JPH0526187U - Ultraviolet irradiation device for photochemical reaction treatment - Google Patents
Ultraviolet irradiation device for photochemical reaction treatmentInfo
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- JPH0526187U JPH0526187U JP7020391U JP7020391U JPH0526187U JP H0526187 U JPH0526187 U JP H0526187U JP 7020391 U JP7020391 U JP 7020391U JP 7020391 U JP7020391 U JP 7020391U JP H0526187 U JPH0526187 U JP H0526187U
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- ultraviolet
- photochemical reaction
- titanium oxide
- platinum
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Abstract
(57)【要約】
【目的】 流体の光化学反応処理を行う際、金担持酸化
チタン等の光触媒粒子の剥離、流出を防止し、かつ紫外
線と光触媒との接触面積を大きくし、反応（滞留）時間
を長くし、紫外線照射量を増加させて処理流体の純度を
高める。
【構成】 紫外線照射装置の処理筒内に、紫外線ランプ
を内臓した紫外線透過性のある透過筒を配設し、紫外線
照射によって流体の光化学反応処理を行う流路を形成
し、この流路に、紫外線透過性のある固形媒体に白金担
持酸化チタン等の光触媒粒子を被覆させたものを充填
し、さらに必要に応じて、処理筒、透過筒の接液部分
に、白金担持酸化チタン等の光触媒粒子を被覆させて、
流体の光化学反応処理を行う。
(57) [Abstract] [Purpose] When photochemical reaction treatment of fluid is performed, the separation (outflow) of photocatalyst particles such as gold-supported titanium oxide is prevented from peeling and flowing out, and the contact area between ultraviolet rays and photocatalyst is increased. Prolong the time and increase the UV irradiation dose to improve the purity of the processing fluid. [Structure] An ultraviolet ray transmitting transparent tube containing an ultraviolet lamp is provided in a treatment tube of an ultraviolet irradiation device, and a flow path for performing photochemical reaction treatment of a fluid by ultraviolet irradiation is formed, and in this flow path, A solid medium having ultraviolet transparency is filled with a material coated with photocatalytic particles such as platinum-supported titanium oxide, and further, if necessary, the treatment cylinder, the liquid contact portion of the transmission cylinder, photocatalytic particles such as platinum-supported titanium oxide. To cover
Perform photochemical reaction treatment of fluid.
Description
【０００１】[0001]
本考案は、紫外線照射によって流体中の光化学反応処理、たとえば白金担持酸 化チタン等の光触媒粒子を用いた有機物の酸化分解、細菌の殺菌、有害物質の分 解等の光化学反応処理を行う紫外線照射装置に関するものである。 The present invention is an ultraviolet irradiation that performs photochemical reaction processing in a fluid by ultraviolet irradiation, such as oxidative decomposition of organic matter using photocatalytic particles such as platinum-supported titanium oxide, sterilization of bacteria, and decomposition of harmful substances. It relates to the device.
【０００２】[0002]
最近、半導体製造工程、医薬品製造工程において、用水として超純水やクリー ンエアーが使用されている。 例えば、ＬＳＩ等の半導体を製造する際には、半導体の洗浄水として超純水が使 用されているが、通常の場合、この分野で用いられる超純水は、紫外線照射装置 、イオン交換装置、超濾過膜装置、逆浸透膜装置等を適宜組み合わせた超純水製 造システムによって製造されている。 この種の超純水製造システムにおいては、紫外線照射装置は、超純水の原水で ある一次純水に含まれている有機物を酢酸等の有機酸、二酸化炭素等に酸化分解 処理をする役目をし、次いでこの処理水に含まれている有機酸、二酸化炭素等を 、イオン交換装置、超濾過膜装置、逆浸透膜装置等で除去して超純水を製造して いる。 Recently, ultrapure water and clean air have been used as water in semiconductor manufacturing processes and pharmaceutical manufacturing processes. For example, when manufacturing semiconductors such as LSIs, ultrapure water is used as cleaning water for semiconductors. Normally, ultrapure water used in this field includes ultraviolet irradiation devices, ion exchange devices. It is manufactured by an ultrapure water manufacturing system that is an appropriate combination of an ultrafiltration membrane device, a reverse osmosis membrane device, and the like. In this type of ultrapure water production system, the ultraviolet irradiation device has a role of oxidizing and decomposing organic substances contained in primary pure water, which is the raw water of ultrapure water, into organic acids such as acetic acid and carbon dioxide. Then, organic acids, carbon dioxide, etc. contained in the treated water are removed by an ion exchange device, an ultrafiltration membrane device, a reverse osmosis membrane device, etc. to produce ultrapure water.
【０００３】 また、原水中に細菌が含まれている場合には、紫外線照射装置は、原水中の細 菌の殺菌をする役目をし、超純水を製造する後段のイオン交換樹脂、超濾過膜、 逆浸透膜等が細菌で汚染されるのを防止するためにも使用されている。 さらに、製造した超純水がなんらかの事情で細菌で汚染された場合には、ＬＳ Ｉ等の半導体が細菌で汚染されるのを防止するために、最終処理として、紫外線 照射装置よって超純水中の細菌を殺菌するためにも使用されることがある。 そして、いずれの場合においても、近年の技術の高度化に伴って、超純水の純 度、特に従来より除去が難しいといわれている微量の有機物や細菌、微生物の除 去が技術課題になっており、現在用いられている紫外線照射装置の紫外線照射効 率の向上が求められている。Further, when the raw water contains bacteria, the ultraviolet irradiation device plays a role of sterilizing bacteria in the raw water, and an ion exchange resin in the latter stage for producing ultrapure water and ultrafiltration. It is also used to prevent membranes and reverse osmosis membranes from being contaminated with bacteria. Furthermore, if the produced ultrapure water is contaminated with bacteria for some reason, as a final treatment, to prevent the semiconductors such as LSI from being contaminated with bacteria, it is treated in ultrapure water by an ultraviolet irradiation device. It may also be used to kill bacteria. In any case, with the advancement of technology in recent years, the purity of ultrapure water, especially the removal of trace amounts of organic substances, bacteria, and microorganisms, which are said to be more difficult to remove than before, has become a technical issue. Therefore, it is required to improve the ultraviolet irradiation efficiency of the ultraviolet irradiation device currently used.
【０００４】 近年、紫外線照射処理において流体の光化学反応処理を行う場合に、酸化チタ ン（ＴｉＯ2）等の微粒子に白金（Ｐｔ）等の金属の微粒子を担持した光触媒粒 子、すなわち白金担持酸化チタン等の光触媒粒子を用いることにより、触媒活性 を高めて超純水の純度を一段と高める工夫や改善が提案なされている。 しかし、これまでの白金担持酸化チタン等の光触媒粒子を用いた流体の光化学 反応処理は、学問的な提案であったり、実験的なものが多く、工業的技術として 確立されたり、実装置として評価されるものは少なかった。In recent years, when performing a photochemical reaction treatment on a fluid in ultraviolet irradiation treatment, a photocatalyst particle in which fine particles of metal such as platinum (Pt) are supported on fine particles of titanium oxide (TiO 2 ), that is, platinum-supported oxidation. The use of photocatalyst particles such as titanium has been proposed to improve the catalytic activity and further improve the purity of ultrapure water. However, the photochemical reaction treatment of fluids using photocatalyst particles such as platinum-supported titanium oxide has so far been an academic proposal or an experimental one, which has been established as an industrial technique or evaluated as an actual device. There were few things to be done.
【０００５】 例えば、その一つとして、超純水を製造する際に、被処理水中に含まれる有機 物を、白金担持酸化チタン等の光触媒粒子の存在下で、紫外線照射して酸化分解 して除去するという超純水製造方法が、特許出願公開（特開昭６２−１９３６９ ６号）になっている。[0005] For example, as one of them, when producing ultrapure water, organic matter contained in water to be treated is irradiated with ultraviolet rays in the presence of photocatalyst particles such as platinum-supported titanium oxide to be oxidatively decomposed. A method for producing ultrapure water, which is to remove the ultrapure water, has been disclosed in Japanese Patent Application Laid-Open No. 62-193696.
【０００６】 紫外線照射による流体の光化学反応処理を行うことについては記載されている が、処理液である超純水より、白金担持酸化チタン等の光触媒粒子を分離する手 段にいて一切記載がなく、不明である。 超純水として使用する以上、最終段階で超純水より白金担持酸化チタン等の光 触媒粒子を分離することは絶対に必要で、かつ非常に面倒な技術であることを考 えると、この重要な点について記載のない技術は工業的に完成されたものとはい えない。 この出願公開された技術における超純水と光触媒粒子との分離手段について想 像すると、光触媒粒子の沈殿による分離が考えられるが、沈殿に長時間を要する とともに分離性が悪くて実用的でなく、また光触媒粒子を濾過機やストレーナー で濾別して分離することも考えられるが、光触媒粒子によって濾過機やストレー ナーが目詰まりし易く、かつ別途に分離装置を付設する必要があるために、装置 設置費用が増大する欠点があり、さらに光触媒を超純水とともに装置外の槽に流 出させて沈殿分離することも考えられるが、前述の欠点のほか、操作が面倒で、 光触媒の使用量がどうしても多くなる等種々の不都合がある。Although it has been described that a photochemical reaction treatment of a fluid by ultraviolet irradiation is performed, there is no description at all as a means for separating photocatalyst particles such as platinum-supported titanium oxide from ultrapure water which is a treatment liquid. , Unknown. Given that it is absolutely necessary and extremely troublesome to separate photocatalyst particles such as platinum-supported titanium oxide from ultrapure water in the final stage as long as it is used as ultrapure water, this important factor is important. A technology that does not describe such points cannot be said to have been industrially completed. As an image of the means for separating ultrapure water and photocatalyst particles in the technology disclosed in this application, separation due to precipitation of photocatalyst particles can be considered, but it takes a long time for precipitation and the separability is poor, which is not practical. It is also possible to separate the photocatalyst particles by filtering them with a filter or strainer, but the photocatalyst particles easily clog the filter or strainer, and it is necessary to install a separate separation device. It is possible that the photocatalyst flows out into a tank outside the equipment together with ultrapure water for precipitation separation. There are various inconveniences such as
【０００７】 さらに、他の一つとしては、フィラメント状、繊維状、網状、グラスファイバ ー等にコーテングした白金担持酸化チタン等の光触媒粒子の存在下において、被 処理流体中に含まれる有機物を紫外線照射して酸化分解して除去するものである が、白金担持酸化チタン等の光触媒粒子をコーテングする、前述の媒体が被処理 流体との接触によって揺れたりするために、コーテングした白金担持酸化チタン 等の光触媒粒子が媒体より剥離、流出しやすく、流体全体として紫外線の照射効 率があがらないという難点があった。Further, as another one, in the presence of photocatalyst particles such as platinum-supported titanium oxide coated on filaments, fibers, nets, glass fibers, etc., organic matter contained in the fluid to be treated is irradiated with ultraviolet rays. Although it is irradiated and oxidatively decomposed and removed, it coats photocatalyst particles such as platinum-supported titanium oxide, and the above-mentioned medium shakes due to contact with the fluid to be treated. However, the photocatalyst particles of the above are easily separated from the medium and flow out, and there is a drawback that the irradiation efficiency of ultraviolet rays does not increase in the fluid as a whole.
【０００８】[0008]
本考案は、流体の光化学反応処理を行うについて、白金担持酸化チタン等の光 触媒粒子を、紫外線透過性のある板状、箱状、円筒状、またはハニカム状あるい は粒状物等の個体媒体固形媒体に確固に被覆させることによって、白金担持酸化 チタン等の光触媒粒子の剥離、流出を防止しながら、紫外線と光触媒との接触面 積を大きくし、かつ反応（滞留）時間を長くし、ひいては光触媒の触媒活性を高 め、紫外線照射量を増加させて処理流体の純度を高めることにある。 また本考案は、酸化チタン等の微粒子に白金等の金属の微粒子をた光触媒を、 紫外線照射装置の処理筒、透過筒の接液部分にも担持させることによって、紫外 線と光触媒との接触面積を一段と大きくし、かつ反応時間をより長くし、光触媒 反応効率を高めて、処理流体の純度を向上させることにある。 The present invention relates to a solid medium such as a plate-like, box-like, cylindrical, or honeycomb-like or granular substance having ultraviolet light transmitting property for photocatalyst particles such as platinum-supported titanium oxide for performing photochemical reaction treatment of a fluid. By solidly coating the solid medium, the photocatalyst particles such as platinum-supported titanium oxide can be prevented from peeling and flowing out, the contact area between the ultraviolet rays and the photocatalyst can be increased, and the reaction (residence) time can be lengthened, and The purpose is to enhance the catalytic activity of the photocatalyst and increase the irradiation dose of ultraviolet rays to improve the purity of the processing fluid. In addition, the present invention also supports the contact area between the ultraviolet rays and the photocatalyst by supporting the photocatalyst composed of fine particles of titanium or the like with fine particles of metal such as platinum also in the liquid contact parts of the processing tube and the transmission tube of the ultraviolet irradiation device. Is further increased, the reaction time is made longer, the photocatalytic reaction efficiency is increased, and the purity of the processing fluid is improved.
【０００９】[0009]
本考案は、前述した従来の流体紫外線照射装置の問題点を解決するもので、紫 外線照射装置の処理筒内に、紫外線ランプを内臓した紫外線透過性のある透過筒 を配設し、紫外線照射によって流体の光化学反応処理を行う流路を形成し、この 流路に、紫外線透過性のある固形媒体に白金担持酸化チタン等の光触媒粒子を被 覆させたものを充填して光化学反応処理を行う紫外線照射装置に関するものであ る。 さらに本考案は、紫外線透過性のある固形媒体に白金担持酸化チタン等の光触 媒粒子を被覆させるとともに、前述の処理筒、透過筒の接液部分に、白金担持酸 化チタン等の光触媒粒子を被覆させて、光化学反応処理を行う紫外線照射装置に 関するものである。 The present invention solves the above-mentioned problems of the conventional fluid ultraviolet irradiation device. In the ultraviolet irradiation device, a transmission tube having an ultraviolet ray transmission is installed in the processing tube of the ultraviolet irradiation device, and the ultraviolet irradiation is performed. To form a flow path for photochemical reaction treatment of a fluid, and to fill this flow path with a solid medium having ultraviolet transparency coated with photocatalytic particles such as platinum-supported titanium oxide, and perform photochemical reaction processing It relates to an ultraviolet irradiation device. Further, the present invention is to coat a solid medium having ultraviolet transparency with photocatalyst particles such as platinum-supported titanium oxide, and at the liquid contact portion of the treatment cylinder and the transmission cylinder described above, photocatalyst particles such as platinum-supported titanium oxide. The present invention relates to an ultraviolet irradiating device that coats a film and performs a photochemical reaction process.
【００１０】[0010]
図１に示すように、ステンレス製の処理筒１の内部に、紫外線ランプ２を内臓 した石英ガラス製の透過筒３を配置して流路４を形成し、この光触媒を被覆させ るための石英ガラス製の円筒状の固形媒体５を、透過筒３を中心として同心円的 に複数個間隔を置いて配設したり、あるいは板状の媒体を複数枚間隔を置いて配 設してもよい。 As shown in FIG. 1, a quartz glass transmission tube 3 containing an ultraviolet lamp 2 is arranged inside a stainless steel processing tube 1 to form a flow path 4, and quartz for covering the photocatalyst is formed. A plurality of cylindrical solid media 5 made of glass may be arranged concentrically around the transmission cylinder 3 at intervals, or a plurality of plate-like media may be arranged at intervals.
【図１】[Figure 1]
【００１１】 また図２は、図１の断面図であり、光触媒を被覆させた石英ガラス製の円筒状 の固形媒体５を配設したステンレス製の処理筒１の内部の流路に流体が流入する 状態を示すものである。 さらに、図３は処理筒１の流路４に、透過筒３を中心として、光触媒を被覆さ せた石英ガラス製の板状の固形媒体５をハニカム状の固形媒体として配設し、さ らにハニカム状の固形媒体の固形媒体５の外周に、紫外線ランプ２を内臓した石 英ガラス製の透過筒３の他数個を間隔を置いて配置したもので、光化学反応を一 段と高めるためには、前述の処理筒１、透過筒３の接液部分、すなわち処理筒１ の内面と透過筒３の外面に、白金担持酸化チタン等の光触媒粒子を被覆させても よい。FIG. 2 is a sectional view of FIG. 1, in which a fluid flows into a flow path inside a stainless processing cylinder 1 in which a cylindrical solid medium 5 made of quartz glass coated with a photocatalyst is arranged. It indicates the state in which it does. Further, in FIG. 3, a plate-shaped solid medium 5 made of quartz glass coated with a photocatalyst is disposed as a honeycomb-shaped solid medium in the flow path 4 of the processing cylinder 1 with the transmission cylinder 3 as the center. On the outer periphery of the solid medium 5 of honeycomb-shaped solid medium, several other transparent glass tubes 3 made of English glass with a built-in ultraviolet lamp 2 are arranged at intervals to further enhance the photochemical reaction. In addition, the liquid contact portions of the processing cylinder 1 and the transmission cylinder 3, that is, the inner surface of the processing cylinder 1 and the outer surface of the transmission cylinder 3 may be coated with photocatalyst particles such as platinum-supported titanium oxide.
【図３】[Figure 3]
【００１２】 光触媒を被覆させるための紫外線透過性のある固形媒体５は、前述の板状、箱 状、円筒状、ハニカム状以外にも、固形状の媒体であればどのようなものでもよ いし、またビーズやイオン交換樹脂のような粒状物を用いると接触面積を飛躍的 に増大させることができるので、白金担持酸化チタン等の光触媒粒子の被覆量は 格段に増加させることが可能である。 さらに、前述した固形媒体５に紫外線ランプ２を内臓させて透過筒５に代用し てもかまわない。 なお、固形媒体５の間隔は２〜５０mmあればよく、５〜２０mmが適当であり、 この間隔、すなわち空隙率を等しくし、各流路４の流速の均一化をはかり、紫外 線照射量を増大させることもできる。また、その設置枚数と個数は、処理筒１と 透過筒３の大きさや処理条件よって異なるが、通常は２〜１５枚、望ましくは５ 〜１０枚がよい。The solid medium 5 having ultraviolet transparency for coating the photocatalyst may be any solid medium other than the above-mentioned plate, box, cylinder, and honeycomb. Moreover, since the contact area can be dramatically increased by using particles such as beads or ion exchange resins, the coating amount of photocatalytic particles such as platinum-supported titanium oxide can be significantly increased. Further, the transparent lamp 5 may be used by incorporating the ultraviolet lamp 2 in the solid medium 5 described above. The solid medium 5 may have an interval of 2 to 50 mm, preferably 5 to 20 mm. The interval, that is, the porosity is made equal, the flow velocity of each flow path 4 is made uniform, and the ultraviolet irradiation dose is adjusted. It can be increased. The number and the number of the installed units are different depending on the sizes of the processing cylinder 1 and the transmission cylinder 3 and the processing conditions, but are usually 2 to 15, and preferably 5 to 10 sheets.
【００１３】 固形媒体５の材質は、石英ガラス以外に弗素樹脂等紫の紫外線透過率が高く、 かつ、流体 中に溶出物が流出しない材質を使用できるが、このような材質を使 用するのは、紫外線が固形媒体５によって遮断されるのを防止し、流体に対する 紫外線照射量の増加をはかるためである。 処理筒１には流体の流入管６と流出管７を設け、さらに処理筒１の上端と下端に 蓋を設け透過筒３や固形媒体５の端部を固定する。As the material of the solid medium 5, other than quartz glass, a material such as fluororesin having a high ultraviolet transmittance of violet and having no eluate flowing out into the fluid can be used. However, such a material is not used. Is to prevent the ultraviolet rays from being blocked by the solid medium 5 and to increase the irradiation amount of ultraviolet rays to the fluid. A fluid inflow pipe 6 and a fluid outflow pipe 7 are provided in the processing cylinder 1, and lids are provided at the upper and lower ends of the processing cylinder 1 to fix the end of the permeation cylinder 3 and the solid medium 5.
【００１４】 固形媒体５に被覆させて光化学反応処理を行う光触媒の代表例として、白金担 持酸化チタン（ＴｉＯ2／Ｐｔ）をあげることができ、また酸化チタン（ＴｉＯ2 ）としては、アナタース、ルチル、ブルカイトの三種類があり、アナタースが 一般的に使用されることが多いが、ルチル、ブルカイトも使用できる。 酸化チタンと白金（ＴｉＯ2／Ｐｔ）の混合割合は、１：0.002〜１５％にす ることが望ましく、また酸化チタンに対する白金の担持法としては、公知の含浸 法、混練法による他、光析出法（光電析法）、コロイド混合法でもよい。As a typical example of a photocatalyst which is coated on the solid medium 5 and is subjected to a photochemical reaction treatment, platinum-bearing titanium oxide (TiO 2 / Pt) can be cited. As titanium oxide (TiO 2 ), anatase, There are three types, rutile and brookite, and anatase is generally used, but rutile and brookite can also be used. The mixing ratio of titanium oxide and platinum (TiO 2 / Pt) is preferably 1: 0.002 to 15%. As a method for supporting platinum on titanium oxide, a known impregnation method or a kneading method may be used. A precipitation method (photodeposition method) or a colloid mixing method may be used.
【００１５】 なお、金属を担持する半導体としては、酸化チタン（ＴｉＯ2）以外に、酸化 亜鉛（ＺｎＯ）、酸化第二鉄（Ｆｅ2０3）、カドミウム（ＣｄＳ）が使用でき 、また触媒に担持する半導体としては、白金（Ｐｔ）以外に、ニッケル（Ｎｉ） 、ロジュム（Ｒｈ）が使用でき、これらの半導体と金属とを光化学反応処理条件 に応じて、適宜組み合わせて使用すればよく、被覆する際の厚さは、１００〜１ ０００オングストロームあればよい。In addition to titanium oxide (TiO 2 ), zinc oxide (ZnO), ferric oxide (Fe 2 O 3 ), and cadmium (CdS) can be used as the metal-supporting semiconductor. Other than platinum (Pt), nickel (Ni) and rhodium (Rh) can be used as the semiconductor to be supported. These semiconductors and metals may be used in appropriate combination depending on the photochemical reaction treatment conditions. The thickness at the time of performing may be 100 to 1,000 angstrom.
【００１６】 紫外線ランプ２としては、主波長２５４ｎｍの低圧殺菌ランプ、主波長１８５ ｎｍ、２５４ｎｍの低圧オゾンランプ、主波長１８５ｎｍ、２５４ｎｍ、３６５ ｎｍの中・高圧ランプを使用し、必要に応じて、過酸化水素、オゾン等の酸化剤 を併用して光化学反応効率を高めてもよい。 なお酸化剤を併用する場合には、酸化剤の濃度により紫外線の吸収係数が異なる ために、紫外線ランプ２の照度分布と紫外線強度を適宜選択する。As the ultraviolet lamp 2, a low-pressure germicidal lamp having a main wavelength of 254 nm, a low-pressure ozone lamp having a main wavelength of 185 nm, 254 nm, and a medium / high-pressure lamp having a main wavelength of 185 nm, 254 nm, 365 nm are used. Photochemical reaction efficiency may be increased by using an oxidizing agent such as hydrogen peroxide or ozone together. When an oxidizing agent is used in combination, the illuminance distribution and the ultraviolet intensity of the ultraviolet lamp 2 are appropriately selected because the ultraviolet absorption coefficient varies depending on the concentration of the oxidizing agent.
【００１７】 本考案の流体紫外線照射装置の処理筒１の流入管６より、例えば白金担持酸化 チタン粒子を混入した有機物等を含む被処理液を流路４に導入し、石英ガラス製 の円筒状又は板状の固形媒体５の全体に被処理液を均等に流入し、白金担持酸化 チタン粒子を石英ガラス製の円筒状又は板状の固形媒体５の全面に被覆させ、石 英ガラス製の透過筒３に内臓した紫外線ランプ２より十分に照射される紫外線と 、接触面積を増大させて活性化した白金担持酸化チタン粒子とによる、有機物等 の光化学反応処理を行い、有機物等を効率的に酸化分解することによって、有機 物等をほぼ除去した超純水（ TOC値１〜１０ ppb）を流出管７より処理筒１外に 流出させて、各用途に使用する。 さらに、光化学反応処理の効率を一層高めるためには、処理筒１または処理筒 １の流入管６に、ＢｒＯ3 、Ｈ2 Ｏ2 、Ｏ2 、またはＯ3 等の酸化剤の注入装置 （図示せず）を接続させてもよい。A liquid to be treated containing, for example, an organic substance mixed with platinum-supported titanium oxide particles is introduced into the flow path 4 from the inflow pipe 6 of the treatment cylinder 1 of the fluid ultraviolet irradiation apparatus of the present invention, and the quartz glass cylindrical shape Alternatively, the liquid to be treated is evenly flowed into the whole of the plate-shaped solid medium 5, and the platinum-supported titanium oxide particles are coated on the entire surface of the cylindrical or plate-shaped solid medium 5 made of quartz glass. Photochemical reaction treatment of organic substances, etc. is carried out by the ultraviolet rays which are sufficiently irradiated from the ultraviolet lamp 2 incorporated in the cylinder 3 and the platinum-supported titanium oxide particles which are activated by increasing the contact area, and the organic substances are efficiently oxidized. By decomposing, ultrapure water (TOC value of 1 to 10 ppb) from which organic substances and the like are almost removed is allowed to flow out of the processing cylinder 1 through the outflow pipe 7 and used for each purpose. Further, in order to further enhance the efficiency of the photochemical reaction treatment, an injecting device for an oxidizing agent such as BrO 3 , H 2 O 2 , O 2 or O 3 into the inflow pipe 6 of the treatment cylinder 1 or the treatment cylinder 1 (Fig. (Not shown) may be connected.
【００１８】[0018]
本考案の光化学反応処理を行う紫外線照射装置においては、白金担持酸化チタ ン等の光触媒粒子を紫外線透過性のある固形媒体に確固に被覆させるために、従 来のフィラメント状、繊維状、網状、グラスファイバー等に白金担持酸化チタン 等の光触媒粒子コーテングしたものを充填した場合のように、白金担持酸化チタ ン等の光触媒粒子の剥離、流出がないために、光化学反応処理効率は一段と向上 する。 特に処理筒、透過筒の接液部分に白金担持酸化チタン等の光触媒粒子を被覆さ せ、かつビーズやイオン交換樹脂のような粒状物を用いると接触面積は飛躍的に 増大し、白金担持酸化チタン等の光触媒粒子の被覆量は格段に増加するために、 前述の白金担持酸化チタン等の光触媒粒子の剥離、流出がないこととの相乗効果 により、光化学反応処理効率はこれまでになく高まり、有機物等がほとんど存在 しない（ TOC値１〜１０ ppb）の高品質の超純水やクリーンエアーを得ることが できる。 さらに、本考案の光化学反応処理を行う紫外線照射装置においては、白金担持 酸化チタン等の光触媒粒子の剥離、流出がなく、光触媒を処理流体より分離する 必要がなくなり、従来、時間がかかって面倒な沈殿分離処理装置や濾過機、スト レーナーの設置も不要になり、装置コストを安価にできるメリットもある。 本考案の光化学反応処理を行う紫外線照射装置によって得られる超純水やクリ ーンエアーの流体は、半導体、医薬品、原子力等において使用することができる 他に、トリハロメタン等の塩素有機化合物やその前駆物質の分解除去、地下水や 工業用水中のトリクレン等の汚染水の処理、下水処理水のＣＯＤの低減、飲料水 の浄化、医薬品用水よりのパイロジェンの除去、冷却水のスライム発生の防止、 湖沼水中のアオコや赤潮の発生防止、水中の機器や構成物への海生生物の付着防 止、プールや浴場用水の浄化、各種用水中の毒性物質、難分解性物質の分解除去 等にも活用することができる。 In the UV irradiation device for performing the photochemical reaction treatment of the present invention, in order to firmly coat the photocatalyst particles such as platinum-supported titanium oxide on the solid medium having UV transparency, the conventional filament, fiber, net, As in the case of filling glass fibers with photocatalyst particles such as platinum-supported titanium oxide, the photocatalytic particles such as platinum-supported titanium oxide do not peel off or flow out, so the photochemical reaction treatment efficiency is further improved. In particular, when the liquid contacting parts of the treatment tube and the permeation tube are coated with photocatalytic particles such as platinum-supported titanium oxide and particles such as beads or ion-exchange resin are used, the contact area increases dramatically, and the platinum-supported oxidation occurs. Since the coating amount of photocatalyst particles such as titanium is remarkably increased, the photochemical reaction treatment efficiency is higher than ever due to the synergistic effect with the above-mentioned separation and outflow of photocatalyst particles such as platinum-supported titanium oxide. It is possible to obtain high-quality ultrapure water and clean air with almost no organic substances (TOC value of 1 to 10 ppb). Further, in the ultraviolet irradiation apparatus for performing the photochemical reaction treatment of the present invention, there is no peeling or outflow of photocatalyst particles such as platinum-supported titanium oxide, and it is not necessary to separate the photocatalyst from the treatment fluid, which is conventionally time-consuming and troublesome. There is also the merit that the cost of the equipment can be reduced because it is not necessary to install a precipitation separation treatment device, a filter, or a strainer. The ultrapure water and clean air fluids obtained by the UV irradiation device for performing the photochemical reaction treatment of the present invention can be used in semiconductors, pharmaceuticals, nuclear power, etc., as well as chlorine organic compounds such as trihalomethanes and their precursors. Decomposition / removal, treatment of contaminated water such as trichlene in groundwater and industrial water, reduction of COD of sewage treatment water, purification of drinking water, removal of pyrogens from pharmaceutical water, prevention of slime generation in cooling water, water-bloom in lake water It can also be used to prevent the generation of red tides and red tides, to prevent marine organisms from adhering to underwater equipment and components, to purify water for pools and baths, and to decompose and remove toxic and persistent substances in various types of water. it can.
【提出日】平成４年８月２１日[Submission date] August 21, 1992
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１４[Correction target item name] 0014
【補正方法】変更[Correction method] Change
【００１４】 図２は、光触媒４を１００Ａ（オングストローム）〜１ｍｍ程度の膜状または １００Ａ（オングストローム）〜１ｍｍ程度の薄板状にし、これらをステンレス 製の処理容器１の内側面や構成部品である整流板５の側面等の流体の接触個所に 貼り付けたものである。FIG. 2 shows that the photocatalyst 4 is formed into a film having a thickness of about 100 A (angstrom) to 1 mm or a thin plate having a thickness of about 100 A (angstrom) to 1 mm. It is attached to the side of the plate 5 where the fluid comes into contact.
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１５[Correction target item name] 0015
【補正方法】変更[Correction method] Change
【００１５】 図３は、光触媒４を、チタン製、石英ガラス製、セラミック製の処理容器１の 内側面や構成部品である整流板５の側面等の流体の接触個所に、100 A(オンク゛ストローム ) 〜 1 ｍｍ程度にコーティングしたものである。 なお、処理容器１がステンレス製やプラスチック製等の溶融物が溶出する素材 よりなるときは、処理容器１の内側面や構成部品の側面等の流体の接触個所に、 石英ガラスや硬質ガラス等を被覆し、これに光触媒４をコーティングする。 また処理容器１の内側面であつて流体の接触個所のみをアナタース型チタン製 にし、その他の処理容器部分をチタン製にしてもよい。FIG. 3 shows the photocatalyst 4 at 100 A (angstrom) at the fluid contact points such as the inner surface of the processing container 1 made of titanium, quartz glass, or ceramic and the side surface of the straightening plate 5 which is a component. It is coated to about 1 mm. When the processing container 1 is made of a material such as stainless steel or plastic that melts out of the melt, quartz glass, hard glass, or the like is used at the fluid contact points such as the inner surface of the processing container 1 or the side surfaces of the components. The photocatalyst 4 is coated thereon. Alternatively, the inner surface of the processing container 1 may be made of anatase-type titanium only at the fluid contact point, and the other processing container may be made of titanium.
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１６[Correction target item name] 0016
【補正方法】変更[Correction method] Change
【００１６】 図４は、処理容器１を石英ガラス製にするとともに、光源の保護管、例えば紫 外線ランプ２の透過筒３を石英ガラス製にし、この処理容器１の内側または外側 あるいは両側より紫外線照射を行い、また処理容器１および紫外線ランプ２の透 過筒３の流体が接触するの個所に、アナタース型チタンまたはアナタース型チタ ンに白金等の金属を担持させた光触媒をコーティングしたものである。 光触媒４は、図５に示すよな 0.01 〜 5 ｍｍ程度の粒子状やビーズ状の担体 ５にコーティングして用いると、流体との接触面積が大きくなるので、このよう な光触媒４を処理容器１に充填して光化学反応処理を行うとよく、さらにはアナ タース型チタンまたはアナタース型チタンに白金等の金属を担持させた光触媒を 、粒子状やビーズ状で処理容器１に充填すると、一層流体との接触面積が大きく なる。In FIG. 4, the processing container 1 is made of quartz glass, and the protective tube of the light source, for example, the transmission tube 3 of the ultraviolet ray lamp 2 is made of quartz glass. Anatase-type titanium or anatase-type titanium is coated with a photocatalyst carrying a metal such as platinum at the location where the fluid is irradiated in the treatment container 1 and the transparent tube 3 of the ultraviolet lamp 2 and is brought into contact with the fluid. .. When the photocatalyst 4 is used by coating it on a carrier 5 in the form of particles or beads having a diameter of 0.01 to 5 mm as shown in FIG. 5, the contact area with the fluid becomes large. It is advisable to perform a photochemical reaction treatment by filling the container with an anatase-type titanium or an anatase-type titanium-supported photocatalyst in the form of particles or beads in the processing container 1 to obtain a further fluid. The contact area becomes larger.
【図１】本考案の光触媒を被覆させた円筒状の固形媒体
を、透過筒を中心として同心円的に複数個間隔を置いて
配設した処理筒の断面図である。FIG. 1 is a cross-sectional view of a processing cylinder in which a plurality of cylindrical solid media coated with a photocatalyst of the present invention are concentrically arranged around a transmission cylinder at intervals.
【図２】図１のＡーＡ線断面図である。FIG. 2 is a sectional view taken along the line AA of FIG.
【図３】光触媒を被覆させた固形媒体を、紫外線ランプ
を内臓した透過筒を中心としてハニカム状に配設し、か
つハニカム状の固形媒体の外周に紫外線ランプを内臓し
た透過筒の多数個を間隔を置いて配置した処理筒の断面
図である。[Fig. 3] A solid medium coated with a photocatalyst is arranged in a honeycomb shape around a transmission tube containing an ultraviolet lamp, and a large number of transmission tubes containing an ultraviolet lamp are provided around the outer periphery of the honeycomb-shaped solid medium. It is sectional drawing of the process cylinder arrange | positioned at intervals.
１ 処理筒 ２ 紫外線ランプ ３ 透過筒 ４ 流路 ５ 固形媒体 1 Processing Tube 2 Ultraviolet Lamp 3 Transmission Tube 4 Flow Path 5 Solid Medium
Claims (3)
プを内臓した紫外線透過性のある透過筒を配設し、紫外
線照射によって流体の光化学反応処理を行う流路を形成
し、この流路に、紫外線透過性のある板状、箱状、円筒
状、またはハニカム状の固形媒体に白金担持酸化チタン
等の光触媒粒子を被覆させたものを充填して光化学反応
処理を行う紫外線照射装置。1. A processing tube of an ultraviolet irradiating device is provided with a transparent tube having an ultraviolet ray lamp and having an ultraviolet permeable property, and a flow path for carrying out a photochemical reaction treatment of a fluid by ultraviolet irradiation is formed. An ultraviolet irradiation device for performing a photochemical reaction treatment by filling a plate-shaped, box-shaped, cylindrical, or honeycomb-shaped solid medium coated with photocatalyst particles such as platinum-supported titanium oxide with ultraviolet light.
る光化学反応処理を行う紫外線照射装置。2. An ultraviolet irradiation device for performing a photochemical reaction treatment using a granular material as the solid medium according to claim 1.
の接液部分に、白金担持酸化チタン等の光触媒粒子を被
覆させた光化学反応処理を行う紫外線照射装置。3. An ultraviolet irradiation device for performing a photochemical reaction treatment in which the liquid contact portions of the treatment cylinder and the transmission cylinder according to claim 1 or 2 are coated with photocatalytic particles such as platinum-supported titanium oxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991070203U JP2567273Y2 (en) | 1991-08-08 | 1991-08-08 | UV irradiation device for photochemical reaction treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991070203U JP2567273Y2 (en) | 1991-08-08 | 1991-08-08 | UV irradiation device for photochemical reaction treatment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0526187U true JPH0526187U (en) | 1993-04-06 |
| JP2567273Y2 JP2567273Y2 (en) | 1998-04-02 |
Family
ID=13424731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1991070203U Expired - Lifetime JP2567273Y2 (en) | 1991-08-08 | 1991-08-08 | UV irradiation device for photochemical reaction treatment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2567273Y2 (en) |
Cited By (11)
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|---|---|---|---|---|
| JPH063494U (en) * | 1991-10-28 | 1994-01-18 | 株式会社日本フォトサイエンス | Fluid photochemical reaction processor |
| JPH1147771A (en) * | 1997-07-31 | 1999-02-23 | Meidensha Corp | Continuous water passing type water treatment apparatus |
| JP2000157873A (en) * | 1998-10-30 | 2000-06-13 | Basf Ag | Molding member |
| WO2001030706A1 (en) * | 1999-10-28 | 2001-05-03 | Kazuto Hashizume | Improved method and apparatus for water treatment |
| JP2007021496A (en) * | 1994-12-28 | 2007-02-01 | Benrad Ab | Method and apparatus for treatment of fluid |
| WO2009022456A1 (en) * | 2007-08-15 | 2009-02-19 | Shin-Etsu Quartz Products Co., Ltd. | Silica glass for photocatalysts and process for production of silica glass for photocatalysts |
| WO2009025077A1 (en) * | 2007-08-23 | 2009-02-26 | Shin-Etsu Quartz Products Co., Ltd. | Chemical-resistant silica glass and method for producing chemical-resistant silica glass |
| WO2009072220A1 (en) * | 2007-12-06 | 2009-06-11 | Masami Oouti | Water purifying device |
| KR101141180B1 (en) * | 2011-04-05 | 2012-04-27 | (주)구츠 | Photocatalyst sterilizer for water purifier |
| JP2015136686A (en) * | 2014-01-24 | 2015-07-30 | シャープ株式会社 | Water treatment device and wet cleaning machining using the water treatment device |
| JP2018034020A (en) * | 2017-12-04 | 2018-03-08 | 日機装株式会社 | Ultraviolet sterilization device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH063494U (en) * | 1991-10-28 | 1994-01-18 | 株式会社日本フォトサイエンス | Fluid photochemical reaction processor |
| JP2007021496A (en) * | 1994-12-28 | 2007-02-01 | Benrad Ab | Method and apparatus for treatment of fluid |
| JPH1147771A (en) * | 1997-07-31 | 1999-02-23 | Meidensha Corp | Continuous water passing type water treatment apparatus |
| JP2000157873A (en) * | 1998-10-30 | 2000-06-13 | Basf Ag | Molding member |
| WO2001030706A1 (en) * | 1999-10-28 | 2001-05-03 | Kazuto Hashizume | Improved method and apparatus for water treatment |
| JP2009046328A (en) * | 2007-08-15 | 2009-03-05 | Shinetsu Quartz Prod Co Ltd | Silica glass for photocatalyst and its production method |
| WO2009022456A1 (en) * | 2007-08-15 | 2009-02-19 | Shin-Etsu Quartz Products Co., Ltd. | Silica glass for photocatalysts and process for production of silica glass for photocatalysts |
| WO2009025077A1 (en) * | 2007-08-23 | 2009-02-26 | Shin-Etsu Quartz Products Co., Ltd. | Chemical-resistant silica glass and method for producing chemical-resistant silica glass |
| JP2009051677A (en) * | 2007-08-23 | 2009-03-12 | Shinetsu Quartz Prod Co Ltd | Chemically resistant silica glass and its production method |
| WO2009072220A1 (en) * | 2007-12-06 | 2009-06-11 | Masami Oouti | Water purifying device |
| KR101141180B1 (en) * | 2011-04-05 | 2012-04-27 | (주)구츠 | Photocatalyst sterilizer for water purifier |
| JP2015136686A (en) * | 2014-01-24 | 2015-07-30 | シャープ株式会社 | Water treatment device and wet cleaning machining using the water treatment device |
| JP2018034020A (en) * | 2017-12-04 | 2018-03-08 | 日機装株式会社 | Ultraviolet sterilization device |
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|---|---|
| JP2567273Y2 (en) | 1998-04-02 |
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