JPH0527370Y2 - - Google Patents

Info

Publication number
JPH0527370Y2
JPH0527370Y2 JP1987036194U JP3619487U JPH0527370Y2 JP H0527370 Y2 JPH0527370 Y2 JP H0527370Y2 JP 1987036194 U JP1987036194 U JP 1987036194U JP 3619487 U JP3619487 U JP 3619487U JP H0527370 Y2 JPH0527370 Y2 JP H0527370Y2
Authority
JP
Japan
Prior art keywords
ball
air
pedestal
air chamber
pressurized air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987036194U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63142315U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987036194U priority Critical patent/JPH0527370Y2/ja
Publication of JPS63142315U publication Critical patent/JPS63142315U/ja
Application granted granted Critical
Publication of JPH0527370Y2 publication Critical patent/JPH0527370Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Rollers For Roller Conveyors For Transfer (AREA)
JP1987036194U 1987-03-12 1987-03-12 Expired - Lifetime JPH0527370Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987036194U JPH0527370Y2 (enrdf_load_stackoverflow) 1987-03-12 1987-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987036194U JPH0527370Y2 (enrdf_load_stackoverflow) 1987-03-12 1987-03-12

Publications (2)

Publication Number Publication Date
JPS63142315U JPS63142315U (enrdf_load_stackoverflow) 1988-09-20
JPH0527370Y2 true JPH0527370Y2 (enrdf_load_stackoverflow) 1993-07-13

Family

ID=30846374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987036194U Expired - Lifetime JPH0527370Y2 (enrdf_load_stackoverflow) 1987-03-12 1987-03-12

Country Status (1)

Country Link
JP (1) JPH0527370Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4973839B2 (ja) * 2006-05-19 2012-07-11 いすゞ自動車株式会社 ボールベアリングキャスタ
JP2011080501A (ja) * 2009-10-05 2011-04-21 Freebear Corp ボール式支承装置及びワーク搬送装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6151405A (ja) * 1984-08-20 1986-03-13 Ntn Toyo Bearing Co Ltd 物品搬送装置

Also Published As

Publication number Publication date
JPS63142315U (enrdf_load_stackoverflow) 1988-09-20

Similar Documents

Publication Publication Date Title
US6152507A (en) Conveying device for thin disk-like articles
US4932642A (en) Workpiece support tooling
CN101164148A (zh) 半导体晶片周缘的研磨装置及方法
JPS6240853B2 (enrdf_load_stackoverflow)
US6273804B1 (en) Apparatus for polishing wafers
KR102812559B1 (ko) 기울기 조정 기구
KR101948522B1 (ko) 사이즈 조절이 가능한 웨이퍼용 매거진
JPH0527370Y2 (enrdf_load_stackoverflow)
JP2000280155A (ja) 薄板円板状ワークの両面研削装置
JP2000015570A (ja) 研削装置
US2877538A (en) Method of making a work supporting structure
US5075924A (en) Tilted axle multiple wheel caster
US4015880A (en) Multiple level fluid bearing track assembly
KR102206642B1 (ko) 인너레이스 볼트랙 연삭장치
US7044120B1 (en) Baseplate for tool
JPH0249215Y2 (enrdf_load_stackoverflow)
WO2017163399A1 (ja) 製剤搬送装置
JP7605618B2 (ja) 加工装置
JPH0715136Y2 (ja) ウエハ回転装置
CN113620042B (zh) 一种轴向微调机构及具有微调功能的转盘输送装置
US4646432A (en) Placement mechanism
US4243131A (en) Conveying apparatus
EP1191242A1 (en) Ball-type anti-friction device
US3044149A (en) Method of making a work supporting structure
JPH0331937B2 (enrdf_load_stackoverflow)