JPH0525702Y2 - - Google Patents

Info

Publication number
JPH0525702Y2
JPH0525702Y2 JP1988017820U JP1782088U JPH0525702Y2 JP H0525702 Y2 JPH0525702 Y2 JP H0525702Y2 JP 1988017820 U JP1988017820 U JP 1988017820U JP 1782088 U JP1782088 U JP 1782088U JP H0525702 Y2 JPH0525702 Y2 JP H0525702Y2
Authority
JP
Japan
Prior art keywords
gas
raw material
laminar flow
air
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988017820U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01120942U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988017820U priority Critical patent/JPH0525702Y2/ja
Publication of JPH01120942U publication Critical patent/JPH01120942U/ja
Application granted granted Critical
Publication of JPH0525702Y2 publication Critical patent/JPH0525702Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Furnace Details (AREA)
JP1988017820U 1988-02-12 1988-02-12 Expired - Lifetime JPH0525702Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988017820U JPH0525702Y2 (enExample) 1988-02-12 1988-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988017820U JPH0525702Y2 (enExample) 1988-02-12 1988-02-12

Publications (2)

Publication Number Publication Date
JPH01120942U JPH01120942U (enExample) 1989-08-16
JPH0525702Y2 true JPH0525702Y2 (enExample) 1993-06-29

Family

ID=31231937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988017820U Expired - Lifetime JPH0525702Y2 (enExample) 1988-02-12 1988-02-12

Country Status (1)

Country Link
JP (1) JPH0525702Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010228996A (ja) * 2009-03-27 2010-10-14 Osaka Gas Co Ltd 吸熱型ガス生成装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60112342U (ja) * 1983-12-28 1985-07-30 大阪瓦斯株式会社 雰囲気ガス発生装置
JPH029888Y2 (enExample) * 1985-01-21 1990-03-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010228996A (ja) * 2009-03-27 2010-10-14 Osaka Gas Co Ltd 吸熱型ガス生成装置

Also Published As

Publication number Publication date
JPH01120942U (enExample) 1989-08-16

Similar Documents

Publication Publication Date Title
GB1597192A (en) High-pressure high-temperature gaseous chemical apparatus and method
JP2000323464A (ja) 半導体製造装置用のガス供給装置及びガス供給方法
GB1250395A (enExample)
CN1135934A (zh) 化学反应器进料控制
JPH05180733A (ja) 超高精度分析装置へのガス供給方法及び装置
US4938256A (en) Apparatus for the production of particular concentrations of gaseous materials as well as for mixing various gaseous materials in a specified ratio
CN102128285B (zh) 一种气体比例配比阀、多元气体比例配比组合阀以及气体混配系统
JPH0525702Y2 (enExample)
CN207280839U (zh) 一种标准气配气仪
CN101868113A (zh) 气体喷射系统以及用于运行气体喷射系统的方法
JP2024521576A (ja) 圧力ベースの質量流量比制御のための方法及び装置
GB1122817A (en) Method and apparatus for mixing gases in proportion
CN110327830B (zh) C4f7n/co2/o2三元混合气体分压配气装置、配气方法
JP2005038239A (ja) 流量比率制御装置
JPS59130534A (ja) 少なくとも二つの一次流れから少なくとも二つの相よりなる流れを形成する方法および装置
CN220601235U (zh) 一种小型化宽幅高精度气体供给系统
EP0246266A1 (en) MANIFOLD VALVE.
JPS63195568A (ja) 圧力平衡器
CN115821228A (zh) 一种mocvd设备管路的实时平衡压差装置及其使用方法
US3538933A (en) Fluid mixing device
US5299932A (en) Fuel and air supply control apparatus for gas burners
CN1126293A (zh) 自动配气调节阀
DE102021111516A1 (de) Gaszufuhrvorrichtung, Prozessieranordnung, Steuervorrichtung, Speichermedium und Verfahren
SU1648490A1 (ru) Смеситель дыхательных газов
GB1380261A (en) Fluid flow control apparatus