JPH05307015A - Manufacture of oxygen sensor - Google Patents

Manufacture of oxygen sensor

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Publication number
JPH05307015A
JPH05307015A JP4112659A JP11265992A JPH05307015A JP H05307015 A JPH05307015 A JP H05307015A JP 4112659 A JP4112659 A JP 4112659A JP 11265992 A JP11265992 A JP 11265992A JP H05307015 A JPH05307015 A JP H05307015A
Authority
JP
Japan
Prior art keywords
electrode
platinum
base
paste
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4112659A
Other languages
Japanese (ja)
Inventor
Akira Uchikawa
晶 内川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Unisia Automotive Ltd
Original Assignee
Unisia Jecs Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unisia Jecs Corp filed Critical Unisia Jecs Corp
Priority to JP4112659A priority Critical patent/JPH05307015A/en
Publication of JPH05307015A publication Critical patent/JPH05307015A/en
Pending legal-status Critical Current

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  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

PURPOSE:To activate the catalyst function of an electrode and allow a sensor to be actuated at a low temp. by applying a paste as electrode material consisting of a noble metal and complex oxide to a base in a provisionally baked state, and sintering the paste and the base simultaneously. CONSTITUTION:A tubular base 1 with the tip blocked is fabricated from a green sheet of zirconia ZrO2 as a solid electrolyte having oxygen ion conductivity. After provisionally baking the base 1, paste as mixture of complex oxide (for example, ZrO2+Y2O3) and platinum Pt is applied to the inner and outer surfaces of the base 1, and the resultant is sintered at a high temp. between 1100-1300 deg.C to form electrodes 2, 3. At this time, gas is generated from the complex oxide to suppress grain growth of platinum Pt, which causes enlargement of the surface area of the platinum Pt, and thereby, the catalyst function is activated. Accordingly, starting is practicable even at a low temp. without using any heater. On the outer surface of the base 1, a platinum catalyst layer 4 and a protection layer 5 are further provided, and brought into contact with the gas to be inspected is generated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は酸素センサの製造方法に
関し、詳しくは、酸素分圧比に応じた起電力を発生する
酸素センサの低温活性を向上させる製造技術に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an oxygen sensor, and more particularly to a manufacturing technique for improving low-temperature activity of an oxygen sensor which generates an electromotive force according to an oxygen partial pressure ratio.

【0002】[0002]

【従来の技術】従来、酸素イオン伝導性固体電解質を用
いた酸素センサとしては、例えば以下に示すようなセン
サ部構造を有したものがある(特開昭58−20436
5号公報、実開昭59−31054号公報等参照)。即
ち、酸化ジルコニウムZrO2 を主成分とする酸素イオ
ン伝導性固体電解質から形成される先端が閉塞されたジ
ルコニアチューブの内表面及び外表面にそれぞれ白金電
極を形成すると共に、外側の白金電極の更に外側にマグ
ネシウムスピネル等の酸化金属で保護層を形成する。
2. Description of the Related Art Conventionally, as an oxygen sensor using an oxygen ion conductive solid electrolyte, there is one having a sensor part structure as shown below (Japanese Patent Laid-Open No. 58-20436).
No. 5, Japanese Utility Model Publication No. 59-31054, etc.). That is, a platinum electrode is formed on each of the inner surface and the outer surface of a zirconia tube having a closed tip formed from an oxygen ion conductive solid electrolyte containing zirconium oxide ZrO 2 as a main component, and further outside the outer platinum electrode. Then, a protective layer is formed with a metal oxide such as magnesium spinel.

【0003】かかる構成において、ジルコニアチューブ
の内側空洞に基準気体(例えば大気)を導入する一方、
ジルコニアチューブの外側を被検出気体(例えば内燃機
関の排気)と接触させ、内表面に接触する基準気体の酸
素分圧と、外表面に接触する被検出気体の酸素分圧との
比に応じた起電力を、前記電極間に発生させることによ
って、被検出気体の酸素分圧(酸素濃度)を検出するも
のである。
In such a structure, while a reference gas (for example, atmosphere) is introduced into the inner cavity of the zirconia tube,
The outside of the zirconia tube is brought into contact with the gas to be detected (for example, exhaust gas from an internal combustion engine), and the oxygen partial pressure of the reference gas that contacts the inner surface and the oxygen partial pressure of the gas that contacts the outer surface are determined according to the ratio. By generating an electromotive force between the electrodes, the oxygen partial pressure (oxygen concentration) of the gas to be detected is detected.

【0004】尚、前記電極の形成方法としては、真空蒸
着法,無電解めっき法,ペースト法などがあるが、電極
の付着強度が高く耐久性に優れていることから、電極材
をペースト状にして仮焼状態のジルコニアチューブに塗
布してから焼結させるペースト法が、電極形成方法とし
て好ましいとされている。
As the method for forming the electrode, there are a vacuum vapor deposition method, an electroless plating method, a paste method and the like. However, since the electrode has high adhesion strength and excellent durability, the electrode material is formed into a paste. It is said that a paste method, in which a zirconia tube in a calcined state is applied and then sintered, is preferable as an electrode forming method.

【0005】[0005]

【発明が解決しようとする課題】ところで、従来の酸素
センサにおいては、低温時には内部抵抗が大きくなり、
かつ、触媒活性が悪化するなどの理由から、酸素分圧の
大きな差で高温時よりも高い起電力を発生するという特
性を有し、低温状態から酸素センサを通常に作動させる
ことができないという問題がある。特に、前記ペースト
法で電極を形成した場合には、焼結時に白金電極の粒成
長が発生し、これが触媒活性を悪化させる一因となって
いた。
By the way, in the conventional oxygen sensor, the internal resistance becomes large at a low temperature,
In addition, the catalyst has a characteristic of generating a higher electromotive force than that at high temperature due to a large difference in oxygen partial pressure because the catalyst activity is deteriorated, and the problem that the oxygen sensor cannot normally operate from a low temperature state There is. In particular, when the electrode is formed by the paste method, grain growth of the platinum electrode occurs during sintering, which is one of the causes of deteriorating the catalytic activity.

【0006】このため、低温状態から酸素センサを用い
たい場合には、素子を加熱するためのヒータを設け、こ
のヒータによる加熱によって、雰囲気温度が低い状態か
ら内部抵抗の減少及び触媒活性を図るようにしていた。
しかしながら、ヒータを設けることによって酸素センサ
のコストアップを招き、また、ヒータ電圧がリークした
場合に素子が破壊される惧れがあるなどの問題が新たに
発生していた。
For this reason, when it is desired to use the oxygen sensor in a low temperature state, a heater for heating the element is provided, and the heater is used to reduce internal resistance and catalytic activity from a low ambient temperature state. I was doing
However, the provision of the heater causes an increase in the cost of the oxygen sensor, and there is a new problem that the element may be destroyed when the heater voltage leaks.

【0007】本発明は上記問題点に鑑みなされたもので
あり、酸素センサにおける電極の触媒活性を向上させ得
る製造方法を提供し、以て、酸素センサの低温作動化を
改善することを目的とする。
The present invention has been made in view of the above problems, and an object thereof is to provide a manufacturing method capable of improving the catalytic activity of an electrode in an oxygen sensor, and to improve the low temperature operation of the oxygen sensor. To do.

【0008】[0008]

【課題を解決するための手段】そのため本発明は、酸素
イオン伝導性固体電解質からなる基体の内外表面に電極
をそれぞれ形成し、基準気体に接触させた一方表面の電
極と、被検出気体に接触させた他方表面の電極との間に
酸素分圧比に応じた起電力を発生する酸素センサの製造
方法であって、貴金属と複合酸化物とからなる電極材ペ
ーストを、仮焼状態の前記基体に塗布した後、前記電極
材ペーストと基体とを同時に焼結して電極を作製した。
Therefore, according to the present invention, an electrode is formed on each of the inner and outer surfaces of a substrate made of an oxygen ion conductive solid electrolyte and brought into contact with a reference gas, and the electrode on one surface is brought into contact with a gas to be detected. A method of manufacturing an oxygen sensor that generates an electromotive force according to an oxygen partial pressure ratio between the other surface of the electrode and an electrode material paste composed of a noble metal and a complex oxide, on the base body in a calcined state. After coating, the electrode material paste and the substrate were simultaneously sintered to prepare an electrode.

【0009】[0009]

【作用】かかる製造方法によると、焼結時に複合酸化物
からガスが発生して貴金属の粒成長が抑えられ、焼結後
の貴金属の粒径が小さくなり、表面積の拡大によって触
媒活性を図れるようになる。
According to such a manufacturing method, gas is generated from the composite oxide during sintering, grain growth of the noble metal is suppressed, the grain size of the noble metal after sintering is reduced, and the catalytic activity can be achieved by increasing the surface area. become.

【0010】[0010]

【実施例】以下に本発明の実施例を説明する。実施例の
酸素センサ構造を示す図1において、酸化ジルコニウム
ZrO2 を主成分とする酸素イオン伝導性固体電解質か
ら形成される先端が閉塞されたジルコニアチューブ1
(基体)の内表面及び外表面にそれぞれ起電力取り出し
用の白金電極2,3が形成されている。
EXAMPLES Examples of the present invention will be described below. Referring to FIG. 1 showing an oxygen sensor structure of an example, a zirconia tube 1 having a closed tip formed of an oxygen ion conductive solid electrolyte containing zirconium oxide ZrO 2 as a main component.
Platinum electrodes 2 and 3 for extracting electromotive force are formed on the inner surface and the outer surface of the (base), respectively.

【0011】また、ジルコニアチューブ1の外表面に
は、更に白金触媒層4が形成され、その上にはマグネシ
ウムスピネル等の酸化金属によって前記白金触媒層4を
保護するための保護層5が形成されている。かかる構成
において、ジルコニアチューブ1の内側空洞に基準気体
(例えば大気)を導入する一方、ジルコニアチューブ1
の外側を被検出気体(例えば内燃機関の排気)と接触さ
せ、内表面に接触する基準気体の酸素分圧と、外表面に
接触する被検出気体の酸素分圧との比に応じた起電力
を、前記電極2,3間に発生させることによって、被検
出気体の酸素分圧(酸素濃度)を検出するものである。
Further, a platinum catalyst layer 4 is further formed on the outer surface of the zirconia tube 1, and a protective layer 5 for protecting the platinum catalyst layer 4 with an oxide metal such as magnesium spinel is formed thereon. ing. In such a configuration, a reference gas (for example, the atmosphere) is introduced into the inner cavity of the zirconia tube 1 while the zirconia tube 1
Electromotive force according to the ratio of the oxygen partial pressure of the reference gas that contacts the inner surface and the oxygen partial pressure of the detected gas that contacts the outer surface Is generated between the electrodes 2 and 3 to detect the oxygen partial pressure (oxygen concentration) of the gas to be detected.

【0012】次に、上記のような構成の酸素センサの製
造方法を、図2のフローチャートに従って以下に説明す
る。まず、酸素イオン伝導性固体電解質としてのジルコ
ニアZrO2 のグリーンシートから先端が閉塞されたチ
ューブ状の基体(ジルコニアチューブ1)を作製する
(S1)。
Next, a method of manufacturing the oxygen sensor having the above structure will be described below with reference to the flow chart of FIG. First, a tubular substrate (zirconia tube 1) having a closed tip is produced from a green sheet of zirconia ZrO 2 as an oxygen ion conductive solid electrolyte (S1).

【0013】次いで、この基体(ジルコニアチューブ
1)は仮焼され、電極材ペーストの塗布に備える(S
2)。一方、白金ペーストに混ぜる複数酸化物を作製す
る(S3)。この複合酸化物とは、例えばZrO2 +Y
2 3 或いはZrO2 +CeO2 などであり、共沈法に
よって作製される。
Next, this substrate (zirconia tube 1) is calcined to prepare for application of the electrode material paste (S
2). On the other hand, a plurality of oxides to be mixed with the platinum paste is prepared (S3). This composite oxide is, for example, ZrO 2 + Y
2 O 3 or ZrO 2 + CeO 2 or the like, which is produced by the coprecipitation method.

【0014】前記複合酸化物(ZrO2 +Y2 3 或い
はZrO2 +CeO2 )が作製されると、これと白金P
t(貴金属)とを混合させたペーストを、電極材料とし
て作製する(S4)。尚、前記複合酸化物(ZrO2
2 3 或いはZrO2 +CeO2 )と白金Ptとの混
合割合は、白金Pt60〜80%、複合酸化物20〜40%程度
とする。
When the composite oxide (ZrO 2 + Y 2 O 3 or ZrO 2 + CeO 2 ) is prepared, it and platinum P
A paste mixed with t (noble metal) is prepared as an electrode material (S4). The composite oxide (ZrO 2 +
The mixing ratio of Y 2 O 3 or ZrO 2 + CeO 2 ) and platinum Pt is about 60 to 80% platinum Pt and about 20 to 40% complex oxide.

【0015】そして、前記仮焼状態の基体(ジルコニア
チューブ1)の内外表面の各一部(電極形成部)に前記
電極材ペーストを塗布する(S5)。電極材ペーストが
塗布されると、基体(ジルコニアチューブ1)と塗布さ
れた電極材ペーストとを、1100〜1300℃程度の高温で同
時に焼結させる(S6)。これによって、基体(セラミ
ックチューブ1)の内外表面にそれぞれ電極2,3が形
成される。
Then, the electrode material paste is applied to each part (electrode forming portion) of the inner and outer surfaces of the base body (zirconia tube 1) in the calcined state (S5). When the electrode material paste is applied, the substrate (zirconia tube 1) and the applied electrode material paste are simultaneously sintered at a high temperature of about 1100 to 1300 ° C (S6). As a result, the electrodes 2 and 3 are formed on the inner and outer surfaces of the base (ceramic tube 1), respectively.

【0016】ここで、図3に示すように、前記焼結時
に、電極材ペーストに含まれるZrO 2 +Y2 3 或い
はZrO2 +CeO2 等の複合酸化物からO2 又はH2
Oガスが発生し、かかるガスの発生によって白金Ptの
粒成長が抑制され、焼結後の白金Pt電極の粒径を小さ
くできる。具体的には、複合酸化物を含まない電極材ペ
ーストによって上記と同じように電極を形成した場合に
は、焼結によって白金電極の粒径は10〜20μmとなる
が、上記のようにZrO2 +Y2 3 或いはZrO2
CeO2 などの複合酸化物を混ぜてガスを発生させるこ
とで、白金電極の粒径を1〜10μm程度に小さくでき
る。
Here, as shown in FIG. 3, during the sintering
And ZrO contained in the electrode material paste 2+ Y2O3Some
Is ZrO2+ CeO2O from complex oxides such as2Or H2
O gas is generated, and by the generation of such gas, platinum Pt
Grain growth is suppressed and the particle size of the platinum Pt electrode after sintering is small.
You can Specifically, the electrode material binder that does not contain complex oxides
If the electrodes are formed in the same way as above by
Causes the particle size of the platinum electrode to become 10-20 μm by sintering.
However, as described above,2+ Y2O3Or ZrO2+
CeO2Mixing complex oxides such as
With, the particle size of the platinum electrode can be reduced to about 1 to 10 μm.
It

【0017】白金電極の粒径が小さくなれば、表面積が
大きくなって触媒性能が活性化されるから、低温時から
良好な触媒活性を得て、加熱ヒータを必要とせずに酸素
センサの低温作動化を可能とすることができるものであ
る。従って、低温作動化を実現できる酸素センサを低コ
ストに提供でき、また、ヒータを必要としないから、ヒ
ータ電圧のリークによる素子破壊の惧れもなくなる。
As the particle size of the platinum electrode becomes smaller, the surface area becomes larger and the catalytic performance is activated. Therefore, good catalytic activity is obtained even at low temperatures, and the oxygen sensor operates at low temperature without the need for a heater. Can be made possible. Therefore, it is possible to provide an oxygen sensor that can be operated at a low temperature at low cost, and since a heater is not required, there is no fear of element destruction due to leakage of the heater voltage.

【0018】上記のようにして、触媒活性が改善され低
温作動化が促進されれば、内燃機関の排気中の酸素濃度
を検出するために設けられる場合には、機関の始動直後
から排気中の酸素濃度を計測することができ、前記酸素
濃度の情報に基づく空燃比フィードバック制御を早期に
行わせて、機関始動時(冷機時)の排気性状を改善でき
るようになる。
As described above, if the catalytic activity is improved and the low temperature operation is promoted, if the oxygen concentration is provided to detect the oxygen concentration in the exhaust gas of the internal combustion engine, the exhaust gas in the exhaust gas is discharged immediately after the engine is started. The oxygen concentration can be measured, and the air-fuel ratio feedback control based on the information of the oxygen concentration can be performed early to improve the exhaust property at the engine start (when the engine is cold).

【0019】また、上記のように仮焼した基体(ジルコ
ニアチューブ)に電極材をペースト状にして塗布し、基
体と電極とを同時に焼結させる構成とすれば、電極の基
体に対する付着強度が強く、また、白金の熱変化も少な
いという効果が得られることは、複合酸化物を含まない
電極ペーストによって電極を形成する場合と同様であ
る。
If the electrode material is applied in paste form to the substrate (zirconia tube) that has been calcined as described above and the substrate and the electrode are simultaneously sintered, the adhesion strength of the electrode to the substrate is high. Further, the effect that the heat change of platinum is small is obtained as in the case of forming the electrode by the electrode paste containing no complex oxide.

【0020】即ち、ペースト状にした電極材を基体(ジ
ルコニアチューブ)に塗布してから同時焼結させる製造
方法においては、高い付着強度が得られ、かつ、白金の
熱変化も少ないという効果があるが、白金の粒成長が発
生して触媒活性が悪くなってしまうという欠点を有して
いたが、本実施例に示すように、白金ペーストに小説時
にガスを発生させる複合酸化物(ZrO2 +Y2 3
いはZrO2 +CeO 2 )を混ぜることで、白金の粒成
長が抑えられるようになり、粒成長というペースト法の
欠点を解消し得たものである。
That is, the paste-like electrode material is
Manufacture of applying to Luconia tube) and then sintering at the same time
In the method, high adhesion strength is obtained, and platinum
It has the effect of less heat change, but platinum grain growth occurs.
It has the drawback that it causes poor catalytic activity
However, as shown in this example, the platinum paste
Complex oxide (ZrO2+ Y2O3Some
Iha ZrO2+ CeO 2) Is mixed to form platinum particles.
The length can be suppressed, and the paste method called grain growth
The drawbacks could be resolved.

【0021】また、白金ペーストに複合酸化物(ZrO
2 +Y2 3 或いはZrO2 +CeO2 )を混ぜること
は、基体に対する親和性を高めて高い付着強度を得るこ
とにもなる。尚、本実施例では、貴金属として白金Pt
を用いたが、この他の耐熱性を有しかつ触媒機能を有し
た貴金属を用いても良い。
Further, platinum oxide is mixed with complex oxide (ZrO
Mixing 2 + Y 2 O 3 or ZrO 2 + CeO 2 ) also increases the affinity for the substrate and obtains high adhesion strength. In this embodiment, platinum Pt is used as the noble metal.
However, other noble metals having heat resistance and a catalytic function may be used.

【0022】[0022]

【発明の効果】以上説明したように本発明にかかる酸素
センサの製造方法によると、電極材のペーストを仮焼状
態の基体に塗布し、前記ペーストと基体とを同時に焼結
させて電極を形成する方法において、前記焼結時に電極
材ペーストに混ぜた複合酸化物からガスが発生して電極
の粒成長を抑えることができるので、電極における触媒
活性を図ることができ、酸素センサの低温作動化を図れ
るようになるという効果がある。
As described above, according to the method of manufacturing an oxygen sensor of the present invention, the paste of the electrode material is applied to the substrate in the calcined state, and the paste and the substrate are simultaneously sintered to form the electrode. In the method described above, gas can be generated from the composite oxide mixed in the electrode material paste at the time of sintering to suppress grain growth of the electrode, so that catalytic activity in the electrode can be achieved and low temperature operation of the oxygen sensor can be achieved. The effect is to be able to achieve.

【図面の簡単な説明】[Brief description of drawings]

【図1】酸素センサ構造例を示す断面図。FIG. 1 is a cross-sectional view showing an example of an oxygen sensor structure.

【図2】本発明にかかる製造方法の工程を示すフローチ
ャート。
FIG. 2 is a flowchart showing steps of a manufacturing method according to the present invention.

【図3】焼結時のガス発生の様子を示す状態図。FIG. 3 is a state diagram showing how gas is generated during sintering.

【符号の説明】[Explanation of symbols]

1 セラミックチューブ 2,3 電極 1 Ceramic tube 2 and 3 electrodes

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】酸素イオン伝導性固体電解質からなる基体
の内外表面に電極をそれぞれ形成し、基準気体に接触さ
せた一方表面の電極と、被検出気体に接触させた他方表
面の電極との間に酸素分圧比に応じた起電力を発生する
酸素センサの製造方法であって、 貴金属と複合酸化物とからなる電極材ペーストを、仮焼
状態の前記基体に塗布した後、前記電極材ペーストと基
体とを同時に焼結して電極を作製することを特徴とする
酸素センサの製造方法。
1. An electrode is formed on each of the inner and outer surfaces of a substrate made of an oxygen ion conductive solid electrolyte, and the electrode is on one surface in contact with a reference gas and the electrode on the other surface is in contact with a gas to be detected. A method for manufacturing an oxygen sensor that generates an electromotive force according to an oxygen partial pressure ratio, wherein an electrode material paste comprising a noble metal and a complex oxide is applied to the base body in a calcined state, and then the electrode material paste and A method of manufacturing an oxygen sensor, which comprises simultaneously sintering a substrate and an electrode.
JP4112659A 1992-05-01 1992-05-01 Manufacture of oxygen sensor Pending JPH05307015A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4112659A JPH05307015A (en) 1992-05-01 1992-05-01 Manufacture of oxygen sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4112659A JPH05307015A (en) 1992-05-01 1992-05-01 Manufacture of oxygen sensor

Publications (1)

Publication Number Publication Date
JPH05307015A true JPH05307015A (en) 1993-11-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP4112659A Pending JPH05307015A (en) 1992-05-01 1992-05-01 Manufacture of oxygen sensor

Country Status (1)

Country Link
JP (1) JPH05307015A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990047686A (en) * 1997-12-05 1999-07-05 이구택 Manufacturing method of limit current type oxygen sensor
US5970780A (en) * 1996-08-21 1999-10-26 Toyota Jidosha Kabushiki Kaisha Oxygen sensor
JP2016012697A (en) * 2014-06-30 2016-01-21 日本特殊陶業株式会社 Thermistor element and temperature sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5970780A (en) * 1996-08-21 1999-10-26 Toyota Jidosha Kabushiki Kaisha Oxygen sensor
KR19990047686A (en) * 1997-12-05 1999-07-05 이구택 Manufacturing method of limit current type oxygen sensor
JP2016012697A (en) * 2014-06-30 2016-01-21 日本特殊陶業株式会社 Thermistor element and temperature sensor

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