JPH0529113Y2 - - Google Patents
Info
- Publication number
- JPH0529113Y2 JPH0529113Y2 JP8092987U JP8092987U JPH0529113Y2 JP H0529113 Y2 JPH0529113 Y2 JP H0529113Y2 JP 8092987 U JP8092987 U JP 8092987U JP 8092987 U JP8092987 U JP 8092987U JP H0529113 Y2 JPH0529113 Y2 JP H0529113Y2
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- tank
- cleaning
- evaporation tank
- airtight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002904 solvent Substances 0.000 claims description 84
- 238000004140 cleaning Methods 0.000 claims description 56
- 238000000935 solvent evaporation Methods 0.000 claims description 34
- 238000011084 recovery Methods 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000001704 evaporation Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 4
- 238000004821 distillation Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 238000005292 vacuum distillation Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 150000008280 chlorinated hydrocarbons Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 238000004508 fractional distillation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8092987U JPH0529113Y2 (US20100056889A1-20100304-C00004.png) | 1987-05-29 | 1987-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8092987U JPH0529113Y2 (US20100056889A1-20100304-C00004.png) | 1987-05-29 | 1987-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63193588U JPS63193588U (US20100056889A1-20100304-C00004.png) | 1988-12-13 |
| JPH0529113Y2 true JPH0529113Y2 (US20100056889A1-20100304-C00004.png) | 1993-07-26 |
Family
ID=30932191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8092987U Expired - Lifetime JPH0529113Y2 (US20100056889A1-20100304-C00004.png) | 1987-05-29 | 1987-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0529113Y2 (US20100056889A1-20100304-C00004.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108325915A (zh) * | 2018-03-28 | 2018-07-27 | 安徽尼古拉电子科技有限公司 | 一种电子元器件表面氧化膜清洗装置及方法 |
| CN108687016A (zh) * | 2018-03-28 | 2018-10-23 | 安徽尼古拉电子科技有限公司 | 一种微电子机械清洗装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2535466B2 (ja) * | 1991-10-17 | 1996-09-18 | ジャパン・フィールド株式会社 | 可燃性溶剤を用いた被洗浄物の洗浄装置 |
| JP2742238B2 (ja) * | 1995-03-16 | 1998-04-22 | 中外炉工業株式会社 | 有機溶剤を使用する洗浄装置 |
-
1987
- 1987-05-29 JP JP8092987U patent/JPH0529113Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108325915A (zh) * | 2018-03-28 | 2018-07-27 | 安徽尼古拉电子科技有限公司 | 一种电子元器件表面氧化膜清洗装置及方法 |
| CN108687016A (zh) * | 2018-03-28 | 2018-10-23 | 安徽尼古拉电子科技有限公司 | 一种微电子机械清洗装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63193588U (US20100056889A1-20100304-C00004.png) | 1988-12-13 |
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