JPH0529600Y2 - - Google Patents

Info

Publication number
JPH0529600Y2
JPH0529600Y2 JP8284388U JP8284388U JPH0529600Y2 JP H0529600 Y2 JPH0529600 Y2 JP H0529600Y2 JP 8284388 U JP8284388 U JP 8284388U JP 8284388 U JP8284388 U JP 8284388U JP H0529600 Y2 JPH0529600 Y2 JP H0529600Y2
Authority
JP
Japan
Prior art keywords
gear
nut
lubricant
opening
piston shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8284388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH024099U (US06633600-20031014-M00021.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8284388U priority Critical patent/JPH0529600Y2/ja
Publication of JPH024099U publication Critical patent/JPH024099U/ja
Application granted granted Critical
Publication of JPH0529600Y2 publication Critical patent/JPH0529600Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
  • Transmission Devices (AREA)
JP8284388U 1988-06-22 1988-06-22 Expired - Lifetime JPH0529600Y2 (US06633600-20031014-M00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8284388U JPH0529600Y2 (US06633600-20031014-M00021.png) 1988-06-22 1988-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8284388U JPH0529600Y2 (US06633600-20031014-M00021.png) 1988-06-22 1988-06-22

Publications (2)

Publication Number Publication Date
JPH024099U JPH024099U (US06633600-20031014-M00021.png) 1990-01-11
JPH0529600Y2 true JPH0529600Y2 (US06633600-20031014-M00021.png) 1993-07-28

Family

ID=31307584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8284388U Expired - Lifetime JPH0529600Y2 (US06633600-20031014-M00021.png) 1988-06-22 1988-06-22

Country Status (1)

Country Link
JP (1) JPH0529600Y2 (US06633600-20031014-M00021.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4588620B2 (ja) * 2004-12-22 2010-12-01 東京エレクトロン株式会社 真空処理装置

Also Published As

Publication number Publication date
JPH024099U (US06633600-20031014-M00021.png) 1990-01-11

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