JPH0525044B2 - - Google Patents

Info

Publication number
JPH0525044B2
JPH0525044B2 JP10148285A JP10148285A JPH0525044B2 JP H0525044 B2 JPH0525044 B2 JP H0525044B2 JP 10148285 A JP10148285 A JP 10148285A JP 10148285 A JP10148285 A JP 10148285A JP H0525044 B2 JPH0525044 B2 JP H0525044B2
Authority
JP
Japan
Prior art keywords
striped pattern
pattern
control device
modulator
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10148285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61260107A (ja
Inventor
Shigeru Kawai
Keiichi Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP10148285A priority Critical patent/JPS61260107A/ja
Publication of JPS61260107A publication Critical patent/JPS61260107A/ja
Publication of JPH0525044B2 publication Critical patent/JPH0525044B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP10148285A 1985-05-15 1985-05-15 ３次元計測方法および装置 Granted JPS61260107A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10148285A JPS61260107A (ja) 1985-05-15 1985-05-15 ３次元計測方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10148285A JPS61260107A (ja) 1985-05-15 1985-05-15 ３次元計測方法および装置

Publications (2)

Publication Number Publication Date
JPS61260107A JPS61260107A (ja) 1986-11-18
JPH0525044B2 true JPH0525044B2 (fr) 1993-04-09

Family

ID=14301931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10148285A Granted JPS61260107A (ja) 1985-05-15 1985-05-15 ３次元計測方法および装置

Country Status (1)

Country Link
JP (1) JPS61260107A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4613626B2 (ja) * 2005-02-04 2011-01-19 旭硝子株式会社 鏡面形状測定方法および装置並びに検査方法および装置
CN108562240B (zh) * 2018-01-24 2019-08-23 北京理工大学 基于两步载波拼接法的数字莫尔移相干涉测量方法

Also Published As

Publication number Publication date
JPS61260107A (ja) 1986-11-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term