JP6727605B1 - Force sensor - Google Patents

Abstract

A force sensor according to the present invention includes a force-receiving body, a support body that supports the force-receiving body, a force-receiving body and the support body, and a detection unit that is elastically deformed by the action of a force or moment received by the force-receiving body. And a detection element for detecting elastic deformation generated in the detection unit. Based on the detection result of the detection element, the detection circuit outputs an electric signal indicating the force or moment acting on the detection strain generating element. The force receiving body and the support body are connected by an auxiliary strain generating body, and the auxiliary strain generating body is elastically deformed by the action of a force or a moment received by the force receiving body.

Description

The present invention relates to a force sensor.

BACKGROUND ART Conventionally, a force sensor has been known that outputs a force acting in a predetermined axial direction and a moment (torque) acting around a predetermined rotation axis as an electric signal. This force sensor is widely used for force control of various robots such as industrial robots, collaborative robots, life support robots, medical robots and service robots. Therefore, it is required to improve performance as well as safety.

For example, in a general force sensor, when a force or a moment is input, a strain-generating body forming the force sensor is elastically deformed and distorted and displaced. By detecting the magnitude of the displacement as an electric signal, the magnitude of the input force or moment can be obtained. There are various detection methods, and examples thereof include a capacitance method, a strain gauge method, a piezoelectric method, and an optical method.

During the elastic deformation of the flexure element, stress is applied to the flexure element. A rated load and a rated moment are set in the force sensor according to the relationship between the stress applied to the flexure element and the material strength of the flexure element. In order to increase the rated load and rated moment, it is required to improve the strength of the force sensor.

Japanese Patent No. 4907050

The present invention has been made in consideration of such a point, and an object thereof is to provide a force sensor capable of improving strength.

The present invention is
A force-receiving body that receives the action of a force or moment to be detected,
A support body disposed on one side of the force receiving body in the first direction and supporting the force receiving body;
A detection strain body having a detection unit that connects the force receiving body and the support body and that is elastically deformed by the action of a force or a moment received by the force receiving body,
A detection element for detecting elastic deformation generated in the detection unit,
Based on the detection result of the detection element, a detection circuit that outputs an electric signal indicating the force or moment acting on the detection strain generating element,
A force sensor, comprising: a force-receiving body connected to the support body; and an auxiliary strain-generating body that is elastically deformed by the action of a force or moment received by the force receiving body
I will provide a.

In the force sensor described above,
The auxiliary strain generating body is a tilting body extending in a second direction orthogonal to the first direction, and a first connecting body connecting the force receiving body and the tilting body, and a force received by the force receiving body. Alternatively, the first connecting body is elastically deformable by the action of a moment, and the second connecting body that connects the tilting body and the support body is elastically deformable by the action of the force or the moment received by the force receiving body. A second connecting body,
You may do it.

Also, in the force sensor described above,
The first connection body and the second connection body are arranged at positions different from each other in the second direction,
You may do it.

Also, in the force sensor described above,
The force receiving body and the support body, when viewed in the first direction, are connected by a plurality of the auxiliary flexure elements arranged around the detection flexure element,
The plurality of auxiliary strain-generating bodies have a first auxiliary strain-generating body and a second auxiliary strain-generating body which are adjacent to each other around the detected strain generating body,
The first connection body of the first auxiliary strain-generating body is arranged closer to the second auxiliary strain-generating body than the second connecting body of the first auxiliary strain-generating body,
The first connecting body of the second auxiliary strain generating element is arranged closer to the first auxiliary strain generating element than the second connecting body of the second auxiliary strain generating element is,
You may do it.

Also, in the force sensor described above,
The force receiving body and the support body, when viewed in the first direction, are connected by a plurality of the auxiliary flexure elements arranged around the detection flexure element,
The plurality of auxiliary strain-generating bodies have a first auxiliary strain-generating body and a second auxiliary strain-generating body which are adjacent to each other around the detected strain generating body,
The first connection body of the first auxiliary strain-generating body is arranged closer to the second auxiliary strain-generating body than the second connecting body of the first auxiliary strain-generating body,
The second connecting body of the second auxiliary flexure element is arranged closer to the first auxiliary flexure element than the first connecting body of the second auxiliary flexure element is,
You may do it.

Also, in the force sensor described above,
The first connecting body is connected to an end portion of the tilting body on the side of the force receiving body, and the second connecting body is connected to an end portion of the tilting body on the side of the support body,
You may do it.

Also, in the force sensor described above,
The first connection body is connected to an end portion of the tilting body on the support body side, and the second connection body is connected to an end portion of the tilting body on the force receiving body side,
You may do it.

Also, in the force sensor described above,
The first connection body and the second connection body extend in the first direction,
You may do it.

Also, in the force sensor described above,
The first connection body and the second connection body extend in a direction inclined with respect to the first direction,
You may do it.

Also, in the force sensor described above,
The first connection body and the second connection body are curved when viewed in a direction orthogonal to the first direction and the second direction,
You may do it.

Also, in the force sensor described above,
The first connecting body and the second connecting body are arranged at positions overlapping each other when viewed in the first direction,
The tilting body includes a slit that extends in the second direction when viewed in a direction orthogonal to the first direction and the second direction and that is open at one end of the tilting body.
You may do it.

Also, in the force sensor described above,
The first connecting body and the second connecting body are arranged at positions overlapping each other when viewed in the first direction,
The tilting body includes a slit having a closed shape that extends in the second direction when viewed in a direction orthogonal to the first direction and the second direction,
You may do it.

Also, in the force sensor described above,
The tilting body is formed symmetrically in the second direction with the first connecting body and the second connecting body as a center when viewed in a direction orthogonal to the first direction and the second direction. ,
You may do it.

Also, in the force sensor described above,
When viewed in a direction orthogonal to the first direction and the second direction, at least one of the contour of the first connecting body and the contour of the second connecting body and the contour of the tilting body are R contour portions. Connected through,
You may do it.

Also, in the force sensor described above,
The tilting body includes a slit that extends in the second direction and opens at one end of the tilting body when viewed in the first direction,
The first connecting body is connected to a portion of the tilting body on one side with respect to the slit,
The second connecting body is connected to a portion of the tilting body on the other side of the slit,
You may do it.

Also, in the force sensor described above,
The tilting body includes a slit having a closed shape that extends in the second direction when viewed in the first direction,
The first connecting body is connected to a portion of the tilting body on one side with respect to the slit,
The second connecting body is connected to a portion of the tilting body on the other side of the slit,
You may do it.

Also, in the force sensor described above,
The tilting body is formed symmetrically in the second direction with the first connecting body and the second connecting body as a center when viewed in a direction orthogonal to the first direction and the second direction. ,
You may do it.

Also, in the force sensor described above,
A connection position between the first connection body and the force receiving body and a connection position between the second connection body and the support body are arranged at positions different from each other in a direction orthogonal to the first direction and the second direction. Has been
You may do it.

Also, in the force sensor described above,
The connection position between the first connection body and the force receiving body and the connection position between the second connection body and the support body are arranged at the same position in the direction orthogonal to the first direction and the second direction. ing,
You may do it.

Also, in the force sensor described above,
The first connecting body is connected to the force receiving body via a first pedestal,
You may do it.

Also, in the force sensor described above,
The second connection body is connected to the support body via a second pedestal,
You may do it.

Also, in the force sensor described above,
The auxiliary strain generating body has a connecting body extending from the force receiving body to the support body and elastically deformable by an action of a force or a moment received by the force receiving body,
The connection body is inclined with respect to the first direction,
You may do it.

Also, in the force sensor described above,
The connection body is connected to the force receiving body via a first pedestal, and is connected to the support body via a second pedestal,
You may do it.

Also, in the force sensor described above,
The auxiliary strain generating body is connected to the force receiving body via a first pedestal, and a first tilting body extending in a second direction orthogonal to the first direction and the support body via a second pedestal. A second tilting body that is connected and extends in the second direction, and a connecting body that connects the first tilting body and the second tilting body and is elastically deformable by the action of the force or moment received by the detection unit. And has,
You may do it.

Also, in the force sensor described above,
At one end in the second direction, the first tilting body is connected to the force receiving body, and the second tilting body is connected to the support body;
The first tilting body and the second tilting body are connected to the connecting body at the other end in the second direction.
You may do it.

Also, in the force sensor described above,
The first tilting body and the second tilting body are connected to the connecting body at both ends in the second direction,
The first tilting body is connected to the force receiving body and the second tilting body is connected to the support body at a position between the pair of connection bodies in the second direction.
You may do it.

Also, in the force sensor described above,
When the first tilting body and the second tilting body are viewed in a direction orthogonal to the first direction and the second direction, the first tilting body and the second tilting body are left and right in the second direction with the first base and the second base as centers. Formed symmetrically,
You may do it.

Also, in the force sensor described above,
The first tilting body and the second tilting body are arranged at positions different from each other in a direction orthogonal to the first direction and the second direction,
A connection position between the first pedestal and the force receiving body and a connection position between the second pedestal and the support body are arranged at positions different from each other in a direction orthogonal to the first direction and the second direction. Is
You may do it.

Also, in the force sensor described above,
The first tilting body and the second tilting body are arranged at positions different from each other in a direction orthogonal to the first direction and the second direction,
The connection position between the first pedestal and the force receiving body and the connection position between the second pedestal and the support body are arranged at the same position in the direction orthogonal to the first direction and the second direction. ,
You may do it.

Also, in the force sensor described above,
The connection body has a longitudinal direction along the first direction,
You may do it.

Also, in the force sensor described above,
When viewed in the first direction, further comprising an exterior body that covers the auxiliary flexure element from the outside,
You may do it.

Also, in the force sensor described above,
The exterior body is fixed to the support body and is separated from the force receiving body,
You may do it.

Also, in the force sensor described above,
A cushioning member is interposed between the exterior body and the force receiving body,
You may do it.

Also, in the force sensor described above,
The detection element has a fixed electrode provided on the force receiving body or the support, and a displacement electrode provided on the detection strain generating element and facing the fixed electrode.
You may do it.

Also, in the force sensor described above,
The detection unit has a strain gauge provided in the detection strain body,
You may do it.

According to the present invention, strength can be improved.

FIG. 1 is a diagram showing an example of a robot to which the force sensor according to the present embodiment is applied. FIG. 2 is a plan view of the force sensor according to this embodiment. 3 is a cross-sectional view of the force sensor of FIG. 2 taken along the line AA. FIG. 4 is a cross-sectional view of the force sensor of FIG. 2 taken along the line BB. FIG. 5 is a plan view showing an example of a fixed electrode of the strain sensing element of FIG. FIG. 6 is a front view showing the auxiliary flexure element of FIG. FIG. 7 is a partial perspective view of the force sensor of FIG. FIG. 8 is a front view showing a deformed state of the auxiliary flexure element when the force sensor of FIG. 2 receives a force on the Y axis direction positive side. FIG. 9 is a front view showing a deformed state of the auxiliary flexure element when the force sensor of FIG. 2 receives a force on the negative side in the Z-axis direction. FIG. 10: is a front view which shows the auxiliary strain generating body of the force sensor in the 1st modification. FIG. 11: is a front view which shows the auxiliary strain generating body of the force sensor in the 2nd modification. FIG. 12 is a front view showing an auxiliary flexure element of the force sensor according to the third modification. FIG. 13A is a front view showing an auxiliary flexure element of a force sensor according to a fourth modification. FIG. 13B is a front view showing an auxiliary flexure element of the force sensor according to a further modification of FIG. 13A. FIG. 14A is a front view showing an auxiliary flexure element of a force sensor according to a fifth modification. 14B is a cross-sectional view taken along the line CC of FIG. 14A. FIG. 14C is a front view showing an auxiliary flexure element of a force sensor according to a further modification of FIG. 14A. FIG. 14D is a sectional view taken along line DD of FIG. 14C. FIG. 14E is a side view showing a modified example of the auxiliary flexure element of FIGS. 14A and 14C. FIG. 15: is a front view which shows the auxiliary strain generating body of the force sensor in the 6th modification. FIG. 16A is a front view showing an auxiliary flexure element of a force sensor according to a seventh modified example. 16B is a cross-sectional view taken along the line EE of FIG. 16A. FIG. 16C is a front view showing an auxiliary flexure element of a force sensor according to a further modification of FIG. 16A. FIG. 16D is a sectional view taken along line FF of FIG. 16C. FIG. 16E is a side view showing a modified example of the auxiliary flexure element of FIGS. 16A and 16C. FIG. 17A is a plan view showing a detected flexure element according to an eighth modification. 17B is a cross-sectional view of the force sensor corresponding to the cross section taken along line GG of FIG. 17A. FIG. 18 is a table showing, as a comparative example of the present embodiment, the maximum stress and displacement that occur in the detected strain generating element of the force sensor that does not include the auxiliary strain generating element. FIG. 19 is a table showing the maximum stress and displacement generated in the detected strain generating element of the force sensor including the auxiliary strain generating element in the present example.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in the drawings attached to this specification, for convenience of illustration and understanding, the scale, the vertical and horizontal dimension ratios, etc. are appropriately changed and exaggerated from the actual ones.

Note that, as used in the present specification, the shape, geometric condition, physical property, and their degree are specified, for example, terms such as “parallel”, “orthogonal”, “equal”, dimensions, and values of physical properties. The terms "etc." are to be construed to include the range in which similar functions can be expected without being bound by the strict meaning.

Before describing the force sensor according to the present embodiment, an application example of the force sensor to a robot will be described with reference to FIG. FIG. 1 is a diagram showing an example of a robot to which the force sensor according to the present embodiment is applied.

As shown in FIG. 1, the industrial robot 1000 includes a robot body 1100, an end effector 1200, an electric cable 1300, a control unit 1400, and a force sensor 1. The robot body 1100 includes the arm part of the robot. The force sensor 1 is provided between the robot body 1100 and the end effector 1200.

The electric cable 1300 extends inside the robot body 1100. The electric cable 1300 is connected to a connector (not shown) of the force sensor 1.

Although the control unit 1400 is arranged inside the robot body 1100 in FIG. 1, it may be arranged at another place (for example, a control panel outside the robot). Further, the manner of mounting the force sensor 1 on the robot is not limited to that shown in FIG.

The force sensor 1 detects a force or moment acting on the end effector 1200 that functions as a gripper. An electric signal indicating the detected force or moment is transmitted to the control unit 1400 of the industrial robot 1000 via the electric cable 1300. The control unit 1400 controls the operations of the robot body 1100 and the end effector 1200 based on the received electric signal.

The force sensor 1 is not limited to the industrial robot, and can be applied to various robots such as a collaborative robot, a life support robot, a medical robot, and a service robot.

Hereinafter, the force sensor according to the embodiment of the present invention will be described with reference to FIGS. 2 to 7. FIG. 2 is a plan view of the force sensor according to this embodiment. 3 is a sectional view taken along the line AA of FIG. 2, and FIG. 4 is a sectional view taken along the line BB of FIG. FIG. 5 is a plan view showing the fixed electrode, FIG. 6 is a front view showing the auxiliary flexure element, and FIG. 7 is a partial perspective view of the force sensor. In the following description, an XYZ coordinate system is defined, the Z-axis direction (first direction) is the vertical direction, the force receiving body 10 is arranged on the upper side, and the support body 20 is arranged on the lower side. Will be explained in the state where is placed. Therefore, the force sensor according to the present embodiment is not limited to being used in a posture in which the Z-axis direction is the vertical direction. Further, which of the force receiving body 10 and the support body 20 is arranged on the upper side or the lower side is arbitrary.

The force sensor 1 has a function of outputting a force acting in a predetermined axial direction and a moment (torque) acting about a predetermined rotation axis as an electric signal.

As shown in FIGS. 2 to 4, the force sensor 1 includes a force receiving body 10, a support body 20, a detection strain element 30, a detection element 40, a detection circuit 50, and an auxiliary strain element 60A. 60D and the exterior body 80 are provided. Hereinafter, each component will be described in more detail.

The force receiving body 10 is subjected to the action of a force or moment to be detected. By receiving this action, the force receiving body 10 moves relative to the support body 20. In the example of FIG. 1 described above, the force receiving body 10 is fixed to the end effector 1200 with a bolt or the like, and receives a force or moment from the end effector 1200. The detection strain generating body 30 and the auxiliary strain generating bodies 60</b>A to 60</b>D are connected to the force receiving body 10, and the force receiving body 10 includes the force receiving body of the detection strain generating body 30 and the auxiliary strain generating bodies 60</b>A to 60</b>D. It is also used as a force receiver. However, the force receiving body of the detection strain generating body 30 and the force receiving bodies of the auxiliary strain generating bodies 60A to 60D may be configured separately. In this case, each force receiving body may be fixed by separate members.

In the present embodiment, the planar shape of the force receiving body 10 is a rectangular flat plate shape. The planar shape of the force receiving body 10 is not limited to the rectangular shape, and may be another shape such as a circular shape, a polygonal shape, or an elliptical shape.

The support body 20 supports the force receiving body 10. The force receiving body 10 and the support body 20 are arranged at mutually different positions in the Z-axis direction, and the support body 20 is separated from the force receiving body 10. In the example of FIG. 1, the support 20 is fixed to the tip of the robot body 1100 (arm portion) with a bolt or the like, and is supported by the robot body 1100. The detection strain body 30 and the auxiliary strain bodies 60A to 60D are connected to the support body 20, and the support body 20 is the support body of the detection strain body 30 and the support bodies of the auxiliary strain bodies 60A to 60D. Is also used as.

In the present embodiment, the planar shape of the support body 20 is a rectangular flat plate shape like the force receiving body 10. The planar shape of the support 20 is not limited to a rectangle, and may be another shape such as a circle, a polygon, or an ellipse.

The detection strain generating body 30 connects the force receiving body 10 and the support body 20. More specifically, the detection strain generating body 30 is disposed between the force receiving body 10 and the support body 20, and the detection strain generating body 30 is connected to the force receiving body 10 and is connected to the support body 20. It is connected. The force receiving body 10 is supported by the support body 20 via the detection strain generating body 30. The detection strain body 30 may have any configuration, but for example, the detection strain body of the force detection device disclosed in Patent Document 1 may be applied. Hereinafter, an example in which the detection strain body of the force detection device is applied to the detection strain body 30 according to the present embodiment will be roughly described. It should be noted that in FIG. 3, the detailed illustration of the detection strain generating element 30 is omitted for the sake of clarity.

As shown in FIG. 4, the detection strain generating body 30 has an intermediate body 31 fixed to the support body 20, and a detecting section D connecting the intermediate body 31 and the force receiving body 10. The detection unit D is configured to be elastically deformed by the action of the force or moment received by the force receiving body 10 to be distorted and displaced. By detecting the magnitude of this displacement, the force or moment is detected by the detection element 40.

As shown in FIG. 2, the planar shape of the intermediate body 31 is a rectangular flat plate shape like the force receiving body 10 and the support body 20. The planar shape of the intermediate body 31 is not limited to the rectangular shape, and may be another shape such as a circular shape, a polygonal shape, or an elliptical shape.

As shown in FIG. 4, the detection unit D includes a diaphragm 32 that connects the force receiving body 10 and the intermediate body 31. The diaphragm 32 is formed between an annular groove portion 33 formed on the upper surface of the intermediate body 31 and a thin cylindrical groove portion 34 formed on the lower surface of the intermediate body 31. The diaphragm 32 is formed thin. As a result, the diaphragm 32 has flexibility and functions as a leaf spring. Further, the diaphragm 32 has conductivity and functions as a common displacement electrode Ed that constitutes a capacitive element described later.

The diaphragm 32 and the force receiving body 10 are connected by a force transmitting portion 35. The force transmission portion 35 includes a first columnar protrusion 36 extending upward from the diaphragm 32 and a second columnar protrusion 37 extending downward from the force receiving body 10. The lower end of the first cylindrical protrusion 36 is connected to the diaphragm 32. The lower end of the second columnar protrusion 37 is connected to the upper end of the first columnar protrusion 36. An annular groove 38 is formed on the lower surface of the force receiving body 10, and a thin portion 39 is formed above the groove 38. The upper end of the second cylindrical protrusion 37 is connected to the thin portion 39. The thin portion 39 has flexibility and functions as a leaf spring.

In the example shown in FIGS. 2 to 4, the force receiving body 10 and the intermediate body 31 are connected by the two force transmitting portions 35. However, the number is not limited to this, and the number of force transmission portions 35 that connect the force receiving body 10 and the intermediate body 31 is arbitrary.

The detection element 40 is configured to detect the displacement generated in the detection unit D. In the present embodiment, the detection element 40 is configured as a capacitive element, and includes the fixed electrode Ef provided on the force receiving body 10 or the support body 20, and the common displacement electrode Ed provided on the detection strain generating body 30. ,have. The common displacement electrode Ed and the fixed electrode Ef face each other.

In the present embodiment, the common displacement electrode Ed is composed of the diaphragm 32 described above. A plurality of fixed electrodes Ef are provided in the groove 34 of the intermediate body 31. Each fixed electrode Ef is fixed to the upper surface of the support 20 and faces the diaphragm 32.

For example, as shown in FIG. 5, five fixed electrodes Ef may be provided in the groove 34 of the intermediate body 31. In this case, the fixed electrodes Ef may be arranged on both outer sides in the X-axis direction and both outer sides in the Y-axis direction with respect to the central fixed electrode Ef. The fixed electrodes Ef and the common displacement electrode Ed each form a capacitive element. Therefore, a plurality of capacitive elements are formed for one diaphragm.

The detection circuit 50 outputs an electric signal indicating the force or moment acting on the detected strain generating element 30, based on the detection result of the detection element 40. The detection circuit 50 may have an arithmetic function including, for example, a microprocessor. Further, the detection circuit 50 may have an A/D conversion function of converting an analog signal received from the detection element 40 described above into a digital signal, and a function of amplifying the signal. The detection circuit 50 may include a terminal that outputs an electric signal, and the electric signal is transmitted from the terminal to the control unit 1400 described above via the electric cable 1300 (see FIG. 1 ).

Next, the configurations of the auxiliary strain producing bodies 60A to 60D will be described in more detail.

As shown in FIGS. 3 and 4, the auxiliary strain generating bodies 60</b>A to 60</b>D are affected by the force or moment received by the force receiving body 10. That is, the auxiliary strain generating bodies 60</b>A to 60</b>D are arranged between the force receiving body 10 and the support body 20, and are connected to the force receiving body 10 and the support body 20. As a result, when the force receiving body 10 is subjected to the action of a force or moment, not only the above-described detected strain generating body 30 but also the auxiliary strain generating bodies 60A to 60D are also elastically deformed due to the action thereof, and a strain is generated and displaced. Is configured to. In addition, in the present embodiment, the magnitude of the displacement of the auxiliary strain generating bodies 60A to 60D is not detected by the above-described detection element 40. Therefore, the force or moment received by the force receiving body 10 is detected by the detection element 40 from the magnitude of the displacement of the detecting portion D of the detection strain generating body 30, not the magnitude of the displacement of the auxiliary strain generating bodies 60A to 60D. To be done.

In the present embodiment, the plurality of auxiliary flexure bodies 60A to 60D are connected to the force receiving body 10 and the support body 20. Thereby, the action of the force or moment received by the force receiving body 10 is received by the plurality of auxiliary strain generating bodies 60A to 60D, and each of the auxiliary strain generating bodies 60A to 60D elastically deforms to generate strain, It will be displaced. The plurality of auxiliary strain generating bodies 60A to 60D are arranged around the detection strain generating body 30 when viewed in the Z-axis direction, and may be arranged outside the detection strain generating body 30. The plurality of auxiliary flexure elements 60A to 60D may be evenly arranged around the detected flexure element 30 when viewed in the Z-axis direction.

In the present embodiment, as shown in FIG. 2, four auxiliary strain generating bodies 60A to 60D are connected to the force receiving body 10 and the support body 20. The four auxiliary flexure elements 60A to 60D are arranged around the detection flexure element 30 when viewed in the Z-axis direction, and are evenly arranged at 90° intervals. More specifically, the auxiliary strain body 60A is arranged on the positive side in the X-axis direction with respect to the detected strain body 30, and the auxiliary strain body 60B is arranged on the positive side in the Y-axis direction. In addition, the auxiliary strain generating body 60C is arranged on the negative side in the X-axis direction with respect to the detected strain generating body 30, and the auxiliary strain generating body 60D is arranged on the negative side in the Y-axis direction.

The number of the auxiliary strain generating bodies 60A to 60D that connect the force receiving body 10 and the support body 20 is not limited to four, and may be three or less, or five or more. However, it is optional. Also in this case, the auxiliary flexure elements 60A to 60D may be evenly arranged around the detected flexure element 30 when viewed in the Z-axis direction.

The four auxiliary strain generating bodies 60A to 60D are arranged such that the tilting body 61, which will be described later, extends in a different direction (second direction). That is, the second direction of the tilting body 61 of the auxiliary strain generating bodies 60A and 60C faces the Y-axis direction, and the second direction of the tilting body 61 of the auxiliary strain generating bodies 60B and 60D faces the X-axis direction. There is. However, the respective auxiliary flexure elements 60A to 60D have the same structure. Therefore, the auxiliary flexure element 60A will be described in more detail below as an example.

As shown in FIG. 6, the auxiliary strain generating body 60A is a tilting body 61 arranged between the force receiving body 10 and the supporting body 20, and a first connecting body connecting the force receiving body 10 and the tilting body 61. 62 and a second connection body 63 that connects the support body 20 and the tilting body 61.

The tilting body 61 is separated from the force receiving body 10 and the support body 20 in the Z-axis direction. The tilting body 61 of the auxiliary strain generating body 60A extends with the Y-axis direction as the second direction. In the present embodiment, the tilting body 61 is formed in a rectangular shape when viewed in the X-axis direction orthogonal to the Z-axis direction and the Y-axis direction (when viewed as in FIG. 6 ). The tilting body 61 is formed so that the dimension in the Y-axis direction is larger than the dimension in the Z-axis direction and is less flexible than the first connecting body 62 and the second connecting body 63. ..

The first connecting body 62 and the second connecting body 63 are elastically deformable by the action of the force or moment received by the force receiving body 10. In the present embodiment, the first connecting body 62 and the second connecting body 63 extend in the Z-axis direction. The first connecting body 62 and the second connecting body 63 are formed so that the dimension in the Y-axis direction of the auxiliary strain body 60A is smaller than the dimension in the Z-axis direction, and are more flexible than the tilting body 61. Is formed. Therefore, the first connecting body 62 and the second connecting body 63 can effectively function as a leaf spring.

The upper end of the first connecting body 62 is connected to the force receiving body 10, and the lower end is connected to the end portion (upper end portion 61a) of the tilting body 61 on the side of the force receiving body 10. The lower end of the second connection body 63 is connected to the support body 20, and the upper end is connected to the end portion (lower end portion 61b) of the tilting body 61 on the support body 20 side. The first connection body 62 and the second connection body 63 are arranged at different positions in the Y-axis direction. The first connection body 62 and the second connection body 63 are arranged at the same position in the X-axis direction.

The auxiliary strain body 60A may be formed by machining a plate material made of a metal material such as an aluminum alloy or an iron alloy. In this case, the tilting body 61, the first connecting body 62, and the second connecting body 63 are formed in a plate shape so that the X-axis direction is the thickness direction, and are integrally formed of a continuous plate material. As a result, the auxiliary flexure element 60A can be easily manufactured. The auxiliary flexure element 60A formed in this manner may be fixed to the force receiving body 10 and the support body 20 with bolts or the like.

By the way, as shown in FIGS. 2 and 7, the auxiliary strain generating body 60A and the auxiliary strain generating body 60B are adjacent to each other around the detected strain generating body 30 when viewed in the Z-axis direction. The auxiliary strain body 60A and the auxiliary strain body 60B are arranged such that the first connecting bodies 62 are close to each other. That is, the first connecting body 62 of the auxiliary flexure element 60A (corresponding to the first auxiliary flexure element) is more auxiliary than the second connecting body 63 of the auxiliary flexure element 60A. It is located on the side of). The first connecting body 62 of the auxiliary flexure body 60B is arranged closer to the auxiliary flexure body 60A than the second connecting body 63 of the auxiliary flexure body 60B.

Similarly, as shown in FIG. 2, the auxiliary strain generating body 60C and the auxiliary strain generating body 60D are adjacent to each other around the detected strain generating body 30 when viewed in the Z-axis direction. The auxiliary strain body 60C and the auxiliary strain body 60D are arranged such that the first connecting bodies 62 are close to each other. That is, the first connecting body 62 of the auxiliary flexure body 60C (corresponding to the first auxiliary flexure body) is more subordinate to the auxiliary flexure body 60D (second auxiliary flexure body) than the second connecting body 63 of the auxiliary flexure body 60C. It is located on the side of). The first connection body 62 of the auxiliary flexure body 60D is arranged closer to the auxiliary flexure body 60C than the second connection body 63 of the auxiliary flexure body 60D.

On the other hand, as shown in FIG. 2, the auxiliary flexure element 60B and the auxiliary flexure element 60C are adjacent to each other around the detected flexure element 30 when viewed in the Z-axis direction. The auxiliary strain body 60B and the auxiliary strain body 60C are arranged such that the second connecting bodies 63 are close to each other. That is, the second connecting body 63 of the auxiliary flexure body 60B is arranged closer to the auxiliary flexure body 60C than the first connecting body 62 of the auxiliary flexure body 60B. The second connecting body 63 of the auxiliary strain generating body 60C is arranged closer to the auxiliary strain generating body 60B than the first connecting body 62 of the auxiliary strain generating body 60C.

Similarly, as shown in FIG. 2, the auxiliary flexure element 60D and the auxiliary flexure element 60A are adjacent to each other around the detected flexure element 30 when viewed in the Z-axis direction. The auxiliary strain body 60D and the auxiliary strain body 60A are arranged such that the second connecting bodies 63 are close to each other. That is, the second connecting body 63 of the auxiliary flexure element 60D is arranged closer to the auxiliary flexure element 60A than the first connecting body 62 of the auxiliary flexure element 60D. The second connecting body 63 of the auxiliary strain generating body 60A is arranged closer to the auxiliary strain generating body 60D than the first connecting body 62 of the auxiliary strain generating body 60A.

As shown in FIGS. 2 to 4, the exterior body 80 is configured to cover the detected strain producing body 30 and the auxiliary strain producing bodies 60A to 60D from the outside when viewed in the Z-axis direction. The exterior body 80 is a tubular housing that constitutes the force sensor 1. The detection strain generating body 30 and the auxiliary strain generating bodies 60</b>A to 60</b>D are housed in the exterior body 80. In the present embodiment, the planar cross-sectional shape (the shape in the cross section along the XY plane) of the outer package 80 is a rectangular frame shape, but it is not limited to this, and a circular frame shape, a polygonal frame shape, an elliptical frame shape, and the like. The shape may be.

As shown in FIGS. 3 and 4, the exterior body 80 is fixed to the support body 20 and separated from the force receiving body 10. The force receiving body 10 is arranged in one opening (the upper opening in FIGS. 3 and 4) of the exterior body 80, and the support 20 is provided in the other opening (the lower opening in FIGS. 3 and 4). Are arranged.

More specifically, the support body 20 is fixed to the exterior body 80 so as to close the lower opening of the exterior body 80. The exterior body 80 may be configured integrally with the support body 20. On the other hand, a gap is provided between the force receiving body 10 and the exterior body 80, and the force receiving body 10 can be displaced according to the action of the force or moment received from the robot. In order to secure waterproofness and dustproofness, a cushioning member 81 such as rubber may be interposed in the gap between the force receiving body 10 and the exterior body 80.

Next, a case where a force or a moment acts on the force sensor 1 of the present embodiment having such a configuration will be described.

When the force receiving body 10 receives a force or a moment, the force or the moment is transmitted to the thin portion 39, the second cylindrical protrusion 37, and the first cylindrical protrusion 36 of the force receiving body 10 to provide flexibility. The diaphragm 32 included therein is elastically deformed and is distorted to be displaced. As a result, the distance between the diaphragm 32 that functions as the common displacement electrode Ed of the detection element 40 and each fixed electrode Ef changes, and the capacitance value between the diaphragm 32 and each fixed electrode Ef changes. The change in the electrostatic capacitance value is detected by the detection element 40 as a displacement generated in the detection unit D (that is, the diaphragm 32). In this case, the capacitance value between each fixed electrode Ef and the diaphragm 32 may be different for each fixed electrode Ef, except when the force of the Z-axis direction is applied. Therefore, the detection circuit 50 can detect the direction and magnitude of the force or moment acting on the force receiving body 10 based on the change in the capacitance value detected by the detection element 40.

When the force receiving body 10 is subjected to the action of a force or moment, each of the auxiliary strain-generating bodies 60A to 60D connecting the force receiving body 10 and the support body 20 is also affected by the action of the force or moment received by the force receiving body 10. receive. More specifically, the force or moment is transmitted to the first connecting body 62, the tilting body 61 and the second connecting body 63 of each of the auxiliary strain generating bodies 60A to 60D, and the flexible first connecting body 62 and The second connecting body 63 is elastically deformed to generate a strain and is displaced. This will be described more specifically with reference to FIGS. 8 and 9. FIG. 8 is a diagram showing a deformed state of the auxiliary strain-generating body 60A when receiving a force on the Y axis direction positive side, and FIG. 9 is a diagram showing a deformed state of the auxiliary strain generating body when receiving a force on the negative side in the Z axis direction. It is a figure which shows the deformation|transformation state of 60A.

For example, when the force Fy is applied to the force receiving body 10 on the Y axis direction positive side, as shown in FIG. 8, the first connecting body 62 and the second connecting body 63 of the auxiliary flexure body 60A move in the Y axis direction. Elastically deforms. More specifically, the first connecting body 62 of the auxiliary flexure element 60A is arranged on the Y axis direction positive side of the second connecting body 63, and the upper end of the first connecting body 62 is Y higher than the lower end. The first connector 62 is displaced to the positive side in the axial direction, and the first connection body 62 is inclined to the positive side in the Y axis direction with respect to the Z axis direction. Similarly, the upper end of the second connecting body 63 is displaced to the Y axis direction positive side with respect to the lower end, and the second connecting body 63 is inclined with respect to the Z axis direction so as to fall to the Y axis direction positive side. In this way, the force Fy acting on the force receiving body 10 also acts on the auxiliary strain generating body 60A, and the auxiliary strain generating body 60A is distorted and displaced. The same applies when the force Fy acts on the force receiver 10 on the Y axis direction negative side.

Since the first connecting body 62 of the auxiliary strain generating body 60C is arranged on the Y axis direction negative side of the second connecting body 63, the first connecting body 62 is connected in the opposite direction to the auxiliary strain generating body 60A shown in FIG. The body 62 and the second connecting body 63 are elastically deformed so as to incline, generate strain, and are displaced.

Since the first connecting body 62 and the second connecting body 63 of the auxiliary strain generating body 60B and the auxiliary strain generating body 60D are arranged such that the Y axis direction is the thickness direction, the force Fy on the Y axis direction positive side is applied. On the other hand, it is elastically deformed so as to bend in the thickness direction to generate a strain and is displaced. In this case, the first connecting body 62, the second connecting body 63, and the tilting body 61 are inclined with respect to the Z-axis direction so as to fall to the Y axis direction positive side.

Similarly, when the force Fx in the X-axis direction acts on the force receiving body 10, the first connecting body 62 and the second connecting body 63 of the auxiliary strain generating body 60B and the auxiliary strain generating body 60D similarly fall in the X axis direction. As described above, it elastically deforms so as to be inclined with respect to the Z-axis direction. The auxiliary strain generating body 60A and the auxiliary strain generating body 60C are elastically deformed so as to bend in the thickness direction, generate strain, and are displaced.

Further, for example, when the force Fz acts on the force receiving body 10 on the Z axis direction negative side, the first connecting body 62 and the second connecting body 63 extend in the Z axis direction, and therefore, as shown in FIG. Then, the tilting body 61 of the auxiliary strain generating body 60A elastically deforms. More specifically, the tilting body 61 receives a downward force from the first connecting body 62, and the end of the tilting body 61 on the Y axis direction positive side is displaced downward. On the other hand, since the second connecting body 63 is supported by the supporting body 20, the end of the tilting body 61 on the Y axis direction negative side is prevented from being displaced downward. Therefore, the tilting body 61 tilts as shown in FIG. In this way, the force Fz acting on the force receiving body 10 also acts on the auxiliary strain generating body 60A, and the auxiliary strain generating body 60A is distorted and displaced. The auxiliary strain generating body 60B, the auxiliary strain generating body 60C, and the auxiliary strain generating body 60D are similarly elastically deformed to generate strain and are displaced.

Although not shown, even when a force directed in another direction or a moment around each axis acts on the force receiving body 10, each of the auxiliary strain-generating bodies 60A to 60D elastically deforms to generate a strain and a displacement. To do.

Therefore, when the auxiliary strain generating bodies 60A to 60D according to the present embodiment are used, it is only necessary to receive the action of the force or moment received by the force receiving body 10 by the detected strain generating body 30 to cause the strain. Instead, the auxiliary strain-generating bodies 60A to 60D can receive and generate strain. Therefore, the stress generated in the detected strain generating element 30 can be reduced, and the strength of the force sensor 1 can be improved.

Further, the auxiliary strain-generating bodies 60A to 60D according to the present embodiment are easily deformed by the force Fy in the Y-axis direction. In this case, the auxiliary flexure elements 60A to 60D according to the present embodiment are easily deformed by the force Fx in the X-axis direction. As a result, the auxiliary flexure elements 60A to 60D according to the present embodiment are easily deformed even with respect to the moment Mz about the Z axis. On the other hand, with respect to the force Fz in the Z-axis direction, the auxiliary flexure elements 60A to 60D according to the present embodiment are less likely to be deformed. In this case, the auxiliary flexure elements 60A to 60D according to the present embodiment are less likely to be deformed with respect to the moment Mx about the X axis and the moment My about the Y axis. Therefore, when the auxiliary strain generating bodies 60A to 60D according to the present embodiment are used, detection of the detected strain generating body 30 with respect to the force Fz in the Z-axis direction, the moment Mx about the X axis, and the moment My about the Y axis. The displacement of the portion D can be suppressed. In this case, the stress generated inside the detected strain generating element 30 due to the action of the force Fz and the moments Mx and My can be reduced, and the strength of the force sensor 1 can be improved. In this way, by providing the auxiliary flexure elements 60A to 60D, it is possible to improve the balance of strength for each force (Fx, Fy, Fz) and each moment (Mx, My, Mz), and each force and each Moment sensitivity and rated values can be made uniform. That is, even when the balance of the strength of the detected flexure element 30 with respect to each force and each moment is lost, each force and each moment can be adjusted by adjusting the shape and the arrangement direction of the auxiliary flexure elements 60A to 60D. The balance of strength can be improved.

As described above, according to the present embodiment, the force receiving body 10 and the support body 20 are connected by the auxiliary strain generating bodies 60A to 60D, and the auxiliary strain generating bodies 60A to 60D receive the force received by the force receiving body 10 or Elastically deformed by the action of a moment. As a result, the stress generated in the detected strain generating element 30 can be reduced, and the strength of the force sensor 1 can be improved. In this case, the force sensor 1 can be prevented from being damaged. In addition, by adjusting the shape and arrangement direction of the auxiliary strain generating bodies 60A to 60D, it is possible to improve the balance of strength for each force (Fx, Fy, Fz) and each moment (Mx, My, Mz), The balance of sensitivity of each force and each moment and the balance of rated values can be improved.

Further, according to the present embodiment, the tilting body 61 of each of the auxiliary strain generating bodies 60A to 60D is connected to the force receiving body 10 via the first connecting body 62 and is supported via the second connecting body 63. The first connecting body 62 and the second connecting body 63, which are connected to the body 20, are elastically deformed by the action of the force or moment received by the force receiving body 10. As a result, the first connecting body 62 and the second connecting body 63 are elastically deformed and distorted by the action of the force or moment received by the force receiving body 10, and can be displaced. Therefore, the stress generated in the detected strain generating element 30 can be reduced, and the strength of the force sensor 1 can be improved. In addition, by providing the tilting body 61 between the first connecting body 62 and the second connecting body 63, it is possible to improve the design flexibility of the auxiliary strain generating bodies 60A to 60D. That is, not only the dimensions of the first connecting body 62 and the second connecting body 63 but also the dimensions of the tilting body 61 can be added to the design parameters, and the auxiliary strain generating bodies 60A to 60D can be easily designed. The balance of strength for each force and each moment can be easily improved.

Further, according to the present embodiment, the first connecting body 62 and the second connecting body 63 of the auxiliary strain producing bodies 60A to 60D are arranged at positions different from each other in the X-axis direction or the Y-axis direction. This makes it easy to displace the auxiliary flexure elements 60A to 60D with respect to the force in the direction orthogonal to the Z-axis direction (for example, the X-axis direction or the Y-axis direction). Therefore, the displacement of the detection unit D (diaphragm 32) of the detection strain generating body 30 can be increased with respect to the force in the direction, and the detection accuracy of the force in the direction can be improved.

Further, according to the present embodiment, the first connecting body 62 of the auxiliary strain generating body 60A is arranged closer to the auxiliary strain generating body 60B than the second connecting body 63 of the auxiliary strain generating body 60A, The first connection body 62 of the body 60B is arranged closer to the auxiliary strain body 60A than the second connection body 63 of the auxiliary strain body 60B. As a result, when the force Fx in the X-axis direction, the force Fy in the Y-axis direction, or the moment Mz about the Z-axis acts, one of the auxiliary strain body 60A and the auxiliary strain body 60B is operated. The first connecting body 62 and the second connecting body 63 can regulate the displacement of the force receiving body 10 in the Z-axis direction. In addition, the first connecting body 62 of the auxiliary flexure element 60C is arranged closer to the auxiliary flexure element 60D than the second connecting body 63 of the auxiliary flexure element 60C, and the first connecting body 62 of the auxiliary flexure element 60D. Are arranged closer to the auxiliary strain-generating body 60C than the second connecting body 63 of the auxiliary strain-generating body 60D. Accordingly, similarly, when the force Fx in the X-axis direction, the force Fy in the Y-axis direction, or the moment Mz about the Z-axis acts, the force receiving body 10 is displaced in the Z-axis direction while rotating. Can be regulated.

When the force receiving body 10 can be allowed to displace in the Z-axis direction while rotating, the first connecting body 62 and the second connecting body 63 are alternately arranged around the detection strain generating body 30. You may do it. That is, the first connection body 62 of the auxiliary flexure body 60A is arranged closer to the auxiliary flexure body 60B than the second connection body 63 of the auxiliary flexure body 60A, and the second connection body 63 of the auxiliary flexure body 60B is disposed. However, it may be arranged closer to the auxiliary flexure element 60A than the first connection body 62 of the auxiliary flexure element 60B. The same applies to other auxiliary flexure elements.

Moreover, according to this Embodiment, the 1st connection body 62 of auxiliary strain generating bodies 60A-60D is connected to the upper end part 61a of the tilting body 61, and the 2nd connection body 63 is the lower end part 61b of the tilting body 61. It is connected to the. As a result, the shapes of the auxiliary flexure elements 60A to 60D can be simplified. In this case, the auxiliary flexure elements 60A to 60D can be easily manufactured by machining.

Further, according to the present embodiment, the first connecting body 62 and the second connecting body 63 of the auxiliary strain producing bodies 60A to 60D extend in the Z-axis direction. This makes it difficult to deform the auxiliary flexure elements 60A to 60D in the Z-axis direction. Therefore, it is possible to suppress the displacement of the detection unit D with respect to the force Fz in the Z-axis direction, the moment Mx about the X-axis, and the moment My about the Y-axis, and it is possible to further improve the strength of the force sensor 1. it can. Further, with respect to the force Fy in the Y-axis direction, it is possible to suppress the occurrence of directivity in the ease of elastic deformation of the auxiliary strain generating body 60A and the auxiliary strain generating body 60C having the tilting body 61 extending in the Y axis direction. You can For example, the magnitude of displacement of the auxiliary strain generating bodies 60A and 60C with respect to the force Fy on the Y axis direction positive side and the magnitude of displacement of the auxiliary strain generating bodies 60A and 60C with respect to the force Fy on the Y axis direction negative side are different. Can be suppressed. The same applies to the auxiliary strain-generating bodies 60B and 60D having the tilting body 61 extending in the X-axis direction with respect to the force Fx in the X-axis direction. Therefore, even when the auxiliary strain generating bodies 60A to 60D are used, it is possible to prevent the detection accuracy of the force or moment by the detecting strain generating body 30 from decreasing.

Hereinafter, a modification of the above-described embodiment will be described. Here, the auxiliary flexure element 60A will be described as an example, but the modified example can be similarly applied to the auxiliary flexure elements 60B to 60D.

(First modification)
In addition, in the above-described present embodiment, the first connecting body 62 of the auxiliary flexure body 60A is connected to the upper end portion 61a of the tilting body 61, and the second connecting body 63 is connected to the lower end portion 61b of the tilting body 61. The connected example was explained. However, the present invention is not limited to this, and as shown in FIG. 10, the first connecting body 62 is connected to the lower end portion 61 b of the tilting body 61 and the second connecting body 63 is connected to the upper end portion 61 a of the tilting body 61. May be connected to. FIG. 10 is a front view showing a first modified example of the auxiliary flexure element 60A.

According to the first modification example shown in FIG. 10, while the length of the first connecting body 62 (or the line length) and the length of the second connecting body 63 (or the line length) are ensured, The dimension between the support 20 and the height sensor (height dimension of the force sensor 1) can be reduced. In this case, as shown in FIG. 10, the first connecting body 62 and the second connecting body 63 may be formed in an L shape. A slit 64 is formed between the tilting body 61 and a portion of the first connecting body 62 that extends in the Z-axis direction. As a result, the length of the first connecting body 62 from the force receiving body 10 to the tilting body 61 can be secured, and the first connecting body 62 can be easily elastically deformed in the Y-axis direction. Similarly, a slit 65 is formed between the tilting body 61 and a portion of the second connecting body 63 extending in the Z-axis direction. As a result, the length of the second connecting body 63 from the supporting body 20 to the tilting body 61 can be secured, and the second connecting body 63 can be easily elastically deformed in the Y-axis direction.

(Second modification)
Further, in the above-described present embodiment, the example in which the first connecting body 62 and the second connecting body 63 of the auxiliary strain generating body 60A extend in the Z-axis direction has been described. However, the present invention is not limited to this, and as shown in FIG. 11, the first connecting body 62 and the second connecting body 63 may extend in a direction inclined with respect to the Z-axis direction. FIG. 11 is a front view showing a second modification of the auxiliary flexure element 60A.

According to the second modification shown in FIG. 11, the auxiliary flexure element 60A can be easily deformed in the Z-axis direction. Therefore, the displacement of the detection portion D of the detected strain element 30 can be increased with respect to the force Fz in the Z-axis direction, the moment Mx about the X-axis, and the moment My about the Y-axis, and the force in the Z-axis direction can be increased. The detection accuracy can be improved. The tilting body 61 shown in FIG. 11 may be formed in a parallelogram shape along the first connecting body 62 and the second connecting body 63 when viewed in the X-axis direction.

Further, two auxiliary flexure elements 60A shown in FIG. 11 may be arranged in the same direction. For example, two auxiliary flexure bodies 60A in which the tilting body 61 extends in the Y direction are arranged on the X axis direction positive side with respect to the detected flexure body 30, and the first connecting body 62 of these two auxiliary flexure bodies 60A is arranged. They may be arranged so that they are close to each other. The 1st connection body 62 of one auxiliary strain generating body 60A is arrange|positioned rather than the 2nd connection body 63 of the said auxiliary strain generating body 60A at the side of the other auxiliary strain generating body 60B, and the other auxiliary strain generating body 60B. The 1st connection body 62 may be arrange|positioned rather than the 2nd connection body 63 of the other auxiliary|assistant strain body 60B at the one auxiliary|assistant strain body 60A side. As a result, when viewed in the X-axis direction, the first connecting body 62 and the second connecting body 63 of the one auxiliary strain generating body 60A and the first connecting body 62 and the second connecting body 62 of the other auxiliary strain generating body 60B. The connection body 63 can be arranged in an inverted V shape. Therefore, when the force Fx in the X-axis direction, the force Fy in the Y-axis direction, or the moment Mz about the Z-axis acts, one of the two auxiliary flexure elements 60A causes the force receiving body 10 to move in the Z-axis direction. It is possible to regulate the displacement to.

(Third Modification)
Further, in the above-described present embodiment, the example in which the first connecting body 62 and the second connecting body 63 of the auxiliary strain generating body 60A extend in the Z-axis direction has been described. However, the present invention is not limited to this, and as shown in FIG. 12, the first connecting body 62 and the second connecting body 63 of the auxiliary strain producing body 60A are orthogonal to the X-axis direction (the first direction and the second direction). It may be curved when viewed in the direction (to do). FIG. 12 is a front view showing a third modified example of the auxiliary flexure element 60A.

According to the third modification example shown in FIG. 12, the first connecting body 62 and the second connecting body 63 can be easily elastically deformed.

Further, as shown in FIG. 12, the contour 62p of the first connecting body 62 and the contour 61p of the tilting body 61 when viewed in the X-axis direction may be connected via the R contour portion 68a. As a result, stress can be relieved and stress concentration can be suppressed at the connecting portion between the first connecting body 62 and the tilting body 61. Therefore, the reliability of the force sensor 1 can be improved. Further, the contour 63p of the second connecting body 63 and the contour 61p of the tilting body 61 may be connected via the R contour portion 68a. As a result, stress can be relieved and stress concentration can be suppressed at the connecting portion between the second connecting body 63 and the tilting body 61. Therefore, the reliability of the force sensor 1 can be improved. That is, both the contour 62p of the first connecting body 62 and the contour 63p of the second connecting body 63 may be connected to each other via the contour 61p of the tilting body 61 and the R contour portion 68a. One of the contour 62p and the contour 63p of the second connecting body 63 may be connected to the contour 61p of the tilting body 61 via the R contour portion 68a. The R dimension of the R contour portion 68a may be, for example, 2 mm to 5 mm. The same applies to the R contour portion 68b described later. The R contour portion 68a is not limited to being applied to the auxiliary flexure element 60A shown in FIG. 12, but can be applied to other auxiliary flexure elements 60A shown in FIG. 6 and the like.

Further, as shown in FIG. 12, the first connecting body 62 may be connected to the force receiving body 10 via the first pedestal 66. Accordingly, even the curved first connecting body 62 can be stably attached to the force receiving body 10 by the first pedestal 66. On the other hand, the second connection body 63 may be connected to the support body 20 via the second pedestal 67. As a result, even the curved second connection body 63 can be stably attached to the support body 20 by the second pedestal 67. For example, the first pedestal 66, the first connection body 62, the tilting body 61, the second connection body 63, and the second pedestal 67 may be integrally formed by a continuous plate material. In this case, the first pedestal 66 may be fixed to the force receiving body 10 with a bolt or the like, and the second pedestal 67 may be fixed to the support body 20 with a bolt or the like. It should be noted that the first pedestal 66 and the second pedestal 67 are not limited to being applied to the auxiliary flexure element 60A shown in FIG. 12, and are also applied to other auxiliary flexure elements 60A shown in FIG. 6 and the like. be able to.

Further, as shown in FIG. 12, the contour 62p of the first connecting body 62 and the contour 66p of the first pedestal 66 of the auxiliary flexure element 60A when viewed in the X-axis direction are connected via the R contour portion 68b. It may have been done. As a result, the stress can be relieved and the stress concentration can be suppressed at the connection portion between the first connection body 62 and the first pedestal 66. Further, the contour 63p of the second connecting body 63 of the auxiliary strain generating body 60A and the contour 67p of the second pedestal 67 may be connected via the R contour portion 68b. As a result, the stress can be relieved and the stress concentration can be suppressed also in the connection portion between the second connection body 63 and the second pedestal 67. Therefore, the reliability of the force sensor 1 can be improved.

(Fourth Modification)
In addition, in the above-described present embodiment, the example in which the first connecting body 62 and the second connecting body 63 of the auxiliary flexure body 60A are arranged at positions different from each other in the Y-axis direction has been described. However, the present invention is not limited to this, and as shown in FIG. 13A, the first connecting body 62 and the second connecting body 63 may be arranged at positions overlapping with each other when viewed in the Z-axis direction. FIG. 13A is a front view showing a fourth modified example of the auxiliary flexure element 60A.

According to the fourth modification shown in FIG. 13A, the first connecting body 62 and the second connecting body 63 are arranged at the same position in the X-axis direction and at the same position in the Y-axis direction. As a result, the displacement of the detector D with respect to the force Fz in the Z-axis direction, the moment Mx about the X-axis, and the moment My about the Y-axis can be suppressed, and the strength of the force sensor 1 can be further improved. You can In this case, when viewed in the X-axis direction, the first connecting body 62 and the second connecting body 63 of the auxiliary flexure body 60A can be arranged in a straight line, and the machining can be facilitated.

Further, as shown in FIG. 13A, the tilting body 61 may include a slit 69a extending in the Y-axis direction when viewed in the X-axis direction. The slit 69a is elongated in the Y-axis direction so as to have a longitudinal direction in the Y-axis direction, but is open to the Y-axis direction negative side at the end of the tilting body 61 on the Y-axis direction negative side. .. The slit 69a may penetrate the tilting body 61 in the X-axis direction. By providing such a slit 69a, even when the first connecting body 62 and the second connecting body 63 of the auxiliary strain generating body 60A are arranged in a straight line in the Z-axis direction, the force in the Z-axis direction is formed. When the tilting body 61 is subjected to the action of Fz, the tilting body 61 can be elastically deformed to generate a strain and be displaced. At this time, the portions of the tilting body 61 on both sides of the slit 69a in the Z-axis direction are easily elastically deformed. For this reason, the detection unit D of the detection strain generating element 30 can be displaced with respect to the force Fz in the Z-axis direction, and the detection accuracy of the force in the Z-axis direction can be improved.

In the example shown in FIG. 13A, the first connecting body 62 and the second connecting body 63 of the auxiliary flexure body 60A are connected to the end of the tilting body 61 on the Y axis direction negative side. The first connecting body 62 and the second connecting body 63 may be connected to arbitrary positions of the tilting body 61 in the Y-axis direction. Further, when the slit 69 a is open to the Y axis direction positive side at the end of the tilting body 61 on the Y axis direction positive side, the first connecting body 62 and the second connecting body 63 are the same in the tilting body 61. It may be connected to the end on the positive side in the X-axis direction. Further, the first connecting body 62 and the second connecting body 63 may be arranged at different positions in the Y-axis direction.

As a further modified example of the auxiliary flexure element 60A shown in FIG. 13A, the auxiliary flexure element 60A may be configured as shown in FIG. 13B. FIG. 13B is a front view showing a further modified example of the auxiliary flexure element 60A shown in FIG. 13A.

As shown in FIG. 13B, the tilting body 61 of the auxiliary flexure body 60A may include a slit 69b extending in the Y-axis direction when viewed in the X-axis direction. The slit 69b is elongated in the Y-axis direction so as to have a longitudinal direction in the Y-axis direction, but is not included in the Y-axis direction negative side end and the Y-axis direction positive side end of the tilting body 61. It doesn't even open. That is, the slit 69b has a closed shape when viewed in the X-axis direction. The slit 69b may penetrate the tilting body 61 in the X-axis direction. By providing such a slit 69b, even if the first connecting body 62 and the second connecting body 63 of the auxiliary strain generating body 60A are arranged in a straight line in the Z-axis direction, the force in the Z-axis direction is generated. When the tilting body 61 is subjected to the action of Fz, the tilting body 61 can be elastically deformed to generate a strain and be displaced. At this time, similarly to the example shown in FIG. 13A, the portions of the tilting body 61 on both sides of the slit 69b in the Z-axis direction are easily elastically deformed. For this reason, the detection unit D of the detection strain generating element 30 can be displaced with respect to the force Fz in the Z-axis direction, and the detection accuracy of the force in the Z-axis direction can be improved.

In the example shown in FIG. 13B, the first connecting body 62 and the second connecting body 63 of the auxiliary flexure body 60A are connected to the central portion of the tilting body 61 in the Y-axis direction. More specifically, in the tilting body 61 of the auxiliary flexure body 60A shown in FIG. 13B, two tilting bodies 61 shown in FIG. 13A are arranged side by side so as to be line-symmetric with respect to the Y axis and integrated. It has a shape. The tilting body 61 and the slit 69b shown in FIG. 13B are formed symmetrically with respect to the first connecting body 62 and the second connecting body 63 in the Y axis direction when viewed in the X axis direction. The first connecting body 62 and the second connecting body 63 may be connected to arbitrary positions of the tilting body 61 in the Y-axis direction. Further, the first connecting body 62 and the second connecting body 63 may be arranged at different positions in the Y-axis direction.

(Fifth Modification)
In addition, in the above-described present embodiment, an example in which the first connecting body 62 and the second connecting body 63 of the auxiliary flexure body 60A are arranged at the same position in the X-axis direction has been described. However, the present invention is not limited to this, and as shown in FIGS. 14A and 14B, the connection position between the first connecting body 62 and the force receiving body 10 of the auxiliary strain-flexing body 60A, the second connecting body 63, and the support. The connection positions with the body 20 may be arranged at different positions in the X-axis direction. The first connection body 62 and the second connection body 63 may be arranged at the same position in the Y-axis direction. 14A is a front view showing a fifth modified example of the auxiliary flexure element 60A, and FIG. 14B is a sectional view taken along the line CC of FIG. 14A.

Further, as shown in FIG. 14B, the tilting body 61 may include a slit 70a extending in the Y-axis direction when viewed in the Z-axis direction. The slit 70a is elongated in the Y-axis direction so as to have the longitudinal direction in the Y-axis direction, but is open to the Y-axis direction negative side at the end of the tilting body 61 on the Y-axis direction negative side. .. The slit 70a may penetrate the tilting body 61 in the Z-axis direction.

The first connecting body 62 is connected to a portion of the tilting body 61 on the X axis direction positive side with respect to the slit 70a. In the example shown in FIG. 14A, the first connection body 62 extends in the Z-axis direction and is arranged on the X-axis direction positive side (upper side in FIG. 14B) with respect to the slit 70a. On the other hand, the second connecting body 63 is connected to a portion of the tilting body 61 on the X axis direction negative side with respect to the slit 70a. In the example shown in FIG. 14A, the second connection body 63 extends in the Z-axis direction and is arranged on the negative side in the X-axis direction (lower side in FIG. 14B) with respect to the slit 70a. Thus, the connection position between the first connection body 62 and the force receiving body 10 (upper end of the first connection body 62) and the connection position between the second connection body 63 and the support body 20 (of the second connection body 63). (Lower end) are different from each other in the X-axis direction. The first connecting body 62 and the second connecting body 63 are arranged at different positions in the X-axis direction.

By providing such a slit 70a, even when the first connecting body 62 and the second connecting body 63 extend in the Z-axis direction, when the force Fz in the Z-axis direction is applied, the tilting body is provided. The elastic member 61 can be elastically deformed to generate a strain and be displaced. At this time, the portions of the tilting body 61 on both sides of the slit 70a in the X-axis direction are easily elastically deformed. For this reason, the detection unit D of the detection strain generating element 30 can be displaced with respect to the force Fz in the Z-axis direction, and the detection accuracy of the force in the Z-axis direction can be improved. In the example shown in FIGS. 14A and 14B, since the tilting body 61 extending in the Y-axis direction is elastically deformed to generate a strain with respect to the force Fz in the Z-axis direction, the first connecting body 62 and the second connecting body are connected. The length of the body 63 in the Z-axis direction can be reduced. Therefore, the dimension between the force receiving body 10 and the support body 20 (the height dimension of the force sensor 1) can be reduced.

According to the fifth modification shown in FIGS. 14A and 14B, the first connecting body 62 and the second connecting body 63 of the auxiliary strain generating body 60A are operated when the force Fy in the Y-axis direction acts on the force receiving body 10. It can be easily displaced. For example, it is possible to make the displacement easier by the action of the force Fy in the Y-axis direction rather than the action of the force Fz in the Z-axis direction, and the rigidity with respect to the force Fy can be weakened. Therefore, it is possible to obtain the same performance as that of the auxiliary flexure element 60A shown in FIG. 13A.

In the example shown in FIGS. 14A and 14B, the first connecting body 62 and the second connecting body 63 of the auxiliary flexure body 60A are connected to the end of the tilting body 61 on the Y axis direction negative side. The first connecting body 62 and the second connecting body 63 may be connected to arbitrary positions of the tilting body 61 in the Y-axis direction. Further, when the slit 70 a is open to the Y axis direction positive side at the end portion of the tilting body 61 on the Y axis direction positive side, the first connecting body 62 and the second connecting body 63 are the same in the tilting body 61. It may be connected to the end on the positive side in the Y-axis direction. Further, the first connecting body 62 and the second connecting body 63 may be arranged at different positions in the Y-axis direction.

As a further modified example of the auxiliary flexure element 60A shown in FIGS. 14A and 14B, the auxiliary flexure element 60A may be configured as shown in FIGS. 14C and 14D. FIG. 14C is a front view showing a further modified example of the auxiliary flexure element 60A shown in FIG. 14A, and FIG. 14D is a sectional view taken along line DD of FIG. 14C.

As shown in FIGS. 14C and 14D, when viewed in the Z-axis direction, a slit 70b extending in the Y-axis direction may be included. The slit 70b is elongated in the Y-axis direction so as to have the longitudinal direction in the Y-axis direction, and is not limited to the Y-axis direction negative side end portion and the Y-axis direction positive side end portion of the tilting body 61. It doesn't even open. That is, the slit 70b has a closed shape when viewed in the Z-axis direction. The slit 70b may penetrate the tilting body 61 in the Z-axis direction.

The first connecting body 62 is connected to a portion of the tilting body 61 on the X axis direction positive side with respect to the slit 70b. In the example shown in FIG. 14C, the first connection body 62 extends in the Z-axis direction and is arranged on the X-axis direction positive side (upper side in FIG. 14D) with respect to the slit 70b. On the other hand, the second connecting body 63 is connected to a portion of the tilting body 61 on the negative side in the X-axis direction with respect to the slit 70b. In the example illustrated in FIG. 14C, the second connection body 63 extends in the Z-axis direction and is arranged on the negative side in the X-axis direction (lower side in FIG. 14D) with respect to the slit 70b. In this way, the connection position between the first connection body 62 and the force receiving body 10 and the connection position between the second connection body 63 and the support body 20 are different from each other in the X-axis direction. The first connecting body 62 and the second connecting body 63 are arranged at different positions in the X-axis direction.

By providing such a slit 70b, even when the first connecting body 62 and the second connecting body 63 extend in the Z-axis direction, when the force Fz in the Z-axis direction acts, the tilting body is provided. The elastic member 61 can be elastically deformed to generate a strain and be displaced. At this time, similarly to the example shown in FIGS. 14A and 14B, the portions of the tilting body 61 on both sides of the slit 70b in the X-axis direction are easily elastically deformed. For this reason, the detection unit D of the detection strain generating element 30 can be displaced with respect to the force Fz in the Z-axis direction, and the detection accuracy of the force in the Z-axis direction can be improved.

In the example shown in FIGS. 14C and 14D, the first connecting body 62 and the second connecting body 63 of the auxiliary flexure body 60A are connected to the central portion of the tilting body 61 in the Y-axis direction. More specifically, the tilting body 61 of the auxiliary strain-flexing body 60A shown in FIGS. 14C and 14D has the tilting body 61 shown in FIG. 14A and FIG. It has a shape that is aligned and integrated. The tilting body 61 and the slit 70b illustrated in FIGS. 14C and 14D are formed symmetrically with respect to the first connecting body 62 and the second connecting body 63 in the Y axis direction when viewed in the X axis direction. The first connecting body 62 and the second connecting body 63 may be connected to arbitrary positions of the tilting body 61 in the Y-axis direction. Further, the first connecting body 62 and the second connecting body 63 may be arranged at different positions in the Y-axis direction.

In the example shown in FIGS. 14A to 14D described above, the connection position between the first connecting body 62 of the auxiliary flexure body 60A and the force receiving body 10, and the connection position between the second connecting body 63 and the support body 20. , But are arranged at different positions in the X-axis direction. However, it is not limited to this. For example, as shown in FIG. 14E, the connection position between the first connection body 62 and the force receiving body 10 and the connection position between the second connection body 63 and the support body 20 are arranged at the same position in the X-axis direction. May be. FIG. 14E is a side view of the auxiliary flexure element 60A shown in FIGS. 14A and 14C, and is a view seen from the Y axis direction positive side (right side of FIGS. 14A and 14C) in FIGS. 14A and 14C.

For example, as shown in FIG. 14E, the first connection body 62 is formed in a crank shape when viewed in the Y-axis direction. The first connection body 62 shown in FIG. 14E connects the first portion 62a connected to the force receiving body 10, the second portion 62b connected to the tilting body 61, and the first portion 62a and the second portion 62b. And a third portion 62c that does. The first portion 62a and the second portion 62b extend in the Z-axis direction, and the third portion 62c extends in the X-axis direction.

Since the first connection body 62 is formed in the crank shape in this manner, the connection position between the first connection body 62 and the force receiving body 10 can be shifted to the X axis direction negative side (left side in FIG. 14E). it can. That is, the connection position between the first connecting body 62 and the tilting body 61 (the lower end of the first connecting body 62, the lower end of the second portion 62b), and the connecting position between the second connecting body 63 and the tilting body 61 (the second connecting body). The upper end of the body 63) is arranged at different positions in the X-axis direction. However, since the first connection body 62 is formed in a crank shape when viewed in the Y-axis direction, the connection position between the first connection body 62 (first portion 62a) and the force receiving body 10 and the second connection body The connection positions of the connection body 63 and the support body 20 can be arranged at the same position in the X-axis direction.

The first connecting body 62 is not limited to be formed in a crank shape, and the second connecting body 63 is formed in a crank shape, so that the first connecting body 62 and the force receiving body 10 are connected to each other. The connection positions of the second connection body 63 and the support body 20 may be arranged at the same position in the X-axis direction. Further, both the first connecting body 62 and the second connecting body 63 are formed in a crank shape when viewed in the Y-axis direction, and the first connecting body 62 and the force receiving body 10 are connected to each other at the connecting position. The connection position between the two-connection body 63 and the support body 20 may be arranged at the same position in the X-axis direction. Furthermore, if the connection position between the first connection body 62 and the force receiving body 10 and the connection position between the second connection body 63 and the support body 20 can be arranged at the same position in the X-axis direction, the first connection body. It is not limited that the 62 or the second connection body 63 is formed in a crank shape.

(Sixth Modification)
Further, in the above-described present embodiment, the auxiliary strain generating body 60A includes the tilting body 61, the first connecting body 62 that connects the tilting body 61 and the force receiving body 10, the tilting body 61, and the support body 20. The second connection body 63 for connecting the above has been described. However, the present invention is not limited to this, and as shown in FIG. 15, the auxiliary strain generating body 60A may have a connecting body 71 extending from the force receiving body 10 to the supporting body 20, and the connecting body 71 is , Is elastically deformed by the action of the force or moment received by the force receiving body 10. The connection body 71 may be inclined with respect to the Z-axis direction. FIG. 15 is a front view showing a sixth modified example of the auxiliary flexure element 60A.

According to the sixth modification shown in FIG. 15, the length (line length) of the connection body 71 can be increased. Therefore, the connecting body 71 can be easily elastically deformed. Therefore, the displacement of the detection unit D can be increased, and the detection accuracy can be improved. In addition, the structure and shape of the auxiliary flexure element 60A can be simplified. When the inclination angle of the connector 71 with respect to the Y-axis direction is θ, the inclination angle θ is increased (closer to 90°), whereby the force Fz in the Z-axis direction, the moment Mx about the X-axis, and the Y-axis. It is possible to make it difficult for the connecting body 71 to be deformed with respect to the surrounding moment My, and to easily deform the connecting body 71 with respect to the force Fx in the X-axis direction, the force Fy in the Y-axis direction, and the moment Mz about the Z-axis. be able to. On the other hand, by making the inclination angle θ small (close to 0°), the connecting body 71 can be easily deformed with respect to the force Fz in the Z axis direction, the moment Mx about the X axis, and the moment My about the Y axis. Therefore, it is possible to make it difficult for the connecting body 71 to be deformed by the force Fx in the X-axis direction, the force Fy in the Y-axis direction, and the moment Mz about the Z-axis.

Further, as shown in FIG. 15, the connection body 71 may be connected to the force receiving body 10 via the first pedestal 66. As a result, even the inclined connecting body 71 can be stably attached to the force receiving body 10 by the first pedestal 66. Further, the connection body 71 may be connected to the support body 20 via the second pedestal 67. As a result, even the inclined connection body 71 can be stably attached to the support body 20 by the second pedestal 67. For example, the first pedestal 66, the connecting body 71, and the second pedestal 67 may be integrally formed by a continuous plate material. In this case, the first pedestal 66 is fixed to the force receiving body 10 with a bolt or the like. Alternatively, the second pedestal 67 may be fixed to the support 20 with bolts or the like. Further, the first pedestal 66, the connecting body 71, and the second pedestal 67 may be formed of different members, and in this case, the connecting body 71 and the first pedestal 66 are fixed by bolts or the like. Alternatively, the connection body 71 and the second pedestal 67 may be fixed with a bolt or the like.

(Seventh Modification)
Further, in the above-described present embodiment, the auxiliary strain generating body 60A includes the tilting body 61, the first connecting body 62 that connects the tilting body 61 and the force receiving body 10, the tilting body 61, and the support body 20. The second connection body 63 for connecting the above has been described. However, the present invention is not limited to this, and as shown in FIGS. 16A and 16B, the auxiliary flexure body 60A includes the first tilting body 72 connected to the force receiving body 10 and extending in the Y-axis direction, and the support body. The second tilting body 73 connected to the Y-axis extending in the Y-axis direction and the connecting body 74 connecting the first tilting body 72 and the second tilting body 73 may be provided. The first tilting body 72 and the second tilting body 73 are arranged separately from each other at different positions in the X-axis direction, and in FIG. 16B, the first tilting body 72 is X more than the second tilting body 73. It is located on the positive side in the axial direction. The connection body 74 may be elastically deformable by the action of the force or moment received by the force receiving body 10. 16A is a front view showing a seventh modified example of the auxiliary flexure element 60A, and FIG. 16B is a sectional view taken along the line EE of FIG. 16A.

According to the seventh modification shown in FIGS. 16A and 16B, when the force receiving body 10 receives a force or a moment, the connecting body 74 can be elastically deformed to generate a strain and be displaced.

Further, as shown in FIG. 16A, the first tilting body 72 may be connected to the force receiving body 10 via the first pedestal 66. With the first pedestal 66, a space for elastically deforming the first tilting body 72 can be secured between the first tilting body 72 and the force receiving body 10. The second tilting body 73 may be connected to the support body 20 via the second pedestal 67. With the second pedestal 67, a space for elastically deforming the second tilting body 73 can be secured between the second tilting body 73 and the support body 20. The connection position between the first pedestal 66 and the force receiving body 10 and the connection position between the second pedestal 67 and the support body 20 are arranged at different positions in the X-axis direction. The first pedestal 66 and the second pedestal 67 may be arranged at the same position in the Y-axis direction.

Further, as shown in FIGS. 16A and 16B, the first tilting body 72 of the auxiliary strain generating body 60A may be connected to the force receiving body 10 and the connecting body 74 at different positions in the Y-axis direction. The second tilting body 73 of the auxiliary flexure body 60A may be connected to the support body 20 and the connecting body 74 at different positions in the Y-axis direction. More specifically, at the end on the negative side in the Y-axis direction, the first tilting body 72 is connected to the force receiving body 10 via the first base 66, and the second tilting body 73 is connected to the second base 67. It is connected to the support 20 through. Further, the first tilting body 72 and the second tilting body 73 are connected to the connecting body 74 at the end portion on the positive side in the Y-axis direction. However, the present invention is not limited to this, and the first tilting body 72 may be connected to the force receiving body 10 at any position in the Y axis direction, and the second tilting body 73 may be positioned at any position in the Y axis direction. May be connected to the support 20. For example, at the end on the positive side in the Y-axis direction, the first tilting body 72 is connected to the force receiving body 10 via the first pedestal 66, and the second tilting body 73 is supported via the second pedestal 67. It may be connected to the body 20. In this case, the first tilting body 72 and the second tilting body 73 may be connected to the connecting body 74 at the end on the negative side in the Y-axis direction.

Further, as shown in FIG. 16A, the connecting body 74 may have a longitudinal direction along the Z-axis direction. In this case, when the force Fy in the Y-axis direction is applied, the connection body 74 can be elastically deformed to generate a strain and be displaced. Therefore, the detection portions D of the detection strain generating element 30 can be displaced with respect to the force Fy in the Y-axis direction, and the detection accuracy of the force in the Y-axis direction can be improved. When the connecting body 74 has a longitudinal direction along the Z-axis direction, the dimension of the connecting body 74 in the Z-axis direction is long and the dimension of the connecting body 74 in the Y-axis direction is short. As a result, the connector 74 is less likely to be elastically deformed by the force Fz in the Z-axis direction, and the displacement with respect to the force Fz can be suppressed. On the other hand, the force Fy in the Y-axis direction can be easily elastically deformed as described above.

As a further modified example of the auxiliary flexure element 60A shown in FIGS. 16A and 16B, the auxiliary flexure element 60A may be configured as shown in FIGS. 16C and 16D. 16C is a front view showing a further modified example of the auxiliary flexure element 60A shown in FIG. 16A, and FIG. 16D is a sectional view taken along line FF of FIG. 16C.

As shown in FIGS. 16C and 16D, the first tilting body 72 and the second tilting body 73 may be connected to the connecting body 74 at each of the ends on both sides in the Y-axis direction. In this case, at the position between the pair of connecting bodies 74 in the Y-axis direction, the first tilting body 72 is connected to the force receiving body 10 via the first pedestal 66, and the second tilting body 73 is the second pedestal. It may be connected to the support 20 via 67. For example, the first pedestal 66 may be connected to the central portion of the first tilting body 72 in the Y-axis direction. The second pedestal 67 may be connected to the central portion of the second tilting body 73 in the Y-axis direction. More specifically, the first tilting body 72, the second tilting body 73 and the connecting body 74 shown in FIGS. 16C and 16D correspond to the first tilting body 72, the second tilting body 73 and the connecting body shown in FIGS. 16A and 16B. The body 74 has a shape in which two bodies 74 are arranged side by side so as to be line-symmetrical with respect to the Y axis and integrated. The first tilting body 72, the second tilting body 73, and the connecting body 74 shown in FIGS. 16C and 16D are left and right in the Y-axis direction with the first pedestal 66 and the second pedestal 67 as the center when viewed in the X-axis direction. It is formed symmetrically. In this case, the first tilting body 72, the second tilting body 73, and the connecting body 74 are formed in a rectangular frame shape when viewed in the Z-axis direction. The first tilting body 72 may be connected to the force receiving body 10 at any position in the Y-axis direction, and the second tilting body 73 is connected to the support body 20 at any position in the Y-axis direction. May be. Further, the position where the first tilting body 72 is connected to the force receiving body 10 and the position where the second tilting body 73 is connected to the support body 20 may be different positions in the Y-axis direction.

In the example shown in FIGS. 16A to 16D described above, the connection position between the first pedestal 66 and the force receiving body 10 and the connection position between the second pedestal 67 and the support body 20 are different from each other in the X-axis direction. The example is arranged in. However, it is not limited to this. For example, as shown in FIG. 16E, the connection position between the first pedestal 66 and the force receiving body 10 and the connection position between the second pedestal 67 and the support body 20 are arranged at the same position in the X-axis direction. Good. FIG. 16E is a side view of the auxiliary flexure element 60A shown in FIGS. 16A and 16C, and is a view seen from the Y axis direction positive side (right side of FIGS. 16A and 16C) in FIGS. 16A and 16C.

For example, as shown in FIG. 16E, the first pedestal 66 is formed in a crank shape when viewed in the Y-axis direction. The first pedestal 66 shown in FIG. 16E includes a first portion 66a connected to the force receiving body 10, a second portion 66b connected to the first tilting body 72, a first portion 66a and a second portion 66b. And a third portion 66c for connection. The first portion 66a and the second portion 66b extend in the Z-axis direction, and the third portion 66c extends in the X-axis direction.

Since the first pedestal 66 is formed in the crank shape in this manner, the connection position between the first pedestal 66 and the force receiving body 10 can be shifted to the X axis direction negative side (left side in FIG. 16E). That is, the connection position between the first pedestal 66 and the first tilting body 72 (the lower end of the first pedestal 66, the lower end of the second portion 66b), and the connection position between the second pedestal 67 and the second tilting body 73 (second The upper end of the pedestal 67) is arranged at a different position in the X axis direction. However, since the first pedestal 66 is formed in a crank shape when viewed in the Y-axis direction, the connection position between the first pedestal 66 (first portion 66a) and the force receiving body 10 and the second pedestal 67 are formed. The connection positions of the support 20 and the support 20 can be arranged at the same position in the X-axis direction.

The first pedestal 66 is not limited to be formed in a crank shape, the second pedestal 67 is formed in a crank shape, and the first pedestal 66 and the force receiving body 10 are connected to each other at the second position. You may arrange|position the connection position of the base 67 and the support body 20 in the same position in the X-axis direction. Further, both the first pedestal 66 and the second pedestal 67 are formed in a crank shape when viewed in the Y-axis direction, and the connection position between the first pedestal 66 and the force receiving body 10 and the second pedestal 67 are formed. The connection position between the and the support 20 may be arranged at the same position in the X-axis direction. Furthermore, if the connection position between the first pedestal 66 and the force receiving body 10 and the connection position between the second pedestal 67 and the support body 20 can be arranged at the same position in the X-axis direction, the first pedestal 66 or the first pedestal 66 or The two pedestals 67 are not limited to being formed in a crank shape.

(Eighth modification)
Further, in the above-described present embodiment, an example in which the force sensor 1 is of the electrostatic capacitance type has been described. That is, the example in which the detection element 40 is configured as a capacitive element and has the fixed electrode Ef and the common displacement electrode Ed facing the fixed electrode Ef has been described. However, the method of detecting force or moment by the force sensor 1 is not limited to this. For example, the force sensor 1 may be a strain gauge type. That is, as shown in FIGS. 17A and 17B, the detection element 40 may include the strain gauge 101 provided in the detection strain element 90. FIG. 17A is a plan view showing a force sensor 1 according to an eighth modification, and FIG. 17B is a sectional view taken along line GG of FIG. 17A.

Next, the strain gauge type force sensor 1 will be described. In the force sensor 1 shown in FIGS. 17A and 17B, the force receiving body 10 and the support body 20 are connected by the detection strain generating body 90, and the detection strain generating body 90 receives the force received by the force receiving body 10. It has a detection unit D that is elastically deformed by the action of a moment. The elastic deformation generated in the detection section D is detected by the corresponding detection element 100, and the detection circuit 50 outputs an electric signal indicating a force or a moment.

The detection strain generating body 90 has an outer ring portion 91, an inner ring portion 92 provided concentrically with the outer ring portion 91, and a plurality of (here, four) beam portions 93. .. The beam portion 93 constitutes the detection portion D, and has a rectangular cross section. An annular connecting ring portion 94 is fixed to the outer ring portion 91. The connecting ring portion 94 is fixed to the force receiving body 10. An annular support ring portion 95 is fixed to the inner ring portion 92. The support ring portion 95 is fixed to the support body 20.

Each detection element 100 has a strain gauge 101 provided on the corresponding beam portion 93. More specifically, two strain gauges 101 are provided at each end of both side surfaces (surfaces extending in the Z direction) of the beam portion 93. Two strain gauges 101 are also provided on the upper surface of the beam portion 93. As shown in FIG. 17A, the strain gauges 101 are provided at both ends of the beam portion 93 (that is, a connecting portion between the outer ring portion 91 and the beam portion 93 and a connecting portion between the inner ring portion 92 and the beam portion 93). Has been. The detection part D is provided on each beam part 93 and is evenly arranged in the circumferential direction of the outer ring part 91 and the inner ring part 92 when viewed in the Z-axis direction. The number of the beam portions 93 is not limited to four and is arbitrary.

With such a configuration, when the force receiving body 10 is subjected to the action of a force or moment, the strain gauge 101 provided in each beam portion 93 determines the direction and magnitude of the force or moment acting on the force receiving body 10. Can be detected.

In the force sensor 1 shown in FIGS. 17A and 17B as well, similar to the above-described present embodiment, the auxiliary strain-generating bodies 60A to 60D are arranged between the force receiving body 10 and the support body 20. The auxiliary strain generating bodies 60A to 60D connect the outer ring portion 91 and the support body 20. The auxiliary strain generating bodies 60A to 60D are arranged around the detection strain generating body 90 and outside the detection strain generating body 90 when viewed in the Z-axis direction. Since the auxiliary strain-generating bodies 60A to 60D shown in FIGS. 17A and 17B can be applied to the auxiliary strain-generating bodies 60A to 60D in the above-described present embodiment and each modified example, detailed description thereof is omitted here. To do.

According to the eighth modified example shown in FIGS. 17A and 17B, when the force receiving body 10 is subjected to the action of a force or a moment, each auxiliary strain body 60A for connecting the force receiving body 10 and the support body 20 to the support body 20. 60D also elastically deforms and causes distortion. As a result, even in the strain gauge type force sensor 1, the stress generated in the detected strain generating element 90 can be reduced, and the strength of the force sensor 1 can be improved. In this case, the force sensor 1 can be prevented from being damaged.

Here, as shown in FIG. 17A, since the outer ring portion 91 and the inner ring portion 92 are connected by the four beam portions 93 arranged in the XY plane, the moments Mx and Y about the X axis are generated. The beam 93 is easily elastically deformed and displaced with respect to the moment My about the axis. On the other hand, with respect to the force Fx in the X-axis direction and the force Fy in the Y-axis direction, since a force in a pulling direction or a compressing direction acts on the beam portion 93, the beam portion 93 is less likely to be elastically deformed and displaced. It's hard to do. Therefore, in the strain gauge type force sensor 1 shown in FIG. 17A, it is difficult for the strain gauge type force sensor 1 to be displaced with respect to the forces Fx and Fy, but it is likely to be displaced with respect to the moments Mx and My. On the other hand, the above-mentioned auxiliary strain generating bodies 60A to 60D tend to be displaced with respect to the forces Fx and Fy, and are less likely to be displaced with respect to the moments Mx and My on which the force in the Z-axis direction acts. Therefore, by combining the detected strain generating body 90 of the strain gauge type force sensor 1 shown in FIG. 17A and the auxiliary strain generating bodies 60A to 60D, each force (Fx, Fy, Fz) and each moment (Mx, The balance of strength with respect to My, Mz) can be improved. As a result, the sensitivity and rated value of each force and each moment can be made uniform, and an optimal force sensor can be configured.

In the force sensor 1 shown in FIGS. 17A and 17B, an example is shown in which the planar shapes of the force receiving body 10 and the support body 20 are circular, but the present invention is not limited to this. Further, although an example in which the outer casing 80 is not provided is shown, the present invention is not limited to this.

The force sensor 1 does not have to be a strain gauge type, and may be a piezoelectric type, for example. In this case, a piezoelectric element (not shown) may be provided on the beam portion 93 instead of the strain gauge 101 shown in FIG. 17A. As a result, when the force receiving body 10 is subjected to the action of a force or moment and each beam portion 93 is elastically deformed and distorted, the piezoelectric element generates an electric charge. By extracting this charge, the elastic deformation generated in the detection unit D can be detected. Therefore, the detection circuit 50 can output an electric signal indicating the force or moment acting on the force receiving body 10.

Further, the force sensor 1 may be of an optical type, for example. In this case, a light emitting/receiving element (not shown) is attached to a fixed member (for example, the support body 20 shown in FIG. 4), and a receiving member is received by a displacement member (for example, the diaphragm 32 shown in FIG. 4) that is displaced by the action of force. A reflective surface is formed to face the light emitting element. As a result, when the force receiving body 10 receives a force or a moment and the displacement member is displaced, the light emitted from the light emitting/receiving element and reflected by the reflecting surface reaches the light receiving/emitting element. Deviate from the position. The displacement generated in the displacement member can be detected by the light emitting/receiving element detecting the amount of change in the position. Therefore, the detection circuit 50 can output an electric signal indicating the force or moment acting on the force receiving body 10.

The present invention is not limited to the above-described embodiments and modified examples as they are, and can be embodied by modifying the components within a range not departing from the gist of the invention in an implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above-described embodiments and modifications. Some components may be deleted from all the components shown in the embodiment and the modification. Further, constituent elements in different embodiments and modifications may be combined as appropriate.

Next, an embodiment according to the present invention will be described with reference to FIGS. FIG. 18 is a result obtained by FEM analysis of the maximum stress acting on the detected strain element and the displacement at the location where the maximum stress is generated, using the electrostatic force type force sensor without the auxiliary strain element as a model. Is. The maximum stress and displacement shown in the table of FIG. 18 are approximate values of the values obtained from the analysis result. Fx represents the maximum stress and displacement when 100N is applied as a force in the X-axis direction, and Fy represents the maximum stress and displacement when 100N is applied as a force in the Y-axis direction, Fz represents the maximum stress and displacement when 100 N is applied as a force in the Z-axis direction. Mx is the maximum stress and displacement when 2N·m is applied as the moment about the X axis, and My is the maximum stress and displacement when 2N·m is applied as the moment about the Y axis. Mz represents the maximum stress and displacement when 2 N·m is applied as a moment about the Z axis. Here, the moment of 2 N·m is a value of the moment generated when a rated force of 100 N acts, with the length between the force sensor and the end effector 1200 (see FIG. 1) being 0.02 m.

As shown in FIG. 18, in the force sensor of this model, the maximum stress when Mx and My are applied is relatively large. Therefore, in the force sensor of this model, if the moments acting as Mx and My increase, the strength limit may be approached.

On the other hand, FIG. 19 shows the maximum stress and displacement in the case where the electrostatic force type force sensor which is the model of FIG. 18 is provided with four auxiliary strain generating bodies 60A to 60D. Here, the auxiliary flexure elements 60A to 60D shown in FIG. 6 are adopted. FIG. 19 shows the maximum stress and displacement when a force of 100 N is applied as Fx, Fy, and Fz. However, when Mx, My, and Mz are applied with a moment of 10 N·m, respectively. Maximum stress and displacement are shown. Here, the moment of 10 N·m is a value of the moment generated when the rated force of 100 N acts, with the length between the force sensor 1 and the end effector 1200 (see FIG. 1) being 0.1 m.

Although the moments Mx, My, and Mz to be applied are made larger than the conditions of the analysis shown in FIG. 18, the maximum stress shown in FIG. 19 is smaller than the maximum stress shown in FIG. From this, it was confirmed that the provision of the auxiliary flexure element can reduce the stress generated in the detected flexure element 30 and improve the strength of the force sensor 1. The displacement when the forces Fx, Fy, Fz shown in FIG. 19 are applied is also smaller than the displacement shown in FIG. However, if there is a displacement of about 5 μm, it is considered that the force or moment can be detected accurately.

Further, in the capacitive force sensor without the auxiliary strain element shown in FIG. 18, the rated load is set to 100 N and the rated moment is set to 2 N·m. On the other hand, in the electrostatic capacity type force sensor having the auxiliary strain generating element shown in FIG. 19, the rated load can be set to 100 N and the rated moment can be set to 10 N·m. Therefore, the performance of the force sensor 1 can be improved and the rated load and rated moment can be increased. As a result, the force sensor 1 having good usability can be obtained.

1 Force sensor 10 Force receiving body 20 Supporting body 30 Detection strain body 40 Detection element 50 Detection circuit 60A-60D Auxiliary strain body 61 Tilt body 61a Upper end part 61b Lower end part 61p Contour 62 1st connection body 62p Contour 63 2nd Connection body 63p Contour 64 Slit 65 Slit 66 First pedestal 66p Contour 67 Second pedestal 67p Contour 68 R Contour portions 69a, 69b Slits 70a, 70b Slit 71 Connection body 72 First tilting body 73 Second tilting body 74 Connection body 80 Exterior Body 81 Cushioning member 90 Detection strain body 91 Outer ring part 92 Inner ring part 93 Beam part 94 Connection ring part 95 Support ring part 100 Detection element 101 Strain gauge 1000 Industrial robot 1100 Robot body 1200 End effector 1300 Electric cable 1400 Control part

Claims (30)

A force-receiving body that receives the action of a force or moment to be detected,
A support body disposed on one side of the force receiving body in the first direction and supporting the force receiving body;
A detection strain body having a detection unit that connects the force receiving body and the support body and that is elastically deformed by the action of a force or a moment received by the force receiving body,
A detection element for detecting elastic deformation generated in the detection unit,
Based on the detection result of the detection element, a detection circuit that outputs an electric signal indicating the force or moment acting on the detection strain generating element,
An auxiliary strain generating body that connects the force receiving body and the support body and is elastically deformed by the action of a force or moment received by the force receiving body ,
The auxiliary strain generating body is a tilting body extending in a second direction orthogonal to the first direction, and a first connecting body connecting the force receiving body and the tilting body, and a force received by the force receiving body. Alternatively, the first connecting body is elastically deformable by the action of a moment, and the second connecting body that connects the tilting body and the support body is elastically deformable by the action of the force or the moment received by the force receiving body. A second connecting body,
The first connection body and the second connection body are arranged at positions different from each other in the second direction,
The first connection body is connected to an end portion of the tilting body on the support body side, and the second connection body is connected to an end portion of the tilting body on the side of the force receiving body. Sensor. The force receiving body and the support body, when viewed in the first direction, are connected by a plurality of the auxiliary flexure elements arranged around the detection flexure element,
The plurality of auxiliary strain-generating bodies have a first auxiliary strain-generating body and a second auxiliary strain-generating body which are adjacent to each other around the detected strain generating body,
The first connection body of the first auxiliary strain-generating body is arranged closer to the second auxiliary strain-generating body than the second connecting body of the first auxiliary strain-generating body,
The first connection of the second auxiliary flexure element is disposed on a side of the first auxiliary flexure element than the second connection of the second auxiliary flexure element, according to claim 1 Force sensor. The force receiving body and the support body, when viewed in the first direction, are connected by a plurality of the auxiliary flexure elements arranged around the detection flexure element,
The plurality of auxiliary strain-generating bodies have a first auxiliary strain-generating body and a second auxiliary strain-generating body which are adjacent to each other around the detected strain generating body,
The first connection body of the first auxiliary strain-generating body is arranged closer to the second auxiliary strain-generating body than the second connecting body of the first auxiliary strain-generating body,
The second connection of the second auxiliary flexure element is disposed on a side of the first auxiliary flexure element than the first connection of the second auxiliary flexure element, according to claim 1 Force sensor. Wherein the first connecting body and the second connecting member extends in the first direction, force sensor according to any one of claims 1 to 3. Wherein the first connecting body and the second connector extends in a direction inclined to the first direction, force sensor according to any one of claims 1 to 3. The force according to any one of claims 1 to 5 , wherein the first connection body and the second connection body are curved when viewed in a direction orthogonal to the first direction and the second direction. Sensor. A force-receiving body that receives the action of a force or moment to be detected,
A support body disposed on one side of the force receiving body in the first direction and supporting the force receiving body;
A detection strain body having a detection unit that connects the force receiving body and the support body and that is elastically deformed by the action of a force or a moment received by the force receiving body,
A detection element for detecting elastic deformation generated in the detection unit,
Based on the detection result of the detection element, a detection circuit that outputs an electric signal indicating the force or moment acting on the detection strain generating element,
An auxiliary strain generating body that connects the force receiving body and the support body and is elastically deformed by the action of a force or moment received by the force receiving body,
The auxiliary strain generating body is a tilting body extending in a second direction orthogonal to the first direction, and a first connecting body connecting the force receiving body and the tilting body, and a force received by the force receiving body. Alternatively, the first connecting body is elastically deformable by the action of a moment, and the second connecting body that connects the tilting body and the support body is elastically deformable by the action of the force or the moment received by the force receiving body. A second connecting body,
The first connecting body and the second connecting body are arranged at positions overlapping each other when viewed in the first direction,
The tilting body, when viewed in a direction perpendicular to the first direction and the second direction, extending in the second direction, and includes a slit which opens at the end of one side of the tilting body, the force Sensor. A force-receiving body that receives the action of a force or moment to be detected,
A support body disposed on one side of the force receiving body in the first direction and supporting the force receiving body;
A detection strain body having a detection unit that connects the force receiving body and the support body and that is elastically deformed by the action of a force or a moment received by the force receiving body,
A detection element for detecting elastic deformation generated in the detection unit,
Based on the detection result of the detection element, a detection circuit that outputs an electric signal indicating the force or moment acting on the detection strain generating element,
An auxiliary strain generating body that connects the force receiving body and the support body and is elastically deformed by the action of a force or moment received by the force receiving body,
The auxiliary strain generating body is a tilting body extending in a second direction orthogonal to the first direction, and a first connecting body connecting the force receiving body and the tilting body, and a force received by the force receiving body. Alternatively, the first connecting body is elastically deformable by the action of a moment, and the second connecting body that connects the tilting body and the support body is elastically deformable by the action of the force or the moment received by the force receiving body. A second connecting body,
The first connecting body and the second connecting body are arranged at positions overlapping each other when viewed in the first direction,
The tilting body, the when viewed in a direction perpendicular to the first direction and the second direction, extending in the second direction includes a slit having a closed shape, force sensor. The tilting body is formed symmetrically in the second direction with the first connecting body and the second connecting body as a center when viewed in a direction orthogonal to the first direction and the second direction. The force sensor according to claim 8 . When viewed in a direction orthogonal to the first direction and the second direction, at least one of the contour of the first connecting body and the contour of the second connecting body and the contour of the tilting body are R contour portions. It is connected via a force sensor according to any one of claims 1 to 9. A force-receiving body that receives the action of a force or moment to be detected,
A support body disposed on one side of the force receiving body in the first direction and supporting the force receiving body;
A detection strain body having a detection unit that connects the force receiving body and the support body and that is elastically deformed by the action of a force or a moment received by the force receiving body,
A detection element for detecting elastic deformation generated in the detection unit,
Based on the detection result of the detection element, a detection circuit that outputs an electric signal indicating the force or moment acting on the detection strain generating element,
An auxiliary strain generating body that connects the force receiving body and the support body and is elastically deformed by the action of a force or moment received by the force receiving body,
The auxiliary strain generating body is a tilting body extending in a second direction orthogonal to the first direction, and a first connecting body connecting the force receiving body and the tilting body, and a force received by the force receiving body. Alternatively, the first connecting body is elastically deformable by the action of a moment, and the second connecting body that connects the tilting body and the support body is elastically deformable by the action of the force or the moment received by the force receiving body. A second connecting body,
The tilting body includes a slit that extends in the second direction and opens at one end of the tilting body when viewed in the first direction,
The first connecting body is connected to a portion of the tilting body on one side with respect to the slit,
The second connecting body, the connected, force sensor on a portion of the other side with respect to the slit of said tilting member. A force-receiving body that receives the action of a force or moment to be detected,
A support body disposed on one side of the force receiving body in the first direction and supporting the force receiving body;
A detection strain body having a detection unit that connects the force receiving body and the support body and that is elastically deformed by the action of a force or a moment received by the force receiving body,
A detection element for detecting elastic deformation generated in the detection unit,
Based on the detection result of the detection element, a detection circuit that outputs an electric signal indicating the force or moment acting on the detection strain generating element,
An auxiliary strain generating body that connects the force receiving body and the support body and is elastically deformed by the action of a force or moment received by the force receiving body,
The auxiliary strain generating body is a tilting body extending in a second direction orthogonal to the first direction, and a first connecting body connecting the force receiving body and the tilting body, and a force received by the force receiving body. Alternatively, the first connecting body is elastically deformable by the action of a moment, and the second connecting body that connects the tilting body and the support body is elastically deformable by the action of the force or the moment received by the force receiving body. A second connecting body,
The tilting body includes a slit having a closed shape that extends in the second direction when viewed in the first direction,
The first connecting body is connected to a portion of the tilting body on one side with respect to the slit,
The second connecting body, the connected, force sensor on a portion of the other side with respect to the slit of said tilting member. The tilting body is formed symmetrically in the second direction with the first connecting body and the second connecting body as a center when viewed in a direction orthogonal to the first direction and the second direction. The force sensor according to claim 12 . A connection position between the first connection body and the force receiving body and a connection position between the second connection body and the support body are arranged at positions different from each other in a direction orthogonal to the first direction and the second direction. The force sensor according to any one of claims 11 to 13 which is carried out. The connection position between the first connection body and the force receiving body and the connection position between the second connection body and the support body are arranged at the same position in the direction orthogonal to the first direction and the second direction. The force sensor according to any one of claims 11 to 13 . The first connection member is connected via a first seat on the force receiving member, the force sensor according to any one of claims 1 to 15. It said second connecting member is connected to said support through a second seat, the force sensor according to any one of claims 1 to 16. A force-receiving body that receives the action of a force or moment to be detected,
A support body disposed on one side of the force receiving body in the first direction and supporting the force receiving body;
A detection strain body having a detection unit that connects the force receiving body and the support body and that is elastically deformed by the action of a force or a moment received by the force receiving body,
A detection element for detecting elastic deformation generated in the detection unit,
Based on the detection result of the detection element, a detection circuit that outputs an electric signal indicating the force or moment acting on the detection strain generating element,
An auxiliary strain generating body that connects the force receiving body and the support body and is elastically deformed by the action of a force or moment received by the force receiving body,
The auxiliary strain generating body has a connecting body extending from the force receiving body to the support body and elastically deformable by an action of a force or a moment received by the force receiving body,
The connection body is inclined with respect to the first direction,
It said connection member is connected to the force receiving member via a first seat and is connected to the support via a second seat, force sensor. A force-receiving body that receives the action of a force or moment to be detected,
A support body disposed on one side of the force receiving body in the first direction and supporting the force receiving body;
A detection strain body having a detection unit that connects the force receiving body and the support body and that is elastically deformed by the action of a force or a moment received by the force receiving body,
A detection element for detecting elastic deformation generated in the detection unit,
Based on the detection result of the detection element, a detection circuit that outputs an electric signal indicating the force or moment acting on the detection strain generating element,
An auxiliary strain generating body that connects the force receiving body and the support body and is elastically deformed by the action of a force or moment received by the force receiving body,
The auxiliary strain generating body is connected to the force receiving body via a first pedestal, and a first tilting body extending in a second direction orthogonal to the first direction and the support body via a second pedestal. A second tilting body that is connected and extends in the second direction, and a connecting body that connects the first tilting body and the second tilting body and is elastically deformable by the action of the force or moment received by the detection unit. It has the, the, force sensor. At one end in the second direction, the first tilting body is connected to the force receiving body, and the second tilting body is connected to the support body;
20. The force sensor according to claim 19 , wherein the first tilting body and the second tilting body are connected to the connecting body at the other end in the second direction. The first tilting body and the second tilting body are connected to the connecting body at both ends in the second direction,
At a position between the pair of the connecting member in the second direction, the second tilting member together with the first tilting member is connected to the force receiving member is connected to the support, to claim 19 The force sensor described. When the first tilting body and the second tilting body are viewed in a direction orthogonal to the first direction and the second direction, the first tilting body and the second tilting body are left and right in the second direction with the first base and the second base as centers. The force sensor according to claim 21 , wherein the force sensor is formed symmetrically. The first tilting body and the second tilting body are arranged at positions different from each other in a direction orthogonal to the first direction and the second direction,
A connection position between the first pedestal and the force receiving body and a connection position between the second pedestal and the support body are arranged at positions different from each other in a direction orthogonal to the first direction and the second direction. The force sensor according to any one of claims 19 to 23 which is present. The first tilting body and the second tilting body are arranged at positions different from each other in a direction orthogonal to the first direction and the second direction,
The connection position between the first pedestal and the force receiving body and the connection position between the second pedestal and the support body are arranged at the same position in the direction orthogonal to the first direction and the second direction. force sensor according to any one of claims 19-22. The force sensor according to any one of claims 19 to 24 , wherein the connecting body has a longitudinal direction along the first direction. Wherein when viewed in the first direction, wherein further comprising an outer body covering assist strain generating body from the outside, the force sensor according to any one of claims 1 to 25. The force sensor according to claim 26 , wherein the exterior body is fixed to the support body and is separated from the force receiving body. The force sensor according to claim 27 , wherein a cushioning member is interposed between the exterior body and the force receiving body. The detection element includes a fixed electrode provided on the force receiving body or the support body, and a displacement electrode provided on the detection strain generating body and facing the fixed electrode. The force sensor according to any one of 28 . Wherein the detection unit includes a strain gauge provided on said detecting flexure element, force sensor according to any one of claims 1 to 28.

Images