JPH0525536B2 - - Google Patents
Info
- Publication number
- JPH0525536B2 JPH0525536B2 JP61061395A JP6139586A JPH0525536B2 JP H0525536 B2 JPH0525536 B2 JP H0525536B2 JP 61061395 A JP61061395 A JP 61061395A JP 6139586 A JP6139586 A JP 6139586A JP H0525536 B2 JPH0525536 B2 JP H0525536B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- anode
- plasma
- cathode
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 19
- 238000012545 processing Methods 0.000 claims description 18
- 230000005684 electric field Effects 0.000 claims description 2
- 210000002381 plasma Anatomy 0.000 description 21
- 208000028659 discharge Diseases 0.000 description 13
- 238000005530 etching Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000010301 surface-oxidation reaction Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- -1 electrons Chemical class 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6139586A JPS62216637A (ja) | 1986-03-19 | 1986-03-19 | プラズマ処理装置 |
JP61239765A JP2613377B2 (ja) | 1986-03-19 | 1986-10-08 | プラズマ処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6139586A JPS62216637A (ja) | 1986-03-19 | 1986-03-19 | プラズマ処理装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61239765A Division JP2613377B2 (ja) | 1986-03-19 | 1986-10-08 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62216637A JPS62216637A (ja) | 1987-09-24 |
JPH0525536B2 true JPH0525536B2 (zh) | 1993-04-13 |
Family
ID=13169922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6139586A Granted JPS62216637A (ja) | 1986-03-19 | 1986-03-19 | プラズマ処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62216637A (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2792558B2 (ja) * | 1987-12-07 | 1998-09-03 | 株式会社日立製作所 | 表面処理装置および表面処理方法 |
JP2662656B2 (ja) * | 1988-12-19 | 1997-10-15 | 東京エレクトロン株式会社 | オゾン発生方法およびこれを用いたアッシング方法 |
JPH05335244A (ja) * | 1992-05-29 | 1993-12-17 | Anelva Corp | アモルファスシリコン薄膜の成膜方法 |
US6896773B2 (en) | 2002-11-14 | 2005-05-24 | Zond, Inc. | High deposition rate sputtering |
US7095179B2 (en) | 2004-02-22 | 2006-08-22 | Zond, Inc. | Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities |
JP4643933B2 (ja) * | 2004-07-06 | 2011-03-02 | パナソニック株式会社 | プラズマ処理方法およびプラグ形成方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56105627A (en) * | 1980-01-28 | 1981-08-22 | Fuji Photo Film Co Ltd | Manufacture of amorphous semiconductor |
JPS60215777A (ja) * | 1984-03-03 | 1985-10-29 | エステイ−シ− ピ−エルシ− | 表面処理方法 |
JPS61213221A (ja) * | 1985-03-19 | 1986-09-22 | Japan Synthetic Rubber Co Ltd | プラズマ重合膜の製法 |
JPS62103371A (ja) * | 1985-10-30 | 1987-05-13 | Hitachi Ltd | プラズマ化学蒸着法 |
-
1986
- 1986-03-19 JP JP6139586A patent/JPS62216637A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56105627A (en) * | 1980-01-28 | 1981-08-22 | Fuji Photo Film Co Ltd | Manufacture of amorphous semiconductor |
JPS60215777A (ja) * | 1984-03-03 | 1985-10-29 | エステイ−シ− ピ−エルシ− | 表面処理方法 |
JPS61213221A (ja) * | 1985-03-19 | 1986-09-22 | Japan Synthetic Rubber Co Ltd | プラズマ重合膜の製法 |
JPS62103371A (ja) * | 1985-10-30 | 1987-05-13 | Hitachi Ltd | プラズマ化学蒸着法 |
Also Published As
Publication number | Publication date |
---|---|
JPS62216637A (ja) | 1987-09-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |