JPH052400B2 - - Google Patents
Info
- Publication number
- JPH052400B2 JPH052400B2 JP59127278A JP12727884A JPH052400B2 JP H052400 B2 JPH052400 B2 JP H052400B2 JP 59127278 A JP59127278 A JP 59127278A JP 12727884 A JP12727884 A JP 12727884A JP H052400 B2 JPH052400 B2 JP H052400B2
- Authority
- JP
- Japan
- Prior art keywords
- copper
- mercury
- waste liquid
- liquid
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 claims description 29
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 claims description 22
- 239000010949 copper Substances 0.000 claims description 21
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 21
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 20
- 229910052802 copper Inorganic materials 0.000 claims description 20
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 17
- 229910052753 mercury Inorganic materials 0.000 claims description 17
- 239000002699 waste material Substances 0.000 claims description 14
- 239000003513 alkali Substances 0.000 claims description 7
- 239000000243 solution Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- QXKXDIKCIPXUPL-UHFFFAOYSA-N sulfanylidenemercury Chemical compound [Hg]=S QXKXDIKCIPXUPL-UHFFFAOYSA-N 0.000 claims description 5
- 239000007864 aqueous solution Substances 0.000 claims description 4
- 150000001879 copper Chemical class 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 3
- 230000003472 neutralizing effect Effects 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 150000004763 sulfides Chemical class 0.000 claims description 3
- JJLJMEJHUUYSSY-UHFFFAOYSA-L Copper hydroxide Chemical compound [OH-].[OH-].[Cu+2] JJLJMEJHUUYSSY-UHFFFAOYSA-L 0.000 claims description 2
- 239000005750 Copper hydroxide Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims description 2
- 229910001956 copper hydroxide Inorganic materials 0.000 claims description 2
- OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- 239000004202 carbamide Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 239000005708 Sodium hypochlorite Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 229910001431 copper ion Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 150000004968 peroxymonosulfuric acids Chemical class 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
- C02F1/5236—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using inorganic agents
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F11/00—Treatment of sludge; Devices therefor
- C02F11/004—Sludge detoxification
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
- C02F2101/101—Sulfur compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
- C02F2101/16—Nitrogen compounds, e.g. ammonia
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
- C02F2101/20—Heavy metals or heavy metal compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Treating Waste Gases (AREA)
- Removal Of Specific Substances (AREA)
Description
産業上の利用分野
水銀蒸気を含むガスはチオ尿素及び銅イオンを
含む吸収液に吸収させることにより効率よくガス
中から水銀を除去し得るが、本発明はこの吸収廃
液の処理及びそれに含まれる有効成分を回収利用
する方法に関する。
従来技術の問題点
チオ尿素を含有する廃液はCODが高く処理に
問題があつた。チオ尿素及び銅イオンを含む水銀
吸収廃液は従来ハイアルカリ処理することにより
廃液中の水銀除去が可能であることは分かつてい
たが、水銀及び銅をSSとして分離した後の廃液
中には多量のチオ尿素が残存するためCODが高
くその処理が問題となつていた。
問題点を解決するための手段
そこで発明者らは銅及び水銀をSSとして過
分離除去した廃液をそのまま廃液として廃出する
のでなく、水銀吸収液として再利用することを試
み成功した。
すなわち、廃液をアルカリ処理して廃液中の銅
及び水銀を硫化物として沈澱せしめ、銅及び水銀
を除去した分離液のPHを調整するとともに所定の
チオ尿素及び銅塩を補充して水銀蒸気の吸収液と
して循環再利用可能とした。なお、廃液のアルカ
リ処理は任意のアルカリ剤を用いて液のPHを8以
上、好ましくは9以上にすることにより実施する
ことができる。本発明者らは、更に、銅及び水銀
の硫化物は分離した後、銅と水銀を分離回収する
方法を見出した。まず、分離された銅及び水銀硫
化物に硫酸、塩酸、硝酸などの酸又はアンモニア
水等のアルカリを添加し、さらに必要に応じて過
酸化水素、過硫酸などの酸化剤を加えることによ
り銅の硫化物のみを溶解し、得られた生成液を
過などにより固形分離することにより水銀は硫化
物として回収できる。酸処理は好ましくはPH3以
下、更に好ましくは2以下で実施し、アルカリ処
理は好ましくはPH11以上、更に好ましくはPH12以
上で実施する。処理温度には特に制限はなく、常
温でも実施できる。
このようにして得られた分離液は適当な中和剤
で中和することにより銅を水酸化物として沈澱回
収することができる。このように本発明に従え
ば、前記吸収廃液はその中の有用成分を排棄する
ことなく純粋な形で回収できるとともに吸収液と
して循環再利用することもでき、水銀含有廃ガス
処理システムを確立することができた。
つぎに、本発明によつても水銀吸収液の廃棄が
必要となる場合があり、その場合前述したように
COD処理が問題であり、酸化剤による分離処理
では充分でなかつた。例えば次亜塩素酸による酸
化処理を行なつた場合、例えばチオ尿素として5
g/含む廃液はCODとして4250ml/の値を
示すがこれに理論当量の次亜塩素酸ソーダ20g/
を添加したところ、CODは30ml/となり、
さらに理論当量の1.5倍量の次亜塩素酸ソーダ30
g/を添加してもCODは20mg/となり、完
全な処理はできなかつたが、チオ尿素に対してチ
オ尿素とキレート化合物を形成し得る金属イオ
ン、例えば銅イオンをチオ尿素に対して等モル以
上添加しPHを8以上、望ましくは9以上に調整す
ることにより液のCODをmg/以下、銅濃度を
0.1mg/以下に処理することができた。この処
理方法ではチオ尿素中の硫黄成分が銅などの金属
イオンと結びついて除去されることによりCOD
成分としては分析上検出できない尿素となるもの
と考えられる。COD処理としては充分な処理が
可能であるが尿素はBODとしては尿素1g/
で1000mg/の値を示し処理の必要があるがこれ
は加熱処理によりアンモニアと炭酸ガスに分解さ
れるので本発明のCOD処理後加熱処理すること
により完全な廃水処理ができる。
実施例
以下に本発明の実施例を説明する。
実施例 1
蒸気水銀を含む排ガスを洗浄処理した、下記表
−1に示す組成の吸収廃液を以下のようにして処
理した。
即ち、吸収廃液1を20%NaOH水溶液でPH
12に調整したところ、黒褐色の硫化物沈澱が生成
した。沈澱を過分離して調整し液の組成を分析
した。結果は表−2の実験1に示した通りであつ
た。表−2よりチオ尿素は92%回収されかつ重金
属(銅及び水銀)は黒褐色の硫化物として沈澱除
去されたことが明らかである。実験1で沈澱した
硫化物汚泥を200mlビーカーに取り、これに水を
加えて100mlとし、更に30%H2O2水溶液5mlを加
え、30%硫酸を加えて液のPHを2に調整した。室
温で30分間撹拌した後、液を過分離した。この
液を分析した結果は表−2の実験2に示した通
りであつた。表−2の実験2の結果から銅は前記
処理で液中に溶解し、水銀は溶解せず、銅との分
離回収ができることが明らかである。次に、実験
3をして銅を溶解した液をNaOH溶液でPH7
に調整したところ、沈澱(水酸化銅)が生成し
た。過分離後の液中の銅を分析した結果、表
−2の実験3に示した通り、Cuは水酸化物とし
て沈澱回収することができた。
Industrial Application Field Mercury can be efficiently removed from gas containing mercury vapor by absorbing it into an absorption liquid containing thiourea and copper ions. It relates to a method of recovering and utilizing components. Problems with conventional technology Wastewater containing thiourea has a high COD and has problems in treatment. It has been known that mercury can be removed from mercury-absorbing wastewater containing thiourea and copper ions by high alkali treatment, but after mercury and copper have been separated as SS, a large amount of Because thiourea remains, the COD is high and its disposal has become a problem. Means for Solving the Problems The inventors therefore tried and succeeded in reusing the waste liquid from which copper and mercury were over-separated using SS as a mercury absorption liquid instead of disposing of it as waste liquid. That is, the waste liquid is treated with alkali to precipitate the copper and mercury in the waste liquid as sulfide, and the pH of the separated liquid from which copper and mercury have been removed is adjusted, and the specified thiourea and copper salt are replenished to absorb mercury vapor. It can be recycled and reused as a liquid. Incidentally, the alkaline treatment of the waste liquid can be carried out by using any alkaline agent to adjust the pH of the liquid to 8 or higher, preferably 9 or higher. The present inventors further discovered a method for separating and recovering copper and mercury after separating copper and mercury sulfides. First, an acid such as sulfuric acid, hydrochloric acid, nitric acid, or an alkali such as aqueous ammonia is added to the separated copper and mercury sulfide, and if necessary, an oxidizing agent such as hydrogen peroxide or persulfuric acid is added to remove copper. Mercury can be recovered as sulfide by dissolving only the sulfide and separating the resulting product liquid as a solid by filtration or the like. Acid treatment is preferably carried out at a pH of 3 or lower, more preferably 2 or lower, and an alkali treatment is preferably carried out at a pH of 11 or higher, more preferably PH12 or higher. There is no particular restriction on the treatment temperature, and the treatment can be carried out at room temperature. By neutralizing the thus obtained separated liquid with a suitable neutralizing agent, copper can be precipitated and recovered as hydroxide. As described above, according to the present invention, the absorption waste liquid can be recovered in a pure form without discarding the useful components therein, and can also be recycled and reused as an absorption liquid, thereby establishing a mercury-containing waste gas treatment system. We were able to. Next, even with the present invention, there may be cases where it is necessary to dispose of the mercury absorbing solution, and in that case, as described above,
COD treatment was a problem, and separation treatment using an oxidizing agent was not sufficient. For example, when oxidizing with hypochlorous acid, for example, 5
g/The waste liquid containing COD shows a value of 4250ml/, but the theoretical equivalent of sodium hypochlorite 20g/
When added, the COD was 30ml/
Furthermore, 1.5 times the theoretical equivalent amount of sodium hypochlorite 30
Even when thiourea was added, the COD was 20mg/, and complete treatment was not possible. By adding the above and adjusting the pH to 8 or higher, preferably 9 or higher, the COD of the liquid can be lowered to mg/min, and the copper concentration can be lowered.
It was possible to reduce the amount to 0.1mg/or less. In this treatment method, the sulfur component in thiourea combines with metal ions such as copper and is removed, resulting in COD.
It is thought that the component is urea, which cannot be detected analytically. Although sufficient treatment is possible for COD treatment, urea is treated as BOD at 1g/g of urea.
It shows a value of 1000mg/ and requires treatment, but this is decomposed into ammonia and carbon dioxide gas by heat treatment, so complete wastewater treatment can be achieved by heat treatment after the COD treatment of the present invention. Examples Examples of the present invention will be described below. Example 1 An absorption waste liquid having a composition shown in Table 1 below, which was obtained by cleaning exhaust gas containing vaporized mercury, was treated as follows. That is, the pH of absorption waste liquid 1 was adjusted with 20% NaOH aqueous solution.
When the temperature was adjusted to 12, a blackish brown sulfide precipitate was formed. The precipitate was overseparated and adjusted, and the composition of the solution was analyzed. The results were as shown in Experiment 1 in Table 2. It is clear from Table 2 that 92% of thiourea was recovered and heavy metals (copper and mercury) were precipitated and removed as dark brown sulfides. The sulfide sludge precipitated in Experiment 1 was placed in a 200 ml beaker, water was added to make 100 ml, 5 ml of 30% H 2 O 2 aqueous solution was added, and 30% sulfuric acid was added to adjust the pH of the liquid to 2. After stirring at room temperature for 30 minutes, the liquid was overseparated. The results of analyzing this liquid were as shown in Experiment 2 in Table 2. From the results of Experiment 2 in Table 2, it is clear that copper is dissolved in the liquid by the above treatment, mercury is not dissolved, and that it can be separated and recovered from copper. Next, in experiment 3, the solution in which copper was dissolved was diluted with NaOH solution to pH 7.
When the temperature was adjusted to 1, a precipitate (copper hydroxide) was formed. As a result of analyzing the copper in the solution after over-separation, as shown in Experiment 3 in Table 2, Cu could be precipitated and recovered as hydroxide.
【表】【table】
Claims (1)
るに当り、 (i) 廃液をアルカリ処理して廃液中の銅及び水銀
を硫化物として沈澱せしめ、 (ii) 銅及び水銀の硫化物を固形分離したのち、酸
もしくはアルカリ処理又は酸もしくはアルカリ
処理と酸化処理により銅の硫化物を可溶化せし
め、そして (iii) 水銀の硫化物を固形物として回収すると共に
分離した銅含有水溶液を中和して水酸化銅を回
収することを特徴とする廃液の処理方法。 2 前記廃液が水銀蒸気を含むガスをチオ尿素及
び銅塩を含む水溶液で洗浄した液であり、前記工
程(i)で沈澱した銅及び水銀の硫化物を分離した後
の分離液をPH調整、チオ尿素濃度調整及び銅塩補
充をした後水銀蒸気を含むガスの洗浄液として再
利用する特許請求の範囲第1項記載の方法。[Claims] 1. In treating a waste liquid containing thiourea, copper salts and mercury, (i) the waste liquid is treated with an alkali to precipitate the copper and mercury in the waste liquid as sulfides; (ii) the copper and mercury are precipitated as sulfides; After separating the mercury sulfide as a solid, the copper sulfide is solubilized by acid or alkali treatment or acid or alkali treatment and oxidation treatment, and (iii) the mercury sulfide is recovered as a solid and the separated copper A method for treating waste liquid, characterized by recovering copper hydroxide by neutralizing the aqueous solution containing it. 2. The waste liquid is a liquid obtained by washing a gas containing mercury vapor with an aqueous solution containing thiourea and a copper salt, and adjusting the pH of the separated liquid after separating the copper and mercury sulfides precipitated in the step (i), 2. The method according to claim 1, wherein the thiourea concentration is adjusted and the copper salt is replenished and then reused as a cleaning solution for gas containing mercury vapor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59127278A JPS618193A (en) | 1984-06-22 | 1984-06-22 | Treatment of waste solution |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59127278A JPS618193A (en) | 1984-06-22 | 1984-06-22 | Treatment of waste solution |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS618193A JPS618193A (en) | 1986-01-14 |
JPH052400B2 true JPH052400B2 (en) | 1993-01-12 |
Family
ID=14956019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59127278A Granted JPS618193A (en) | 1984-06-22 | 1984-06-22 | Treatment of waste solution |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS618193A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105936558A (en) * | 2016-06-24 | 2016-09-14 | 白银有色集团股份有限公司 | Technology for processing waste acid generated by lead-zinc smelting |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5072867A (en) * | 1973-10-31 | 1975-06-16 | ||
JPS5130159A (en) * | 1974-07-16 | 1976-03-15 | Asahi Chemical Co | Kagakusenjohaiekino shorihoho |
JPS5515277A (en) * | 1978-07-20 | 1980-02-02 | Nec Home Electronics Ltd | Manufacturing method for semiconductor device |
-
1984
- 1984-06-22 JP JP59127278A patent/JPS618193A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5072867A (en) * | 1973-10-31 | 1975-06-16 | ||
JPS5130159A (en) * | 1974-07-16 | 1976-03-15 | Asahi Chemical Co | Kagakusenjohaiekino shorihoho |
JPS5515277A (en) * | 1978-07-20 | 1980-02-02 | Nec Home Electronics Ltd | Manufacturing method for semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS618193A (en) | 1986-01-14 |
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