JP3010010B2 - Lifting method of crucible made of carbon fiber reinforced carbon - Google Patents
Lifting method of crucible made of carbon fiber reinforced carbonInfo
- Publication number
- JP3010010B2 JP3010010B2 JP7202751A JP20275195A JP3010010B2 JP 3010010 B2 JP3010010 B2 JP 3010010B2 JP 7202751 A JP7202751 A JP 7202751A JP 20275195 A JP20275195 A JP 20275195A JP 3010010 B2 JP3010010 B2 JP 3010010B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- fiber reinforced
- carbon
- ccm
- carbon fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【技術分野】本発明は、シリコン単結晶引上げ装置用の
炭素繊維強化炭素製（以下ＣＣＭという）ルツボを取り
付け、取り外しをする際に吊り上げる方法に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of attaching and removing a crucible made of carbon fiber reinforced carbon (hereinafter referred to as CCM) for a silicon single crystal pulling apparatus.
【０００２】[0002]
【従来の技術】シリコン単結晶引上げ装置用のルツボに
は、従来黒鉛製のものが多く用いられていたが、最近は
シリコンウエハーの大型化により、ルツボも大型となる
ためＣＣＭ製のものが採用されてきた。2. Description of the Related Art Conventionally, graphite crucibles for silicon single crystal pulling apparatuses have been used in many cases, but recently, crucibles have become larger due to the enlargement of silicon wafers, so those made of CCM have been adopted. It has been.
【０００３】すなわちシリコンウエハーの口径が従来４
インチのものが主流であったのが、６インチさらには８
インチと拡大してきており、これに従いルツボも１２イ
ンチから１８インチ、２４インチと大型化してきてい
る。That is, the diameter of a silicon wafer is
6 inches and 8 inches were the mainstream.
In accordance with this, crucibles have been increasing from 12 inches to 18 inches and 24 inches accordingly.
【０００４】上記のような大型化したＣＣＭルツボの吊
り上げ方法として、各種の方法があるが次のような問題
点がある。まずＣＣＭルツボの胴部に引掛け用の穴を開
ける方法があるが、穴まわりが消耗し、ルツボの強度低
下をきたし、薄肉構造の為、引っ掛りしろも少なく困難
である。There are various methods for lifting the large-sized CCM crucible as described above, but there are the following problems. First, there is a method in which a hole for hooking is formed in the body of the CCM crucible. However, the circumference of the hole is worn, the strength of the crucible is reduced, and the thin wall structure makes it difficult to get caught.
【０００５】またルツボ底部をストレートに伸ばし段差
加工する方法があるが、この場合、底部を厚肉化する必
要がある。ＣＣＭルツボは基本的に薄肉構成であり、厚
肉化はコスト高となり、製造歩留まりが低下し、さらに
伝熱や温度分布の面でも問題が生じる。In addition, there is a method in which the bottom of the crucible is straightened to form a step, but in this case, it is necessary to increase the thickness of the bottom. CCM crucibles are basically thin-walled, and thickening them increases the cost, lowers the production yield, and causes problems in terms of heat transfer and temperature distribution.
【０００６】[0006]
【発明の課題】上記のような問題に鑑み、本発明はシリ
コン単結晶引上げ装置用のＣＣＭのルツボの吊り上げ方
法につき、ルツボの設計、加工に大幅な変更なしに、装
置に簡単な改良を加えることにより吊り上げ可能な方法
を提供するものである。SUMMARY OF THE INVENTION In view of the above problems, the present invention relates to a method of lifting a crucible of a CCM for a silicon single crystal pulling apparatus, and to add a simple improvement to the apparatus without drastically changing the design and processing of the crucible. Thus, a method capable of lifting can be provided.
【０００７】[0007]
【課題を解決するための手段】上記のような問題を解決
するため、本発明者が提案するのは、シリコン単結晶引
上げ装置用のＣＣＭルツボの吊り上げ方法に関し、前記
ルツボ底部とルツボを支えるペデスタルの間に炭素繊維
強化炭素製のリングを介在させ、該炭素繊維強化炭素製
リングを炭素繊維強化炭素製のルツボの取り付け、取り
外し作業のための把持部材とする方法であって、前記ペ
デスタルには取り付けの段差加工を施し、かつルツボの
底部外面には、ずれ防止のため切り溝を設けた構成とす
ることを特徴とする炭素繊維強化炭素製ルツボの吊り上
げ方法である。To solve the above problems, the present inventors propose a method of lifting a CCM crucible for a silicon single crystal pulling apparatus, and a pedestal supporting the crucible bottom and the crucible. A method in which a ring made of carbon fiber reinforced carbon is interposed between the carbon fiber reinforced carbon ring and a crucible made of carbon fiber reinforced carbon, which is used as a gripping member for a removing operation. A method of lifting a crucible made of carbon fiber reinforced carbon, wherein the crucible is provided with a step for mounting and a cut groove is provided on an outer surface of a bottom portion of the crucible to prevent slippage.
【０００８】以下に本発明を図面とともに説明する。図
１は本発明のシリコン単結晶引上げ装置のＣＣＭルツボ
のルツボの吊り上げの構成を表す図である。１はＣＣＭ
ルツボ、２は前記ＣＣＭルツボを支えるペデスタルであ
る。本発明において特徴となるのは、ＣＣＭルツボ１の
底部とペデスタル２の間に炭素繊維強化炭素製（以下Ｃ
ＣＭという）のリング３を介在させ、ルツボを吊り上げ
ることにしている点である。Hereinafter, the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a configuration of lifting a CCM crucible of a silicon single crystal pulling apparatus of the present invention. 1 is CCM
A crucible 2 is a pedestal supporting the CCM crucible. A feature of the present invention is that a carbon fiber reinforced carbon (hereinafter referred to as C) is provided between the bottom of the CCM crucible 1 and the pedestal 2.
The point is that the crucible is lifted by interposing the ring 3 of CM).
【０００９】かかるＣＣＭリングを使用することによ
り、大型のＣＣＭルツボであつても、取り付け、取り外
しの際に、容易に吊り上げることができる。上記リング
は、黒鉛製では強度、靭性の面で難があり、ＣＣＭ製の
ものであることにより、ＣＣＭルツボの吊り上げが可能
になる。By using such a CCM ring, even a large-sized CCM crucible can be easily lifted when being attached or detached. The ring made of graphite is difficult in terms of strength and toughness, and the ring made of CCM makes it possible to lift a CCM crucible.
【００１０】ペデスタルにはＣＣＭリング取り付けのた
め段差加工が施されており、これによりＣＣＭルツボの
把持がより確実になされる。そしてルツボの底部外面に
は、ずれ防止のために切り溝が設けられている。このよ
うにＣＣＭルツボとペデスタルの間にＣＣＭリングを設
け、ペデスタルには段差加工を施し、ＣＣＭルツボには
切り溝を設けるという簡単な構成の改良により、ＣＣＭ
ルツボを取り付け、取り外しの際に、吊り上げる有効な
手段とすることができる。[0010] The pedestal is stepped for mounting the CCM ring, thereby more reliably holding the CCM crucible. A cut groove is provided on the outer surface of the bottom of the crucible to prevent slippage. As described above, the CCM ring is provided between the CCM crucible and the pedestal, the pedestal is stepped, and the CCM crucible is provided with a cut groove.
It can be used as an effective means for lifting when a crucible is attached and detached.
【００１１】[0011]
【本発明の効果】本発明によるとシリコン単結晶引き上
げ装置用のＣＣＭルツボの取付けや取り外しの際の吊り
上げについて、ルツボの厚肉化や設計、加工の大幅な変
更なしで簡単な構造上の改良により、吊り上げが可能で
あり、またサイドヒーターからの熱を遮らず、伝熱面で
も問題は生じない。シリコン単結晶引き上げ装置用のＣ
ＣＭルツボの吊り上げ法として工業上有用である。According to the present invention, when a CCM crucible for a silicon single crystal pulling apparatus is lifted when it is attached or detached, a simple structural improvement without increasing the thickness of the crucible, and without drastic changes in design and processing. Thereby, lifting is possible, and the heat from the side heater is not blocked, and no problem occurs in the heat transfer surface. C for silicon single crystal pulling device
It is industrially useful as a method for lifting CM crucibles.
【図１】本発明のシリコン単結晶引き上げ装置のＣＣＭ
ルツボの吊り上げ装置のＣＣＭルツボの吊り上げの構成
を表わす図である。FIG. 1 shows a CCM of a silicon single crystal pulling apparatus of the present invention.
It is a figure showing the structure of CCM crucible lifting of the crucible lifting device.
１ ＣＣＭルツボ ２ ペデスタル ３ ＣＣＭリング ４ 切り溝 1 CCM crucible 2 pedestal 3 CCM ring 4 kerf
Claims (1)
化炭素製ルツボの吊り上げ方法に関し、前記ルツボ底部
とルツボを支えるペデスタルの間に炭素繊維強化炭素製
のリングを介在させ、該炭素繊維強化炭素製リングを炭
素繊維強化炭素製のルツボの取付け、取り外し作業のた
めの把持部材とする方法であって、前記ペデスタルには
取付けの段差加工を施し、かつルツボ底部外面にはずれ
防止用の切り溝を設けた構成とすることを特徴とする炭
素繊維強化炭素製ルツボの吊り上げ方法。The present invention relates to a method for lifting a carbon fiber reinforced carbon crucible for a silicon single crystal pulling apparatus, wherein a ring made of carbon fiber reinforced carbon is interposed between the bottom of the crucible and a pedestal supporting the crucible. A method of attaching a ring made of carbon fiber reinforced carbon to a crucible made of carbon fiber reinforced carbon, as a gripping member for the work of removing, wherein the pedestal is subjected to a stepping process of attachment, and a cut groove for preventing slippage is formed on the outer surface of the crucible bottom. A method of lifting a crucible made of carbon fiber reinforced carbon, wherein the crucible is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7202751A JP3010010B2 (en) | 1995-07-18 | 1995-07-18 | Lifting method of crucible made of carbon fiber reinforced carbon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7202751A JP3010010B2 (en) | 1995-07-18 | 1995-07-18 | Lifting method of crucible made of carbon fiber reinforced carbon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0930888A JPH0930888A (en) | 1997-02-04 |
| JP3010010B2 true JP3010010B2 (en) | 2000-02-14 |
Family
ID=16462568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7202751A Expired - Fee Related JP3010010B2 (en) | 1995-07-18 | 1995-07-18 | Lifting method of crucible made of carbon fiber reinforced carbon |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3010010B2 (en) |
-
1995
- 1995-07-18 JP JP7202751A patent/JP3010010B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0930888A (en) | 1997-02-04 |
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