JPH0527029B2 - - Google Patents
Info
- Publication number
- JPH0527029B2 JPH0527029B2 JP5981784A JP5981784A JPH0527029B2 JP H0527029 B2 JPH0527029 B2 JP H0527029B2 JP 5981784 A JP5981784 A JP 5981784A JP 5981784 A JP5981784 A JP 5981784A JP H0527029 B2 JPH0527029 B2 JP H0527029B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- lamp
- furnace
- reflecting mirror
- specific wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011521 glass Substances 0.000 claims description 10
- 238000010521 absorption reaction Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000002844 melting Methods 0.000 description 23
- 230000008018 melting Effects 0.000 description 23
- 238000010438 heat treatment Methods 0.000 description 15
- 230000005855 radiation Effects 0.000 description 14
- 229910052736 halogen Inorganic materials 0.000 description 13
- 150000002367 halogens Chemical class 0.000 description 13
- 238000001228 spectrum Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000005457 Black-body radiation Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- AHOUBRCZNHFOSL-YOEHRIQHSA-N (+)-Casbol Chemical compound C1=CC(F)=CC=C1[C@H]1[C@H](COC=2C=C3OCOC3=CC=2)CNCC1 AHOUBRCZNHFOSL-YOEHRIQHSA-N 0.000 description 1
- YBNMDCCMCLUHBL-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 4-pyren-1-ylbutanoate Chemical compound C=1C=C(C2=C34)C=CC3=CC=CC4=CC=C2C=1CCCC(=O)ON1C(=O)CCC1=O YBNMDCCMCLUHBL-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Furnace Details (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5981784A JPS60205178A (ja) | 1984-03-28 | 1984-03-28 | イメ−ジ炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5981784A JPS60205178A (ja) | 1984-03-28 | 1984-03-28 | イメ−ジ炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60205178A JPS60205178A (ja) | 1985-10-16 |
| JPH0527029B2 true JPH0527029B2 (enrdf_load_stackoverflow) | 1993-04-19 |
Family
ID=13124153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5981784A Granted JPS60205178A (ja) | 1984-03-28 | 1984-03-28 | イメ−ジ炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60205178A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011037640A (ja) * | 2009-08-06 | 2011-02-24 | Canon Machinery Inc | 単結晶育成装置及び単結晶育成方法 |
-
1984
- 1984-03-28 JP JP5981784A patent/JPS60205178A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60205178A (ja) | 1985-10-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7995195B2 (en) | Method of optically monitoring the progression of a physical and/or chemical process taking place on a surface of a body | |
| Hottel et al. | Determination of true temperature and total radiation from luminous gas flames | |
| US5271084A (en) | Method and device for measuring temperature radiation using a pyrometer wherein compensation lamps are used | |
| EP0458388B1 (en) | Method and device for measuring temperature radiation using a pyrometer wherein compensation lamps are used | |
| US2792484A (en) | Temperature measuring and controlling apparatus | |
| JPH0527029B2 (enrdf_load_stackoverflow) | ||
| US3439985A (en) | Pyrometric device | |
| US2690511A (en) | Comparative emission pyrometer | |
| JP2601137B2 (ja) | イメージ炉 | |
| JPH02443Y2 (enrdf_load_stackoverflow) | ||
| Branstetter | Some practical aspects of surface temperature measurement by optical and ratio pyrometers | |
| JP3126759B2 (ja) | 光学式分析装置 | |
| JP2001033385A (ja) | ガラスの塗膜面の判別方法 | |
| JP3103338B2 (ja) | 放射温度計 | |
| Strong | APPARATUS FOR SPECTROSCOPIC STUDIES IN THE INTERMEDIATE INFRARED REGION—20 TO 40μ | |
| JPH0230454Y2 (enrdf_load_stackoverflow) | ||
| JP2826176B2 (ja) | 単結晶製造装置 | |
| JPS62123325A (ja) | Ｆｚ炉用試料温度測定方法 | |
| JPS60211338A (ja) | 溶融ガラス内部の気泡、石等の検知方法 | |
| JPS62271385A (ja) | 輻射線加熱装置 | |
| JPH04204023A (ja) | ランプアニール装置 | |
| Schubnell et al. | Temperature measurement under concentrated radiation | |
| JPH0336919Y2 (enrdf_load_stackoverflow) | ||
| RU2024852C1 (ru) | Установка для температурных измерений спектрального коэффициента диффузного отражения | |
| JPH09126889A (ja) | 半導体基板の温度測定方法および装置 |