JPH0526736Y2 - - Google Patents

Info

Publication number
JPH0526736Y2
JPH0526736Y2 JP7810885U JP7810885U JPH0526736Y2 JP H0526736 Y2 JPH0526736 Y2 JP H0526736Y2 JP 7810885 U JP7810885 U JP 7810885U JP 7810885 U JP7810885 U JP 7810885U JP H0526736 Y2 JPH0526736 Y2 JP H0526736Y2
Authority
JP
Japan
Prior art keywords
valve
line
vent
growth furnace
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7810885U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61195043U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7810885U priority Critical patent/JPH0526736Y2/ja
Publication of JPS61195043U publication Critical patent/JPS61195043U/ja
Application granted granted Critical
Publication of JPH0526736Y2 publication Critical patent/JPH0526736Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP7810885U 1985-05-24 1985-05-24 Expired - Lifetime JPH0526736Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7810885U JPH0526736Y2 (enExample) 1985-05-24 1985-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7810885U JPH0526736Y2 (enExample) 1985-05-24 1985-05-24

Publications (2)

Publication Number Publication Date
JPS61195043U JPS61195043U (enExample) 1986-12-04
JPH0526736Y2 true JPH0526736Y2 (enExample) 1993-07-07

Family

ID=30621789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7810885U Expired - Lifetime JPH0526736Y2 (enExample) 1985-05-24 1985-05-24

Country Status (1)

Country Link
JP (1) JPH0526736Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060156980A1 (en) * 2005-01-19 2006-07-20 Samsung Electronics Co., Ltd. Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
WO2019053989A1 (ja) 2017-09-15 2019-03-21 ソニー株式会社 香料保持構造体、香料保持構造体の製造方法、及び香り提供装置

Also Published As

Publication number Publication date
JPS61195043U (enExample) 1986-12-04

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