JP2578749Y2 - Liquid photochemical reaction processing equipment - Google Patents
Liquid photochemical reaction processing equipmentInfo
- Publication number
- JP2578749Y2 JP2578749Y2 JP1991095888U JP9588891U JP2578749Y2 JP 2578749 Y2 JP2578749 Y2 JP 2578749Y2 JP 1991095888 U JP1991095888 U JP 1991095888U JP 9588891 U JP9588891 U JP 9588891U JP 2578749 Y2 JP2578749 Y2 JP 2578749Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- photocatalyst
- anatase
- type titanium
- photochemical reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Treatment Of Water By Oxidation Or Reduction (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
- Physical Water Treatments (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本考案は、紫外線、太陽光線等の
光照射によって、液体に含まれている有機物の酸化分
解、細菌の殺菌、有害物質の分解等の光化学反応処理
を、アナタース型チタンの光触媒またはアナタース型チ
タンに白金等の金属を担持させた光触媒の存在下におい
て行い、有機物、細菌、有害物質を除去する光化学反応
処理装置に関するものである。The present invention relates to an anatase type titanium for photochemical reaction treatment such as oxidative decomposition of organic substances contained in a liquid , sterilization of bacteria, decomposition of harmful substances, etc. by irradiation of light such as ultraviolet rays and sun rays. The present invention relates to a photochemical reaction processing apparatus for removing organic matter, bacteria, and harmful substances in the presence of a photocatalyst or a photocatalyst in which a metal such as platinum is supported on anatase-type titanium.
【０００２】[0002]
【従来の技術】最近、半導体製造工程、医薬品製造工
程、電力発電工程において、超純水等の高純度の液体が
使用されている。例えば、ＬＳＩ等の半導体を製造する
際には、半導体の洗浄水として超純水が使用されている
が、この超純水は、光化学反応処理装置としての紫外線
照射装置、イオン交換装置、超濾過膜装置、逆浸透膜装
置等を適宜組み合わせた超純水製造システムによって製
造されている。この超純水製造システムにおいては、紫
外線照射装置は、原水である一次純水に含まれている有
機物を酢酸等の有機酸、二酸化炭素等に酸化分解処理、
そして処理水に含まれている有機酸、二酸化炭素等を、
イオン交換装置、超濾過膜装置、逆浸透膜装置等で除去
して超純水を製造している。また、超純水を半導体の洗
浄に一度使用してイソプロピールアルコール等の有機物
で汚染された洗浄水（超純水の純度より悪いが高純度の
純水）を、前述した超純水製造システムで処理して超純
水として再度使用することも多い。2. Description of the Related Art Recently, high-purity liquids such as ultrapure water have been used in semiconductor manufacturing processes, pharmaceutical manufacturing processes, and power generation processes. For example, when manufacturing semiconductors such as LSIs, ultrapure water is used as washing water for semiconductors. This ultrapure water is used as an ultraviolet irradiation apparatus as a photochemical reaction processing apparatus, an ion exchange apparatus, and an ultrafiltration apparatus. It is manufactured by an ultrapure water manufacturing system that appropriately combines a membrane device, a reverse osmosis membrane device, and the like. In this ultrapure water production system, the ultraviolet irradiation device oxidizes and decomposes organic matter contained in primary water as raw water into organic acids such as acetic acid, carbon dioxide,
And the organic acid, carbon dioxide, etc. contained in the treated water,
Ultrapure water is produced by removing with an ion exchange device, ultrafiltration membrane device, reverse osmosis membrane device and the like. Further, the ultrapure water is used once for cleaning the semiconductor, and the cleaning water (pure water having a purity lower than the purity of the ultrapure water but high purity) contaminated with an organic substance such as isopropyl alcohol is supplied to the ultrapure water production system described above. And then reused as ultrapure water.
【０００３】そして紫外線照射装置は、原水中に細菌や
有害物質が含まれている場合には、原水中の細菌の殺
菌、有害物質の分解をし、超純水製造システムの後段の
イオン交換樹脂、超濾過膜、逆浸透膜等が細菌、有害物
質で汚染されるのを防止するためにも使用されている。
また紫外線照射装置は、超純水製造システムで製造した
超純水が細菌で汚染された場合には、半導体の細菌汚染
を防止するために、超純水中の殺菌用に使用されること
もある。しかし、昨今の技術革新や技術の高度化に伴っ
て、超純水の純度、特に超純水中に最後まで残留する微
量の有機物、細菌、有害物質の除去が重要な技術課題に
なり、現在用いられている紫外線照射装置の紫外線照射
効率の向上が求められている。[0003] When the raw water contains bacteria and harmful substances, the ultraviolet irradiation apparatus sterilizes the bacteria in the raw water and decomposes the harmful substances. It is also used to prevent ultrafiltration membranes, reverse osmosis membranes and the like from being contaminated with bacteria and harmful substances.
In addition, when the ultrapure water produced by the ultrapure water production system is contaminated with bacteria, the ultraviolet irradiation device may be used for sterilization in ultrapure water to prevent bacterial contamination of semiconductors. is there. However, with the recent technological innovation and sophistication of technology, the purity of ultrapure water, especially the removal of trace amounts of organic substances, bacteria and harmful substances remaining in ultrapure water, has become an important technical issue. There is a demand for an improvement in the ultraviolet irradiation efficiency of the ultraviolet irradiation device used.
【０００４】近年、紫外線照射処理において液体の光化
学反応処理を行う場合に、酸化チタン（ＴｉＯ２）また
は酸化チタンに白金（Ｐｔ）等の金属を担持した光触媒
を用い、触媒の活性度を高めて超純水の純度を一段と高
める工夫や改善が提案なされている。しかし、これまで
の光触媒を用いた液体の光化学反応処理は、学問的アイ
デアや実験的提案が多く、工業的な技術として完成され
ているものが少なく、実装置として運転されているもの
は、光触媒と液体の接触面積が小さいものが多く、光化
学反応処理効率が悪いという欠点があった。In recent years, in the case of performing a photochemical reaction of a liquid in an ultraviolet irradiation treatment, a photocatalyst in which titanium oxide (TiO 2) or a metal such as platinum (Pt) is supported on titanium oxide is used, and the activity of the catalyst is increased. Some ideas and improvements have been proposed to further increase the purity of pure water. However, conventional photochemical reaction treatment of liquids using photocatalysts has many academic ideas and experimental proposals, and few of them have been completed as industrial technologies. In many cases, the contact area between the liquid and the liquid is small, and the efficiency of the photochemical reaction treatment is low.
【０００５】また、光触媒と液体の接触面積を大きくす
るものとして、被処理水中に含まれる有機物を、白金担
持酸化チタン等の光触媒粒子の存在下で、紫外線照射し
て酸化分解して除去するという超純水製造方法が、特許
出願公開（特開昭６２−１９３６９６号）になってい
る。しかし、この公開公報には、紫外線照射による液体
の光化学反応処理を行うことについては記載されている
が、処理液である超純水より、白金担持酸化チタン等の
光触媒粒子を分離する手段について記載がない。超純水
として使用する限り、最終段階で超純水より白金担持酸
化チタン等の光触媒粒子を分離することは必須の技術条
件であるが、このような重要な分離技術について記載が
ないことより判断すると、工業技術として完成されてい
るとはいえない。In order to increase the contact area between the photocatalyst and the liquid, organic substances contained in the water to be treated are oxidized and decomposed by irradiation with ultraviolet rays in the presence of photocatalyst particles such as platinum-supported titanium oxide. A method for producing ultrapure water is disclosed in Japanese Patent Application Laid-Open (JP-A-62-193696). However, this publication has been described for carrying out the photochemical reaction treatment of the liquid by ultraviolet irradiation, from the ultra-pure water is a processing liquid, One to means for separating the photocatalyst particles, such as platinum-supported titanium oxide There is no description. As long as it is used as ultrapure water, it is an essential technical condition to separate photocatalyst particles such as platinum-supported titanium oxide from ultrapure water at the final stage, but it is judged from the fact that such an important separation technology is not described Then, it cannot be said that it has been completed as an industrial technology.
【０００６】この出願公開された技術における超純水と
光触媒との分離手段について想像すると、光触媒粒子の
沈殿による分離が考えられるが、沈殿に長時間を要する
とともに分離性が悪くて実用的でなく、また光触媒粒子
を濾過機、ストレーナー分離膜装置で濾別して分離する
ことも考えられるが、光触媒粒子によって濾過機、スト
レーナー、分離膜装置が目詰まりし易く、これらの装置
の洗浄をたびたび行う必要があるために光化学反応処理
効率が悪くなる欠点がありに、また濾過機、ストレーナ
ー、分離膜装置の設置の必要があるために、設置費用が
増大する等種々の不都合があった。When imagining a means for separating ultrapure water and a photocatalyst in the technology disclosed in this application, separation by precipitation of photocatalyst particles is conceivable, but it takes a long time for the precipitation and poor separability, which is not practical. It is also conceivable to separate the photocatalyst particles by filtration with a filter and a strainer separation membrane device.However, the filter, the strainer and the separation membrane device are easily clogged by the photocatalyst particles, and it is necessary to frequently wash these devices. For this reason, there is a disadvantage that the efficiency of the photochemical reaction treatment is deteriorated, and there are various inconveniences such as an increase in installation cost due to the necessity of installing a filter, a strainer, and a separation membrane device.
【０００７】[0007]
【考案が解決しようとする課題】本考案は、液体の光化
学反応処理を行うについて、アナタース型チタンの光触
媒またはアナタース型チタンに白金等の金属を担持させ
た光触媒を液体と効率的に接触させることにより、紫外
線等と光触媒との接触面積を飛躍的に大きくし、光化学
反応処理反応効率を高めて、処理液体の純度を向上させ
ることにある。An invention It is an object of the present invention, for performing a photochemical reaction treatment of the liquid, causing the photocatalyst obtained by supporting a metal such as platinum photocatalyst or anatase titanium anatase titanium is liquid and effectively contact Thus, the contact area between the ultraviolet light or the like and the photocatalyst is greatly increased, the efficiency of the photochemical reaction is increased, and the purity of the processing liquid is improved.
【０００８】[0008]
【課題を解決するための手段】本考案は、紫外線、太陽
光線等の光照射によって、液体に含まれている有機物の
酸化分解、細菌の殺菌、有害物質の分解等を行う光化学
反応処理装置に関するものであって、アナタース型チタ
ンの光触媒またはアナタース型チタンに白金等の金属を
担持させた光触媒を、担体にコーティングすることな
く、それ自体をネット状やラシヒリング状等の接触面積
が大きく、かつ液体の通過性のよい形状にして処理容器
の内部に充填して、光化学反応処理を行う主体処理材と
して使用するとともに、さらにアナタース型チタンの光
触媒またはアナタース型チタンに白金等の金属を担持さ
せた光触媒を、処理容器（たとえば光触媒が充填されて
いないが液体は接触する処理容器の上方部分）の内面や
構成部品（たとえば透過筒３や整流板５）の側面等の液
体の接触個所に、貼り付けまたはコーティングして光化
学反応処理を行う補足的処理材として使用することに特
徴がある。SUMMARY OF THE INVENTION The present invention relates to a photochemical reaction processing apparatus that oxidizes and decomposes organic substances contained in a liquid, sterilizes bacteria, and decomposes harmful substances by irradiating light such as ultraviolet rays and sunlight. It is those, a photocatalyst obtained by supporting a metal such as platinum photocatalyst or anatase titanium anatase titanium, without coating the carrier, itself large contact area, such as a net-like or Raschig ring shape and, In addition to filling the inside of the processing container in a shape with good liquid permeability and using it as a main processing material for performing a photochemical reaction treatment, furthermore, a metal such as platinum is supported on a photocatalyst of anatase type titanium or anatase type titanium. The photocatalyst is transferred to the inner surface of a processing vessel (eg, the upper portion of the processing vessel that is not filled with a photocatalyst but is in contact with a liquid) or a component (eg, The contact point of the liquid side or the like of the over tube 3 and the current plate 5), is characterized in that for use as a supplementary treatment material by pasting or coating performed photochemical reaction process.
【０００９】また、本考案は、前述したアナタース型チ
タンの光触媒またはアナタース型チタンに白金等の金属
を担持させた光触媒を、ネット状やラシヒリング状等の
接触面積が大きく、かつ液体の通過性のよい形状にして
処理容器の内部に充填するとともに、さらに、金属製ま
たは非金属製のネット状やラシヒリング状等の接触面積
が大きく、かつ液体の通過性のよい形状にした物体に石
英ガラスや硬質ガラス等を被覆した担体に、前述した光
触媒をコーティングした状態で処理容器の内部に充填
（光化学反応処理を行う主体処理材として２種類充填）
し、また、この光触媒を、処理容器の内面や構成部品の
側面等の液体の接触個所に貼り付けまたはコーティング
（光化学反応処理を行う補足的処理材として使用）した
ことに特徴がある。Further, the present invention relates to a method of applying the above-described anatase-type titanium photocatalyst or a photocatalyst in which an anatase-type titanium is supported with a metal such as platinum to a net-like or Raschig-ring-like contact area and a liquid-permeable property. In addition to filling the inside of the processing container with a good shape, furthermore, a glass or hard metal with a large contact area such as a metal or non-metal net or Raschig ring shape and a good liquid permeability Filling the inside of the processing vessel with the above-mentioned photocatalyst coated on a carrier coated with glass etc. (Two types are filled as main processing materials for photochemical reaction processing)
Further, this photocatalyst is characterized in that it is attached or coated (used as a supplementary processing material for performing a photochemical reaction process) on a liquid contact point such as an inner surface of a processing container or a side surface of a component.
【００１０】さらに、本考案は、前述した光触媒を処理
容器の内部に充填するとともに、さらに光触媒を、処理
容器の内面や構成部品の側面等の液体の接触個所に石英
ガラスや硬質ガラス等を被覆したものに、コーティング
したことに特徴がある。さらに、本考案は、前述した光
触媒を処理容器の内部に装填するとともに、処理容器の
液体の接触個所のみをアナタース型チタン製にし、その
他の処理容器部分をチタン製とすることに特徴がある。
さらに、本考案は、前述した光触媒を処理容器の内部に
充填するとともに、処理容器および光源の保護管を光透
過性物質製とし、この処理容器の内側または外側あるい
は両側より光照射を行い、また処理容器および光源の保
護管の液体が接触する個所に、アナタース型チタンまた
はアナタース型チタンに白金等の金属を担持させた光触
媒をコーティングしたことに特徴がある。Further, in the present invention, the above-mentioned photocatalyst is filled in the inside of the processing container, and the photocatalyst is further coated with quartz glass, hard glass, or the like on the liquid contact points such as the inner surface of the processing container and the side surfaces of the components. It is characterized by coating. Further, in the present invention, the above-described photocatalyst is loaded into the inside of the processing container, and
It is characterized in that only the contact portion of the liquid is made of anatase type titanium, and the other processing container portions are made of titanium.
Further, in the present invention, the above-described photocatalyst is placed inside the processing container.
To fill, the protective tube of the processing vessel and a light source and a light transmissive material made, perform light irradiation from inside or outside or both sides of the process container, also the location where the liquid of the protective tube of the processing vessel and the light source are in contact, It is characterized by coating an anatase type titanium or a photocatalyst in which a metal such as platinum is supported on anatase type titanium.
【００１１】[0011]
【実施例】図１に示すように、光化学反応処理装置のス
テンレス製の処理容器１内に、光化学反応処理の光源と
して、例えば紫外線ランプ２を内臓した石英ガラス製の
透過筒３を配置し、この透過筒３の付近に、アナタース
型チタンまたはアナタース型チタンに白金等の金属を担
持させた光触媒（以下光触媒という）４をネット状に重
ね、これを透過筒３を中心として同心円的に充填する。
なお、光触媒４をネット状に充填するについては、処理
容器１内に整流板５を間隔をおいて配置させて、これら
の整流板５と整流板５との間に光触媒４を分離状態で充
填させ、液体を蛇行状に通過するようにすると、光化学
反応処理効率はよくなる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIG. 1, in a stainless steel processing vessel 1 of a photochemical reaction processing apparatus, as a light source for photochemical reaction processing, for example, a transmission tube 3 made of quartz glass having a built-in ultraviolet lamp 2 is arranged. In the vicinity of the transmission tube 3, an anatase-type titanium or a photocatalyst (hereinafter referred to as a photocatalyst) 4 in which anatase-type titanium carries a metal such as platinum is superposed in a net shape, and this is filled concentrically around the transmission tube 3. .
When the photocatalyst 4 is filled in a net shape, the rectifying plates 5 are arranged at intervals in the processing vessel 1, and the photocatalyst 4 is filled between the rectifying plates 5 in a separated state. When the liquid is caused to pass in a meandering manner, the photochemical reaction processing efficiency is improved.
【００１２】光触媒４の形状は、ネット状に重ねるほ
か、ラシヒリング状にしてもよく、要すれば、接触面積
が大きく、かつ液体の通過性のよい形状であれば、どの
ような形状であってもよい。光触媒４のネットを構成す
る細線の太さは１０００〜１００μ程度が望ましく、ネ
ットのメッシュとしては、２〜５０程度が望ましく、ま
たネットの重ね枚数は１〜５０枚程度が望ましい。光触
媒４のラシヒリングの形状は、通常の液体処理に使用さ
れている形状のものであればどんなものでもよい。[0012] The shape of the photocatalyst 4, in addition to overlaying the net-like, may be the Raschig ring, if desired, the contact area is large and if the good shape of passage of the liquid, any shape There may be. The thickness of the thin line constituting the net of the photocatalyst 4 is preferably about 1000 to 100 μm, the mesh of the net is preferably about 2 to 50, and the number of nets is about 1 to 50. The shape of Raschig rings of the photocatalyst 4 may be any of those shapes used in ordinary liquid treatment.
【００１３】なお、光触媒４としてのチタン（Ｔｉ
Ｏ２）としては、アナタース型を使用し、光触媒に半導
体を担持するときは、白金（ｐｔ）が一般的に使用され
るが、これ以外に、ニッケル（Ｎｉ）、ロジュム（Ｒ
ｈ）の金属が使用でき、例えばチタンと白金（ＴｉＯ２
／Ｐｔ）の混合割合は、１：０．００２〜１５％にする
ことが望ましく、チタンに対する白金の担持法として
は、公知の含浸法、混練法による他、光析出法（光電析
法）、コロイド混合法でもよい。The titanium (Ti) as the photocatalyst 4
As an O 2 ), an anatase type is used. When a semiconductor is supported on a photocatalyst, platinum (pt) is generally used. In addition, nickel (Ni) and rhodium (R) are used.
h) can be used, for example, titanium and platinum (TiO 2
The mixing ratio of (/ Pt) is desirably 1: 0.002 to 15%. Examples of the method of supporting platinum on titanium include a known impregnation method, a kneading method, a photodeposition method (a photoelectric deposition method), A colloid mixing method may be used.
【００１４】紫外線ランプ２を使用するときは、主波長
２５４ｎｍの低圧殺菌ランプ、主波長１８５ｎｍ、２５
４ｎｍの低圧オゾンランプ、主波長１８５ｎｍ、２５４
ｎｍ、３６５ｎｍの中・高圧ランプを使用し、また紫外
線ランプ２以外にも、光化学反応処理の目的に応じて、
太陽光ランプ、ケミカルランプ、ブラックライトラン
プ、メタルハライドランプ、ナトリウムランプ等、その
他７００ｎｍ以下の波長を有するものを使用する。When the ultraviolet lamp 2 is used, a low-pressure germicidal lamp having a main wavelength of 254 nm, a main wavelength of 185 nm,
4 nm low pressure ozone lamp, main wavelength 185 nm, 254
nm, 365 nm medium and high pressure lamps, and besides the UV lamp 2, depending on the purpose of the photochemical reaction treatment,
A lamp having a wavelength of 700 nm or less, such as a solar lamp, a chemical lamp, a black light lamp, a metal halide lamp, and a sodium lamp, is used.
【００１５】光触媒４は、処理容器１に充填した金属製
または非金属製のネット状に石英ガラスや硬質ガラス等
を被覆した担体に、１００ Ａ（オングストローム）〜
１ｍｍ程度にコーティングしてもよく、さらに光触媒４
を、金属製または非金属製のラシヒリング状のものに石
英ガラスや硬質ガラス等を被覆した担体５に、同様にコ
ーティングしてもよい。前述したように、担体５の形状
は、ネット状に重ねたもの、ラシヒリング状にしたもの
以外、接触面積が大きく、かつ液体の通過性のよい形状
であれば、どのような形状であってもよい。The photocatalyst 4 is a metal or nonmetal net filled in the processing vessel 1 and coated with quartz glass or hard glass, etc., in a carrier of 100 A (angstrom) or more.
It may be coated to about 1 mm.
May be similarly coated on a carrier 5 in which a metal or non-metallic Raschig ring is coated with quartz glass, hard glass or the like. As described above, the shape of the support 5, which was superimposed on the net-like, other than those in Raschig ring shape, the contact area is large and if the good shape of passage of the liquid, be any shape Good.
【００１６】図２は、光触媒４を１００Ａ（オングスト
ローム）〜１ｍｍ程度の膜状または１００Ａ（オングス
トローム）〜１ｍｍ程度の薄板状にし、これらをステン
レス製の処理容器１の内側面や構成部品である整流板５
の側面等の液体の接触個所に貼り付けたものである。FIG. 2 shows the photocatalyst 4 in the form of a film having a thickness of about 100 A (angstrom) to about 1 mm or a thin plate having a thickness of about 100 A (angstrom) to about 1 mm. Board 5
It is affixed to a liquid contact point such as a side surface of the liquid crystal display.
【００１７】図３は、光触媒４を、チタン製、石英ガラ
ス製、セラミック製の処理容器１の内側面や構成部品で
ある整流板５の側面等の液体の接触個所に、１００Ａ
（オングストローム）〜１ｍｍ程度にコーティングした
ものである。なお、処理容器１がステンレス製やプラス
チック製等の溶融物が溶出する素材よりなるときは、処
理容器１の内側面や構成部品の側面等の液体の接触個所
に、石英ガラスや硬質ガラス等を被覆し、これに光触媒
４をコーティングする。また処理容器１の内側面であっ
て液体の接触個所のみをアナタース型チタン製にし、そ
の他の処理容器部分をチタン製にしてもよい。FIG. 3 shows that the photocatalyst 4 is placed on the contact surface of the liquid such as the inner surface of the processing container 1 made of titanium, quartz glass, or ceramic or the side surface of the rectifying plate 5 as a component by 100 A.
(Angstrom) Coated to about 1 mm. When the processing container 1 is made of a material such as stainless steel or plastic from which a melt is eluted, quartz glass, hard glass, or the like is applied to a liquid contact point such as the inner surface of the processing container 1 or the side surface of a component. Coating, and the photocatalyst 4 is coated thereon. The <br/> Tsu inner surface der of the processing vessel 1 Te and only contact point of the liquid steel anatase type titanium, other processing container portion may be made of titanium.
【００１８】図４は、処理容器１を石英ガラス製にする
とともに、光源の保護管、例えば紫外線ランプ２の透過
筒３を石英ガラス製にし、この処理容器１の内側または
外側あるいは両側より紫外線照射を行い、また処理容器
１および紫外線ランプ２の透過筒３の液体が接触する個
所に、アナタース型チタンまたばアナタース型チタンに
白金等の金属を担持させた光触媒をコーティングしたも
のである。光触媒４は、図５に示すよな０．０１〜５ｍ
ｍ程度の粒子状やビーズ状の担体にコーティングして用
いると、液体との接触面積が大きくなるので、このよう
な光触媒４を処理容器１に充填して光化学反応処理を行
うとよく、さらにはアナタース型チタンまたはアナター
ス型チタンに白金等の金属を担持させた光触媒を、粒子
状やビーズ状で処理容器１に充填すると、一層液体との
接触面積が大きくなる。FIG. 4 shows that the processing vessel 1 is made of quartz glass and the protective tube of the light source, for example, the transmission tube 3 of the ultraviolet lamp 2 is made of quartz glass, and the inside or outside or both sides of the processing vessel 1 is irradiated with ultraviolet rays. In addition, an anatase type titanium or a photocatalyst in which an anatase type titanium is loaded with a metal such as platinum is coated on a place where the liquid in the transmission tube 3 of the processing container 1 and the ultraviolet lamp 2 comes into contact. The photocatalyst 4 is 0.01 to 5 m as shown in FIG.
When coated on a particulate or bead-like carrier having a particle size of about m, the contact area with a liquid is increased. Therefore, the photocatalyst 4 is preferably filled in the processing container 1 to perform a photochemical reaction treatment. When the processing container 1 is filled with an anatase-type titanium or a photocatalyst in which a metal such as platinum is supported on the anatase-type titanium in the form of particles or beads, the contact area with the liquid is further increased.
【００１９】本考案の液体紫外線照射装置の流入管６よ
り、有機物、細菌、有害物質等を含む液体を処理容器１
に導入し、以上のべたような接触面積を増大させたアナ
タース型チタンまたはアナタース型チタンに白金等の金
属を担持させた光触媒４の存在において、液体に光照
射、例えば紫外線ランプ２より紫外線を照射し、液体に
含まれている有機物の酸化分解、細菌の殺菌、有害物質
の分解等の光化学反応処理を効率的に行い、有機物、細
菌、有害物質等を除去した液体を流出管７より処理容器
１外に流出させ、これを貯留して各用途に使用する。The liquid containing organic substances, bacteria, harmful substances, etc. is supplied from the inflow pipe 6 of the liquid ultraviolet irradiation apparatus of the present invention to the processing vessel 1.
In the presence of an anatase-type titanium or a photocatalyst 4 in which a metal such as platinum is supported on anatase-type titanium, the liquid is irradiated with light, for example, ultraviolet light is irradiated from an ultraviolet lamp 2 and, oxidative decomposition of organic matter contained in the liquid, bacteria sterilization, performed photochemical reaction treatment such as decomposition of harmful substances efficiently, organic, bacteria, processing from the outflow pipe 7 a liquid to remove toxic substances like It flows out of the container 1 and is stored and used for each purpose.
【００２０】[0020]
【考案の効果】本考案においては、光触媒と液体の接触
面積を大きくし、液体を光触媒と十分に接触させること
により、液体に含まれている有機物の酸化分解、細菌の
殺菌、有害物質の分解等の光化学反応処理を効果的に行
うために、処理液体の純度を従来より格段に向上させる
ことができ、特に液体中に最後まで残留する微量の有機
物、細菌、有害物質の除去には顕著な効果がある。ま
た、本考案においては、処理液体より光触媒を分離する
という面倒な分離操作が必要がなく、かつ光触媒による
目詰まりもないために、繁雑な洗浄操作も行う必要もな
く、光化学反応処理効率を大幅に向上させることができ
る。特に処理容器の接液部分を、光触媒で構成したり、
プレコートして、かつ粒子状やビーズの担体に光触媒を
プレコートしたものを併用した場合には、液体と光触媒
との接触面積は飛躍的に増大するために、光化学反応処
理効率はこれまでになく高まり、高純度の超純水等の液
体を得ることができる。本考案においては、光触媒を処
理液体より分離する必要がなくなり、従来、時間がかか
って面倒な沈殿分離処理装置や濾過機、ストレーナーの
設置も不要になり、装置コストを安価にできるメリット
もある。本考案の装置は、半導体、液晶、医薬品等の製
造の際に用いられる超純水等の液体の精製に使用され、
また原子力発電所等において用いられる純水や超純水等
の液体の精製にも使用できる以上の用途の他に、本考案
の装置は、トリハロメタン等の塩素有機化合物やその前
駆物質の分解除去、地下水や工業用水中のトリクレン等
の汚染水の処理、上下水や廃水のＣＯＤの低減、飲料水
の殺菌や有害物質低減、医薬品用水よりのパイロジェン
の除去、プールや浴場用水の浄化、各種用水中の毒性物
質、難分解性物質の分解除去、ＴＯＣアナライザー、水
溶性切削油の殺菌、牛乳や異性化糖等の光透過性の低い
液体の殺菌にも活用することができる。According to the present invention, the contact area between the photocatalyst and the liquid is increased, and the liquid is sufficiently contacted with the photocatalyst to oxidatively decompose organic substances contained in the liquid , kill bacteria, and decompose harmful substances. In order to effectively carry out photochemical reaction treatments such as, etc., the purity of the treated liquid can be significantly improved compared to the past, especially remarkable for removing trace amounts of organic substances, bacteria and harmful substances remaining in the liquid to the end. effective. In addition, in the present invention, there is no need for a troublesome separation operation of separating the photocatalyst from the processing liquid , and there is no clogging due to the photocatalyst. Can be improved. In particular, the wetted part of the processing vessel may be composed of a photocatalyst,
When pre-coated and a pre-coated particle or bead carrier with a photo-catalyst are used together, the contact area between the liquid and the photo-catalyst increases dramatically, and the efficiency of the photochemical reaction treatment increases more than ever. , Liquids such as high-purity ultrapure water
You can get the body . In the present invention, there is no need to separate the photocatalyst from the processing liquid, and conventionally, it is not necessary to install a time-consuming and cumbersome sedimentation separation processing device, a filter and a strainer, and there is an advantage that the device cost can be reduced. The device of the present invention is used for purification of liquids such as ultrapure water used in the production of semiconductors, liquid crystals, pharmaceuticals, etc.
In addition to the above applications that can be used for purification of liquids such as pure water and ultrapure water used in nuclear power plants, etc., the device of the present invention is also capable of decomposing and removing chlorine organic compounds such as trihalomethane and its precursors, Treatment of contaminated water such as trichlene in groundwater and industrial water, reduction of COD in water and wastewater and wastewater, sterilization of drinking water and reduction of harmful substances, removal of pyrogen from pharmaceutical water, purification of pool and bath water, various types of water It can also be used for decomposing and removing toxic substances and hardly decomposable substances, TOC analyzer, sterilizing water-soluble cutting oil, and sterilizing liquids with low light transmittance such as milk and isomerized sugar.
【図１】本考案の処理容器内に設けた紫外線ランプの透
過筒を中心として、ネット状の光触媒を重ねて充填した
光化学反応処理装置の断面図である。FIG. 1 is a cross-sectional view of a photochemical reaction processing apparatus in which a net-shaped photocatalyst is filled and stacked around a transmission tube of an ultraviolet lamp provided in a processing container of the present invention.
【図２】本考案の処理容器の内側面や構成部品の側面等
の液体の接触個所に、光触媒を膜状または薄板状にして
貼り付けた光化学反応処理装置の断面図である。FIG. 2 is a cross-sectional view of a photochemical reaction processing apparatus in which a photocatalyst is attached in a film-like or thin-plate form to a liquid contact point such as an inner surface of a processing container or a side surface of a component according to the present invention.
【図３】本考案の処理容器の内側面や構成部品の側面等
の液体の接触個所に、光触媒をコーティングした光化学
反応処理装置の断面図である。FIG. 3 is a cross-sectional view of a photochemical reaction processing apparatus in which a contact portion of a liquid such as an inner surface of a processing container or a side surface of a component of the present invention is coated with a photocatalyst;
【図４】本考案の処理容器と紫外線ランプの透過筒を石
英ガラス製にし、処理容器の内側または外側あるいは両
側より紫外線照射を行い、また処理容器および紫外線ラ
ンプの透過筒の液体が接触する個所に、光触媒をコーテ
ィングした光化学反応処理装置の断面図である。FIG. 4 is a view showing the processing container of the present invention and the transmission tube of the ultraviolet lamp made of quartz glass, irradiating ultraviolet rays from inside or outside or both sides of the processing container, and a place where the liquid of the processing container and the transmission tube of the ultraviolet lamp come into contact. FIG. 3 is a cross-sectional view of a photochemical reaction processing apparatus coated with a photocatalyst.
【図５】本考案の処理容器内に、粒子状やビーズ状の担
体にコーティングした光触媒を充填した光化学反応処理
装置の断面図である。FIG. 5 is a cross-sectional view of a photochemical reaction processing apparatus in which a processing catalyst of the present invention is filled with a photocatalyst coated on a particulate or beaded carrier.
１ 処理容器 ２ 紫外線ランプ ３ 透過筒 ４ 光触媒 ５ 整流板 DESCRIPTION OF SYMBOLS 1 Processing container 2 Ultraviolet lamp 3 Transmission cylinder 4 Photocatalyst 5 Rectifier plate
フロントページの続き (56)参考文献 特開 昭63−97234（ＪＰ，Ａ) 特開 昭64−90035（ＪＰ，Ａ) 特開 平３−157125（ＪＰ，Ａ) 特開 平２−251241（ＪＰ，Ａ) 特開 平２−107339（ＪＰ，Ａ) 特開 平３−228639（ＪＰ，Ａ) 特開 平１−262944（ＪＰ，Ａ) 特開 平３−106420（ＪＰ，Ａ) 特開 昭60−118236（ＪＰ，Ａ) 特開 平１−169866（ＪＰ，Ａ) 実開 平５−26187（ＪＰ，Ｕ) 特公 平２−9850（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.6，ＤＢ名) C02F 1/72 101 B01J 35/02 C02F 1/32Continuation of the front page (56) References JP-A-63-97234 (JP, A) JP-A-64-90035 (JP, A) JP-A-3-157125 (JP, A) JP-A-2-251241 (JP) JP-A-2-107339 (JP, A) JP-A-3-228639 (JP, A) JP-A-1-262944 (JP, A) JP-A-3-106420 (JP, A) JP 60-118236 (JP, A) JP-A-1-169866 (JP, A) JP-A-5-26187 (JP, U) JP-B-2-9850 (JP, B2) (58) Fields investigated (Int. Cl. 6 , DB name) C02F 1/72 101 B01J 35/02 C02F 1/32
Claims (5)
体に含まれている有機物の酸化分解、細菌の殺菌、有害
物質の分解等の光化学反応処理を行うについて、アナタ
ース型チタンの光触媒またはアナタース型チタンに白金
等の金属を担持させた光触媒を、担体にコーティングす
ることなく、ネット状やラシヒリング状等の接触面積が
大きく、かつ液体の通過性のよい形状にして処理容器の
内部に充填するとともに、さらに、アナタース型チタン
の光触媒またはアナタース型チタンに白金等の金属を担
持させた光触媒を、別途に、膜状、薄板状にし、これを
処理容器の内面や構成部品の側面等の液体の接触個所に
貼り付けるか、あるいは、アナタース型チタンの光触媒
またはアナタース型チタンに白金等の金属を担持させた
光触媒を、別途に、処理容器の内面や構成部品の側面等
の液体の接触個所にコーティングした液体の光化学反応
処理装置。1. The liquid is irradiated with light such as ultraviolet rays or sunlight.
Regarding photochemical reaction treatment such as oxidative decomposition of organic substances contained in the body , sterilization of bacteria, decomposition of harmful substances, etc., an anatase type titanium photocatalyst or a photocatalyst carrying a metal such as platinum on anatase type titanium, a carrier Coating on
Rukoto without with the contact area, such as a net-like or Raschig ring shape is large and filled into the interior of the processing container in a well shape of passage of the liquid, further anatase titanium
Metal such as platinum on a photocatalyst or anatase-type titanium
Separate the photocatalyst into a film or a thin plate, and affix it to the liquid contact point on the inner surface of the processing container or the side of the component, or use an anatase-type titanium photocatalyst.
Or a metal such as platinum supported on anatase type titanium
Separate the photocatalyst from the inside of the processing vessel or the side of the component
Photochemical reaction treatment equipment for liquid coated at the contact point of liquid.
ース型チタンに白金等の金属を担持させた光触媒を、金
属製または非金属製のネット状やラシヒリング状等の接
触面積が大きく、かつ液体の通過性のよい形状にした物
体に石英ガラスや硬質ガラスを被覆した担体に、コーテ
ィングして処理容器の内部に充填する請求項１記載の液
体の光化学反応処理装置。2. An anatase-type titanium photocatalyst or a photocatalyst in which a metal such as platinum is supported on anatase-type titanium is provided with a metal or nonmetal net-like or Raschig-ring-like contact area and a liquid passage property. 2. The liquid photochemical reaction processing apparatus according to claim 1, wherein the carrier is formed by coating a carrier obtained by coating a quartz glass or hard glass on an object having a good shape and filling the inside of the processing container.
ース型チタンに白金等の金属を担持させた光触媒を、処
理容器の内面や構成部品の側面等の液体の接触個所に石
英ガラスや硬質ガラスを被覆したものに、コーティング
した請求項１または請求項２記載の液体の光化学反応処
理装置。3. An anatase-type titanium photocatalyst or a photocatalyst in which a metal such as platinum is supported on anatase-type titanium, and quartz glass or hard glass is coated on a liquid contact point such as an inner surface of a processing container or a side surface of a component. 3. The liquid photochemical reaction treatment apparatus according to claim 1, wherein the liquid photochemical reaction treatment apparatus is coated.
ス型チタン製にし、その他の処理容器部分をチタン製と
する請求項１、請求項２または請求項３記載の液体の光
化学反応処理装置。4. A photochemical reaction processing apparatus for a liquid according to claim 1, wherein only the liquid contact portion of the processing container is made of anatase type titanium, and the other processing container portions are made of titanium.
質製とし、この処理容器の内側または外側あるいは両側
より光照射を行い、また処理容器および光源の保護管の
液体が接触する個所に、アナタース型チタンまたはアナ
タース型チタンに白金等の金属を担持させた光触媒をコ
ーティングした請求項１、請求項２、請求項３または請
求項４記載の液体の光化学反応処理装置。5. A protective tube for a processing vessel and a light source is made of a light-transmitting substance, light is irradiated from inside or outside or both sides of the processing vessel.
The point where the liquid is in contact, co photocatalyst obtained by supporting a metal such as platinum anatase titanium or anatase type titanium
Claim 1 was computing, claim 2, photochemical reaction device of a liquid according to claim 3 or claim 4, wherein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991095888U JP2578749Y2 (en) | 1991-10-28 | 1991-10-28 | Liquid photochemical reaction processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991095888U JP2578749Y2 (en) | 1991-10-28 | 1991-10-28 | Liquid photochemical reaction processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH063494U JPH063494U (en) | 1994-01-18 |
| JP2578749Y2 true JP2578749Y2 (en) | 1998-08-13 |
Family
ID=14149855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1991095888U Expired - Lifetime JP2578749Y2 (en) | 1991-10-28 | 1991-10-28 | Liquid photochemical reaction processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2578749Y2 (en) |
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| JPH0929065A (en) * | 1995-07-19 | 1997-02-04 | Nhk Spring Co Ltd | Deodorizing apparatus |
| WO1997035466A1 (en) * | 1996-03-26 | 1997-10-02 | Mitsubishi Chemical Corporation | Sterilizer for circulation nutricultivating apparatus, nutrient solution sterilizing method using the same, and circulation nutricultivating apparatus |
| JP2006181394A (en) * | 2003-04-18 | 2006-07-13 | Raizaa Kogyo Kk | Photocatalytic module and its manufacturing method, and treatment apparatus for water to be treated using the same |
| WO2004096441A1 (en) * | 2003-04-18 | 2004-11-11 | Lizer Industry Co., Ltd. | Photocatalyst module, method of manufacturing the same, and cleaning treatment apparatus for water to be treated |
| JP4692987B2 (en) * | 2005-02-28 | 2011-06-01 | 財団法人電力中央研究所 | Antiseptic equipment |
| WO2009072220A1 (en) * | 2007-12-06 | 2009-06-11 | Masami Oouti | Water purifying device |
| JPWO2016021465A1 (en) * | 2014-08-04 | 2017-04-27 | 国立大学法人信州大学 | Fluid distributor and photochemical reactor |
| JP6906259B1 (en) * | 2020-08-06 | 2021-07-21 | Ｆｋｋ株式会社 | Sterilizer |
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| JPS60118236A (en) * | 1983-11-30 | 1985-06-25 | Giken Kogyo Kk | Molded photo-oxidation catalyst body |
| JPS6397234A (en) * | 1986-10-14 | 1988-04-27 | Nippon Sheet Glass Co Ltd | Fixation photocatalyst |
| US4892712A (en) * | 1987-09-04 | 1990-01-09 | Nutech Energy Systems Inc. | Fluid purification |
| JPH01169866A (en) * | 1987-12-25 | 1989-07-05 | Hitachi Ltd | Discharge lamp |
| DE3811119C1 (en) * | 1988-03-31 | 1989-10-12 | Merckle Gmbh, 7902 Blaubeuren, De | |
| JPH01262944A (en) * | 1988-04-11 | 1989-10-19 | Nippon Shokubai Kagaku Kogyo Co Ltd | Deodorization catalyst |
| JP2691751B2 (en) * | 1988-10-14 | 1997-12-17 | 株式会社日立製作所 | Catalytic structure and method and apparatus for producing the same |
| JP2669039B2 (en) * | 1989-03-22 | 1997-10-27 | 松下電器産業株式会社 | Photocatalytic device manufacturing method |
| JPH03106420A (en) * | 1989-09-20 | 1991-05-07 | Matsushita Electric Ind Co Ltd | Deodorizing method for photo-catalyst |
| JPH03157125A (en) * | 1989-11-16 | 1991-07-05 | Matsushita Electric Ind Co Ltd | Deodorizing method with photocatalyst |
| JPH03228639A (en) * | 1990-02-05 | 1991-10-09 | Nippon Zeon Co Ltd | Agent for removing horticultural crop growth-accelerating substance and method for retaining freshness of horticultural crop |
| JP2567273Y2 (en) * | 1991-08-08 | 1998-04-02 | 株式会社日本フォトサイエンス | UV irradiation device for photochemical reaction treatment |
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| Publication number | Publication date |
|---|---|
| JPH063494U (en) | 1994-01-18 |
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