JPH041472Y2 - - Google Patents
Info
- Publication number
- JPH041472Y2 JPH041472Y2 JP18204184U JP18204184U JPH041472Y2 JP H041472 Y2 JPH041472 Y2 JP H041472Y2 JP 18204184 U JP18204184 U JP 18204184U JP 18204184 U JP18204184 U JP 18204184U JP H041472 Y2 JPH041472 Y2 JP H041472Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- gauge
- temperature
- shear stress
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000012535 impurity Substances 0.000 claims description 15
- 239000013078 crystal Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18204184U JPH041472Y2 (zh) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18204184U JPH041472Y2 (zh) | 1984-11-30 | 1984-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6196347U JPS6196347U (zh) | 1986-06-20 |
| JPH041472Y2 true JPH041472Y2 (zh) | 1992-01-20 |
Family
ID=30739577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18204184U Expired JPH041472Y2 (zh) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH041472Y2 (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5701807B2 (ja) * | 2012-03-29 | 2015-04-15 | 株式会社東芝 | 圧力センサ及びマイクロフォン |
| JP5865986B2 (ja) * | 2014-12-04 | 2016-02-17 | 株式会社東芝 | 圧力センサ及びマイクロフォン |
| JP6340734B2 (ja) | 2015-09-18 | 2018-06-13 | Smc株式会社 | 圧力センサ |
| JP6410105B2 (ja) * | 2015-09-18 | 2018-10-24 | Smc株式会社 | 圧力センサ及びその製造方法 |
-
1984
- 1984-11-30 JP JP18204184U patent/JPH041472Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6196347U (zh) | 1986-06-20 |
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