JPH0528772Y2 - - Google Patents

Info

Publication number
JPH0528772Y2
JPH0528772Y2 JP2528887U JP2528887U JPH0528772Y2 JP H0528772 Y2 JPH0528772 Y2 JP H0528772Y2 JP 2528887 U JP2528887 U JP 2528887U JP 2528887 U JP2528887 U JP 2528887U JP H0528772 Y2 JPH0528772 Y2 JP H0528772Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
holding jig
sheet holding
outer ring
wafer sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2528887U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63134546U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2528887U priority Critical patent/JPH0528772Y2/ja
Publication of JPS63134546U publication Critical patent/JPS63134546U/ja
Application granted granted Critical
Publication of JPH0528772Y2 publication Critical patent/JPH0528772Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Packaging Frangible Articles (AREA)
  • Special Conveying (AREA)
JP2528887U 1987-02-23 1987-02-23 Expired - Lifetime JPH0528772Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2528887U JPH0528772Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-23 1987-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2528887U JPH0528772Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-23 1987-02-23

Publications (2)

Publication Number Publication Date
JPS63134546U JPS63134546U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-02
JPH0528772Y2 true JPH0528772Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-23

Family

ID=30825301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2528887U Expired - Lifetime JPH0528772Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-23 1987-02-23

Country Status (1)

Country Link
JP (1) JPH0528772Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012059749A (ja) * 2010-09-06 2012-03-22 Shin Etsu Polymer Co Ltd 基板用の保持治具
JP7237413B2 (ja) * 2018-05-14 2023-03-13 株式会社ディスコ ウェーハの加工方法
JP2019212815A (ja) * 2018-06-06 2019-12-12 株式会社ディスコ ウェーハの加工方法
JP2019212813A (ja) * 2018-06-06 2019-12-12 株式会社ディスコ ウェーハの加工方法
JP2019212814A (ja) * 2018-06-06 2019-12-12 株式会社ディスコ ウェーハの加工方法
JP2020024990A (ja) * 2018-08-06 2020-02-13 株式会社ディスコ ウェーハの加工方法
JP2020024991A (ja) * 2018-08-06 2020-02-13 株式会社ディスコ ウェーハの加工方法
JP7166723B2 (ja) * 2018-10-17 2022-11-08 株式会社ディスコ ウェーハの加工方法
JP7166721B2 (ja) * 2018-10-17 2022-11-08 株式会社ディスコ ウェーハの加工方法
JP7166722B2 (ja) * 2018-10-17 2022-11-08 株式会社ディスコ ウェーハの加工方法

Also Published As

Publication number Publication date
JPS63134546U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-02

Similar Documents

Publication Publication Date Title
JPH0528772Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US4407627A (en) Automatic wafer orienting apparatus
JPH0768441A (ja) 位置決め装置
JPH0217794Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO2023062738A1 (ja) 位置合わせ治具
JPH0369078B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH04320043A (ja) Ｖノッチウエハの位置決め機構
JPS63133546A (ja) ウエハ−の位置決め装置
JPS62186545A (ja) 半導体ウエハの位置合せ法
JPH0332428U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0120324Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0213288Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0212067Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0517752Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH02122306U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6068339A (ja) リソグラフィ−用マスク構造体
JPH0482852U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH04308113A (ja) 基板の位置決め装置
JPH0329537B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH045634U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61214445A (ja) ウエ−ハの位置合わせ機構
JPH0560260B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0642161Y2 (ja) 頂点測定補助具
JPS6311245A (ja) 組立治具パレツト
JPH0379158U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)