JPH0528767Y2 - - Google Patents

Info

Publication number
JPH0528767Y2
JPH0528767Y2 JP1987111760U JP11176087U JPH0528767Y2 JP H0528767 Y2 JPH0528767 Y2 JP H0528767Y2 JP 1987111760 U JP1987111760 U JP 1987111760U JP 11176087 U JP11176087 U JP 11176087U JP H0528767 Y2 JPH0528767 Y2 JP H0528767Y2
Authority
JP
Japan
Prior art keywords
holder
probe card
probe
wafer
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987111760U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6416638U (US06373033-20020416-M00071.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987111760U priority Critical patent/JPH0528767Y2/ja
Publication of JPS6416638U publication Critical patent/JPS6416638U/ja
Application granted granted Critical
Publication of JPH0528767Y2 publication Critical patent/JPH0528767Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1987111760U 1987-07-20 1987-07-20 Expired - Lifetime JPH0528767Y2 (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987111760U JPH0528767Y2 (US06373033-20020416-M00071.png) 1987-07-20 1987-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987111760U JPH0528767Y2 (US06373033-20020416-M00071.png) 1987-07-20 1987-07-20

Publications (2)

Publication Number Publication Date
JPS6416638U JPS6416638U (US06373033-20020416-M00071.png) 1989-01-27
JPH0528767Y2 true JPH0528767Y2 (US06373033-20020416-M00071.png) 1993-07-23

Family

ID=31350094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987111760U Expired - Lifetime JPH0528767Y2 (US06373033-20020416-M00071.png) 1987-07-20 1987-07-20

Country Status (1)

Country Link
JP (1) JPH0528767Y2 (US06373033-20020416-M00071.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5721831A (en) * 1980-07-14 1982-02-04 Nec Kyushu Ltd Inspecting device for semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5721831A (en) * 1980-07-14 1982-02-04 Nec Kyushu Ltd Inspecting device for semiconductor wafer

Also Published As

Publication number Publication date
JPS6416638U (US06373033-20020416-M00071.png) 1989-01-27

Similar Documents

Publication Publication Date Title
JP5450391B2 (ja) ウェーハプローブ試験および検査システム
TWI483340B (zh) 組件對準方法及裝置
WO2015015921A1 (ja) プローバ
KR101358564B1 (ko) 프로브 카드의 위치 결정 기구 및 검사 장치
US20050005702A1 (en) Transporting tool for object to be tested, and object-to-be-tested transporting system
US20220120785A1 (en) Wafer probe device
JPH0370900B2 (US06373033-20020416-M00071.png)
JPH0528767Y2 (US06373033-20020416-M00071.png)
JP2913609B2 (ja) プロービング装置、プロービング方法およびプローブカード
JPH0575178B2 (US06373033-20020416-M00071.png)
JPH0384945A (ja) 位置合せ方法およびそれを用いた検査装置
JPH0682743B2 (ja) ウエハ処理装置
JPH0685409B2 (ja) ウェハ搬送装置
JPH0719817B2 (ja) プロ−ブカ−ド自動交換方法
KR100262654B1 (ko) 웨이퍼 프로빙 장치 및 방법
JP2529559B2 (ja) 基板処理装置
JPS63318745A (ja) プロ−ブ装置
JPH09326426A (ja) ウェーハの検査装置および方法
JPS6239822B2 (US06373033-20020416-M00071.png)
JPH0374853A (ja) Ｔａｂディバイスの検査方法及びそれに用いるｔａｂディバイス用キャリア並びに測定モジュール及びインサート装置
JPH0228344A (ja) 半導体検査装置
JPH04355943A (ja) ウエハプローバ
JPH07107909B2 (ja) ウエハプローバ
JPH04298057A (ja) プロービング装置及び方法
JPS63138746A (ja) フラツトパツケ−ジｉｃのリ−ドピンの状態検査装置