JPH0525292B2 - - Google Patents
Info
- Publication number
- JPH0525292B2 JPH0525292B2 JP62075549A JP7554987A JPH0525292B2 JP H0525292 B2 JPH0525292 B2 JP H0525292B2 JP 62075549 A JP62075549 A JP 62075549A JP 7554987 A JP7554987 A JP 7554987A JP H0525292 B2 JPH0525292 B2 JP H0525292B2
- Authority
- JP
- Japan
- Prior art keywords
- interferometer
- light
- film
- substrate
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7554987A JPS63241322A (ja) | 1987-03-27 | 1987-03-27 | 可変干渉装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7554987A JPS63241322A (ja) | 1987-03-27 | 1987-03-27 | 可変干渉装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63241322A JPS63241322A (ja) | 1988-10-06 |
| JPH0525292B2 true JPH0525292B2 (enrdf_load_stackoverflow) | 1993-04-12 |
Family
ID=13579381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7554987A Granted JPS63241322A (ja) | 1987-03-27 | 1987-03-27 | 可変干渉装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63241322A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4561728B2 (ja) * | 2006-11-02 | 2010-10-13 | セイコーエプソン株式会社 | 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ |
| JP6761215B2 (ja) * | 2015-09-03 | 2020-09-23 | 国立研究開発法人理化学研究所 | 光学素子、エタロン、および回折格子、ならびに光学素子の製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8201222A (nl) * | 1982-03-24 | 1983-10-17 | Philips Nv | Verstembare fabry-perot interferometer en roentgenbeeldweergeefinrichting voorzien van een dergelijke interferometer. |
-
1987
- 1987-03-27 JP JP7554987A patent/JPS63241322A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63241322A (ja) | 1988-10-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4859060A (en) | Variable interferometric device and a process for the production of the same | |
| US5561523A (en) | Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis | |
| US7734131B2 (en) | Fabry-Perot tunable filter using a bonded pair of transparent substrates | |
| US7106514B2 (en) | Optical tunable filter and method for manufacturing the optical tunable filter | |
| KR100636463B1 (ko) | 분석 장치 | |
| TWI276847B (en) | Wavelength-variable filter and method of manufacturing the same | |
| US7301703B2 (en) | Tunable filter and method of manufacturing the same, and sensing device | |
| US6108121A (en) | Micromachined high reflectance deformable mirror | |
| US6384953B1 (en) | Micro-dynamic optical device | |
| JPS61235731A (ja) | 感圧素子 | |
| GB2371119A (en) | Micro electro-mechanical systems | |
| US20050105184A1 (en) | Tunable filter membrane structures and methods of making | |
| JPH0690329B2 (ja) | ファブリペロ−干渉計 | |
| CN109298504B (zh) | 微机电光学波长参考标准具 | |
| JPH0446369B2 (enrdf_load_stackoverflow) | ||
| JPH0525292B2 (enrdf_load_stackoverflow) | ||
| JP2005031326A (ja) | 光フィルター | |
| JP2004042248A (ja) | 陽極接合構造体及びその製造方法並びにこれを利用した光スキャナーの製造方法 | |
| JPS60239072A (ja) | 光センサ | |
| JPH11119123A (ja) | 光スイッチ及びその製造方法 | |
| JPH0575344B2 (enrdf_load_stackoverflow) | ||
| JP4479351B2 (ja) | 波長可変フィルタおよび波長可変フィルタの製造方法 | |
| CN118550077A (zh) | 一种电磁驱动珐珀滤波芯片及其制作方法 | |
| JPH09189890A (ja) | 不動態層を有する電子光学モジュレータ | |
| WO2021077396A1 (zh) | 一种可调光学滤波器件 |