JPH05264846A - Coupling device and coupling method for optical waveguide and optical fiber - Google Patents

Coupling device and coupling method for optical waveguide and optical fiber

Info

Publication number
JPH05264846A
JPH05264846A JP9186892A JP9186892A JPH05264846A JP H05264846 A JPH05264846 A JP H05264846A JP 9186892 A JP9186892 A JP 9186892A JP 9186892 A JP9186892 A JP 9186892A JP H05264846 A JPH05264846 A JP H05264846A
Authority
JP
Japan
Prior art keywords
coupling
optical waveguide
optical fiber
core
core portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9186892A
Other languages
Japanese (ja)
Other versions
JP2668477B2 (en
Inventor
Masao Maruyama
正夫 丸山
Hidehiro Konishi
秀広 小西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tatsuta Electric Wire and Cable Co Ltd
Original Assignee
Tatsuta Electric Wire and Cable Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tatsuta Electric Wire and Cable Co Ltd filed Critical Tatsuta Electric Wire and Cable Co Ltd
Priority to JP4091868A priority Critical patent/JP2668477B2/en
Publication of JPH05264846A publication Critical patent/JPH05264846A/en
Application granted granted Critical
Publication of JP2668477B2 publication Critical patent/JP2668477B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To provide the device which couples optical fibers with good accuracy to a quartz optical waveguide without requiring the laborious adjustment for optical axis alignment. CONSTITUTION:This device is constituted by recessing core parts 4 at the coupling side end face 5 of the quartz optical waveguide 1 to form recessed parts 6, projecting core parts 7 on the coupling side end face 10 of the optical fibers 2 as projecting parts 9 and fitting the recessed parts 6 of the quartz optical waveguide 1 and the projecting parts 9 of the optical fibers 2. The core parts are inevitably disposed to face each other by the fitting of the recessed parts and the projecting parts, by which the coupling accuracy is improved and the easy mis-alignment is prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、石英光導波路と光ファ
イバとを効率良く結合する結合装置及び結合方法に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coupling device and a coupling method for efficiently coupling a quartz optical waveguide and an optical fiber.

【0002】[0002]

【従来の技術】近年、LANやCATV等の光通信シス
テムの構築が盛んになると共に、光分岐回路、光合波器
等として用いられる石英光導波路がその構成要素として
重要性を増してきた。ところで、この石英光導波路はそ
の入出力部で光ファイバと結合させる必要がある。この
結合は石英光導波路のコア部と光ファイバのコア部を精
度良く対向させることによって行われる。しかし、通常
コア部は数μmβ至数十μm程度であり、簡単に結合さ
せることができない。そのため、種々の結合装置が提案
されている。
2. Description of the Related Art In recent years, construction of optical communication systems such as LAN and CATV has become popular, and quartz optical waveguides used as optical branch circuits, optical multiplexers and the like have become more important as constituent elements. By the way, this quartz optical waveguide needs to be coupled with an optical fiber at its input / output portion. This coupling is performed by accurately opposing the core portion of the quartz optical waveguide and the core portion of the optical fiber. However, the core portion is usually about several μmβ to several tens of μm and cannot be easily bonded. Therefore, various coupling devices have been proposed.

【0003】この従来の結合装置の典型的なものを図6
により説明する。21は光導波路、22は光ファイバで
ある。光導波路21はシリコン基板23上にクラッド2
4を積層したものであり、クラッド24の所定箇所にコ
ア部25が埋設されている。光ファイバ22はコア部2
6とその回りのクラッド27とからなっている。この光
導波路21と光ファイバ22の結合を精度良く行うため
に、光導波路21のコア部25を基準にして凹溝28が
形成され、この凹溝28に光ファイバ22の先端を押し
込み、光ファイバ22のコア部26と光導波路21のコ
ア部25が対向するようにし、接着剤等で固定したもの
である。また、この凹溝のガイドに代わり、ガイド壁を
形成したもの(特公平3−24642号公報参照)や、
V溝を形成したもの(特開昭61−185991号公報
参照)などが提案されている。
A typical example of this conventional coupling device is shown in FIG.
Will be explained. Reference numeral 21 is an optical waveguide, and 22 is an optical fiber. The optical waveguide 21 has a clad 2 on a silicon substrate 23.
4 is laminated, and a core portion 25 is embedded in a predetermined portion of the clad 24. The optical fiber 22 is the core 2
6 and a clad 27 around it. In order to accurately couple the optical waveguide 21 and the optical fiber 22, a concave groove 28 is formed with the core portion 25 of the optical waveguide 21 as a reference, and the tip of the optical fiber 22 is pushed into the concave groove 28. The core part 26 of 22 and the core part 25 of the optical waveguide 21 are opposed to each other and are fixed with an adhesive or the like. Further, instead of the guide of the groove, a guide wall is formed (see Japanese Patent Publication No. 3-24642),
A device having a V groove (see Japanese Patent Laid-Open No. 61-185991) has been proposed.

【0004】[0004]

【発明が解決しようとする課題】この従来の結合装置は
いずれも光導波路にそのコア部を基準にして凹溝などの
ガイドを形成し、このガイドによって光ファイバ先端の
全体を位置決めするものである。そのため、凹溝などの
ガイドをコア部に対して精度良く設けることと、凹溝な
どのガイド内の光ファイバを接着剤などで固定する際に
ずれが生じないように細心の注意を払って調整すること
が求められる。
In all of the conventional coupling devices, a guide such as a groove is formed in the optical waveguide with the core portion as a reference, and the entire tip of the optical fiber is positioned by this guide. .. Therefore, provide guides such as grooves to the core with high precision, and pay close attention to prevent misalignment when fixing optical fibers in guides such as grooves with adhesive. Required to do so.

【0005】しかしながら、これらの注意を細心に払っ
たとしても、光ファイバ断面が真円でありコアが偏心し
ていないことを前提としているため、光導波路の凹溝な
どのガイドを精度良く形成しても、光ファイバが完全な
真円で、且つ偏心がないものでない限り光ファイバのコ
アを光導波路のコアの軸心にずれが生じるのは避けられ
ないという問題点がある。
However, even if these precautions are taken with great care, it is premised that the optical fiber cross section is a perfect circle and the core is not eccentric. However, unless the optical fiber is a perfect circle and has no eccentricity, it is inevitable that the core of the optical fiber is displaced from the axial center of the core of the optical waveguide.

【0006】本発明は、従来の技術の有するこのような
問題点に鑑みてなされたものであり、その目的とすると
ころは、光軸合わせのために面倒な調整を必要とせず、
石英光導波路に光ファイバを精度良く結合する結合装置
及び結合方法を提供するところにある。
The present invention has been made in view of the above problems of the prior art, and an object of the present invention is not to require troublesome adjustment for optical axis alignment.
An object is to provide a coupling device and a coupling method for accurately coupling an optical fiber to a quartz optical waveguide.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に、本発明の結合装置は、石英光導波路の結合側端面に
おけるコア部を窪ませた凹部とし、光ファイバの結合側
端面のおけるコア部を突出させた凸部とし、石英光導波
路の凹部と光ファイバの凸部とを嵌合させて結合したも
のである。
In order to achieve the above-mentioned object, the coupling device of the present invention has a recessed core portion at the coupling-side end face of a quartz optical waveguide, and a core at the coupling-side end face of an optical fiber. The projection is a convex portion, and the concave portion of the quartz optical waveguide and the convex portion of the optical fiber are fitted and coupled to each other.

【0008】そして、本発明の結合方法は、石英光導波
路の光ファイバとの結合側端面にポジティブ型の紫外線
硬化樹脂を塗布し、他方の端面からコア部に紫外線を入
射させて前記紫外線硬化樹脂のコア部を感光させ、現像
することにより前記コア部の紫外線硬化樹脂を除去し、
しかる後露出したコア部をエッチングして凹部を形成す
る凹部形成工程と、光ファイバの光導波路との結合側端
面に凸部を形成する凸部形成工程と、前記光導波路の凹
部に前記光ファイバの凸部を挿入し結合させる凹凸結合
工程とから成るものである。
In the coupling method of the present invention, a positive type UV curable resin is applied to the end face of the quartz optical waveguide on the side of coupling with the optical fiber, and the UV curable resin is applied by injecting UV rays into the core portion from the other end face. The UV curing resin of the core part is removed by exposing the core part of
Thereafter, a concave portion forming step of forming a concave portion by etching the exposed core portion, a convex portion forming step of forming a convex portion on an end face of the optical fiber coupling side with the optical waveguide, and the optical fiber in the concave portion of the optical waveguide. And the convex-concave coupling step of inserting and coupling the convex portions.

【0009】[0009]

【作用】石英光導波路のコア部が凹部に形成され、光フ
ァイバのコア部が凸部に形成されているので、凹部と凸
部を嵌合すると、必然的にコア部同士が対向して結合精
度が上がり、簡単にずれない。
The core portion of the quartz optical waveguide is formed in the concave portion and the core portion of the optical fiber is formed in the convex portion. Therefore, when the concave portion and the convex portion are fitted together, the core portions inevitably face each other and are joined together. The accuracy is improved and it does not easily shift.

【0010】光導波路のコア部を窪ませることが困難で
あるとの常識を打ち破り、石英光導波路をコア部を凹部
に形成する点が重要であり、そのため、端面にポジティ
ブ型の紫外線硬化型樹脂を塗布し、他方の端面からコア
部に紫外線を入射させて前記紫外線硬化樹脂のコア部を
感光させ、現像することにより前記コア部の紫外線硬化
樹脂を除去してコア部のみを露出させた後露出したコア
部をエッチングして所定の凹部が形成される。
It is important to break the common wisdom that it is difficult to make the core of the optical waveguide hollow, and to form the quartz optical waveguide in the concave portion of the core. Therefore, a positive type ultraviolet curable resin is formed on the end face. After exposing the core portion of the ultraviolet curable resin by exposing the core portion of the ultraviolet curable resin by exposing the core portion of the ultraviolet curable resin from the other end surface to expose the core portion only by developing. The exposed core portion is etched to form a predetermined recess.

【0011】[0011]

【実施例】以下、本発明の実施例を図面を参照しつつ説
明する。図1は結合装置の結合状態を示す図である。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a view showing a coupling state of the coupling device.

【0012】図1において、1はたとえば1×8Y分岐
石英光導波路、2は石英光ファイバである。この石英光
導波路1は1本から8本に分岐するためのものであり、
3はクラッド、4はコア部であって図示例はその結合側
端面5の一部が示されている。この結合側端面5に露出
するコア部4は凹部6に形成されている。石英光ファイ
バ2はコア部7とクラッド8とからなり、その結合側端
面10に露出するコア部7は凸部9に形成されている。
なお、石英光導波路1の凹部6と同心の円錐台孔形状の
ガイド孔11はシリコンなどで形成されており、石英光
ファイバ2の凸部9を凹部6に嵌合させるための予備的
なガイドとなっている。
In FIG. 1, reference numeral 1 is, for example, a 1 × 8Y branched quartz optical waveguide, and 2 is a quartz optical fiber. This quartz optical waveguide 1 is for branching from one to eight,
Reference numeral 3 is a clad, and 4 is a core portion. In the illustrated example, a part of the coupling side end surface 5 is shown. The core portion 4 exposed on the end face 5 on the coupling side is formed in the recess 6. The quartz optical fiber 2 is composed of a core portion 7 and a clad 8, and the core portion 7 exposed at the coupling side end face 10 thereof is formed in a convex portion 9.
The truncated conical hole-shaped guide hole 11 concentric with the concave portion 6 of the quartz optical waveguide 1 is formed of silicon or the like, and is a preliminary guide for fitting the convex portion 9 of the quartz optical fiber 2 into the concave portion 6. Has become.

【0013】上述した結合装置と、石英光導波路1の凹
部6に石英光ファイバ2の凸部9を嵌合させて結合が完
了するので、コア部4,7が直接的に対向する。したが
って、石英光ファイバ2のコア部7とクラッド7との間
に偏心があったとしても、心がずれることがない。ま
た、凹凸嵌合により結合精度が決まるようになっている
ので、ガイド孔11自体に其ほどの精度が要求されな
い。さらに、凹凸嵌合という機械的結合により、少々の
外力でずれることがなく、ガイド孔11を接着剤等で埋
める際にずれる恐れがなくなる。
Since the coupling is completed by fitting the convex portion 9 of the quartz optical fiber 2 into the concave portion 6 of the quartz optical waveguide 1 and the coupling device described above, the core portions 4 and 7 directly face each other. Therefore, even if there is an eccentricity between the core portion 7 and the clad 7 of the quartz optical fiber 2, the heart is not displaced. Further, since the coupling accuracy is determined by the concave and convex fitting, the guide hole 11 itself is not required to have such accuracy. Further, due to mechanical coupling such as concave-convex fitting, there is no displacement due to a slight external force, and there is no risk of displacement when filling the guide hole 11 with an adhesive or the like.

【0014】つぎに、石英光導波路1の凹部形成工程を
図2により説明する。同図(a)において、結合側端面
5にポジティブ型の紫外線硬化樹脂12を塗布し、他端
側からコア部4に紫外線UVを入射し、紫外線硬化樹脂
12のコア部4に相当する部分のみが紫外線UVで感光
される。同図(b)において、現像することにより感光
した紫外線硬化樹脂12が除去され、コア部4の端面が
露出する。その後、紫外線硬化樹脂12と反応しない
が、コア部の石英と反応するフッ酸等のエッチング液
で、コア部4をエッチングして凹部6を形成する。同図
(c)において、残った紫外線硬化樹脂12が除去さ
れ、所定の凹部形成工程を終える。
Next, the step of forming the concave portion of the quartz optical waveguide 1 will be described with reference to FIG. In FIG. 3A, a positive type ultraviolet curable resin 12 is applied to the end surface 5 on the coupling side, ultraviolet rays UV are incident on the core portion 4 from the other end side, and only a portion corresponding to the core portion 4 of the ultraviolet curable resin 12 is applied. Is exposed to UV light. In FIG. 2B, the ultraviolet curable resin 12 that has been exposed to light by developing is removed, and the end face of the core portion 4 is exposed. Thereafter, the core portion 4 is etched with an etching solution such as hydrofluoric acid that does not react with the ultraviolet curable resin 12 but reacts with the quartz of the core portion to form the recess 6. In the same figure (c), the remaining ultraviolet curable resin 12 is removed, and the predetermined recess forming step is completed.

【0015】図3により、石英光導波路と同様のエッチ
ッグによる石英光ファイバ2の凸部形成工程を説明す
る。同図(a)において、結合側端面10にネガティブ
型の紫外線硬化樹脂13を塗布し、他端側からコア部7
に紫外線UVを入射し、紫外線硬化樹脂13のコア部7
に相当する部分のみが紫外線UVで感光される。同図
(b)において、現像することにより感光した紫外線硬
化樹脂13以外の部分が除去され、コア部7の端面を除
くクラッド8の部分が露出する。その後、紫外線硬化樹
脂13と反応しないが、コア部の石英と反応するフッ酸
等のエッチング液で、クラッド8をエッチングして凸部
9を形成する。同図(c)において、残った紫外線硬化
樹脂13が除去され、所定の凸部形成工程を終える。
Referring to FIG. 3, a process of forming a convex portion of the quartz optical fiber 2 by the same etching as the quartz optical waveguide will be described. In FIG. 3A, a negative type ultraviolet curable resin 13 is applied to the end surface 10 on the coupling side, and the core portion 7
UV light is incident on the core 7 of the UV curable resin 13.
Only the portion corresponding to is exposed to ultraviolet UV. In FIG. 2B, the portions other than the ultraviolet curable resin 13 that have been exposed to light by developing are removed, and the portions of the clad 8 other than the end faces of the core portion 7 are exposed. After that, the clad 8 is etched with an etching solution such as hydrofluoric acid that does not react with the ultraviolet curable resin 13 but reacts with the quartz of the core portion to form the protrusion 9. In the same figure (c), the remaining ultraviolet curable resin 13 is removed and the predetermined convex portion forming step is finished.

【0016】石英光ファイバ2の凸部形成工程は上記工
程に限定されるものではなく、図4はその簡便法の説明
図である。同図(a)に示す石英光ファイバの結合端面
10を、コア部よりもクラッド8の方を選択的にエッチ
ングしやすいエッチング液(たとえばフッ酸6重量%、
フッ化アンモニウム30重量%を水64重量%5/6に
混合した水溶液)中に浸漬し、同図(b)のように凸部
9を形成する。
The step of forming the convex portion of the quartz optical fiber 2 is not limited to the above step, and FIG. 4 is an explanatory view of the simple method. An etching solution (for example, 6% by weight of hydrofluoric acid) which makes it easier to selectively etch the coupling end surface 10 of the quartz optical fiber shown in FIG.
An aqueous solution in which 30% by weight of ammonium fluoride is mixed with 64% by weight of water in a ratio of 5/6) is dipped to form the protrusions 9 as shown in FIG.

【0017】さらに、図5は紫外線硬化樹脂自体を凸部
にする凸部形成工程を示している。同図(a)におい
て、石英光ファイバ2の結合側端面10に紫外線硬化樹
脂13を塗布し、他端側からコア部7に紫外線UVを入
射し、紫外線硬化樹脂13のコア部7に相当する部分の
みが紫外線UVで感光される。同図(b)において、現
像により感光した紫外線硬化樹脂13以外の部分が除去
され、コア部7の端面を除くクラッド8の部分が露出
し、凸部9が形成される。この場合、紫外線硬化樹脂1
3の特性を適切に選択し、結合効率が低下しないように
する。
Further, FIG. 5 shows a step of forming a convex portion in which the ultraviolet curable resin itself is a convex portion. In FIG. 3A, an ultraviolet curable resin 13 is applied to the coupling-side end face 10 of the quartz optical fiber 2 and ultraviolet UV is incident on the core portion 7 from the other end side, which corresponds to the core portion 7 of the ultraviolet curable resin 13. Only part of it is exposed to UV light. In FIG. 3B, the portions other than the ultraviolet curable resin 13 exposed by the development are removed, the portions of the clad 8 other than the end faces of the core portion 7 are exposed, and the convex portions 9 are formed. In this case, UV curable resin 1
The property of 3 is selected appropriately so that the coupling efficiency is not deteriorated.

【0018】そして、図1に示されるように、図2の凹
部形成工程を経た石英光導波路1と、図3又は図4の凸
部形成工程を経た石英光ファイバ2とを対向させ、ガイ
ド11によって凹部6に凸部9を嵌合させて結合し、結
合状態のまま接着剤等で固定する。
Then, as shown in FIG. 1, the quartz optical waveguide 1 having undergone the recess forming step of FIG. 2 and the quartz optical fiber 2 having undergone the convex forming step of FIG. The convex portion 9 is fitted into the concave portion 6 by means of and is coupled, and is fixed with an adhesive or the like in the coupled state.

【0019】[0019]

【発明の効果】本発明の結合装置は、石英光導波路のコ
ア部が凹部に形成され、光ファイバのコア部が凸部に形
成され、凹部と凸部を嵌合すると、必然的にコア部同士
が対向して結合精度が上がるようにしたので、面倒な光
軸合わせ調整の必要がなく、光ファイバのコア部とクラ
ッド軸の心のずれに起因して結合精度が低下する恐れが
なくなる。
According to the coupling device of the present invention, the core portion of the quartz optical waveguide is formed in the concave portion, the core portion of the optical fiber is formed in the convex portion, and when the concave portion and the convex portion are fitted, the core portion is inevitably formed. Since the coupling accuracy is increased by facing each other, there is no need for troublesome optical axis alignment adjustment, and there is no fear that the coupling accuracy will decrease due to the misalignment between the core of the optical fiber and the cladding axis.

【0020】本発明の結合方法は、光導波路のコア部を
窪ませることが困難であるとの常識を打ち破り、端面に
ポジティブ型の紫外線硬化型樹脂を塗布し、他方の端面
からコア部に紫外線を入射させて前記紫外線硬化樹脂の
コア部を感光させ、現像することにより前記コア部の紫
外線硬化樹脂を除去してコア部のみを露出させた後露出
したコア部をエッチングして所定の凹部を形成するの
で、光導波路の凹部の形成が精密且つ容易である。
In the coupling method of the present invention, the common sense that it is difficult to make the core portion of the optical waveguide difficult to dent, the positive type UV curable resin is applied to the end face, and the UV ray is applied to the core portion from the other end face. To expose the core portion of the ultraviolet curable resin to remove the ultraviolet curable resin of the core portion by developing to expose only the core portion, and then etch the exposed core portion to form a predetermined concave portion. Since it is formed, the concave portion of the optical waveguide can be formed precisely and easily.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の結合装置の結合状態を示す図である。FIG. 1 is a diagram showing a coupled state of a coupling device of the present invention.

【図2】光導波路のコア部を凹部にする凹部形成工程を
示す図である。
FIG. 2 is a diagram showing a recess forming step in which a core portion of an optical waveguide is recessed.

【図3】光ファイバのコア部を凸部にする凸部形成工程
を示す図である。
FIG. 3 is a diagram showing a step of forming a convex portion in which a core portion of an optical fiber is convex.

【図4】光ファイバのコア部を凸部にする他の凸部形成
工程を示す図である。
FIG. 4 is a diagram showing another step of forming a convex portion in which the core portion of the optical fiber is a convex portion.

【図5】光ファイバのコア部を凸部にするさらに他の凸
部形成工程を示す図である。
FIG. 5 is a diagram showing still another convex portion forming step in which the core portion of the optical fiber is made into a convex portion.

【図6】従来の結合装置の結合状態を示す斜視図であ
る。
FIG. 6 is a perspective view showing a coupled state of a conventional coupling device.

【符号の説明】[Explanation of symbols]

1 石英光導波路 2 石英光ファイバ 4 石英光導波路のコア部 5 結合側端面 6 凹部 7 石英光ファイバのコア部 9 凸部 10 結合側端面 12 ポジティブ型の紫外線硬化型樹脂 13 ネガティブ型の紫外線硬化樹脂 DESCRIPTION OF SYMBOLS 1 Quartz optical waveguide 2 Quartz optical fiber 4 Quartz optical waveguide core part 5 Coupling side end face 6 Recessed part 7 Quartz optical fiber core part 9 Convex part 10 Coupling side end face 12 Positive type UV curable resin 13 Negative type UV curable resin

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 石英光導波路の結合側端面におけるコア
部を窪ませた凹部とし、光ファイバの結合側端面のおけ
るコア部を突出させた凸部とし、石英光導波路の凹部と
光ファイバの凸部とを嵌合させて結合した光導波路と光
ファイバの結合装置。
1. A concave portion in which the core portion on the coupling-side end surface of the quartz optical waveguide is depressed and a convex portion in which the core portion on the coupling-side end surface of the optical fiber is projected are provided, and the concave portion of the quartz optical waveguide and the convex portion of the optical fiber are formed. A device for coupling an optical waveguide and an optical fiber, which are fitted and coupled to each other.
【請求項2】 石英光導波路の光ファイバとの結合側端
面にポジティブ型の紫外線硬化樹脂を塗布し、他方の端
面からコア部に紫外線を入射させて前記紫外線硬化樹脂
のコア部を感光させ、現像することにより前記コア部の
紫外線硬化樹脂を除去し、しかる後露出したコア部をエ
ッチングして凹部を形成する凹部形成工程と、光ファイ
バの光導波路との結合側端面に凸部を形成する凸部形成
工程と、前記光導波路の凹部に前記光ファイバの凸部を
挿入し結合させる凹凸結合工程とから成る光導波路と光
ファイバの結合方法。
2. A positive type ultraviolet curable resin is applied to the end face of the quartz optical waveguide on the side of coupling with the optical fiber, and ultraviolet rays are made incident on the core part from the other end face to expose the core part of the ultraviolet curable resin, The UV curable resin on the core portion is removed by developing, and then the exposed core portion is etched to form a concave portion, and a convex portion is formed on the end face of the optical fiber coupled to the optical waveguide. A method of coupling an optical waveguide and an optical fiber, comprising: a step of forming a convex portion; and a concave-convex coupling step of inserting a convex portion of the optical fiber into a concave portion of the optical waveguide and coupling them.
JP4091868A 1992-03-16 1992-03-16 Method of coupling optical waveguide and optical fiber Expired - Lifetime JP2668477B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4091868A JP2668477B2 (en) 1992-03-16 1992-03-16 Method of coupling optical waveguide and optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4091868A JP2668477B2 (en) 1992-03-16 1992-03-16 Method of coupling optical waveguide and optical fiber

Publications (2)

Publication Number Publication Date
JPH05264846A true JPH05264846A (en) 1993-10-15
JP2668477B2 JP2668477B2 (en) 1997-10-27

Family

ID=14038540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4091868A Expired - Lifetime JP2668477B2 (en) 1992-03-16 1992-03-16 Method of coupling optical waveguide and optical fiber

Country Status (1)

Country Link
JP (1) JP2668477B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08179147A (en) * 1994-12-27 1996-07-12 Nec Corp Optically coupled circuit and its production

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51149635U (en) * 1975-05-23 1976-11-30
JPS5541430A (en) * 1978-09-18 1980-03-24 Toshiba Corp Optical signal transmitter
JPS5659213A (en) * 1979-10-19 1981-05-22 Matsushita Electric Ind Co Ltd Connecting method of optical fiber
JPH05173038A (en) * 1991-12-26 1993-07-13 Sumitomo Electric Ind Ltd Connecting mechanism between optical waveguide and optical fiber

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51149635U (en) * 1975-05-23 1976-11-30
JPS5541430A (en) * 1978-09-18 1980-03-24 Toshiba Corp Optical signal transmitter
JPS5659213A (en) * 1979-10-19 1981-05-22 Matsushita Electric Ind Co Ltd Connecting method of optical fiber
JPH05173038A (en) * 1991-12-26 1993-07-13 Sumitomo Electric Ind Ltd Connecting mechanism between optical waveguide and optical fiber

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08179147A (en) * 1994-12-27 1996-07-12 Nec Corp Optically coupled circuit and its production

Also Published As

Publication number Publication date
JP2668477B2 (en) 1997-10-27

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