JPH05258264A - Production of thin film magnetic head - Google Patents

Abstract

PURPOSE:To improve efficiency by arranging two or more thin film magnetic heads and polishing these heads at one time with a thin diamond polishing film. CONSTITUTION:The slider 1 has such a structure that two rails are formed on both sides in the air-flowing direction on the medium-facing surface 11. The medium-facing surfaces of the rails make air bearing planes 111. The opposite side 12 to the surface 11 of the slider 1 is head-stuck to a gimbals assay. When a magnetic disk stops, the surface 111 is pressed to the disk surface by pressure of spring in the head holding device, and during rotating the disk, lift generates on the air bearing surface 111 and the slider floats in balance with the spring pressure. Slopes 14 are formed by chamfering the edges of the rails 16 so that head crash or damages of the medium can be prevented on starting. The slider 1 is adhered to a tool 94 and brought into contact with a polishing film 92 and relatively moved against the film 92 to be polished. The polishing film 92 is supported by an elastic sheet 91 and has preferably 0.8-1.2X10<5>mum stiffness ET, <=10mum film thickness and 0.1-0.5mum average particle size of diamond.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a thin film magnetic head, and more particularly, to a diamond polishing in which an abrasive layer containing fine diamond particles as abrasive grains is supported by a flexible film as a support. The present invention relates to a method of manufacturing a thin film magnetic head in which a slider of a thin film magnetic head is polished with a film.

[0002]

2. Description of the Related Art As the information recording capacity and the speed of access increase, the demand for a thin film magnetic head having a higher magnetic permeability than a ferrite head and maintaining a high electromagnetic conversion rate even at a high transfer rate is increasing. ing.

In the thin film magnetic head, various ceramic substrate materials are required for the slider, and SiC, Zr
Materials such as O ₂ , Al ₂ O ₃ , and Al ₂ O ₃ —TiC are used as the slider.

The slider of the thin-film magnetic head has a surface of the air bearing surface, which is one of the medium facing surfaces, that is polished and stable in order to obtain stable flying characteristics and good running durability. It is necessary to chamfer the edges and side edges of the rail. In polishing the air bearing surface of the slider, for example, JP-A-60-185272, JP-A-63-70918, JP-A-2-19
As disclosed in Japanese Patent Application Laid-Open No. 9614, Japanese Patent Application Laid-Open No. 2-212057, Japanese Patent Application Laid-Open No. 2-301014, and the like,
A polishing tape or a polishing film is used.

In the polishing of various ceramic materials, it is necessary to process them with a diamond polishing film using diamond particles in order to improve the polishing processability. However, although the above publication does not disclose processing with a diamond polishing film, the thin film magnetic head has been conventionally polished with a diamond polishing film. In particular, as disclosed in JP-A-2-301014, it is desirable from the standpoint of work efficiency that the above-mentioned polishing is performed by arranging a plurality of thin film magnetic heads at the same time.

[0006]

However, when a plurality of thin film magnetic heads are polished using a conventional polishing tape or polishing film, the distance between adjacent edges of adjacent thin film magnetic heads to be polished is set. Must be larger than size. Therefore, the length of the arrayed thin film magnetic heads becomes considerably long, so that the number of thin film magnetic heads that can be simultaneously polished is limited, and further improvement in efficiency has been desired.

Further, when the slider was polished by the above conventional diamond polishing film, even if the slider was polished under the same conditions, a small chamfering process was difficult, the chamfered dimension and the angle were varied, and further, , It was found that a corner may be formed at the transition between the straight line portion and the chamfered portion. As described above, if the chamfering process cannot be made small, it cannot be used with a small slider, and if the chamfered dimension or chamfered angle varies, for example, in a floating magnetic head, the predetermined durability cannot be guaranteed. It becomes impossible to levitate with a stable relative velocity and a levitating amount, and if the polishing surface has an angle as described above, the medium is damaged and the levitating property or running property is adversely affected.

Therefore, according to the present invention, it is possible to perform a very small chamfering process with high accuracy, to continuously and smoothly chamfer adjacent faces, and to make the chamfering amount minute. The main object of the present invention is to provide a method of manufacturing a thin film magnetic head capable of obtaining a head exhibiting a stable flying property.

[0009]

Means for Solving the Problems The inventors of the present invention have diligently studied the conventional problems, and found that in the conventional diamond polishing film, the polishing film is too stiff and the adhesion between the polishing film and the object to be polished is large. It was found that the property deteriorates and it becomes difficult to polish the adjacent edges.

The present inventors have further studied the diamond polishing film in order to solve the adhesion between the diamond polishing film and the object to be polished, and have found that the thickness of the diamond polishing film is a major factor.

The present invention is based on the above findings and is in the following (1) to (10). (1) In a method of manufacturing a thin film magnetic head in which a slider of a thin film magnetic head is polished by a diamond polishing film using diamond fine particles, two or more thin film magnetic heads are arranged and the thickness of the diamond polishing film is 10 μm. The method for manufacturing a thin film magnetic head is characterized in that the two or more thin film magnetic heads are simultaneously polished with this diamond polishing film.

(2) The method for producing a thin film magnetic head according to the above (1), wherein the average particle size of the diamond fine particles is 1.0 μm or less.

(3) The method of manufacturing a thin film magnetic head according to the above (1) or (2), wherein the slider Vickers hardness HV (500 g) of the thin film magnetic head is set to 1100 or more.

(4) The method for manufacturing a thin film magnetic head according to the above (1) or (2), wherein the Vickers hardness HV (500 g) of the slider of the thin film magnetic head is set to 1500 or more.

(5) The method for manufacturing a thin film magnetic head according to the above (1) or (2), wherein the slider of the thin film magnetic head has a Vickers hardness in the range of 1800 to 3000.

(6) While the diamond polishing film is supported by an elastic body of a considerable thickness, the diamond polishing film is pressed against the polishing surface of the thin-film magnetic head to perform polishing, and the rubber hardness of the elastic body is set. Is set to 55 ° or less, the method for manufacturing a thin film magnetic head according to any one of the above (1) to (5).

(7) The method of claim (6), wherein the rubber hardness of the elastic body is in the range of 20 ° to 40 °.

(8) The thin film magnetic according to any one of (1) to (7) above, wherein the polishing film has a stiffness of 0.8 to 3.0 × 10 ⁵ (μm) ³ kg / mm ^2. Head billing method.

(9) A plurality of thin film magnetic heads are fixedly arranged on a fixing jig, and the plurality of thin film magnetic heads fixedly arranged on the fixing jig are pressed relative to the diamond polishing film. The method for manufacturing a thin film magnetic head according to any one of the above (1) to (8), wherein at least one of the fixing jig and the diamond polishing film is slidably run to simultaneously polish the thin film magnetic head.

(10) After forming a plurality of thin film magnetic conversion elements on a substrate, the thin film magnetic conversion elements are cut, and the cut end face is used as a medium facing surface and is polished by the diamond polishing film (1) to (). 9) A method for manufacturing a thin film magnetic head according to any one of 9).

[0021]

According to the present invention, when a plurality of thin film magnetic heads are arranged and polished, the interval between adjacent edges can be reduced by setting the total thickness of the diamond polishing film. When the thickness is determined, a large number of thin film magnetic heads can be arranged side by side to perform polishing, and efficient polishing can be performed. Furthermore, by setting the diamond grain size of the polishing film, it is possible to carry out extremely small chamfering with high precision, and since there are no variations in chamfering dimensions and angles, durability is improved and the magnetic head is stable at a relative speed. You will be able to surface.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the accompanying drawings. First, a thin film magnetic head obtained by the present invention will be described. FIG. 1 is a perspective view showing an example of a thin film magnetic head.
The medium facing surface 11 has a planar air bearing surface 111. In both figures, a indicates the air inflow direction when combined with a magnetic disk. In FIG. 1, two rails 16 and 16 are formed at both ends of the medium facing surface 11 in the air inflow direction a via a groove 19 in the central portion, and the medium facing surface on the rails 16 and 16 is formed. Form the air bearing surface 111. The number of rails 16, 16 may be three or more.

When used as a magnetic disk device,
A surface 12 opposite to the medium facing surface 11 of the slider 1 is head-stacked on a gimbal assay, and the so-called contact. start. It is driven by a stop (hereinafter referred to as CSS) method. When the magnetic disk is at rest, the air bearing surface 111 is pressed against the surface of the magnetic disk by the spring pressure of the head supporting device, but when the magnetic disk rotates, a lift dynamic pressure is applied to the air bearing surface 111 of the slider 1. Occurs, and the levitation amount operates in balance with this dynamic pressure and the spring pressure of the head support device. Note that so-called dynamic loading may be used instead of CSS.

As shown in FIG. 1, the rails 16, 16
The edge formed by the air bearing surface 111 and the side end surface 13 on the air inflow end side of the
It has a shape. Therefore, the CSS operation or the like can be easily started, and head crush, medium damage, etc. are less likely to occur. That is, if the angle formed by the inclined surface 14 and the air bearing surface 111 on the air inflow end side is a predetermined angle and the length thereof is a predetermined dimension, and the processing accuracy is increased, it becomes more stable. Start ascending or stop ascending at a relative speed.

The inclined surface 14 is formed by chamfering by polishing. At this time, since the inclination angle is small, problems are likely to occur in the accuracy of the surface dimension and the inclination angle,
These precisions are significantly higher according to the invention. In the illustrated example, the edge portion formed by the air bearing surface 111 and the side end surface 14 on the air outflow side of the rails 16, 16 and both side portions in the length direction of the sliders 16, 16 are inclined surfaces 17, 18. An example is shown.

The slider 1 has a Vickers hardness (JIS Z 2244 test load of 500 g) HV (5
00g) 1100 or more, particularly 1100 to 3000. In this case, the lower limit is preferably 1300 or more, more preferably 15
It is 00 or more, more preferably 1800 or more, and at this time, the effect of the present invention is further improved.

As such a ceramic material, A
l ₂ O ₃ —TiO ₂ [HV (500) 1150 or so],
MgO-NiO-ZrO ₂ (about 1200), ZrO
₂ (about 1200 to 1600), ZrO ₂ -Al ₂ O ₃
(About 1400 to 1600), Al ₂ O ₃ -Tic-
AlN (1700 to 2000), SiC (1800 to 2)
000 _{about), Al 2 O 3 -TiC (} 2000~230
0) is suitable. Further, these may contain Mg, Y, ZrO ₂ , TiO ₂ or the like as an additive.

Of these, the ceramics containing Al ₂ O ₃ —TiC as the main component are particularly preferable in the present invention in terms of workability.

FIG. 4 is a diagram showing a method of manufacturing the magnetic head shown in FIG. In the figure, 1 is a magnetic head slider, 91 is an elastic sheet, 92 is a polishing film, 93 is a working table, and 94 is a fixing jig. In this case, the slider may have any of the above structures. Also,
In this example, two thin film magnetic heads are set and fixed on the fixing jig 94, and these are simultaneously polished. As a matter of course, three or more thin film magnetic heads may be arranged.

As shown in FIG. 5, the polishing film 92 has an abrasive layer 921 formed on a flexible film 922 as a support. Abrasive layer 921
Can be prepared, for example, by using synthetic diamond abrasive grains as diamond fine particles, using a binder resin such as polyurethane resin, using a diluting solvent such as MEK / toluene / cyclohexanone mixed system, and drying. The above paste uses various coating machines,
It is evenly coated on the support to form a layer. As the flexible film 922 as the support, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyamide, polyimide or the like can be used.

The average particle size of the diamond particles must be 1 μm or less, as will be seen from the examples below, but is preferably 0.1 to 1.0 μm, more preferably 0.1 to 1.0 μm.
It is preferably 0.9 μm, most preferably 0.1 to 0.5 μm. The weight ratio of the diamond particles to the binder is about 1: 1/7 to 1. Also,
The thickness of the abrasive layer 921 is preferably 1 to 10 μm.

The magnetic head slider 1 is attached to a jig 94 by means such as adhesion, and the medium facing surface 11 side of the slider 1 of the thin film magnetic head is supported by an elastic sheet 91 while applying a load to the jig 94. Polished film 9
The slider 1 is brought into contact with the second surface and is moved relative to the polishing film 92 to polish. At this time,
As shown in, the stiffness ET, which is an index of the flexibility of the polishing film, whose Young's modulus is defined as E so that the diamond polishing film is pressed in a suitable state.
³ is 0.8 to 3.0 × 10 ⁵ (μm) ³ Kg / mm ² ,
Preferably 0.8 to 1.6 × 10 ⁵ (μm) ³ Kg / m
m ² , particularly preferably 0.8 to 1.2 × 10 ⁵ (μm)
It is desirable to set it to be ³ Kg / mm ² .
Since the flexible film as the support is formed of the above-mentioned materials, the rubber hardness thereof is within a predetermined range, and the stiffness of the diamond polishing film largely depends on its total thickness. Therefore, if the thickness of the polishing film is too thick or too thin, the adhesion will deteriorate and the polishing surface will lack uniformity. Therefore, in the present invention, the thickness of the film is set to 10 μm or less, and the stiffness of the diamond polishing film is set within the above range, so that the variation of the polishing surface is suppressed and stable durability running property is obtained. became.

As described above, the diamond polishing film is pushed in as shown in FIG. 4, but the elastic film 9 as a support for the diamond polishing film is used.
If the rubber hardness of 1 is too high, the adhesion between the diamond polishing film and the polishing surface will deteriorate, and the uniformity of the polishing surface will be impaired. At the same time, the chamfering accuracy deteriorates. Therefore, in the present invention, by setting the rubber hardness of the elastic sheet to 55 ° or less, preferably in the range of 20 ° to 40 °, it is possible to suppress the variation of the polishing surface and obtain stable durable running property. Became. The elastic sheet is JIS K62
00 rubber term can be mentioned.

The above relative movement may be achieved by moving either the slider 1 or the polishing film 92. Alternatively, the polishing film may be formed in a circular shape, and the polishing film may be rotated around the center of the circle and polished as a so-called buff. Also, a combination of a long polishing film and an elastic sheet, with the polishing film on the outside,
Alternatively, the loop may be formed into an endless tape shape, and the tape may be polished by running it. The load is in the range of 5 to 200 g per magnetic head. Further, the polishing time is generally about 10 to 300 seconds, though it depends on the hardness of the slider 1, the particle size of diamond particles, the magnitude of the load, and the like.

In this way, the air bearing surface 111
In addition to polishing, for example, JP-A-60-185272, JP-A-63-70918, JP-A-2-199614 and JP-A-2-199614.
No. 212057, No. 2-301014, etc., the tilt angle and the chamfering of the edge can be performed by inclining the slider 1 and the polishing film or arranging the polishing film in a predetermined shape, if necessary. Processing etc. are performed.

As described above, in summary, according to the method of the present invention, two or more thin film magnetic heads are arranged, and a polishing film having a thickness of 10 μm or less is brought into contact with the medium facing surface side of the magnetic head slider to make the slider. Is relatively moved with respect to the polishing sheet to polish the medium facing surface of two or more thin film magnetic heads.

Next, in order to confirm the effect of the method according to the present invention, in particular, the polishing method, the grain size of diamond as an abrasive was set as shown in Table 3. The paste was mixed as shown in Table 1 with the mixture ratio of the paste, and the thickness was set as shown in Table 3. Using a diamond polishing film arranged on a predetermined elastic sheet, the load and the polishing time were constant. Under the conditions described above, two sliders (magnetic heads) shown in FIG. 1 are polished in total, 20 in total, and the accuracy of the chamfered inclined surfaces of the adjacent rails 16 of the two thin film magnetic heads facing each other is determined according to the criteria of Table 2. Measured or investigated. The results are shown in Table 3.
Shown in. The object to be polished was Al ₂ O ₃ —TiO _2.
A thin-film magnetic head having a slider manufactured by No. ₂ and having Hv (500 g) of 2000 was used.

[0038]

[Table 1]

[0039]

[Table 2]

[0040]

[Table 3]

As is clear from these tables, when neither of the conditions for the thickness of the diamond polishing film of 15 μm or less and the average particle size of diamond fine particles of 1.0 μm or less is satisfied, a variation of more than 5 μm occurs,
It can be seen that a large angle θ is formed between the chamfered surface and the horizontal or vertical surface, which is not practical. On the other hand, thickness 15
When the particle size is less than or equal to μm and the average particle size is less than or equal to 1.0 μm, all of these are in a satisfactory state. Especially, the thickness is 10
the average particle size is 0.1 μm or more,
It can be seen that when the thickness is 0.9 μm or less, particularly 0.5 μm or less, these are even more preferable.

Further, the diamond fine particles used had an average particle size of 1.0 μm, and as shown in Table 4, the Vickers hardness HV (500 g) of the slider and the thickness of the diamond polishing film were variously changed to carry out the experiment. The results are shown in Table 4. As shown in Table 4,
It can be seen that when the Vickers hardness HV (500 g) is less than 1100, the polished surface is greatly scratched and cannot be put to practical use. On the other hand, Vickers hardness HV (500
g) When it is 1100 or more, only small scratches are present on the polished surface of the slider, which is satisfactory.

In particular, when the Vickers hardness HV (500 g) was 1500 or more, both scratches and accuracy were good, and when it was 1800 or more, extremely good results were obtained.

[0044]

[Table 4]

When the relationship with the film thickness is summarized, the total thickness is 15 μm or less, and more preferably Vickers hardness (50
0g) 1100 or more, film thickness 10μ or less, Vickers hardness (Hv500g) 1500 or more, film thickness 10μ or less,
This tendency shows that the accuracy is improved as the Vickers hardness HV (500 g) is larger and the total thickness is smaller, the Vickers hardness (Hv500 g
) A film thickness of 1800 or more and a film thickness of 7 μm or less is particularly preferable.

Further, the diamond fine particles used have an average particle size of 1.0 μm, and the diamond polishing film has a thickness of 1
0 μm, and slider Vickers hardness HV (50
0g) was set to 1800, and the rubber hardness of the elastic sheet as the support of the diamond polishing film was variously changed and the experiment was conducted. The results are shown in Table 5.

[0047]

[Table 5]

As shown in Table 5, the rubber hardness of the support of the diamond polishing film is 20 ° to 55 °.
If it is not within the range, the scratches will be large and 2μ
It can be seen that there is a variation in accuracy greater than m, which is not practical. In contrast, the rubber hardness is 20 ° to 55 °
In the range of, all of these are in a satisfactory state.

In particular, it is understood that a more preferable state is obtained when the rubber hardness is in the range of 20 ° to 40 °.

The present invention can also be applied to a thin film magnetic head arranged in a bar state.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of a floating magnetic head manufactured by a manufacturing method of the present invention.

FIG. 2 is a front view of the magnetic head of FIG.

3 is a side view of the magnetic head of FIG. 1. FIG.

FIG. 4 is a front view for explaining a method of polishing an air bearing surface of a slider of two floating magnetic heads.

FIG. 5 is a cross-sectional view showing an example of a polishing film used in the method of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 slider 11 medium facing surface 111 air bearing surface 14, 17, 18 inclined surface 92 polishing film 921 abrasive layer 922 flexible film

Claims (10)

[Claims] 1. A method of manufacturing a thin-film magnetic head in which a slider of a thin-film magnetic head is polished by a diamond-polishing film using fine diamond particles, wherein two or more thin-film magnetic heads are arranged and the thickness of the diamond-polishing film is large. To 10 μm or less, and the diamond polishing film is used to simultaneously polish the two or more thin film magnetic heads. 2. The method of manufacturing a thin-film magnetic head according to claim 1, wherein the average particle size of the diamond fine particles is 1.0 μm or less. 3. The method of manufacturing a thin film magnetic head according to claim 1, wherein the slider has a Vickers hardness HV (500 g) of 1100 or more. 4. The method of manufacturing a thin film magnetic head according to claim 1, wherein the slider of the thin film magnetic head has a Vickers hardness HV (500 g) of 1500 or more. 5. The method of manufacturing a thin film magnetic head according to claim 1, wherein the slider of the thin film magnetic head has a Vickers hardness in a range of 1800 to 3000. 6. A diamond polishing film is supported by an elastic body of a considerable thickness, and is pressed against the polishing surface of the thin-film magnetic head to perform polishing, and the rubber hardness of the elastic body is adjusted. 6. The method of manufacturing a thin film magnetic head according to claim 1, wherein the setting is 55 [deg.] Or less. 7. The rubber hardness of the elastic body is from 20 ° to 40.
A method of claiming a thin film magnetic head according to claim 6, wherein the range is in the range of °. 8. The stiffness of the polishing film,
8. The method for claiming the thin film magnetic head according to claim 1, wherein the range is 0.8 to 3.0 × 10 ⁵ (μm) ³ kg / mm ² . 9. A plurality of thin-film magnetic heads are fixedly arranged on a fixing jig, and the plurality of thin-film magnetic heads fixedly arranged on the fixing jig are pressed relative to the diamond polishing film. 9. The method of manufacturing a thin film magnetic head according to claim 1, wherein at least one of the fixing jig and the diamond polishing film is slidably run to simultaneously polish the thin film magnetic head. 10. The method according to claim 1, wherein after forming a plurality of thin film magnetic conversion elements on a substrate, the thin film magnetic conversion elements are cut, and the cut end face is used as a medium facing surface, and the diamond polishing film is used for polishing. Method for manufacturing thin film magnetic head.