JPH0531796Y2 - - Google Patents
Info
- Publication number
- JPH0531796Y2 JPH0531796Y2 JP1983067446U JP6744683U JPH0531796Y2 JP H0531796 Y2 JPH0531796 Y2 JP H0531796Y2 JP 1983067446 U JP1983067446 U JP 1983067446U JP 6744683 U JP6744683 U JP 6744683U JP H0531796 Y2 JPH0531796 Y2 JP H0531796Y2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- electron beam
- chip
- electron
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 17
- 229910002804 graphite Inorganic materials 0.000 claims description 17
- 239000010439 graphite Substances 0.000 claims description 17
- 238000003466 welding Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 6
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 2
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6744683U JPS59173250U (ja) | 1983-05-06 | 1983-05-06 | 把持型熱電子放射陰極 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6744683U JPS59173250U (ja) | 1983-05-06 | 1983-05-06 | 把持型熱電子放射陰極 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59173250U JPS59173250U (ja) | 1984-11-19 |
JPH0531796Y2 true JPH0531796Y2 (zh) | 1993-08-16 |
Family
ID=30197635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6744683U Granted JPS59173250U (ja) | 1983-05-06 | 1983-05-06 | 把持型熱電子放射陰極 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59173250U (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007053128A (ja) * | 2005-08-15 | 2007-03-01 | Nikon Corp | 電子銃及び電子線露光装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5526862B2 (zh) * | 1976-03-15 | 1980-07-16 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6013163Y2 (ja) * | 1978-08-10 | 1985-04-26 | 電気化学工業株式会社 | 熱電子陰極 |
-
1983
- 1983-05-06 JP JP6744683U patent/JPS59173250U/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5526862B2 (zh) * | 1976-03-15 | 1980-07-16 |
Also Published As
Publication number | Publication date |
---|---|
JPS59173250U (ja) | 1984-11-19 |
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