JPH0526983Y2 - - Google Patents
Info
- Publication number
- JPH0526983Y2 JPH0526983Y2 JP1986153560U JP15356086U JPH0526983Y2 JP H0526983 Y2 JPH0526983 Y2 JP H0526983Y2 JP 1986153560 U JP1986153560 U JP 1986153560U JP 15356086 U JP15356086 U JP 15356086U JP H0526983 Y2 JPH0526983 Y2 JP H0526983Y2
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- pressure
- semiconductor
- sensor
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 27
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 230000008646 thermal stress Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986153560U JPH0526983Y2 (zh) | 1986-10-06 | 1986-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986153560U JPH0526983Y2 (zh) | 1986-10-06 | 1986-10-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6358731U JPS6358731U (zh) | 1988-04-19 |
| JPH0526983Y2 true JPH0526983Y2 (zh) | 1993-07-08 |
Family
ID=31072557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986153560U Expired - Lifetime JPH0526983Y2 (zh) | 1986-10-06 | 1986-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526983Y2 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001011329A1 (fr) * | 1999-08-05 | 2001-02-15 | Fujikin Incorporated | Structure de montage de detecteur de pression |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7021152B2 (en) * | 2003-07-18 | 2006-04-04 | Radi Medical Systems Ab | Sensor and guide wire assembly |
| JP2004045424A (ja) * | 2003-09-22 | 2004-02-12 | Tadahiro Omi | 圧力検出器の取付け構造 |
| JP4840098B2 (ja) * | 2006-11-20 | 2011-12-21 | トヨタ自動車株式会社 | 圧力センサ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52141594A (en) * | 1977-01-31 | 1977-11-25 | Hitachi Ltd | Semiconductor type pressure transmittor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109483U (zh) * | 1977-02-08 | 1978-09-01 |
-
1986
- 1986-10-06 JP JP1986153560U patent/JPH0526983Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52141594A (en) * | 1977-01-31 | 1977-11-25 | Hitachi Ltd | Semiconductor type pressure transmittor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001011329A1 (fr) * | 1999-08-05 | 2001-02-15 | Fujikin Incorporated | Structure de montage de detecteur de pression |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6358731U (zh) | 1988-04-19 |
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