JPH05312659A - Strain-generating body for detecting force and moment - Google Patents

Strain-generating body for detecting force and moment

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Publication number
JPH05312659A
JPH05312659A JP4122297A JP12229792A JPH05312659A JP H05312659 A JPH05312659 A JP H05312659A JP 4122297 A JP4122297 A JP 4122297A JP 12229792 A JP12229792 A JP 12229792A JP H05312659 A JPH05312659 A JP H05312659A
Authority
JP
Japan
Prior art keywords
light
group
electrode plate
strain
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4122297A
Other languages
Japanese (ja)
Other versions
JP3177790B2 (en
Inventor
Hideo Morimoto
森本  英夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitta Corp
Original Assignee
Nitta Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitta Corp filed Critical Nitta Corp
Priority to JP12229792A priority Critical patent/JP3177790B2/en
Publication of JPH05312659A publication Critical patent/JPH05312659A/en
Application granted granted Critical
Publication of JP3177790B2 publication Critical patent/JP3177790B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

PURPOSE:To obtain a strain-generating body for detecting force and moment which can detect forces in X-Y-Z directions (three-dimensional directions) and moment around an axis with an improved sensitivity. CONSTITUTION:The title body is provided with mounting parts 1a and 1b which are placed upper and lower parts opposingly with a certain spacing, spindle parts 2a and 2b which are provided at either one of the mounting parts and whose tip parts oppose the other mounting part and a strain-generating part 3 which is provided between the mounting parts while surrounding the spindle parts and is provided with a recessed part 39 which is curved toward inside. A group of light receiving bodies where four light receiving bodies 4 are laid out at either the inner surface of the recessed part 39 or the outer surface of the spindle part 2a which opposes it in upper/ lower and left/right directions are laid out at 90-degree spacing and at the same time a light emitting body 5 which irradiates the center of the group of light receiving bodies with light is provided at the other. On the other hand, one group of light receiving bodies 4 which are aligned in upper/lower and left/right directions are provided at either the tip part of the spindle part 2a (2b) or a mounting part which opposes it and a light emitting body 5 which applies light to the center of the other group of light emitting bodies is provided at the other.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、力及びモーメント検
出用の起歪体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flexure element for detecting force and moment.

【0002】[0002]

【従来の技術】この種の起歪体としては、例えば、図1
1に示すような形式のものがあり、このものは、リング
状に形成された第1取付部9aと、円形状に形成された
取付板90と前記第1取付部9aの中央部に挿通された
軸部91とを有する第2取付部9bと、前記第1取付部
9aと軸部91相互間に90°角度間隔で架設された変
形容易な帯状の起歪部92と、前記起歪部92に固着さ
れ且つ機械的変形により電気抵抗が変化する4個の検出
素子93をX,Y線上に備えた単結晶基板94とから構
成されている。
2. Description of the Related Art As a flexure element of this type, for example, FIG.
There is a type as shown in FIG. 1, which is inserted into the ring-shaped first mounting portion 9a, the circular mounting plate 90, and the central portion of the first mounting portion 9a. A second mounting portion 9b having a shaft portion 91, a band-shaped strain-producing portion 92 that is easily deformable and is installed between the first mounting portion 9a and the shaft portion 91 at 90 ° angular intervals, and the strain-generating portion. It is composed of a single crystal substrate 94 having four detection elements 93 fixed to 92 and having electric resistances changed by mechanical deformation on the X and Y lines.

【0003】このものでは、上記起歪体の第1取付部9
aや第2取付部9bに力(機械的外力が加わると、図1
2に示すように、起歪部92の変形に伴って単結晶基板
94が変形することとなり、単結晶基板94上に備えた
検出素子93の電気抵抗値が変化(引張方向の歪みが検
出素子に加われば抵抗値は増加し、圧縮方向の歪みが検
出素子に加われば抵抗値は減少する)する。
In this case, the first mounting portion 9 of the strain-generating body is used.
When a force (mechanical external force is applied to the a and the second mounting portion 9b,
As shown in FIG. 2, the single crystal substrate 94 is deformed along with the deformation of the strain generating portion 92, and the electric resistance value of the detection element 93 provided on the single crystal substrate 94 changes (strain in the tensile direction is detected by the detection element). The resistance value is increased by adding to the detection element, and the resistance value is decreased when the strain in the compression direction is added to the detection element).

【0004】したがって、上記した4個の検出素子94
の抵抗変化からX,Y方向の力や軸回りのモーメントの
検出が可能となる。ところが、上記起歪体では、X−Y
−Z方向(三次元方向)における力や軸回りのモーメン
トのうち一部のものしか検出できず、且つ起歪部92の
変形量が直接検出素子93の変形量として現れるもので
はなく単結晶基板94を介してのものであることから上
記した力やモーメントの検出感度が良くないという問題
がある。
Therefore, the above-mentioned four detection elements 94
It is possible to detect the force in the X and Y directions and the moment around the axis from the change in resistance. However, in the above flexure element, XY
Only a part of the force in the −Z direction (three-dimensional direction) and the moment about the axis can be detected, and the deformation amount of the strain generating portion 92 does not directly appear as the deformation amount of the detection element 93, but the single crystal substrate. Since it is via 94, there is a problem that the detection sensitivity of the force and moment is not good.

【0005】[0005]

【発明が解決しようとする課題】そこで、この発明で
は、X−Y−Z方向(三次元方向)における力及び軸回
りのモーメントが優れた感度で検出できる、力及びモー
メント検出用の起歪体を提供することを課題とする。
Therefore, in the present invention, a strain-generating body for detecting a force and a moment capable of detecting a force in the XYZ directions (three-dimensional directions) and a moment around an axis with excellent sensitivity. The challenge is to provide.

【0006】[0006]

【課題を解決するための手段】この発明の力及びモーメ
ント検出用の起歪体は、上下に一定間隔を有して対向配
設される取付部と、前記取付部のうち一方に具備させて
あり且つ先端部が他方の取付部と対向する軸部と、前記
軸部を取り囲む態様で取付部相互間に架設され且つ内側
に向かって折曲された凹み部を有する起歪部とを具備す
るものであって、前記凹み部の内面又はこれと対向する
軸部の外面のうち、どちらか一方に四個の受光体を上下
左右に配列させて成る受光体群を90°角度間隔で配設
すると共に他方に前記受光体群の中央部を照射する発光
体を設け、他方、前記軸部の先端部又はこれに対向する
取付部分のうちどちらか一方に上下左右に配列された一
個の受光体群を配設すると共に他方に前記受光体群の中
央部を照射する発光体を設け、上記取付部に外力が作用
したときに起歪部が変形して前記受光体群と発光体との
相対位置関係が変化し、これにより、各受光体群を構成
する各受光体が受ける光量が変化するようにしている。
A strain-generating body for detecting a force and a moment according to the present invention is provided in one of the mounting portion and the mounting portion which are vertically opposed to each other with a certain space. A shaft portion having a tip portion facing the other mounting portion, and a strain-flexing portion having a recessed portion that is provided between the mounting portions and surrounds the shaft portion and that is bent inward. A group of photoconductors, in which four photoconductors are arranged vertically and horizontally on either the inner surface of the recessed portion or the outer surface of the shaft portion facing the recessed portion, is arranged at 90 ° angular intervals. On the other hand, a light-emitting body for irradiating the central portion of the light-receiving body is provided on the other side, and on the other hand, one light-receiving body arranged vertically or horizontally on either one of the tip portion of the shaft portion or the mounting portion facing this. A light source that illuminates the central part of the photoreceptor group to the other while arranging A body is provided, and when an external force is applied to the mounting portion, the strain generating portion is deformed to change the relative positional relationship between the light receiving body group and the light emitting body, whereby each light receiving body forming each light receiving body group is changed. The amount of light received by is changed.

【0007】又、この発明の力及びモーメント検出用の
起歪体は、上下に一定間隔を有して対向配設される取付
部と、前記取付部のうち一方に具備させてあり且つ先端
部が他方の取付部と対向する軸部と、前記軸部を取り囲
む態様で取付部相互間に架設され且つ内側に向かって折
曲された凹み部を有する起歪部とを具備するものであっ
て、前記凹み部の内面又はこれと対向する軸部の外面の
うち、どちらか一方に四個の小極板を上下左右に配列さ
せて成る極板群を90°角度間隔で配設すると共に他方
に前記極板群と略同一面積の大極板を設け、他方、前記
軸部の先端部又はこれに対向する取付部分のうちどちら
か一方に小極板が上下左右に配列されて成る極板群を配
設すると共に他方に前記極板群と略同一面積の大極板を
設け、上記取付部に外力が作用したときに起歪部が変形
して前記極板群と大極板との相対位置関係が変化し、こ
れにより、各極板群の小極板における大極板との間のコ
ンデンサ容量が変化するようにしている。
Further, the flexure element for detecting force and moment of the present invention is provided at one of the mounting portion and the mounting portion which are vertically opposed to each other with a certain interval, and the tip portion. Includes a shaft portion facing the other mounting portion, and a strain-flexing portion having a recessed portion that is provided between the mounting portions and surrounds the shaft portion and that is bent inward. , An inner surface of the recessed portion or an outer surface of the shaft portion opposed to the recessed portion is provided with an electrode plate group in which four small electrode plates are vertically and horizontally arrayed at 90 ° angular intervals while the other is provided. A large electrode plate having substantially the same area as that of the electrode plate group, on the other hand, an electrode plate in which small electrode plates are vertically and horizontally arranged on either one of the tip end portion of the shaft portion or a mounting portion opposed thereto. And a large electrode plate having substantially the same area as the electrode plate group on the other side, When an external force is applied, the strain generating portion is deformed to change the relative positional relationship between the electrode plate group and the large electrode plate, whereby a capacitor between the large electrode plate and the small electrode plate of each electrode plate group is changed. The capacity is changed.

【0008】尚、上記した構成にかえて、取付部の両方
に軸部を設けると共にこれらの端部相互を対向させるよ
うにすることもできる。又、上記した構成にかえて、凹
み部の内面又はこれと対向する軸部の外面のうちどちら
か一方に上下左右に配列された四個の受光体群と二個の
受光体を左右に配列させて成る受光体群を交互に90°
角度間隔で配設すると共に他方に前記受光体群の中央部
を照射する発光体を設けるようにすることもできる。
Incidentally, in place of the above-mentioned structure, it is possible to provide a shaft portion on both of the mounting portions and to make these end portions face each other. Further, in place of the above-mentioned configuration, four photoconductor groups and two photoconductors are arrayed vertically and horizontally on either the inner surface of the recessed portion or the outer surface of the shaft portion facing the recessed portion. Alternate 90 °
It is also possible to dispose them at angular intervals and to provide a light emitting body for irradiating the central portion of the light receiving group on the other side.

【0009】[0009]

【作用】この発明は次のように作用する。 (請求項1〜4記載の発明の作用)取付部に外力が作用
すると、起歪部が変形して前記受光体群と発光体との相
対位置、即ち、受光体群と発光体との接近・離反、
受光体群と発光体との対向姿勢が変化し、各受光体群を
構成する各受光体が受ける光量が変化する。
The present invention operates as follows. (Operation of the invention according to claims 1 to 4) When an external force is applied to the mounting portion, the strain generating portion is deformed and the relative position between the light receiving body group and the light emitting body, that is, the light receiving body group and the light emitting body approach each other. · Separation,
The facing attitude of the light-receiving body group and the light-emitting body changes, and the amount of light received by each light-receiving body forming each light-receiving body group changes.

【0010】上記した受光体群及び発光体は起歪部に9
0°角度間隔で配置されているから、各受光体が受ける
光量の変化により上記取付部に作用している三次元(X
−Y−Z)方向の力及び軸回りのモーメントが検出でき
ることとなる。そして、この発明の起歪体は、従来の技
術の欄に記載したものと相違して起歪部の変形量を直接
(単結晶基板を介さない)検出するものであるから、検
出精度は優れたものとなる。 (請求項5〜8記載の発明の作用)取付部に外力が作用
すると、起歪部が変形して前記極板群と大極板との相対
位置、即ち、極板群と大極板との接近・離反、極板
群と大極板との対向姿勢が変化し、各極板群の小極板に
おける大極板との間のコンデンサ容量が変化する。
The above-mentioned light-receiving body group and light-emitting body have 9
Since they are arranged at 0 ° angular intervals, the three-dimensional (X
The force in the (-Y-Z) direction and the moment around the axis can be detected. Since the strain-generating body of the present invention directly detects the deformation amount of the strain-generating portion (not through the single crystal substrate) unlike the one described in the section of the related art, the detection accuracy is excellent. It becomes a thing. (Operation of the invention according to claims 5 to 8) When an external force acts on the mounting portion, the strain generating portion is deformed and the relative position between the electrode plate group and the large electrode plate, that is, the electrode plate group and the large electrode plate. The approaching / separating of the electrode plate and the facing attitude of the electrode group and the large electrode plate are changed, and the capacitor capacity between the small electrode plate and the large electrode plate of each electrode plate group is changed.

【0011】上記した極板群及び大極板は起歪部に90
°角度間隔で配置されているから、各極板群の小極板に
おける大極板との間のコンデンサ容量の変化により上記
取付部に作用している三次元(X−Y−Z)方向の力及
び軸回りのモーメントが検出できることとなる。そし
て、この発明の起歪体は、従来の技術の欄に記載したも
のと相違して起歪部の変形量を直接(単結晶基板を介さ
ない)して検出するものであるから、検出精度は優れた
ものとなる。
The above electrode plate group and large electrode plate have 90
Since the electrodes are arranged at angular intervals, the three-dimensional (XYZ) direction acting on the mounting portion due to the change in the capacitor capacity between the small electrode plate and the large electrode plate of each electrode plate group. The force and the moment around the axis can be detected. Since the strain-generating body of the present invention directly detects the deformation amount of the strain-generating part (not through the single crystal substrate) unlike the one described in the section of the conventional technique, the detection accuracy is high. Will be excellent.

【0012】[0012]

【実施例】以下、この発明の構成を実施例として示した
図面に従って説明する。 〔実施例1〕この実施例の起歪体は、図1〜図3に示す
ように、一定間隔を有して対向配設された取付部1a,
1bと、前記取付部1aの内面に固定配設された長軸部
2aと、前記取付部1bの内面に固定配設され且つ前記
長軸部2aの先端面と対向する短軸部2bと、前記長・
短軸2a,2bを取り囲む態様で取付部1a,1b相互
間に架設され且つ内側に向かって折曲させた凹み部39
を有する起歪部3とから構成されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of the present invention will be described below with reference to the drawings shown as embodiments. [Embodiment 1] As shown in FIGS. 1 to 3, the flexure element of this embodiment has mounting portions 1a, which are arranged facing each other with a constant interval.
1b, a long shaft portion 2a fixedly arranged on the inner surface of the mounting portion 1a, and a short shaft portion 2b fixedly arranged on the inner surface of the mounting portion 1b and facing the tip end surface of the long shaft portion 2a, The length
A recess 39 that is provided between the mounting portions 1a and 1b and surrounds the minor shafts 2a and 2b and is bent inward.
And a strain-flexing part 3 having

【0013】取付部1a,1bはそれぞれ、同図に示す
ように、薄い円形板により構成されており、90°角度
間隔でボルト挿入孔10を穿設けてある。長軸部2a
は、図1〜図3に示すように、角柱状に形成されてお
り、その周面には図4に示すような、四個のフォトダイ
オード40(手段の欄の受光体と対応する)を上下左右
に配列させて成る受光体素子4a,4b,4c,4d
(手段の欄の受光体群と対応する)を90°角度間隔で
配設してあり、又、端面についても上記受光体素子4e
を配設してある。
As shown in the figure, each of the mounting portions 1a and 1b is formed of a thin circular plate, and bolt insertion holes 10 are provided at 90 ° angular intervals. Long shaft 2a
Is formed in a prismatic shape as shown in FIGS. 1 to 3, and four photodiodes 40 (corresponding to the light receiving body in the column of means) are formed on the peripheral surface thereof as shown in FIG. Photoreceptor elements 4a, 4b, 4c, 4d arranged vertically and horizontally
(Corresponding to the photoreceptor group in the column of means) are arranged at 90 ° angular intervals, and the photoreceptor element 4e is also formed on the end face.
Is provided.

【0014】短軸部2bは、図2に示すように、上記長
軸部2aよりも太い角柱状に形成されており、これの端
面と長軸部2aとの端面との間に小間隙(g±0)がで
きる長さに設定してある。そして、この短軸部2bの端
面には、2図に示すように、長軸部2aの受光体素子4
eの中央部を照射する発光ダイオード5e(手段の欄の
発光体と対応する)を設けてある。
As shown in FIG. 2, the short shaft portion 2b is formed in the shape of a prism that is thicker than the long shaft portion 2a, and a small gap () is formed between the end surface of the short shaft portion 2b and the end surface of the long shaft portion 2a. The length is set to be g ± 0). Then, as shown in FIG. 2, on the end surface of the short axis portion 2b, the light receiving element 4 of the long axis portion 2a is formed.
A light emitting diode 5e (corresponding to the light emitter in the column of means) for irradiating the central portion of e is provided.

【0015】起歪部3は、図1及び図2に示すように四
本の帯状板材から成り、各帯状板材はそれぞれ、内側に
向かって略コ字状に折曲された凹み部39を有した主体
30と、前記主体30の両端部に設けられ且つ上記した
取付部1a,1bに取付けられる取付座30a,30b
とから構成されている。そして、この起歪部3の凹み部
39の内面側には、図2〜図4に示す如く発光ダイオー
ド5(5a,5b,5c,5d)が配設してあり、図1
に示す如く組立られた状態では、前記凹み部39の内面
と長軸部2aの周面との間には小間隙(g±0)が形成
されていると共に、発光ダイオード5aが受光体素子4
aの中央部を、発光ダイオード5bが受光体素子4bの
中央部を、発光ダイオード5cが受光体素子4cの中央
部を、発光ダイオード5dが受光体素子4dの中央部
を、それぞれ照射するようにしてある。
As shown in FIGS. 1 and 2, the strain-flexing portion 3 is composed of four strip-shaped plate members, and each strip-shaped plate member has a recess 39 that is bent inward in a substantially U-shape. Main body 30 and mounting seats 30a, 30b provided on both ends of the main body 30 and mounted on the mounting portions 1a, 1b described above.
It consists of and. The light emitting diode 5 (5a, 5b, 5c, 5d) is disposed on the inner surface side of the recess 39 of the strain-flexing portion 3 as shown in FIGS.
In the assembled state as shown in FIG. 5, a small gap (g ± 0) is formed between the inner surface of the recess 39 and the peripheral surface of the long shaft portion 2a, and the light emitting diode 5a is connected to the light receiving element 4
The light emitting diode 5b irradiates the center portion of the light receiving element 4b, the light emitting diode 5c irradiates the center portion of the light receiving element 4c, and the light emitting diode 5d irradiates the center portion of the light receiving element 4d. There is.

【0016】この起歪体は上記の如く構成としてあるか
ら、上記取付部1a,1bに外力が作用したときには、
起歪部3の変形に伴い受光体素子4a,4b,4c,4
d,4eと発光ダイオード5a,5b,5c,5d,5
eとの相対位置関係が変化して各受光体素子4a,4
b,4c,4d,4eを構成する各フォトダイオード4
0の受光量が変化する。したがって、各フォトダイオー
ド40の受光量の相違を電気的に変換して演算処理すれ
ばX−Y−Z方向(三次元方向)の力や軸回りのモーメ
ントが検出できることとなる。以下に、この起歪体にお
ける力・モーメントの検出について図5〜図8に従って
詳述する。.Fx (X方向の力)とFy(Y方向の力)の検出に
ついて 図5に示す如く取付部1a,1bを固定して例えば取付
部1bにFx を加えると、同図に示すように起歪体が長
軸部2bの周面に対して傾斜すべく変形せしめられ、受
光体素子4aの中心軸AX1+と受光体素子4cの中心軸
AX2+は、フォトダイオード5a,5cの中心軸AX1
−,AX2−に対して互いに反対方向にズレる。この状態
では、受光体素子4aの上側のフォトダイオード40の
受光量及び受光体素子4cの下側のフォトダイオード4
0の受光量が増加していると共に受光体素子4aの下側
のフォトダイオード40の受光量及び受光体素子4cの
上側のフォトダイオード40の受光量が減少しているか
ら、前記受光量を電気的に変換して演算処理すればFx
を検出できる。
Since this flexure element is constructed as described above, when an external force acts on the mounting portions 1a, 1b,
With the deformation of the strain-flexing portion 3, the light-receiving elements 4a, 4b, 4c, 4
d, 4e and light emitting diodes 5a, 5b, 5c, 5d, 5
The relative positional relationship with e is changed so that each of the photoreceptor elements 4a, 4a
Each photodiode 4 constituting b, 4c, 4d and 4e
The amount of received light of 0 changes. Therefore, if the difference in the amount of light received by each photodiode 40 is electrically converted and arithmetic processing is performed, the force in the XYZ directions (three-dimensional direction) and the moment around the axis can be detected. The detection of the force / moment in the strain-generating body will be described in detail below with reference to FIGS. . For detection of Fx (force in X direction) and Fy (force in Y direction)
Then , as shown in FIG. 5, when the mounting portions 1a and 1b are fixed and, for example, Fx is applied to the mounting portion 1b, the flexure element is deformed so as to be inclined with respect to the peripheral surface of the long axis portion 2b as shown in the figure. The center axis AX1 + of the photodetector element 4a and the center axis AX2 + of the photodetector element 4c are the same as the center axis AX1 + of the photodiodes 5a and 5c.
−, AX2 − are displaced in opposite directions. In this state, the amount of light received by the photodiode 40 above the light-receiving element 4a and the photodiode 4 below the light-receiving element 4c.
Since the received light amount of 0 is increasing and the received light amount of the photodiode 40 below the light receiving element 4a and the light receiving amount of the photodiode 40 above the light receiving element 4c are decreasing, Fx if converted and processed
Can be detected.

【0017】Fy についても、受光体素子4b,4dの
フォトダイオード40の受光量変化から、上記と同様に
検出できる。.My (Y軸回りのモーメント)とMx (X軸回りの
モーメント)について 図6に示す如くMy が取付部1bに加わると、同図に示
すように起歪体が変形せしめられる。この場合には、受
光体素子4eの二個のフォトダイオード40の受光量が
増加しており、他の二個のフォトダイオード40の受光
量が減少しているから前記受光量を電気的に変換して演
算処理すればMy を検出できる。
Fy can also be detected in the same manner as above from the change in the amount of light received by the photodiode 40 of each of the light receiving elements 4b and 4d. . My (moment about Y-axis) and Mx (moment about X-axis)
Moment) When My is applied to the mounting portion 1b as shown in FIG. 6, the flexure element is deformed as shown in FIG. In this case, the amount of light received by the two photodiodes 40 of the light-receiving element 4e is increased, and the amount of light received by the other two photodiodes 40 is decreased, so that the amount of light received is electrically converted. Then, the arithmetic processing can be performed to detect My.

【0018】Mx についても上記My と同様に検出でき
る。.Fz (Y方向の力)の検出について 図7に示す如くFz が取付部1bに加わると、同図に示
すように起歪体が変形せしめられる。この場合には、受
光体素子4eを構成する全てのフォトダイオード40の
受光量が増加しているから、前記受光量を電気的に変換
して演算処理すればFz を検出できる。.Mz (Z軸回りのモーメント)について 図8に示す如くMz が取付部1bに加わると、同図に示
すように起歪体が変形せしめられる。この場合には、受
光体素子4a,4b,4c,4d,4eにおける時計方
向側の二個のフォトダイオード40の受光量が減少し、
反時計方向側の二個のフォトダイオード40の受光量が
増加するから、前記受光量を電気的に変換して演算処理
すればFz を検出できる。 〔実施例2〕この実施例の起歪体は、取付部1a,1b
と、長・短軸部2a,2bと、起歪部3については上記
実施例1のものと全く同様の構成としてあるが、受光体
素子4と発光ダイオード5の組合せを、平行平板コンデ
ンサを構成する、四個の小極板60を上下左右に配列さ
せて成る極板群6と、前記極板群と対向しこれと略同一
面積の大極板7とに変えている。
Mx can be detected in the same manner as My. . Regarding the detection of Fz (force in the Y direction) When Fz is applied to the mounting portion 1b as shown in FIG. 7, the flexure element is deformed as shown in FIG. In this case, since the amount of light received by all the photodiodes 40 forming the light-receiving element 4e is increased, Fz can be detected by electrically converting the amount of light received and performing arithmetic processing. . Regarding Mz (moment about the Z axis) When Mz is applied to the mounting portion 1b as shown in FIG. 8, the flexure element is deformed as shown in FIG. In this case, the amount of light received by the two photodiodes 40 on the clockwise side in the photodetector elements 4a, 4b, 4c, 4d, 4e decreases,
Since the amount of light received by the two photodiodes 40 on the counterclockwise side increases, Fz can be detected by electrically converting the amount of light received and performing arithmetic processing. [Embodiment 2] The flexure element of this embodiment has mounting portions 1a and 1b.
The long / short axis portions 2a and 2b, and the strain-flexing portion 3 have exactly the same configuration as in the first embodiment, but the combination of the light-receiving element 4 and the light-emitting diode 5 constitutes a parallel plate capacitor. The four electrode plates 60 are arranged vertically and horizontally, and the electrode plate group 6 and the large electrode plate 7 facing the electrode plate group and having substantially the same area as the electrode plate group 6 are used.

【0019】この実施例の起歪体では、取付部に外力が
作用すると、起歪部が変形して実施例1に詳述したと同
様に、極板群6と大極板7との接近・離反、図10
に示す如く極板群6と大極板7との対向姿勢が変化す
る。そして、この実施例の場合、各極板群6の小極板6
0における大極板7との間のコンデンサ容量が増減する
こととなるから、増減したコンデンサ容量を電気的に変
換して演算処理すればFx ,Fy ,Fz ,Mx ,My ,
Mz を検出できる。
In the flexure element of this embodiment, when an external force acts on the mounting portion, the flexure portion is deformed, and the electrode plate group 6 and the large electrode plate 7 approach each other as described in detail in Embodiment 1. · Separation, Figure 10
As shown in, the facing attitude between the electrode plate group 6 and the large electrode plate 7 changes. In the case of this embodiment, the small electrode plates 6 of each electrode plate group 6 are
Since the capacitance between the large pole plate 7 and the large pole plate at 0 increases or decreases, if the increased or decreased capacitance is electrically converted and arithmetic processing is performed, Fx, Fy, Fz, Mx, My,
Mz can be detected.

【0020】尚、上記した両実施例の構成にかえて、取
付部1aだけに軸部を設けると共に前記軸部の端部を取
付部1bの面と対向させ、前記軸部の端面又は取付部1
bの面のうち一方に受光体素子4e(極板群6)を、他
方にフォトダイオード5e(大極板7)を、それぞれ設
ける構成とすることもできる。又、上記した両実施例の
構成にかえて、起歪部3が、取付部1aや取付部1bを
取囲む筒状のものとすることもできる。
In addition to the constructions of the above-described embodiments, the shaft portion is provided only in the mounting portion 1a, and the end portion of the shaft portion is made to face the surface of the mounting portion 1b. 1
The light-receiving element 4e (electrode plate group 6) may be provided on one side of the surface b, and the photodiode 5e (large electrode plate 7) may be provided on the other side. Further, instead of the configurations of the above-described embodiments, the strain-flexing portion 3 may be a tubular one that surrounds the mounting portion 1a and the mounting portion 1b.

【0021】更に、上記した起歪部3の断面形状は上記
両実施例の形状に限定されるものではなく、取付部へ外
力が作用したときに、軸部に対して接近・離反・傾斜す
る凹み部39を有するものであればよい。そして、上記
した実施例1の構成にかえて、凹み部39の内面又はこ
れと対向する軸部の周面のうちどちらか一方に上下左右
に配列された四個の受光体群と二個の受光体を左右に配
列させて成る受光体群を交互に90°角度間隔で配設す
ると共に他方に前記受光体群の中央部を照射する発光体
を設けるようにすることもできる。
Further, the cross-sectional shape of the strain-flexing portion 3 is not limited to the shape of both of the above-described embodiments, and when an external force acts on the mounting portion, the strain-generating portion 3 approaches, separates from, or tilts with respect to the shaft portion. What has a recess 39 may be used. Then, in place of the configuration of the above-described first embodiment, four photoconductor groups and two photoconductor groups arranged vertically and horizontally on either one of the inner surface of the recessed portion 39 or the peripheral surface of the shaft portion facing the recessed portion 39. It is also possible to alternately arrange light-receiver groups formed by arranging light-receivers on the left and right at 90 ° angular intervals and to provide a light-emitting body for irradiating the central part of the light-receiver group to the other.

【0022】又、上記した実施例2の構成にかえて、凹
み部の内面又はこれと対向する軸部の周面のうち、どち
らか一方に四個の小極板を上下左右に配列させて成る極
板群と二個の受光体を左右に配列させて成る受光体群を
交互に90°角度間隔で配設すると共に他方に前記極板
群と略同一面積の大極板を設ける構成とすることもでき
る。
Further, in place of the structure of the above-described second embodiment, four small electrode plates are arranged vertically and horizontally on either the inner surface of the recess or the peripheral surface of the shaft portion opposed thereto. And a photoreceptor group formed by arranging two photoreceptors on the left and right alternately at 90 ° angular intervals, and a large pole plate having substantially the same area as that of the pole group is provided on the other side. You can also do it.

【0023】[0023]

【発明の効果】この発明は上記のような構成であるか
ら、次の効果を有する。作用の欄に記載した内容から、
X−Y−Z方向における力及び軸回りのモーメントが優
れた感度で検出できる、力及びモーメント検出用の起歪
体を提供できた。
The present invention having the above-mentioned structure has the following effects. From the contents described in the action column,
It has been possible to provide a flexure element for detecting a force and a moment, which is capable of detecting a force in the XYZ directions and a moment about an axis with excellent sensitivity.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施例における力及びモーメント検
出用の起歪体の斜視図。
FIG. 1 is a perspective view of a flexure element for detecting force and moment in an embodiment of the present invention.

【図2】前記起歪体の断面図。FIG. 2 is a sectional view of the flexure element.

【図3】図1のA−A断面図。3 is a sectional view taken along line AA of FIG.

【図4】前記起歪体における受光体素子とフォトダイオ
ードの斜視図。
FIG. 4 is a perspective view of a light receiving element and a photodiode in the strain generating element.

【図5】前記起歪体に力FX が作用したときの断面図。FIG. 5 is a cross-sectional view when a force FX acts on the flexure element.

【図6】前記起歪体にY軸回りのモーメントMy が作用
したときの断面図。
FIG. 6 is a cross-sectional view when a moment My about the Y-axis acts on the flexure element.

【図7】前記起歪体に力FZ が作用したときの断面図。FIG. 7 is a cross-sectional view when a force FZ acts on the flexure element.

【図8】前記起歪体にZ軸回りのモーメントMz が作用
したときの断面図。
FIG. 8 is a cross-sectional view when a moment Mz about the Z axis acts on the strain body.

【図9】他の実施例の起歪体における極板群と大極板の
斜視図。
FIG. 9 is a perspective view of a polar plate group and a large polar plate in a flexure element of another embodiment.

【図10】前記極板群に対して大極板が姿勢変化した状
態を示す図。
FIG. 10 is a view showing a state in which the attitude of the large electrode plate is changed with respect to the electrode plate group.

【図11】従来の力及びモーメント検出用の起歪体の断
面図。
FIG. 11 is a cross-sectional view of a conventional flexure element for detecting force and moment.

【図12】従来の前記起歪体に力が作用したときの断面
図。
FIG. 12 is a cross-sectional view when a force is applied to the conventional flexure element.

【符号の説明】[Explanation of symbols]

1a 取付部 1b 取付部 2a 長軸部 2b 短軸部 3 起歪部 4 受光体素子 5 発光ダイオード 6 極板群 7 大極板 39 凹み部 40 フォトダイオード 60 小極板 1a Mounting part 1b Mounting part 2a Long axis part 2b Short axis part 3 Strain element 4 Photoreceptor element 5 Light emitting diode 6 Electrode plate group 7 Large electrode plate 39 Recessed portion 40 Photodiode 60 Small electrode plate

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】 上下に一定間隔を有して対向配設される
取付部と、前記取付部のうち一方に具備させてあり且つ
先端部が他方の取付部と対向する軸部と、前記軸部を取
り囲む態様で取付部相互間に架設され且つ内側に向かっ
て折曲された凹み部を有する起歪部とを具備するもので
あって、前記凹み部の内面又はこれと対向する軸部の外
面のうち、どちらか一方に四個の受光体を上下左右に配
列させて成る受光体群を90°角度間隔で配設すると共
に他方に前記受光体群の中央部を照射する発光体を設
け、他方、前記軸部の先端部又はこれに対向する取付部
分のうちどちらか一方に上下左右に配列された一個の受
光体群を配設すると共に他方に前記受光体群の中央部を
照射する発光体を設け、上記取付部に外力が作用したと
きに起歪部が変形して前記受光体群と発光体との相対位
置関係が変化し、これにより、各受光体群を構成する各
受光体が受ける光量が変化するようにしたことを特徴と
する力及びモーメント検出用の起歪体。
1. A mounting portion which is vertically opposed to each other at a constant interval, a shaft portion which is provided in one of the mounting portions and has a tip portion facing the other mounting portion, and the shaft. A strain-flexing portion that is provided between the mounting portions in a manner to surround the portion and that has a recessed portion that is bent inward, the inner surface of the recessed portion or On one of the outer surfaces, a light-receiving body group in which four light-receiving bodies are vertically and horizontally arranged is arranged at 90 ° angular intervals, and on the other side, a light-emitting body for irradiating the central portion of the light-receiving body group is provided. On the other hand, one of the photoconductor groups arranged vertically and horizontally is disposed on either one of the tip portion of the shaft portion or the mounting portion facing the tip portion, and the other portion is irradiated with the central portion of the photoconductor group. Provided with a luminous body, the strain-causing part is deformed when an external force is applied to the mounting part. A force and moment detection device characterized in that the relative positional relationship between the light-receiving body group and the light-emitting body is changed, so that the amount of light received by each light-receiving body forming each light-receiving body group is changed. Distorted body.
【請求項2】 上下に一定間隔を有して対向配設される
取付部と、前記取付部のうち一方に具備させてあり且つ
先端部が他方の取付部と対向する軸部と、前記軸部を取
り囲む態様で取付部相互間に架設され且つ内側に向かっ
て折曲された凹み部を有する起歪部とを具備するもので
あって、前記凹み部の内面又はこれと対向する軸部の外
面のうち、どちらか一方に四個の受光体を上下左右に配
列させて成る受光体群と二個の受光体を左右に配列させ
て成る受光体群を交互に90°角度間隔で配設すると共
に他方に前記受光体群の中央部を照射する発光体を設
け、他方、前記軸部の先端部又はこれに対向する取付部
分のうちどちらか一方に上下左右に配列された一個の受
光体群を配設すると共に他方に前記受光体群の中央部を
照射する発光体を設け、上記取付部に外力が作用したと
きに起歪部が変形して前記受光体群と発光体との相対位
置関係が変化し、これにより、各受光体群を構成する各
受光体が受ける光量が変化するようにしたことを特徴と
する力及びモーメント検出用の起歪体。
2. A mounting portion vertically opposed to each other with a constant space, a shaft portion provided in one of the mounting portions and having a tip end facing the other mounting portion, and the shaft. A strain-flexing portion that is provided between the mounting portions in a manner that surrounds the portion and that has a recessed portion that is bent inward, the inner surface of the recessed portion or the shaft portion facing the inner surface of the recessed portion. On one of the outer surfaces, a photoreceptor group consisting of four photoreceptors arranged vertically and horizontally and a photoreceptor group consisting of two photoreceptors arranged laterally are alternately arranged at 90 ° angular intervals. On the other hand, a light-emitting body that irradiates the central portion of the light-receiving body group is provided on the other side, and on the other hand, one light-receiving body arranged vertically or horizontally on either one of the tip portion of the shaft portion or the mounting portion facing this. And a light-emitting body for irradiating the central portion of the light-receiving body on the other side. When an external force is applied to the mounting portion, the strain generating portion is deformed to change the relative positional relationship between the light receiving body group and the light emitting body, whereby the amount of light received by each light receiving body forming each light receiving body group is changed. A strain-generating body for detecting force and moment characterized by being changed.
【請求項3】 上下に一定間隔を有して対向配設される
取付部と、前記取付部の両方にそれぞれ具備させてあり
且つ先端部相互が対向する軸部と、前記軸部を取り囲む
態様で取付部相互間に架設され且つ内側に向かって折曲
された凹み部を有する起歪部とを具備するものであっ
て、前記凹み部の内面又はこれと対向する軸部の外面の
うちどちらか一方に四個の受光体を上下左右に配列させ
て成る受光体群を90°角度間隔で配設すると共に他方
に前記受光体群の中央部を照射する発光体を設け、他
方、上記した両軸部の先端部のうち、どちらか一方に上
下左右に配列された一個の受光体群を配設すると共に他
方に前記受光体群の中央部を照射する発光体を設け、上
記取付部に外力が作用したときに起歪部が変形して前記
受光体群と発光体との相対位置関係が変化し、これによ
り、各受光体群を構成する各受光体が受ける光量が変化
するようにしたことを特徴とする力及びモーメント検出
用の起歪体。
3. A mounting part, which is vertically opposed to each other with a constant space, and shaft parts which are respectively provided in both of the mounting parts and whose tip parts face each other, and a mode which surrounds the shaft part. And a strain-flexing portion having a recessed portion that is provided between the mounting portions and is bent inward, which is one of the inner surface of the recessed portion and the outer surface of the shaft portion that faces the recessed portion. On one side, a group of four light receiving bodies arranged vertically and horizontally is arranged at 90 ° angular intervals, and on the other side, a light emitting body for irradiating the central portion of the light receiving group is provided. One of the tip portions of both shafts is provided with one light-receiving body group arranged vertically and horizontally, and the other is provided with a light-emitting body that irradiates the central portion of the light-receiving body group, and the above-mentioned mounting portion is provided. When an external force is applied, the strain-flexing part is deformed, and the phase Positional relationship is changed, thereby, the strain generating member for force and moment detecting the amount of light the photoreceptor receives constituting each photoreceptor group is characterized in that so as to vary.
【請求項4】 上下に一定間隔を有して対向配設される
取付部と、前記取付部の両方にそれぞれ具備させてあり
且つ先端部相互が対向する軸部と、前記軸部を取り囲む
態様で取付部相互間に架設され且つ内側に向かって折曲
された凹み部を有する起歪部とを具備するものであっ
て、前記凹み部の内面又はこれと対向する軸部の外面の
うちどちらか一方に上下左右に配列された四個の受光体
群と二個の受光体を左右に配列させて成る受光体群を交
互に90°角度間隔で配設すると共に他方に前記受光体
群の中央部を照射する発光体を設け、他方、上記した両
軸部の先端部のうち、どちらか一方に四個の受光体を上
下左右に配列させて成る受光体群90°角度間隔で配設
すると共に他方に前記受光体群の中央部を照射する発光
体を設け、上記取付部に外力が作用したときに起歪部が
変形して前記受光体群と発光体との相対位置関係が変化
し、これにより、各受光体群を構成する各受光体が受け
る光量が変化するようにしたことを特徴とする力及びモ
ーメント検出用の起歪体。
4. A mounting part which is vertically opposed to each other with a constant space, and shaft parts which are respectively provided in both of the mounting parts and whose tip parts face each other, and a mode surrounding the shaft part. And a strain-flexing portion having a recessed portion that is provided between the mounting portions and is bent inward, which is one of the inner surface of the recessed portion and the outer surface of the shaft portion that faces the recessed portion. On one side, four light-receiving body groups arranged vertically and horizontally and on the other hand, light-receiving body groups formed by arranging two light-receiving bodies on the left and right are alternately arranged at 90 ° angular intervals, and on the other side the light-receiving body group is arranged. A light-emitting body for irradiating the central portion is provided, and on the other hand, a light-receiving element group formed by arranging four light-receiving elements vertically or horizontally in either one of the tip portions of the above-described shaft portions is arranged at 90 ° angular intervals. And the other side is provided with a light-emitting body that irradiates the central portion of the light-receiving body group, When the external force is applied, the strain-flexing portion is deformed to change the relative positional relationship between the light-receiving body group and the light-emitting body, thereby changing the amount of light received by each light-receiving body forming each light-receiving body group. A strain-generating body for detecting force and moment, which is characterized in that
【請求項5】 上下に一定間隔を有して対向配設される
取付部と、前記取付部のうち一方に具備させてあり且つ
先端部が他方の取付部と対向する軸部と、前記軸部を取
り囲む態様で取付部相互間に架設され且つ内側に向かっ
て折曲された凹み部を有する起歪部とを具備するもので
あって、前記凹み部の内面又はこれと対向する軸部の外
面のうち、どちらか一方に四個の小極板を上下左右に配
列させて成る極板群を90°角度間隔で配設すると共に
他方に前記極板群と略同一面積の大極板を設け、他方、
前記軸部の先端部又はこれに対向する取付部分のうちど
ちらか一方に小極板が上下左右に配列されて成る極板群
を配設すると共に他方に前記極板群と略同一面積の大極
板を設け、上記取付部に外力が作用したときに起歪部が
変形して前記極板群と大極板との相対位置関係が変化
し、これにより、各極板群の小極板における大極板との
間のコンデンサ容量が変化するようにしたことを特徴と
する力及びモーメント検出用の起歪体。
5. A mounting portion vertically opposed to each other with a constant space, a shaft portion provided in one of the mounting portions and having a tip end facing the other mounting portion, and the shaft. A strain-flexing portion that is provided between the mounting portions in a manner that surrounds the portion and that has a recessed portion that is bent inward, the inner surface of the recessed portion or the shaft portion facing the inner surface of the recessed portion. On one of the outer surfaces, a group of four small plates arranged vertically and horizontally is arranged at 90 ° angular intervals, and on the other side, a large plate having substantially the same area as the group of plates is arranged. Provided, on the other hand,
A pole plate group consisting of small pole plates arranged vertically and horizontally is disposed on either one of the tip portion of the shaft portion or the mounting portion facing the tip portion, and on the other side a large pole plate having substantially the same area as the pole plate group is arranged. An electrode plate is provided, and when an external force is applied to the mounting portion, the strain generating portion is deformed to change the relative positional relationship between the electrode plate group and the large electrode plate, whereby the small electrode plate of each electrode plate group is changed. A strain-generating body for detecting force and moment, characterized in that the capacitance of the capacitor between the large pole plate and the large pole plate is changed.
【請求項6】 上下に一定間隔を有して対向配設される
取付部と、前記取付部のうち一方に具備させてあり且つ
先端部が他方の取付部と対向する軸部と、前記軸部を取
り囲む態様で取付部相互間に架設され且つ内側に向かっ
て折曲された凹み部を有する起歪部とを具備するもので
あって、前記凹み部の内面又はこれと対向する軸部の外
面のうち、どちらか一方に四個の小極板を上下左右に配
列させて成る極板群と二個の受光体を左右に配列させて
成る受光体群を交互に90°角度間隔で配設すると共に
他方に前記極板群と略同一面積の大極板を設け、他方、
前記軸部の先端部又はこれに対向する取付部分のうちど
ちらか一方に小極板が上下左右に配列されて成る極板群
を配設すると共に他方に前記極板群と略同一面積の大極
板を設け、上記取付部に外力が作用したときに起歪部が
変形して前記極板群と大極板との相対位置関係が変化
し、これにより、各極板群の小極板における大極板との
間のコンデンサ容量が変化するようにしたことを特徴と
する力及びモーメント検出用の起歪体。
6. A mounting portion which is vertically disposed to face each other with a constant interval, a shaft portion which is provided in one of the mounting portions and has a tip portion facing the other mounting portion, and the shaft. A strain-flexing portion that is provided between the mounting portions in a manner that surrounds the portion and that has a recessed portion that is bent inward, the inner surface of the recessed portion or the shaft portion facing the inner surface of the recessed portion. On one of the outer surfaces, a group of four plates arranged vertically or horizontally on either side and a group of photoreceptors composed of two photoreceptors arranged on the left and right are alternately arranged at 90 ° angular intervals. And a large electrode plate having substantially the same area as the electrode plate group is provided on the other side, and on the other hand,
A pole plate group consisting of small pole plates arranged vertically and horizontally is disposed on either one of the tip portion of the shaft portion or the mounting portion facing the tip portion, and on the other side a large pole plate having substantially the same area as the pole plate group is arranged. An electrode plate is provided, and when an external force is applied to the mounting portion, the strain generating portion is deformed to change the relative positional relationship between the electrode plate group and the large electrode plate, whereby the small electrode plate of each electrode plate group is changed. A strain-generating body for detecting force and moment, characterized in that the capacitance of the capacitor between the large pole plate and the large pole plate is changed.
【請求項7】 上下に一定間隔を有して対向配設される
取付部と、前記取付部の両方にそれぞれ具備させてあり
且つ先端部相互が対向する軸部と、前記軸部を取り囲む
態様で取付部相互間に架設され且つ内側に向かって折曲
された凹み部を有する起歪部とを具備するものであっ
て、前記凹み部の内面又はこれと対向する軸部の外面の
うち、どちらか一方に上下左右に配列された四個の小極
板で構成された極板群を90°角度間隔で配設すると共
に他方に前記極板群と略同一面積の大極板を設け、他
方、上記した両軸部の先端部のうちどちらか一方に小極
板が上下左右に配列されて成る極板群を配設すると共に
他方に前記極板群と略同一面積の大極板を設け、上記取
付部に外力が作用したときに起歪部が変形して前記極板
群と大極板との相対位置関係が変化し、これにより、各
極板群の小極板における大極板との間のコンデンサ容量
が変化するようにしたことを特徴とする力及びモーメン
ト検出用の起歪体。
7. A mounting part, which is vertically opposed to each other with a constant space, and a shaft part which is provided in both of the mounting parts and whose tip parts face each other, and a mode that surrounds the shaft part. And a strain-flexing portion having a recessed portion which is provided between the mounting portions and is bent inward, wherein, of the inner surface of the recessed portion or the outer surface of the shaft portion facing the inner surface, An electrode plate group composed of four small electrode plates arranged vertically and horizontally on either side is arranged at 90 ° angular intervals, and on the other side, a large electrode plate having substantially the same area as the electrode plate group is provided, On the other hand, a pole plate group consisting of small pole plates arranged vertically and horizontally is arranged on either one of the tip ends of the above-mentioned both shaft portions, and on the other side a big pole plate having substantially the same area as the pole plate group is arranged. And the relative position between the electrode group and the large electrode plate due to deformation of the strain-generating part when an external force acts on the mounting part. Engagement is changed, thereby, force and strain body for moment detection capacitor capacity is characterized in that so as to vary between the large electrode plate in the small plates of the electrode plate group.
【請求項8】 上下に一定間隔を有して対向配設される
取付部と、前記取付部の両方にそれぞれ具備させてあり
且つ先端部相互が対向する軸部と、前記軸部を取り囲む
態様で取付部相互間に架設され且つ内側に向かって折曲
された凹み部を有する起歪部とを具備するものであっ
て、前記凹み部の内面又はこれと対向する軸部の外面の
うち、どちらか一方に四個の小極板を上下左右に配列さ
せて成る極板群と二個の受光体を左右に配列させて成る
受光体群を交互に90°角度間隔で配設すると共に他方
に前記極板群と略同一面積の大極板を設け、他方、上記
した両軸部の先端部のうちどちらか一方に小極板が上下
左右に配列されて成る極板群を配設すると共に他方に前
記極板群と略同一面積の大極板を設け、上記取付部に外
力が作用したときに起歪部が変形して前記極板群と大極
板との相対位置関係が変化し、これにより、各極板群の
小極板における大極板との間のコンデンサ容量が変化す
るようにしたことを特徴とする力及びモーメント検出用
の起歪体。
8. A mode in which mounting portions are arranged to face each other at a certain interval in the vertical direction, and shaft portions which are provided in both of the mounting portions and whose tip portions face each other, and which surround the shaft portion. And a strain-flexing portion having a recessed portion which is provided between the mounting portions and is bent inward, wherein, of the inner surface of the recessed portion or the outer surface of the shaft portion facing the inner surface, An electrode plate group formed by arranging four small electrode plates vertically and horizontally on either side and a light receiver group formed by arranging two light receiving members on the left and right are alternately arranged at 90 ° angular intervals, and Is provided with a large electrode plate having substantially the same area as that of the electrode plate group, and on the other hand, an electrode plate group in which small electrode plates are vertically and horizontally arranged is provided at either one of the tip ends of the both shaft portions. At the same time, a large electrode plate having approximately the same area as the electrode plate group is provided on the other side, and is started when an external force acts on the mounting portion. The parts are deformed so that the relative positional relationship between the electrode group and the large electrode plate is changed, so that the capacitor capacitance between the large electrode plate and the small electrode plate of each electrode plate group is changed. A strain-generating body for detecting force and moment.
【請求項9】 起歪部が、90°角度間隔で配置された
帯状板で構成されていると共に、受光体群又は発光体の
配設位置が前記帯状板に設定されていることを特徴とす
る請求項1乃至4のいずれかに記載の力及びモーメント
検出用の起歪体。
9. The strain-flexing portion is composed of strip-shaped plates arranged at 90 ° angular intervals, and the arrangement position of the light-receiving body group or the light-emitting bodies is set on the strip-shaped plate. A flexure element for detecting force and moment according to any one of claims 1 to 4.
【請求項10】 起歪部が、90°角度間隔で配置され
た帯状板で構成されていると共に、極板群又は大極板の
配設位置が前記帯状板に設定されていることを特徴とす
る請求項5乃至8のいずれかに記載の力及びモーメント
検出用の起歪体。
10. The strain-flexing portion is composed of strip-shaped plates arranged at 90 ° angular intervals, and the position of the electrode plate group or the large electrode plate is set on the strip-shaped plate. A strain-generating body for detecting force and moment according to any one of claims 5 to 8.
JP12229792A 1992-05-14 1992-05-14 Flexure element for detecting force and moment Expired - Lifetime JP3177790B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12229792A JP3177790B2 (en) 1992-05-14 1992-05-14 Flexure element for detecting force and moment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12229792A JP3177790B2 (en) 1992-05-14 1992-05-14 Flexure element for detecting force and moment

Publications (2)

Publication Number Publication Date
JPH05312659A true JPH05312659A (en) 1993-11-22
JP3177790B2 JP3177790B2 (en) 2001-06-18

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ID=14832475

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3177790B2 (en)

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