JPH0531558Y2 - - Google Patents
Info
- Publication number
- JPH0531558Y2 JPH0531558Y2 JP19261186U JP19261186U JPH0531558Y2 JP H0531558 Y2 JPH0531558 Y2 JP H0531558Y2 JP 19261186 U JP19261186 U JP 19261186U JP 19261186 U JP19261186 U JP 19261186U JP H0531558 Y2 JPH0531558 Y2 JP H0531558Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- glow discharge
- annular
- seal member
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 10
- 238000004611 spectroscopical analysis Methods 0.000 description 13
- 239000007789 gas Substances 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical group [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 3
- 238000001675 atomic spectrum Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000001420 photoelectron spectroscopy Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19261186U JPH0531558Y2 (enrdf_load_stackoverflow) | 1986-12-15 | 1986-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19261186U JPH0531558Y2 (enrdf_load_stackoverflow) | 1986-12-15 | 1986-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6397847U JPS6397847U (enrdf_load_stackoverflow) | 1988-06-24 |
| JPH0531558Y2 true JPH0531558Y2 (enrdf_load_stackoverflow) | 1993-08-13 |
Family
ID=31147856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19261186U Expired - Lifetime JPH0531558Y2 (enrdf_load_stackoverflow) | 1986-12-15 | 1986-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0531558Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-12-15 JP JP19261186U patent/JPH0531558Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6397847U (enrdf_load_stackoverflow) | 1988-06-24 |
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