JPH0530354Y2 - - Google Patents

Info

Publication number
JPH0530354Y2
JPH0530354Y2 JP1986000430U JP43086U JPH0530354Y2 JP H0530354 Y2 JPH0530354 Y2 JP H0530354Y2 JP 1986000430 U JP1986000430 U JP 1986000430U JP 43086 U JP43086 U JP 43086U JP H0530354 Y2 JPH0530354 Y2 JP H0530354Y2
Authority
JP
Japan
Prior art keywords
core tube
reactor core
cap body
reaction gas
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986000430U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62112137U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986000430U priority Critical patent/JPH0530354Y2/ja
Publication of JPS62112137U publication Critical patent/JPS62112137U/ja
Application granted granted Critical
Publication of JPH0530354Y2 publication Critical patent/JPH0530354Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1986000430U 1986-01-07 1986-01-07 Expired - Lifetime JPH0530354Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986000430U JPH0530354Y2 (enrdf_load_stackoverflow) 1986-01-07 1986-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986000430U JPH0530354Y2 (enrdf_load_stackoverflow) 1986-01-07 1986-01-07

Publications (2)

Publication Number Publication Date
JPS62112137U JPS62112137U (enrdf_load_stackoverflow) 1987-07-17
JPH0530354Y2 true JPH0530354Y2 (enrdf_load_stackoverflow) 1993-08-03

Family

ID=30777397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986000430U Expired - Lifetime JPH0530354Y2 (enrdf_load_stackoverflow) 1986-01-07 1986-01-07

Country Status (1)

Country Link
JP (1) JPH0530354Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5973496A (ja) * 1982-10-19 1984-04-25 Matsushita Electric Ind Co Ltd 気相成長装置

Also Published As

Publication number Publication date
JPS62112137U (enrdf_load_stackoverflow) 1987-07-17

Similar Documents

Publication Publication Date Title
KR101354106B1 (ko) 가스 입구 부재를 구비한 ｃｖｄ 반응기
US20020048860A1 (en) Method of producing thin films using current of process gas and inert gas colliding with each other and apparatus for producing thin films for practicing the same method
JPS63227011A (ja) 化学気相成長装置
US20140339330A1 (en) Source gas jetting nozzle for a vacuum deposition apparatus
JPH0530354Y2 (enrdf_load_stackoverflow)
KR20200137372A (ko) 기판처리장치
CN221711416U (zh) 一种带涂抹器的包装容器
KR102681787B1 (ko) 기판 지지대 및 기판 처리 장치
KR20050087854A (ko) 수소 파이프를 갖는 수소 연소 장치
JPH0130043B2 (enrdf_load_stackoverflow)
CN107523803A (zh) 薄膜形成装置
JPH0226908Y2 (enrdf_load_stackoverflow)
JP2004211181A (ja) 溶融金属精錬用ランス
JPH0537199Y2 (enrdf_load_stackoverflow)
JP2574269Y2 (ja) 回転円盤式噴霧造粒装置
JPS63293165A (ja) 処理装置
JP3327476B2 (ja) 造粒コーティング装置
JPH10317145A (ja) 気相成長装置
JPH04288821A (ja) 処理装置
JPS5820587Y2 (ja) 粉体の均等分配器
JPH0625000Y2 (ja) 炉芯管構造
JPH044846Y2 (enrdf_load_stackoverflow)
JPH0410915Y2 (enrdf_load_stackoverflow)
SU751445A1 (ru) Головка к горелке дл газопламенного напылени
JPH04352322A (ja) 不純物熱拡散装置