JPH05286688A - Takeout structure for graphite part - Google Patents

Abstract

PURPOSE:To simplify works of taking out a graphite part and enhance the safety by detaining hooks at the tips of arms of a hanging tool with the detaining grooves at the periphery of the graphite item, and fixing the hanging tool to the graphite item only through fixing of the hooks with a stopper. CONSTITUTION:In a drawup device for silicon mono-crystals, seed crystal suspended by a wire is immersed in a molten silicon placed in a quartz crucible, and then silicon mono-crystals are drawn up. This crystal drawup device has a takeout device to take out a heat shield as a graphite item to outside a furnace when the heat shield is to be dismantled and purified, wherein the takeout device is equipped with at least three detaining grooves formed at a certain spacing on the periphery of the heat shield. This has also a hanging tool 20, which is composed of arms 23-25 extending radially from a triangular hooking part, where an eye nut 21 is provided, and L-shaped hooks 26-28 pivoted at the tips of these arms 23-25, and therewith fixation is established by insertion of a stopper pin 30 after the hooks 26-28 are engaged by the grooves.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a take-out structure for taking out a graphite part installed in a silicon pulling device by lifting it with a wire through a lifting tool.

[0002]

2. Description of the Related Art For example, the Czochralski method (CZ method)
As shown in FIG. 9, the apparatus 1 for pulling a silicon single crystal according to (1) comprises a main chamber 2 and a pull chamber 3 installed thereon, and a gate valve 1a is provided between them.

Here, the lower main chamber 2 has a quartz crucible 4 for holding a silicon melt in the center thereof.
Are fitted in a graphite crucible 5, and these crucibles 4, 5 are rotatably supported by a support 6. A heater 7 is provided around the graphite crucible 5, and a heat shield 8 is provided around the heater 7. Furthermore, in the shoulder of the main chamber 2,
A diameter control optical system diameter detector 11 for monitoring the diameter of the silicon single crystal 10 pulled out from the silicon melt 9 in the quartz crucible 4 is installed.

The pulling of the silicon single crystal 10 by the pulling apparatus 1 configured as described above is performed by immersing the seed crystal suspended by the wire 12 in the silicon melt 9 in the quartz crucible 4.
This is performed by pulling the seed crystal and the quartz crucible 4 while rotating in the same direction or in the opposite direction.

By the way, in the furnace internal structure such as the graphite part of the pulling apparatus 1, SiO evaporated from the silicon melt 9, impurities used for being introduced into the silicon single crystal 10 and a quartz crucible. Various metal impurities, etc. from Therefore, conventionally, graphite parts such as the heat shield 8 are regularly taken out of the furnace and disassembled and cleaned. The present invention relates to a structure for taking out the heat shield 8 and the like. The structure will be described below.

Here, the heat shield 8 will be described as an example. The heat shield 8 is formed of graphite fiber or felt into a cylindrical shape, and as shown in FIGS. A body 8a is provided. Also,
At the upper end of the heat shield 8, a graphite molded body 13 having a female screw portion is embedded. Then, an eye nut 14 for hanging a wire (not shown) on the female screw portion
The hoisting tool 14 provided with a can be screwed.

[0007]

However, when the heat shield 8 is taken out of the furnace by such a hoisting structure, the following problems occur.

That is, the hoisting tool 14 and the bolts for screwing the hoisting tool 14 to the graphite molded body 13 are usually made of SUS material having high corrosion resistance / heat resistance and high mechanical strength. Can not. This is because the temperature inside the furnace becomes higher than the melting point of the SUS material when pulling the silicon single crystal, and the hoisting tool 14 and the bolt melt. Therefore, the lifting tool 14 must be attached to the heat shield 8 every time the heat shield 8 is taken out. Further, when the heat shield 8 is installed in the furnace after cleaning the heat shield 8, the lifting tool 14 must be removed. As a result, there is a problem that the work is complicated.

It is not uncommon for the heat shield 8 to be taken out immediately after the pulling of the silicon single crystal 10 in order to improve the operation rate.
Since the temperature is about 300 ° C., there is a risk that the heat shield 8 may be touched and burned during the screwing work of the lifting tool 14.

Such a problem also occurs when taking out another graphite component (for example, a graphite crucible) in the silicon single crystal pulling apparatus.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a take-out structure capable of safely and easily taking out graphite parts.

[0012]

In order to achieve the above object, the present invention provides a take-out structure for taking out a graphite part installed in a silicon pulling apparatus by a wire or a chain via a lifting tool and taking out the graphite part. At least three locking grooves are formed on the outer periphery of the part at predetermined intervals, and the lifting tool is provided with a hooking part for hooking the wire or chain, and the arming part is provided on the hooking part. Are radially provided in the same number as the engaging grooves, and hooks that engage with the engaging grooves are respectively provided at the tips of the arms, and at least one of the hooks is attached to an axis orthogonal to the arms. And a stopper for fixing the hook in a state where the hook is engaged with a corresponding locking groove.

[0013]

According to the above-mentioned means, the hook can be fixed to the graphite part only by engaging the hook at the end of each arm of the hoisting tool with the engaging groove on the outer periphery of the graphite part and fixing the hook with the stopper. , The work is simplified. Also,
Since the work can be done away from the high temperature graphite parts, the work can be safe.

[0014]

Embodiments of the present invention will be described below with reference to FIGS.

The hoisting tool 20 of the embodiment is shown in FIGS.
As shown in FIG. 5, it has a triangular hooking portion 22 to which an eye nut 21 is attached, and the hooking portion 22 is attached with arms 23, 24, 25 extending radially through the respective tops thereof. .. At the tips of the arms 23, 24, 25,
As shown in FIGS. 2 to 6, the “L” -shaped hook 26,
27 and 28 are attached respectively. Of these, the hook 26 is a fixed hook as shown in FIGS. 3 and 4, and the hooks 27 and 28 are movable hooks as shown in FIGS. The hooks 27 and 28, which are movable hooks, are the axes 24a orthogonal to the arms 24 and 25,
It is attached to the arms 24 and 25 via support plates 27a and 28a so as to be rotatable around 25a (see FIG. 5). In this case, as shown in FIG. 5, the hooks 27 and 28 have support plates 27a and 28a.
There are two of each, and these two support plates 27
The hooks 27 and 28 are attached to the arms 24 and 25 such that the tips of the arms 24 and 25 are sandwiched by a and 28a. In addition, as shown in FIG.
As shown in FIG. 5, the engaging holes 24b and 25b are provided, and the supporting plates 27a and 28a of the hooks 27 and 28 are provided with engaging holes 27 that can be centered on the engaging holes 24b and 25b.
b and 28b are perforated. Then, this locking hole 27
The hooks 27, 28 can be fixed to the arms 24, 25 by fitting tapered stopper pins 30 in b, 24b and 28b, 24b.

On the other hand, the heat shield (graphite part) 40 to which the hoisting tool 20 is attached is made of graphite fiber or felt in a cylindrical shape, and as shown in FIG. 7 and FIG. A molded body 40a is provided. Further, the outer peripheral surface of the heat shield 40 has locking holes 41a, 42 into which the hooks 26, 27, 28 can be engaged.
a and 43a are provided. The locking grooves 41a, 42
The graphite molded bodies 41, 42, and 43 embedded in the heat shield 40 are respectively a and 43a.

Next, a method of lifting the heat shield 8 will be described.

First, with the wire (not shown) hooked on the eye nut 21 attached to the hook portion 22, the lifting device 2
0 is lowered to just above the heat shield 8. Then, the stopper pin 30 is attached to the locking holes 27b, 24b and 2
8b, 24b, and remove the hooks 27, 28 from the arm 2
The hook 26 is engaged with the locking groove 41 a on the outer circumference of the heat shield 8 while being movable with respect to the Nos. 4 and 25. Next, the hooks 27, 28 are attached to the remaining locking holes 42a,
43a, and in this state, the locking holes 27b, 24b
And the stopper pin 30 is inserted into 28b and 24b, and the hooks 27 and 28 are fixed. As a result, the lifting device 2
0 is attached to the heat shield 8. Then, the heat shield 8 is lifted by winding a wire,
Take it out of the furnace.

When the heat shield 8 is loaded into the furnace, the procedure is reversed.

According to the hoisting tool constructed as described above, the following effects can be obtained.

That is, the arms 23 and 2 of the lifting device 20.
By engaging the hooks 26, 27, 28 at the ends of 4, 25 with the engaging grooves 41a, 42a, 43a on the outer periphery of the heat shield 8, the lifting tool 20 can be fixed to the heat shield 8, and then the lifting tool 20 The heat shield 8 can be easily lifted by winding the hung wire. As a result, the work time can be shortened and the work safety including the avoidance of high heat work is improved.

Although the embodiments of the present invention have been described above, the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention.

For example, in the above embodiment, the case where the number of arms is three has been described, but the number of arms may be four or more.

Further, in the above embodiment, the heat shield 8
However, the present invention can be applied to other graphite parts such as a graphite crucible.

[0025]

As described above, according to the present invention, in the take-out structure for taking out and taking out the graphite part installed in the silicon pulling device by the wire or the chain through the lifting tool, the graphite part has At least three locking grooves are formed on the outer periphery at predetermined intervals, and the lifting tool is provided with a hooking part for hooking the wire or chain, and the arms are radially arranged on the hooking part. As many hook grooves as the lock grooves are provided, and hooks for engaging the lock grooves are provided at the ends of the arms, and at least one of the hooks is rotatable about an axis orthogonal to the arms. And a stopper for fixing the rotatable hook in a state where the rotatable hook is engaged with the corresponding locking groove, the heat shield can be safely and easily attached. It will be capable of performing up work.

[Brief description of drawings]

FIG. 1 is a plan view of a lifting tool according to an embodiment.

FIG. 2 is a perspective view of a hooking portion of the lifting device of the embodiment.

FIG. 3 is a perspective view of a hook of a hoisting tool of the embodiment and its vicinity.

FIG. 4 is a side view of the hook of FIG. 3 and its vicinity.

FIG. 5 is a perspective view of the hook of the lifting tool of the embodiment and the vicinity thereof.

FIG. 6 is a side view of the hook of FIG. 5 and its vicinity.

FIG. 7 is a perspective view of a heat shield of the embodiment.

FIG. 8 is a cross-sectional view of the heat shield of the embodiment.

FIG. 9 is a schematic configuration diagram of a silicon single crystal pulling apparatus.

FIG. 10 is a vertical cross-sectional view of the heat shield of the embodiment.

FIG. 11 is a plan view of the heat shield of the embodiment.

[Explanation of symbols]

 20 Lifting tool 23, 24, 25 Arm 26, 27, 28 Hook 40 Heat shield (graphite part) 41a, 42a, 43a Locking groove

Claims (1)

[Claims] 1. A take-out structure for hoisting and taking out graphite parts installed in a silicon pulling device by a wire or a chain via a hoisting tool, wherein at least three graphite parts are provided on the outer periphery of the graphite part at predetermined intervals. Locking groove is formed, the lifting tool is provided with a hooking portion for hooking the wire or chain, and the same number of arms as the locking groove are radially attached to the hooking portion. A hook that engages with each locking groove is provided at the tip of each arm, and at least one of the hooks is configured to be rotatable with respect to an axis orthogonal to the arm, and is rotatable. And a hook for fixing the hook in a state where the hook is engaged with the corresponding locking groove.