JPH0527503Y2 - - Google Patents

Info

Publication number
JPH0527503Y2
JPH0527503Y2 JP1987182515U JP18251587U JPH0527503Y2 JP H0527503 Y2 JPH0527503 Y2 JP H0527503Y2 JP 1987182515 U JP1987182515 U JP 1987182515U JP 18251587 U JP18251587 U JP 18251587U JP H0527503 Y2 JPH0527503 Y2 JP H0527503Y2
Authority
JP
Japan
Prior art keywords
growth
substrate
gas
growth chamber
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987182515U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0187173U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987182515U priority Critical patent/JPH0527503Y2/ja
Publication of JPH0187173U publication Critical patent/JPH0187173U/ja
Application granted granted Critical
Publication of JPH0527503Y2 publication Critical patent/JPH0527503Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1987182515U 1987-11-30 1987-11-30 Expired - Lifetime JPH0527503Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987182515U JPH0527503Y2 (enrdf_load_stackoverflow) 1987-11-30 1987-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987182515U JPH0527503Y2 (enrdf_load_stackoverflow) 1987-11-30 1987-11-30

Publications (2)

Publication Number Publication Date
JPH0187173U JPH0187173U (enrdf_load_stackoverflow) 1989-06-08
JPH0527503Y2 true JPH0527503Y2 (enrdf_load_stackoverflow) 1993-07-13

Family

ID=31473962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987182515U Expired - Lifetime JPH0527503Y2 (enrdf_load_stackoverflow) 1987-11-30 1987-11-30

Country Status (1)

Country Link
JP (1) JPH0527503Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1342972A (en) * 1971-08-28 1974-01-10 Wildt Mellor Bromley Ltd Knitting machine needle
JPS57200291A (en) * 1981-06-01 1982-12-08 Fujitsu Ltd Vapor-phase growing method of compound semiconductor

Also Published As

Publication number Publication date
JPH0187173U (enrdf_load_stackoverflow) 1989-06-08

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