JPH05243379A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPH05243379A
JPH05243379A JP4001792A JP4001792A JPH05243379A JP H05243379 A JPH05243379 A JP H05243379A JP 4001792 A JP4001792 A JP 4001792A JP 4001792 A JP4001792 A JP 4001792A JP H05243379 A JPH05243379 A JP H05243379A
Authority
JP
Japan
Prior art keywords
layer wiring
wiring
layer
hole
hard macro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP4001792A
Other languages
Japanese (ja)
Inventor
Masako Kubota
昌子 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC IC Microcomputer Systems Co Ltd
Original Assignee
NEC IC Microcomputer Systems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC IC Microcomputer Systems Co Ltd filed Critical NEC IC Microcomputer Systems Co Ltd
Priority to JP4001792A priority Critical patent/JPH05243379A/en
Publication of JPH05243379A publication Critical patent/JPH05243379A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To reduce the area of a chip as a whole by a method wherein a wiring region on a hard macro inside a semiconductor chip is made small. CONSTITUTION:The following are arranged: third-layer interconnections 123 and fourth-layer interconnections 124 which are formed on a hard macro; and fifth-layer interconnections 125 and sixth-layer interconnections 126 which cross them obliquely. In addition, the following are formed: second through holes 132 which connect second-layer interconnections to the thirdlayer interconnections 123; fifth through holes 135 which connect the fifth-layer interconnections 125 to the sixth-layer interconnections 126; fourth through holes 134 which connect the fourth-layer interconnections 124 to the fifth-layer interconnections 125; and third through holes 133 which connect the third-layer interconnections 123 to the fourth-layer interconnections 124. Thereby, a wiring operation can be performed at a shortest distance on the hard macro.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体集積回路装置に
関し、特にチップ内のハードマクロ間の配線に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor integrated circuit device, and more particularly to wiring between hard macros in a chip.

【0002】[0002]

【従来の技術】一般に半導体集積回路装置は、装置の小
型化、システムの要求に合わせて年々集積度が高くなっ
ている。
2. Description of the Related Art Generally, a semiconductor integrated circuit device has a higher degree of integration year by year in accordance with miniaturization of the device and system requirements.

【0003】従来の半導体集積回路装置は、図4に示す
ように、図面上の横方向に配置した第1層配線221
と、図面上の縦方向に配置した第2層配線222及び第
1層配線221と同様に横方向に配置して配線ピッチを
第1層配線221の2倍にした第3層配線223が配置
され、第1層配線221及び第2層配線222で最小配
線間隔の格子を構成し、格子点にて第1層配線221と
第2層配線222を接続する第1スルーホール231
と、第2層配線222及び第3層配線223で作られた
格子に対し、格子点にて第2層配線222と第3層配線
223を接続する第2スルーホール232を備えてい
る。
As shown in FIG. 4, a conventional semiconductor integrated circuit device has a first layer wiring 221 arranged in a horizontal direction on the drawing.
And a third layer wiring 223 having a wiring pitch twice that of the first layer wiring 221 is arranged in the horizontal direction like the second layer wiring 222 and the first layer wiring 221 arranged in the vertical direction on the drawing. The first layer wiring 221 and the second layer wiring 222 form a lattice having a minimum wiring interval, and the first through hole 231 connecting the first layer wiring 221 and the second layer wiring 222 at the lattice point.
And a second through hole 232 that connects the second layer wiring 222 and the third layer wiring 223 at a lattice point to the lattice formed by the second layer wiring 222 and the third layer wiring 223.

【0004】図5及び図6は従来の半導体集積回路装置
の第1及び第2の例を示すレイアウト図である。
5 and 6 are layout diagrams showing the first and second examples of the conventional semiconductor integrated circuit device.

【0005】図5及び図6に示すように、LSIチップ
11上に形成したハードマクロAとハードマクロB間を
第1層配線221及び第2層配線222を使用して構成
する場合に、図4に示した配線ピッチに従って、ハード
マクロAからハードマクロBへ配線接続を行なう場合、
ハードマクロB上を第1層配線221及び第2層配線2
22のみを用いて配線する事ができないので、図5に示
すように第3層配線223を用いてハードマクロB上を
通過させる方法と、図6に示すようにハードマクロA,
Bの周囲の配線領域13内に第1層配線221及び第2
層配線222を用いて引き回す配線方法がある。図5に
示す前者は、ハードマクロAの出力を第2層配線222
を用いて引き出し、第2スルーホール232で第3層配
線223に接続させ、ハードマクロB上を第3層配線2
23を用いて通過させ、通過後、第2スルーホール23
2で第2層配線222に接続させ、その後第1スルーホ
ール231を用いて第1層配線221に接続させ、再度
第1スルーホール231を用いて第2層配線222に接
続させ、ハードマクロBの入力となる構成になってい
る。図6に示す後者は、ハードマクロAの上部出力を第
2層配線222を用いて引き出し、第1スルーホール2
31を用いて第1層配線221に接続し、チップ左上ま
で配線し、第1スルーホール231を用いて第2層配線
222に接続し、左下まで配線を延ばし、再度第1スル
ーホール231を用いて第1層配線221に接続し、再
々度第1スルーホール231を用いて第2層配線222
に接続し、ハードマクロBの入力となる構成になってい
る。
As shown in FIGS. 5 and 6, when the hard macro A and the hard macro B formed on the LSI chip 11 are formed by using the first layer wiring 221 and the second layer wiring 222, When wiring is connected from the hard macro A to the hard macro B according to the wiring pitch shown in 4,
The first layer wiring 221 and the second layer wiring 2 are formed on the hard macro B.
Since it is not possible to perform wiring using only 22, a method of passing over the hard macro B using the third layer wiring 223 as shown in FIG.
In the wiring region 13 around B, the first layer wiring 221 and the second layer wiring 221
There is a wiring method in which the layer wiring 222 is used. In the former case shown in FIG. 5, the output of the hard macro A is the second layer wiring 222.
Is connected to the third layer wiring 223 through the second through hole 232, and the third layer wiring 2 is formed on the hard macro B.
23 through the second through hole 23
2 is connected to the second layer wiring 222, then is connected to the first layer wiring 221 using the first through hole 231 and is again connected to the second layer wiring 222 using the first through hole 231. It is configured to be the input of. In the latter shown in FIG. 6, the upper output of the hard macro A is drawn out by using the second layer wiring 222, and the first through hole 2
31 is used to connect to the first layer wiring 221 and is wired to the upper left of the chip, is connected to the second layer wiring 222 using the first through hole 231 and is extended to the lower left, and the first through hole 231 is used again. Connected to the first layer wiring 221 and again using the first through hole 231 to form the second layer wiring 222.
It is configured to be connected to the hard macro B as an input.

【0006】[0006]

【発明が解決しようとする課題】従来の半導体集積回路
装置では、図4に示すように図の横方向の第1層配線2
21,図の縦方向の第2層配線222及び第1層配線2
21と同様に図の横方向の第3層配線223と、第1層
配線221と第2層配線222を接続する第1スルーホ
ール231,第2層配線222と第3層配線223で作
られた最小格子の交点に第2層配線222と第3層配線
223を接続する第2スルーホール232を有して構成
されており、ハードマクロ内の配線を第1層配線221
及び第2層配線222用いて構成している為、ハードマ
クロ間配線は、ハードマクロ上を第1層配線221及び
第2層配線222を用いて通過させる事ができず、ハー
ドマクロ上を通過せずに空領域に配線を引き回したり、
又は図の横方向のみに第3層配線223を用いてハード
マクロ上を通過させ、その後空領域で第1層配線221
及び第2層配線222に接続させて配線を行なってい
た。そのため、最短に配線することができず、配線の引
き回しを行わなければならず、配線領域は拡大し、チッ
プ全体として面積が大きくなるという欠点があった。
In the conventional semiconductor integrated circuit device, as shown in FIG. 4, the first layer wiring 2 in the lateral direction of the drawing is formed.
21, second layer wiring 222 and first layer wiring 2 in the vertical direction in the figure
As in the case of FIG. 21, it is formed by the third layer wiring 223 in the horizontal direction in the figure, the first through hole 231, which connects the first layer wiring 221 and the second layer wiring 222, the second layer wiring 222, and the third layer wiring 223. The second through-hole 232 connecting the second-layer wiring 222 and the third-layer wiring 223 is formed at the intersection of the minimum lattices, and the wiring in the hard macro is connected to the first-layer wiring 221.
Since it is configured by using the second layer wiring 222 and the second layer wiring 222, the wiring between the hard macros cannot pass through the hard macro by using the first layer wiring 221 and the second layer wiring 222, but passes through the hard macro. Without arranging the wiring in the empty area,
Alternatively, the third-layer wiring 223 is used only in the lateral direction of the drawing to pass through the hard macro, and then the first-layer wiring 221 is formed in the empty region.
Also, wiring is performed by connecting to the second layer wiring 222. Therefore, the shortest wiring cannot be provided, and the wiring has to be laid out, the wiring region is expanded, and the area of the entire chip is increased.

【0007】本発明の目的は、多層配線を用いることに
より配線領域を小さくし、さらにはチップ全体の面積を
縮小することのできる半導体集積回路装置を提供する事
にある。
It is an object of the present invention to provide a semiconductor integrated circuit device which can reduce the wiring area and the area of the entire chip by using the multilayer wiring.

【0008】[0008]

【課題を解決するための手段】本発明の半導体集積回路
装置は、半導体集積回路上に設けた第1層配線と第2層
配線を用いて基本トランジスタ素子間を接続して形成さ
れたハードマクロと、ハードマクロの相互間を接続する
横方向に配置した第3層配線と、第3層配線に対して垂
直に交差して格子を形成する縦方向に配置した第4層配
線と、第3層配線及び第4層配線の交点以外の第3層配
線及び第4層配線に対してそれぞれ斜めに交差し且つ互
いに交差する第5層配線及び第6層配線とを備えてい
る。
A semiconductor integrated circuit device according to the present invention is a hard macro formed by connecting basic transistor elements using a first layer wiring and a second layer wiring provided on a semiconductor integrated circuit. A third layer wiring arranged in the horizontal direction for connecting the hard macros to each other, and a fourth layer wiring arranged in the vertical direction for intersecting the third layer wiring perpendicularly to form a lattice; A fifth-layer wiring and a sixth-layer wiring which obliquely intersect the third-layer wiring and the fourth-layer wiring other than the intersections of the layer-wiring and the fourth-layer wiring and intersect each other are provided.

【0009】[0009]

【実施例】次に、本発明について図面を参照して説明す
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.

【0010】図1は本発明の一実施例を説明するための
レイアウト図である。
FIG. 1 is a layout diagram for explaining one embodiment of the present invention.

【0011】図1に示すように、半導体チップ上に設け
た第1層配線と第2層配線を用いて基本トランジスタ素
子間を接続して形成されたハードマクロを互いに接続す
るための信号線用配線において、図面上の横方向に設置
した第3層配線123と、第3層配線123に対して図
面上の縦方向に配置した第4層配線124と、第3層配
線123及び第4層配線124の交点を通らず、第3層
配線123及び第4層配線124に対しそれぞれ斜めに
交差し、かつ互いに交差する第5層配線125と、第6
層配線126とを有して構成する。また、第3層配線1
23及び第4層配線124で作られた最小格子に対し
て、第4層配線124の半ピッチずれた点でハードマク
ロ内で用いられている第2層配線222と、ハードマク
ロ間配線に用いる第3層配線123を第2スルーホール
132で接続し、第3層配線123及び第4層配線12
4で作られた最小格子の交点で、第3層配線123と、
第4層配線124を第3スルーホール133で接続し、
第3層配線123及び第4層配線124で作られた最小
格子において、第3層配線123の半ピッチずれた点
で、第4層配線124と、第5層配線125を第4スル
ーホール134で接続し、第2スルーホール132と同
様に第3層配線123及び第4層配線124で作られた
最小格子において第4層配線124の半ピッチずれた点
で、第5層配線と第6層配線126を第5スルーホール
135で接続する。
As shown in FIG. 1, for signal lines for connecting hard macros formed by connecting the basic transistor elements using the first layer wiring and the second layer wiring provided on the semiconductor chip to each other. Regarding the wiring, a third layer wiring 123 arranged in the horizontal direction on the drawing, a fourth layer wiring 124 arranged in the vertical direction on the drawing with respect to the third layer wiring 123, a third layer wiring 123 and a fourth layer The fifth-layer wiring 125, which intersects the third-layer wiring 123 and the fourth-layer wiring 124 obliquely and does not pass through the intersection of the wirings 124, and the sixth-layer wiring 125 and the sixth-layer wiring 125,
It has a layer wiring 126. Also, the third layer wiring 1
23 and the fourth layer wiring 124, the second layer wiring 222 used in the hard macro at a point shifted by a half pitch of the fourth layer wiring 124 and the inter-hard macro wiring. The third layer wiring 123 is connected by the second through hole 132, and the third layer wiring 123 and the fourth layer wiring 12 are connected.
At the intersection of the minimum lattices created in 4, the third layer wiring 123 and
The fourth layer wiring 124 is connected by the third through hole 133,
In the minimum lattice made up of the third-layer wiring 123 and the fourth-layer wiring 124, the fourth-layer wiring 124 and the fifth-layer wiring 125 are connected to the fourth through-hole 134 at a point shifted by a half pitch of the third-layer wiring 123. And the fifth layer wiring and the sixth layer wiring 124 are separated by a half pitch in the minimum lattice formed by the third layer wiring 123 and the fourth layer wiring 124 similarly to the second through hole 132. The layer wiring 126 is connected by the fifth through hole 135.

【0012】図2は本発明の第1の応用例を示すレイア
ウト図である。
FIG. 2 is a layout diagram showing a first application example of the present invention.

【0013】図2に示すように図1に示した配線ピッチ
に従ってハードマクロAの図面上に下部出力からハード
マクロBの図面上下部入力へ配線接続を行なう場合、ハ
ードマクロA内の信号線用配線である第2層配線222
出力をハードマクロ間配線へ接続する配線領域13内の
第2スルーホールを用いて第3層配線123に接続配線
し第3スルーホール133を用いて第4層配線124へ
接続配線し、ハードマクロA上の第4スルーホール13
4を用いて第5層配線125に接続し、ハードマクロB
の図面上右下まで配線し、配線領域13上の第4スルー
ホール134を用いて第4層配線124に接続配線し、
第3スルーホール133を用いて第3層配線123へ接
続配線し、第2スルーホール132を用いてハードマク
ロB内の信号線用配線である第2層配線222入力に接
続する。
As shown in FIG. 2, when wiring is connected from the lower output to the upper and lower inputs of the hard macro B on the drawing of the hard macro A according to the wiring pitch shown in FIG. Second layer wiring 222 which is wiring
The second through hole in the wiring area 13 for connecting the output to the hard macro wiring is used to connect to the third layer wiring 123, and the third through hole 133 is used to connect to the fourth layer wiring 124. Fourth through hole 13 on A
4 is used to connect to the fifth layer wiring 125, and the hard macro B
Wiring to the lower right in the drawing, and connecting wiring to the fourth layer wiring 124 using the fourth through hole 134 on the wiring region 13,
The third through hole 133 is used for connection wiring to the third layer wiring 123, and the second through hole 132 is used for connection to the input of the second layer wiring 222 which is the signal line wiring in the hard macro B.

【0014】図3は本発明の第2の応用例を示すレイア
ウト図である。
FIG. 3 is a layout diagram showing a second application example of the present invention.

【0015】図3に示すように、ハードマクロAの図面
上上部出力からハードマクロBの図面下部入力へ配線接
続を行なう場合、ハードマクロA内の信号線用配線であ
る第2層配線222出力をハードマクロ間配線へ接続す
る第2スルーホール132を用いて第3層配線123に
接続配線し、第3スルーホール133を用いて第4層配
線124に接続配線し、第4スルーホール134を用い
て第5層配線125に接続配線し、第5スルーホール1
35を用いて第6層配線126に接続し、ハードマクロ
B左下まで配線し、第5スルーホール135を用いて第
5層配線125に接続配線し、第4スルーホール134
を用いて第4層配線124に接続配線し、第3スルーホ
ール133を用いて第3層配線123に接続配線し、第
2スルーホール132を用いてハードマクロB内の信号
線用配線である第2層配線222入力に接続する。
As shown in FIG. 3, when wiring is connected from the upper output in the drawing of the hard macro A to the lower input in the drawing of the hard macro B, the second layer wiring 222 output which is the wiring for the signal line in the hard macro A is output. Is connected to the third layer wiring 123 by using the second through hole 132 for connecting to the hard macro wiring, and is connected to the fourth layer wiring 124 by using the third through hole 133, and the fourth through hole 134 is formed. Connection wiring to the fifth layer wiring 125 using the fifth through hole 1
35 to connect to the sixth layer wiring 126, to the lower left of the hard macro B, to connect to the fifth layer wiring 125 to connect to the fifth layer wiring 125 to use the fifth through hole 135, and to connect to the fourth through hole 134.
Is used to connect to the fourth layer wiring 124, the third through hole 133 is used to connect to the third layer wiring 123, and the second through hole 132 is used to connect the signal line in the hard macro B. The second layer wiring 222 is connected to the input.

【0016】[0016]

【発明の効果】以上説明したように本発明は、半導体チ
ップ上の第1層配線と第2層配線を用いて基本トランジ
スタ間を接続して形成されたハードマクロを互いに接続
する場合、ハードマクロ上を横方向,縦方向,斜め方向
に配線することができるので配線の引き回しがなくな
り、また、第3層配線及び第4層配線で作られた最小格
子に第2層配線と第3層配線を接続する第2スルーホー
ルと、第3層配線と第4層配線を接続する第3スルーホ
ールと、第4層配線と第5層配線を接続する第4スルー
ホールと、第5層配線と第6層配線を接続する第5スル
ーホールを配置するので、比較的短い距離で配線可能と
なる。本実施例によれば、x座標,y座標ともに異なる
2つの端子を継ぐために従来2単位長必要であった配線
長が21/2 単位長で可能となるので、従来の技術と比べ
面積として約50%配線領域が小さくなり、また従来配
線領域はチップ面積の60%程度を占有していたため、
チップ面積としては約30%(=60%×0.5)の縮
小を得ることが可能となる。
As described above, according to the present invention, when hard macros formed by connecting the basic transistors using the first layer wiring and the second layer wiring on the semiconductor chip are connected to each other, the hard macros are connected to each other. Since the wiring can be arranged in the horizontal, vertical, and diagonal directions on the top, there is no need to lay out the wiring, and the second layer wiring and the third layer wiring are formed in the minimum lattice made up of the third layer wiring and the fourth layer wiring. A second through hole for connecting the third layer wiring and the fourth layer wiring, a fourth through hole for connecting the fourth layer wiring and the fifth layer wiring, and a fifth layer wiring Since the fifth through hole connecting the sixth layer wiring is arranged, wiring can be performed in a relatively short distance. According to the present embodiment, the wiring length, which was conventionally required to be 2 unit lengths in order to connect two terminals having different x-coordinates and y-coordinates, can be 2 1/2 unit lengths. As a result, the wiring area is reduced by about 50%, and the conventional wiring area occupies about 60% of the chip area.
The chip area can be reduced by about 30% (= 60% × 0.5).

【0017】このように、本発明では、配線領域を小さ
くし、さらにはチップ全体の縮小化を得ることができる
という効果を有する。
As described above, according to the present invention, there is an effect that the wiring area can be reduced and further the entire chip can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を説明するためのレイアウト
図。
FIG. 1 is a layout diagram for explaining an embodiment of the present invention.

【図2】本発明の第1の応用例を示すレイアウト図。FIG. 2 is a layout diagram showing a first application example of the present invention.

【図3】本発明の第2の応用例を示すレイアウト図。FIG. 3 is a layout diagram showing a second application example of the present invention.

【図4】従来の配線の配置を説明するためのレイアウト
図。
FIG. 4 is a layout diagram for explaining a conventional wiring arrangement.

【図5】従来の半導体集積回路装置の第1の例を示すレ
イアウト図。
FIG. 5 is a layout diagram showing a first example of a conventional semiconductor integrated circuit device.

【図6】従来の半導体集積回路装置の第2の例を示すレ
イアウト図。
FIG. 6 is a layout diagram showing a second example of a conventional semiconductor integrated circuit device.

【符号の説明】[Explanation of symbols]

11 LSIチップ 13 配線領域 123,223 第3層配線 124 第4層配線 125 第5層配線 126 第6層配線 132,232 第2スルーホール 133 第3スルーホール 134 第4スルーホール 135 第5スルーホール 221 第1層配線 222 第2層配線 231 第1スルーホール A,B ハードマクロ 11 LSI chip 13 Wiring region 123, 223 Third layer wiring 124 Fourth layer wiring 125 Fifth layer wiring 126 Sixth layer wiring 132, 232 Second through hole 133 Third through hole 134 Fourth through hole 135 Fifth through hole 221 First layer wiring 222 Second layer wiring 231 First through hole A, B Hard macro

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 半導体チップ上に設けた第1層配線及び
第2層配線を用いて基本トランジスタ素子間を接続して
形成されたハードマクロと、前記ハードマクロの相互間
を接続する横方向に配置した第3層配線と、前記第3層
配線に対して垂直に交差して格子を形成する縦方向に配
置した第4層配線と、前記第3層配線及び第4層配線の
交点以外の第3層配線及び第4層配線に対してそれぞれ
斜めに交差し且つ互いに交差する第5層配線及び第6層
配線を備えたことを特徴とする半導体集積回路装置。
1. A hard macro formed by connecting between basic transistor elements by using a first layer wiring and a second layer wiring provided on a semiconductor chip, and a lateral direction connecting between the hard macros. Other than the intersection of the arranged third layer wiring, the fourth layer wiring arranged in the vertical direction that intersects the third layer wiring vertically and forms a lattice, and the intersection of the third layer wiring and the fourth layer wiring. A semiconductor integrated circuit device comprising: a fifth-layer wiring and a sixth-layer wiring which obliquely intersect the third-layer wiring and the fourth-layer wiring, respectively, and intersect each other.
【請求項2】 第5層配線及び第6層配線がハードマク
ロ上に配置された請求項1記載の半導体集積回路装置。
2. The semiconductor integrated circuit device according to claim 1, wherein the fifth layer wiring and the sixth layer wiring are arranged on a hard macro.
JP4001792A 1992-02-27 1992-02-27 Semiconductor integrated circuit device Withdrawn JPH05243379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4001792A JPH05243379A (en) 1992-02-27 1992-02-27 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4001792A JPH05243379A (en) 1992-02-27 1992-02-27 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPH05243379A true JPH05243379A (en) 1993-09-21

Family

ID=12569142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4001792A Withdrawn JPH05243379A (en) 1992-02-27 1992-02-27 Semiconductor integrated circuit device

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Country Link
JP (1) JPH05243379A (en)

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