without using the electromagnetic motor, so that the desired transfer force can be obtained. Nevertheless, the transfer device can be downsized.

According to the manufacturing method of the transfer means of the present invention, the transfer means can be integrally manufactured.

[Brief description of drawings]

FIG. 1 is a schematic view of a transfer device of the present invention.

FIG. 2 is a perspective view of a transfer means.

FIG. 3 is a block diagram of a control system of the vibration element.

FIG. 4 is an explanatory diagram of member transfer by the transfer device of the present invention.

FIG. 5 is an explanatory diagram of a first mode of operation of the transfer means.

FIG. 6 is an explanatory diagram of a second mode of operation of the transfer means.

FIG. 7 is a part of an explanatory view of an operation in which the first mode and the second mode of the operation of the transfer means are combined.

FIG. 8 is a part of an explanatory view of an operation in which the first mode and the second mode of the operation of the transfer means are combined.

FIG. 9 is a part of an explanatory view of an operation in which the first mode and the second mode of the operation of the transfer means are combined.

FIG. 10 is a part of an explanatory view of an operation in which the first mode and the second mode of the operation of the transfer means are combined.

FIG. 11 is a part of an explanatory view of an operation in which the first mode and the second mode of the operation of the transfer means are combined.

FIG. 12 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 13 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 14 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 15 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 16 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 17 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 18 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 19 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 20 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 21 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 22 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 23 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 24 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 25 is a part of an explanatory view of the manufacturing process of the transfer means.

FIG. 26 is a schematic view of a laminated vibration element used as a transfer means.

FIG. 27 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 28 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 29 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 30 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 31 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 32 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 33 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 34 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 35 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 36 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

FIG. 37 is a part of an explanatory view of the manufacturing process of the strain detection element used for the transfer means.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Transfer means 11 Base (substrate) 12 Vibration element 13 Plate-like elastic member 14 Strain detection element 15 Transfer force transmission member 2 Control means 21 Vibration element control circuit

Claims (6)

[Claims] 1. A transfer device comprising a transfer means and a control means, wherein the transfer means is (1) a base having a recess, and (2) arranged in a predetermined array on a bottom surface of the recess of the base. A predetermined number of vibrating elements having a vibration transmitting portion; (3) a plate-like elastic member having the same number as the vibrating elements extending from a predetermined position above the base body to the recess; and (4) the plate-like elastic member. A connecting member formed on a surface of the plate facing the recess and connected to the vibration transmitting part; (5) a strain detecting element arranged at a predetermined position of the plate-like elastic member; (6) the plate A transfer force transmitting member that is disposed above the elastic member, has a central portion connected to the distal end of the plate elastic member, and has an abutting protrusion for abutting the transferred member at the distal end, ) A predetermined number of vibrating elements arranged at predetermined positions of the transfer force transmitting member, The control means (1) outputs a control signal for matching the frequency of the vibration element disposed on the bottom surface of the recess with the resonance frequency of the plate-shaped elastic member, based on the input from the strain detection element. A transfer device comprising at least a vibrating element control circuit that can be used. 2. The number of vibrating elements arranged on the bottom surface of the concave portion of the base is two, and the two vibrating elements are arranged at a predetermined interval in the longitudinal direction of the concave portion. The transfer device according to claim 1, wherein the transfer device is a transfer device. 3. The number of vibrating elements arranged on the bottom surface of the concave portion of the base is four, and two of the four vibrating elements are arranged at predetermined intervals in the longitudinal direction of the concave portion. , The rest 2
2. The transfer device according to claim 1, wherein the individual pieces are arranged at a predetermined interval in a direction perpendicular to the longitudinal direction of the recess. 4. The number of vibrating elements arranged on the transfer force transmitting member is two, and the two vibrating elements are arranged at predetermined intervals in the same direction as the longitudinal direction of the recess of the base. The transfer device according to claim 1 or 2, wherein 5. The number of vibrating elements arranged in the transfer force transmitting member is four, and two of the four vibrating elements are arranged at a predetermined interval in the same direction as the longitudinal direction of the recess. The transfer device according to claim 1 or 3, wherein the remaining two are arranged at a predetermined interval in a direction perpendicular to the longitudinal direction of the recess. 6. (1) a step of forming a recess in the base;
(2) A step of disposing a vibrating element in the recess, and (3) A step of filling a recess in which the vibrating element is arranged with a filler, leaving a space for a connecting member formed in the plate-like elastic member. When,
(4) a step of integrally forming a plate-like elastic member from a top surface of the base body over a predetermined range of the surface of the filler together with a connecting member formed in the space, and (5) a step of removing the filler And (6) a step of disposing a strain detecting element on the plate-like elastic member, and (7) applying a spacer agent on the plate-like elastic member and filling a filler between the plate-like elastic members. And (8) forming a vibrating element at a predetermined position of the spacer agent, and (9) forming a protrusion at the tip of the vibrating element and forming a connecting member between the vibrating elements. , The step of forming the transfer force transmitting member, and (1
0) A method of manufacturing a transfer means, which comprises the step of removing the spacer agent and the filler.