JPH05225543A - Production of thin-film magnetic head - Google Patents

Abstract

PURPOSE:To suppress the flawing of a polished surface and to enhance the accuracy of working, such as chamfering, by restricting the hardness range of a thin-film magnetic head slider and the range of the average grain sizes of the diamond particulates of a diamond polishing film. CONSTITUTION:The Vickers hardness HV (500g) of the slider 7 of the thin-film magnetic head is set at >=1100. The average grain size of the diamond particulates to be used for the diamond polishing film 92 is set at <=1.0mum. The slider 7 is mounted to a jig 94 and while a weight is applied to the jig 94, the medium-facing surface side of the slider 7 is brought into contact with the surface of the polishing film 92 supported by an elastic film 91 and the slider 7 is moved relative to the polishing film 92, by which the slider is polished. As a result, the flawing of the polished surface is minimized and the fluctuations in the chamfering size and angle are eliminated and, therefore, the thin-film magnetic head exhibiting stable floatability is obtd.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a thin film magnetic head, and more particularly to a method of manufacturing a thin film magnetic head in which a slider of a thin film magnetic head is polished by a diamond polishing film using fine diamond particles. Is.

[0002]

2. Description of the Related Art As the information recording capacity and the speed of access increase, the demand for a thin film magnetic head having a higher magnetic permeability than a ferrite head and maintaining a high electromagnetic conversion rate even at a high transfer rate is increasing. ing.

In the thin film magnetic head, various ceramic substrate materials are required for the slider, and SiC, ZrO
Materials such as ₂ , Al ₂ O ₃ , and Al ₂ O ₃ —TiC are used as the slider.

In order to obtain a stable flying property and a good durability running property, the slider of the thin film magnetic head polishes the surface of the air bearing surface of the medium facing surface, and further, the edge of the air bearing surface and the ridge angle of the periphery thereof. It is necessary to chamfer the part. When polishing the air bearing surface of the slider, for example, JP-A-60-185272 and JP-A-63-70918 are used.
Japanese Patent Laid-Open No. 2-199614, Japanese Patent Laid-Open No. 2-2
As disclosed in JP-A-12057, JP-A-2-301014, etc., a polishing tape or a polishing film is used.

In the polishing of various ceramic materials, it is necessary to process them with a diamond polishing film using diamond particles in order to improve the polishing processability. However, the above publication does not disclose processing with a diamond polishing film.

[0006]

However, when various sliders were polished with a diamond polishing film, some of them had scratches on the polishing surface, or even when polishing was performed under the same conditions, the above chamfering was performed. It has been found that the dimensions and angles may vary. As described above, scratches on the polishing surface not only damage the medium, but also adversely affect the flying property and the running property. Further, if the chamfered dimension or chamfered angle varies, for example, in a floating magnetic head, Durability cannot be guaranteed, and it becomes impossible to levitate at a stable relative speed and flying height.

Therefore, the present invention provides a thin-film magnetic head capable of suppressing scratches on the polished surface as much as possible, and capable of performing the above-mentioned chamfering and the like with high accuracy, and obtaining a head exhibiting stable floating properties. Its main purpose is to provide a manufacturing method.

[0008]

DISCLOSURE OF THE INVENTION The present inventors have examined the occurrence of scratches on the polished surface and the variation in processing accuracy. As a result, the above-mentioned occurrence of scratches and the chamfered dimension or corner variation are different from the slider hardness. It was found that it can be prevented critically by controlling the correlation of the diameter of diamond fine particles.

The present invention is based on the above findings and is in the following (1) to (6). (1) In a method of manufacturing a thin film magnetic head in which a slider of a thin film magnetic head is polished with a diamond polishing film using fine diamond particles, a Vickers hardness HV (500 g) 110 of the slider of the magnetic head is used.
A method of manufacturing a thin film magnetic head, wherein the average particle diameter of the diamond fine particles is set to 1.0 μm or less while being set to 0 or more.

(2) The method for producing a thin film magnetic head according to the above (1), wherein the diamond fine particles have an average particle size of 0.1 to 1.0 μm.

(3) HV (500 g) of the slider
The method for manufacturing a thin film magnetic head according to (1) or (2) above, wherein

(4) HV (500 g) of the slider
The method for manufacturing a thin film magnetic head according to (3) above, wherein the value is 1500 or more.

(5) HV (500 g) of the slider
The manufacturing method of the thin film magnetic head according to (4) above, wherein

(6) After forming a plurality of thin film magnetic conversion elements on the slider material, the thin film magnetic conversion elements are cut, and the cut end face is used as the medium facing surface, and this is polished by the diamond polishing film. The method for manufacturing a thin film magnetic head according to any one of (5).

[0015]

According to the present invention, scratches on the polishing surface, for example, the air bearing surface of the slider can be suppressed as much as possible. Further, if the air bearing surface of the slider is polished under the same conditions, variations in chamfered dimensions and angles are eliminated, so that durability is improved and the magnetic head can fly at a stable relative speed.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the accompanying drawings. First, a thin film magnetic head obtained by the present invention will be described. 1 and 2
3A and 3B are perspective views each showing an example of a thin film magnetic head, and the slider 1 has a flat air bearing surface 111 on the medium facing surface 11. In both figures, a indicates the air inflow direction when combined with a magnetic disk. In FIG. 1, the two rails 16 are provided at both ends of the medium facing surface 11 in the air inflow direction a through the groove 19 in the central portion.
16 are formed, and the medium facing surface on the rails 16, 16 constitutes an air bearing surface 111. The number of rails 16, 16 may be three or more. Further, in FIG. 2, almost the entire air bearing surface 11 is the air bearing surface 11.
Make up one.

When used as a magnetic disk device,
A surface 12 opposite to the medium facing surface 11 of the slider 1 is head-stacked on a gimbal assay, and the so-called contact. start. It is driven by a top (hereinafter referred to as CSS) method. When the magnetic disk is at rest, the air bearing surface 111 is pressed against the surface of the magnetic disk by the spring pressure of the head supporting device, but when the magnetic disk rotates, a lift dynamic pressure is applied to the air bearing surface 111 of the slider 1. Occurs, and the levitation amount operates in balance with this dynamic pressure and the spring pressure of the head support device. Note that so-called dynamic loading may be used instead of CSS.

As shown in FIGS. 1 and 2, the ridge portion formed by the air bearing surface 111 and the side end surface 13 on the air inflow end side has a chamfered inclined surface 14 shape. Therefore, the CSS operation or the like can be easily started, and head crush, medium damage, etc. are less likely to occur. That is, if the angle formed by the inclined surface 14 and the air bearing surface 111 on the air inflow end side is a predetermined angle and the length thereof is a predetermined dimension, and the processing accuracy is increased, it becomes more stable. Start ascending or stop ascending at a relative speed.

The inclined surface 14 is formed by chamfering by polishing. At this time, since the inclination angle is small, problems are likely to occur in the accuracy of the surface dimension and the inclination angle,
These precisions are significantly higher according to the invention. In addition, in the example shown in FIG. 1, both sides in the length direction of the sliders 16 and 16 are the inclined surfaces 17 and 18, but in a recent slider, both side walls are Many of them can be seen at right angles to the air bearing surface 111.

Further, in the present invention, it is preferable that at least the air bearing surface 111 is polished and chamfered. However, if necessary, the inclined surface, the outflow end surface and the like may be chamfered by polishing.

On the other hand, in the example of FIG. 2, the inclined surface chamfered by polishing 14 is provided on the entire circumference of the air bearing surface 111, and the effect of preventing head crash and medium damage is obtained in all directions. ..

Incidentally, as shown in FIGS. 1 and 2, when the residual grooves are provided along the length direction at both widthwise end edges where the processing strain is likely to remain, the processing strain portion is removed.

The slider 1 has a Vickers hardness (JIS Z 2244 test load of 500 g) HV (5
00g) 1100 or more, particularly 1100 to 3000. In this case, the lower limit is preferably 1300 or more, more preferably 15
It is 00 or more, more preferably 1800 or more, and at this time, the effect of the present invention is further improved.

As such a ceramic material, A
l ₂ O ₃ —TiO ₂ [HV (500) 1150 or so],
MgO-NiO-ZrO ₂ (about 1200), ZrO ₂
(About 1200 to 1600), ZrO ₂ -Al ₂ O ₃
(About 1400 to 1600), Al ₂ O ₃ -Tic-A
1N (1700 to 2000), SiC (1800 to 20)
00 _{about), Al 2 O 3 -TiC (} 2000~2300
Degree) and the like are preferable. Further, these may contain Mg, Y, ZrO ₂ , TiO ₂ or the like as an additive.

Of these, the ceramics containing Al ₂ O ₃ —TiC as the main component are particularly preferable in the present invention in terms of workability.

FIG. 3 is a diagram showing a method of manufacturing the magnetic head shown in FIGS. In the figure, 1 is a magnetic head slider, 91 is an elastic sheet, 92 is a polishing film,
Reference numeral 93 is a processing table, and 94 is a jig. In this case, the slider may have any of the above structures.

As shown in FIG. 4, the polishing film 92 has an abrasive layer 921 formed on a flexible film 922. For the abrasive layer 921, for example, synthetic diamond abrasive grains are used as diamond fine particles, and a binder resin such as polyurethane-based resin is used.
It can be prepared by coating and drying using a diluent solvent such as a toluene / cyclohexanone mixed system. The above-mentioned paste is uniformly applied and layered on a support using various coating machines.

The average particle size of the diamond particles must be 1 μm or less, as will be seen from the examples below, but is preferably 0.1 to 1.0 μm, more preferably 0.1 to 1.0 μm.
It is preferably 0.9 μm, most preferably 0.1 to 0.5 μm. The weight ratio of the diamond particles to the binder is about 1: 1/7 to 1. Also,
The thickness of the abrasive layer 921 is preferably 1 to 10 μm.

The magnetic head slider 1 is attached to a jig 94 by means such as adhesion, and the medium facing surface 11 side of the slider 1 of the thin film magnetic head is supported by an elastic film 91 while applying a load to the jig 94. The slider 1 is brought into contact with the surface of the polishing film 92 and the slider 1 is moved to the polishing film 92.
With respect to, it is moved and polished. Either the slider 1 or the polishing film 92 may be used for the movement. Alternatively, the polishing film may be formed in a circular shape, and the polishing film may be rotated around the center of the circle and polished as a so-called buff. Also, a combination of a long polishing film and an elastic sheet, with the polishing film on the outside,
Alternatively, the loop may be formed into an endless tape shape, and the tape may be polished by running it. The load is in the range of 5 to 200 g per magnetic head. Further, the polishing time is generally about 10 to 300 seconds, though it depends on the hardness of the slider 2, the particle size of diamond particles, the magnitude of the load, and the like.

In this way, the air bearing surface 111
In addition to polishing, for example, JP-A-60-185272, JP-A-63-70918, JP-A-2-199614 and JP-A-2-199614.
No. 212057, No. 2-301014, etc., the slider 1 and the polishing film may be tilted or the polishing film may be arranged in a predetermined shape, if necessary, to adjust the tilt angle and the ridge angle portion. Chamfering is performed.

As described above, in summary, according to the method of the present invention, a magnetic head slider having a Vickers hardness of 1100 or more at HV (500 g) can be formed on a polishing film or sheet using diamond particles having an average particle size of 1.0 μm or less. The main purpose is to bring the medium facing surface side into contact and to move the slider relatively to the polishing sheet to polish the medium facing surface.

Next, in order to confirm the effect of the method according to the present invention, particularly the polishing method, as shown in Table 1, the Vickers hardness of the slider and the grain size of diamond as an abrasive were set. The paste is blended as shown in Table 1 and the paste is applied onto a flexible film to form a polishing layer. The polishing film is used, and the load and polishing time are constant, as shown in FIG. A total of 10 sliders (magnetic heads) were polished, and the dimensional accuracy of the chamfered inclined surface and the scratched state of the air bearing surface 111, that is, the medium facing surface were measured or examined based on Table 2. The results are shown in Tables 3 and 4.

[0033]

[Table 1]

[0034]

[Table 2]

[0035]

[Table 3]

[0036]

[Table 4]

As is apparent from these tables, the Vickers hardness HV (500 g) is 1100 or more and the average particle size is 1.0.
If any of the conditions below μm is not satisfied,
It can be seen that variations larger than 5 μm occur and medium to large scratches occur, which is not practical. On the other hand, HV
When (500) is 1100 or more and the average particle size is 1.0 μm or less, all of these are in a satisfactory state.

In particular, when the HV (500) is 3000 or less, 1300 or more, 1500 or more, 1800 or more, and the average particle size is 0.1 μm or less, 0.9 μm or less, 0.5 μm or less, It can be seen that these are even more preferable.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of a floating magnetic head manufactured by a manufacturing method of the present invention.

FIG. 2 is a perspective view showing another example of a floating magnetic head.

FIG. 3 is a front view for explaining a method of polishing an air bearing surface of a slider of a floating magnetic head.

FIG. 4 is a cross-sectional view showing an example of a polishing film used in the method of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 slider 11 medium facing surface 111 air bearing surface 14, 17, 18 inclined surface 92 polishing film 921 abrasive layer 922 flexible film

Claims (6)

[Claims] 1. A method of manufacturing a thin-film magnetic head in which a slider of a thin-film magnetic head is polished by a diamond polishing film using fine diamond particles, wherein the slider of the magnetic head has a Vickers hardness HV (500 g).
A method for manufacturing a thin film magnetic head, wherein the average particle diameter of the diamond fine particles is set to 1.0 μm or less while being set to 1100 or more. 2. A method of manufacturing a thin film magnetic head according to claim 1, wherein the diamond fine particles have an average particle diameter of 0.1 to 1.0 μm. 3. The HV (500 g) of the slider is 13
3. The method for manufacturing a thin film magnetic head according to claim 1, wherein the number is 00 or more. 4. The HV (500 g) of the slider is 15
The method of manufacturing a thin film magnetic head according to claim 3, wherein the number is 00 or more. 5. The HV (500 g) of the slider is 18
The method for manufacturing a thin-film magnetic head according to claim 4, wherein the thin-film magnetic head has a size of 00 to 3000. 6. The method according to claim 1, wherein after forming a plurality of thin film magnetic conversion elements on the slider material, the thin film magnetic conversion elements are cut, and the cut end surface is used as a medium facing surface and is polished by the diamond polishing film. A method for manufacturing a thin film magnetic head.