JPH05249694A - Immersion treating device - Google Patents

Abstract

PURPOSE:To provide an immersion treating device having a simple structure and high uniformity in the treatment of a medium surface. CONSTITUTION:The immersion treatment device is constituted of a dry plate 5 having a medium surface 6 to carry out an immersion treatment at one surface, a motor 1 holding the dry plate 5 and rotating the dry plate in a treating liquid 7 in a treating tank 2 in the desired rotational direction and at the inside of the surface of the dry plate 5, and an agitation means 4 which is arranged in the vicinity of a bottom of the treating tank 2 with the same shaft as the motor and generates a convection in the treating liquid 7 by rotating it in the direction opposite to a desired rotational direction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an immersion treatment apparatus for chemically reacting a surface of a medium with a treatment liquid to perform a predetermined treatment. The liquid immersion processing apparatus according to the present invention is particularly effective for the development processing of hologram disks and the like.

[0002]

2. Description of the Related Art FIG. 5 is a block diagram of an example of a conventional liquid immersion processing apparatus. The rectangular dry plate 5 has a medium surface 6 on its lower surface and is immersed in the processing liquid 7 together. The dry plate 5 is supported by a suitable method (not shown). By the way, it is necessary to convect the treatment liquid 7 in order to uniformly perform the treatment (chemical reaction) on the medium surface 6. For that purpose, a plurality of rotors 4 are arranged at the bottom of the processing tank 2, and these are rotated so that the processing liquid 7
Cause convection to. The rotor 4 is magnetically coupled to the stirrer 3, and the rotor 4 is rotated by rotation of a magnet (not shown) in the stirrer 3.

FIG. 6 is a schematic view of the essential part of another example of a conventional liquid immersion processing apparatus. This structure is a method of circulating the treatment liquid 7 by a circular. The treatment liquid 7 flows in from the inflow jig 9 as shown by the arrow, flows through the upper and lower sides of the dry plate 5 and the medium surface 6, flows out, is flowed in again, and is circulated. In this case, the width of the inflow jig 9 is set to be substantially equal to or larger than the width of the dry plate 5 to improve the flow on the medium surface 6.

[0004]

However, even if the convection of the processing liquid by these conventional structures is carried out, the convection is still uneven and the uniformity of the processing on the medium surface needs to be improved. The method of (1) has an improvement such as a large scale of the device. An object of the present invention is to provide a liquid immersion processing apparatus having a simplified structure and capable of obtaining high uniformity in processing the medium surface.

[0005]

DISCLOSURE OF THE INVENTION A liquid immersion treatment apparatus according to the present invention has a dry plate 5 having a medium surface 6 to be subjected to immersion treatment on one surface.
A motor 1 for holding the dry plate and rotating the dry plate in the processing liquid 7 in the processing tank 2 in a predetermined rotation direction in the plane of the dry plate; and a motor 1 coaxially with the motor. The stirring means 4 is disposed near the bottom and rotates in a direction opposite to the predetermined rotation direction to generate convection in the treatment liquid.

In the present invention, the sum of the relative velocity with respect to the treatment liquid generated by the rotation of the dry plate in the predetermined rotation direction and the convection velocity of the treatment liquid generated by the rotation of the stirring means is the surface of the medium surface. The rotation speed of the motor and the rotation speed of the agitating means are adjusted so as to be constant inside. Further, in the present invention, the convection generated by the stirring means is linearly reduced with the distance from the rotation axis at the boundary surface between the dry plate immersed in the treatment liquid and the medium surface. The rotation speed may be adjusted.

Further, as the structure of the processing tank, the shape of the inner surface of the processing tank may be a conical shape 8 having openings at the outer periphery of the dry plate and the periphery of the stirring means.

[0008]

In the present invention, as shown by the arrows in FIGS. 2 and 3, the sum of the relative speed to the processing liquid generated by the rotation of the dry plate in the predetermined rotation direction and the convection speed of the processing liquid generated by the rotation of the stirring means. However, the rotation speed of the motor and the rotation speed of the stirring means are adjusted so as to be constant within the surface of the medium, and as a result, the treatment liquid becomes constant with respect to the medium surface. Can be uniform.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic view of the essential parts of a liquid immersion processing apparatus according to the present invention. The processing bath 2 is filled with the processing liquid 7, and when the motor 1 is rotated, the medium surface 6 is rotated together with the dry plate 5 in the processing liquid 7. The reason why the medium surface 6 is rotated is to make the chemical reaction with the processing liquid 7 uniform. At the bottom of the processing tank 2, there is a rotor 4 for stirring the processing liquid 7. The rotor 4 is magnetically coupled to the stirrer 3, and when a magnet (not shown) in the stirrer 3 rotates, the rotor 4 also rotates. It is like this. The treatment liquid 7 is agitated in order to convect the treatment liquid near the medium surface 6.

The dry plate 5 is fixed to the tip of the shaft 9 of the motor 1 and rotates in its plane as the shaft 9 rotates. The motor 1 is attached to the support via the arm 10, and as shown by the dotted line, the dry plate 5 and the medium surface 6 can be attached / detached outside the processing tank 2 or immersed in the processing tank 2 by rotation around the fulcrum F. You can do it. The rotation direction of the motor 1 is counterclockwise when the dry plate 5 is viewed from the motor 1 side. The dry plate 5 is held horizontally in the processing tank 2. The rotor 4 is magnetically used as stirring means for generating convection in the treatment liquid 6.
Use the stirrer 3 which turns. The rotation direction of the rotor 4 is set clockwise from the dry plate 5 to the bottom of the processing tank 2, that is, the reverse direction of the dry plate 5 is set. The rotation center of the rotor 4 is made to coincide with the rotation axis of the motor 1. The relative speed between the medium surface 6 and the processing liquid 7 is kept constant by the in-plane rotation of the dry plate 5 and the convection generated by the rotor 4.

FIG. 2 is an explanatory view of the flow velocity of the processing liquid at the interface with the dry plate 5 due to the in-plane rotation of the dry plate 5. For convenience of explanation, the shape of the dry plate 5 is shown as a circle, but the shape is not limited to this. As shown in the figure, when the length of the arrow indicates the magnitude and direction of the flow velocity at each starting point, the flow velocity u increases in proportion to the distance r from the rotation center O of the dry plate 5. The rotation direction of the dry plate 5 is the arrow direction, and the rotation speed of the dry plate 5 is constant. As is apparent, the flow velocity becomes larger at the outer periphery of the dry plate.

FIG. 3 is an explanatory view of a convection state of the processing liquid 6 generated by stirring by the rotor 4. The coordinate system is the same as in FIG. As shown in the figure, the flow velocity v increases as the rotation center O of the rotor increases and decreases along the distance r. That is, in the agitation by the rotor 4, the flow velocity is highest near the rotation axis and becomes smaller toward the periphery. The size and speed of the rotor should be selected appropriately in order to decrease in proportion to the distance from the center of rotation.

By the way, the flow velocities u and v shown in FIGS.
When the arrows of are added for the same distance r from the center, they all have the same size. That is, the relative flow velocity is constant regardless of the place. The present invention focuses on this point. FIG. 4 is a block diagram of the essential parts of another example of the liquid immersion processing apparatus according to the present invention. As shown in the drawing, the vortex control jig 8 is provided in the processing tank 2, and thereby the above-mentioned convection state can be realized. That is, a conical surface that is rotationally symmetrical with respect to the axis of stirring (that is, the rotation axis of the dry plate) is formed in the processing tank 2 by the vortex control jig 8. Since the flow velocity at the interface of the fixed wall is 0, the upper opening of the cone is adjusted to the outer diameter of the dry plate 5. The lower opening of the cone has a size that does not hinder the rotation of the rotor 4. This makes it easier to obtain the convection state of the processing liquid.

In the liquid immersion treatment apparatus described above, the center of rotation of the dry plate may be the center of the vortex, and the uniformity of stirring may not be maintained in some cases. Therefore, in the present invention, it is a method particularly suitable for the case where the treatment in the vicinity of the center of the dry plate is not important, for example, for the case of a hologram disk or the like in which the medium surface is processed into a donut-shaped wide annular shape. In the above example, the rotation direction of the motor 1 is counterclockwise and the rotation direction of the rotor 4 is clockwise.
It is clear that the same effect can be obtained even if they are reversed.

[0015]

As described above, according to the present invention,
The liquid immersion treatment device can be simplified, and the liquid immersion treatment device is very effective in uniformly treating a medium surface having a large area, particularly a donut-shaped medium surface.

[Brief description of drawings]

FIG. 1 is a configuration diagram of essential parts of a liquid immersion processing apparatus according to the present invention.

FIG. 2 is an explanatory diagram of the flow velocity of the processing liquid at the interface with the dry plate of the present invention.

FIG. 3 is an explanatory diagram of a convection state of a processing liquid generated by stirring by the rotor of the present invention.

FIG. 4 is a configuration diagram of main parts of another example of the liquid immersion processing apparatus according to the present invention.

FIG. 5 is a configuration diagram of main parts of an example of a conventional processing apparatus.

FIG. 6 is a configuration diagram of a main part of another example of a conventional processing device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Motor 2 ... Processing tank 3 ... Stirrer 4 ... Rotor 5 ... Dry plate 6 ... Medium surface 7 ... Processing liquid 8 ... Vortex control jig 9 ... Motor shaft 10 ... Arm

Front page continued (72) Inventor Fumihiro Tawa 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Fujitsu Limited

Claims (4)

[Claims] 1. A dry plate (5) having on one side a medium surface (6) to be immersed, and a dry plate held in the processing liquid (7) in a processing tank (2). A motor (1) that rotates in a predetermined rotation direction in the plane of the dry plate, and a processing liquid that is arranged coaxially with the motor near the bottom of the processing tank and that rotates in a direction opposite to the predetermined rotation direction. And a stirring means (4) for generating convection. 2. The total of the relative velocity with respect to the treatment liquid generated by the rotation of the dry plate in the predetermined rotation direction and the convection velocity of the treatment liquid generated by the rotation of the stirring means is within the plane of the medium surface. The liquid immersion processing apparatus according to claim 1, wherein the rotation speed of the motor and the rotation speed of the stirring means are adjusted so as to be constant. 3. The rotation of the stirring means such that the convection generated by the stirring means decreases linearly with the distance from the rotation axis at the boundary surface with the medium surface of the dry plate immersed in the treatment liquid. The liquid immersion processing apparatus according to claim 1, wherein the speed is adjusted. 4. The immersion treatment apparatus according to claim 1, wherein an inner surface of the treatment tank has a conical shape (8) having an opening formed around the outer periphery of the dry plate and the periphery of the stirring means.