JPH0526774Y2 - - Google Patents

Info

Publication number
JPH0526774Y2
JPH0526774Y2 JP4543985U JP4543985U JPH0526774Y2 JP H0526774 Y2 JPH0526774 Y2 JP H0526774Y2 JP 4543985 U JP4543985 U JP 4543985U JP 4543985 U JP4543985 U JP 4543985U JP H0526774 Y2 JPH0526774 Y2 JP H0526774Y2
Authority
JP
Japan
Prior art keywords
type
gauge
type shear
crystal axis
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4543985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61162069U (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4543985U priority Critical patent/JPH0526774Y2/ja
Publication of JPS61162069U publication Critical patent/JPS61162069U/ja
Application granted granted Critical
Publication of JPH0526774Y2 publication Critical patent/JPH0526774Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP4543985U 1985-03-28 1985-03-28 Expired - Lifetime JPH0526774Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4543985U JPH0526774Y2 (zh) 1985-03-28 1985-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4543985U JPH0526774Y2 (zh) 1985-03-28 1985-03-28

Publications (2)

Publication Number Publication Date
JPS61162069U JPS61162069U (zh) 1986-10-07
JPH0526774Y2 true JPH0526774Y2 (zh) 1993-07-07

Family

ID=30558943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4543985U Expired - Lifetime JPH0526774Y2 (zh) 1985-03-28 1985-03-28

Country Status (1)

Country Link
JP (1) JPH0526774Y2 (zh)

Also Published As

Publication number Publication date
JPS61162069U (zh) 1986-10-07

Similar Documents

Publication Publication Date Title
JPH0526774Y2 (zh)
JPS59158566A (ja) 半導体加速度センサ
JPH041472Y2 (zh)
JPH0526775Y2 (zh)
JPH0648421Y2 (ja) 半導体加速度センサ
JPH0533017Y2 (zh)
JPS6255629B2 (zh)
JPS6222272B2 (zh)
JPH0511479Y2 (zh)
JPH0455542B2 (zh)
JPH0438273Y2 (zh)
JPS6328615Y2 (zh)
SU1580190A1 (ru) Интегральный преобразователь давлени
JPH0514186Y2 (zh)
JPH041470Y2 (zh)
JPH06742Y2 (ja) 半導体圧力変換器
JPS61295672A (ja) 半導体圧力センサ及び圧力測定装置
JPH0786617A (ja) 半導体圧力センサ
JPH06102128A (ja) 半導体複合機能センサ
SU1668881A1 (ru) Устройство дл измерени давлени
JPH0142238Y2 (zh)
JPS60201229A (ja) 圧力センサ
JP2636404B2 (ja) 半導体差圧測定装置
SU1247693A1 (ru) Полупроводниковое измерительное устройство
JPH0448179B2 (zh)