JPH0527490Y2 - - Google Patents

Info

Publication number
JPH0527490Y2
JPH0527490Y2 JP1987192485U JP19248587U JPH0527490Y2 JP H0527490 Y2 JPH0527490 Y2 JP H0527490Y2 JP 1987192485 U JP1987192485 U JP 1987192485U JP 19248587 U JP19248587 U JP 19248587U JP H0527490 Y2 JPH0527490 Y2 JP H0527490Y2
Authority
JP
Japan
Prior art keywords
target
gas
substrate
thin film
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987192485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0198164U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987192485U priority Critical patent/JPH0527490Y2/ja
Publication of JPH0198164U publication Critical patent/JPH0198164U/ja
Application granted granted Critical
Publication of JPH0527490Y2 publication Critical patent/JPH0527490Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP1987192485U 1987-12-17 1987-12-17 Expired - Lifetime JPH0527490Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987192485U JPH0527490Y2 (enrdf_load_stackoverflow) 1987-12-17 1987-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987192485U JPH0527490Y2 (enrdf_load_stackoverflow) 1987-12-17 1987-12-17

Publications (2)

Publication Number Publication Date
JPH0198164U JPH0198164U (enrdf_load_stackoverflow) 1989-06-30
JPH0527490Y2 true JPH0527490Y2 (enrdf_load_stackoverflow) 1993-07-13

Family

ID=31483342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987192485U Expired - Lifetime JPH0527490Y2 (enrdf_load_stackoverflow) 1987-12-17 1987-12-17

Country Status (1)

Country Link
JP (1) JPH0527490Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114787A (en) * 1977-03-18 1978-10-06 Ulvac Corp Target for high profitable sputtering apparatus
JPS58110673A (ja) * 1981-12-23 1983-07-01 Hitachi Ltd 反応性スパツタリング装置

Also Published As

Publication number Publication date
JPH0198164U (enrdf_load_stackoverflow) 1989-06-30

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