JPH0525699Y2 - - Google Patents
Info
- Publication number
- JPH0525699Y2 JPH0525699Y2 JP7039987U JP7039987U JPH0525699Y2 JP H0525699 Y2 JPH0525699 Y2 JP H0525699Y2 JP 7039987 U JP7039987 U JP 7039987U JP 7039987 U JP7039987 U JP 7039987U JP H0525699 Y2 JPH0525699 Y2 JP H0525699Y2
- Authority
- JP
- Japan
- Prior art keywords
- ultrafine powder
- filter
- valve
- connecting pipe
- collection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP7039987U JPH0525699Y2 (en:Method) | 1987-05-12 | 1987-05-12 | 
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP7039987U JPH0525699Y2 (en:Method) | 1987-05-12 | 1987-05-12 | 
Publications (2)
| Publication Number | Publication Date | 
|---|---|
| JPS63181443U JPS63181443U (en:Method) | 1988-11-22 | 
| JPH0525699Y2 true JPH0525699Y2 (en:Method) | 1993-06-29 | 
Family
ID=30911998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| JP7039987U Expired - Lifetime JPH0525699Y2 (en:Method) | 1987-05-12 | 1987-05-12 | 
Country Status (1)
| Country | Link | 
|---|---|
| JP (1) | JPH0525699Y2 (en:Method) | 
- 
        1987
        - 1987-05-12 JP JP7039987U patent/JPH0525699Y2/ja not_active Expired - Lifetime
 
Also Published As
| Publication number | Publication date | 
|---|---|
| JPS63181443U (en:Method) | 1988-11-22 | 
Similar Documents
| Publication | Publication Date | Title | 
|---|---|---|
| EP0241555A1 (en) | Method of and apparatus for cleaning air by irradiation of ultraviolet rays | |
| CA2145154A1 (en) | Method and Apparatus for Processing Exhaust Gas | |
| GB9622173D0 (en) | Particulate Products | |
| JPH0525699Y2 (en:Method) | ||
| CN211615677U (zh) | 一种手套箱用的等离子除尘装置 | |
| JPS6353943A (ja) | 半導体製造装置 | |
| JPS57197049A (en) | Apparatus and method for purifying fine particle material contaminated with gas | |
| KR20020047112A (ko) | 반도체 웨이퍼로부터 오염물을 감소시키기 위한 방법 및장치 | |
| JPS6317254Y2 (en:Method) | ||
| JP2608562B2 (ja) | クリーンパッケージ | |
| JPH0465146B2 (en:Method) | ||
| CN209416076U (zh) | 一种化工冶炼炉废气处理装置 | |
| JPH06232235A (ja) | ロードロック室 | |
| JPH01151918A (ja) | 真空排気系用微粒子捕集装置 | |
| JPS60206017A (ja) | 清浄搬送システム | |
| JPH05217659A (ja) | コロナ放電用電極 | |
| JPS6287749A (ja) | 運搬装置 | |
| JPH031554A (ja) | 半導体ウエハー搬送用クリーンボックス | |
| JPH0610610Y2 (ja) | 電子顕微鏡 | |
| JPH0434399Y2 (en:Method) | ||
| JPH0721389B2 (ja) | 熱処理炉 | |
| JPS6182833A (ja) | オ−トクレ−ブ | |
| JPH03173114A (ja) | 半導体製造装置 | |
| JPH0761618B2 (ja) | 製品製造装置 | |
| FR2462210A1 (fr) | Installation pour aspirer et epurer l'air vicie dans les ateliers |