JPH0523569Y2 - - Google Patents
Info
- Publication number
- JPH0523569Y2 JPH0523569Y2 JP17465886U JP17465886U JPH0523569Y2 JP H0523569 Y2 JPH0523569 Y2 JP H0523569Y2 JP 17465886 U JP17465886 U JP 17465886U JP 17465886 U JP17465886 U JP 17465886U JP H0523569 Y2 JPH0523569 Y2 JP H0523569Y2
- Authority
- JP
- Japan
- Prior art keywords
- film
- heater
- holder
- rotation shaft
- rotary lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 description 93
- 238000010438 heat treatment Methods 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000010409 thin film Substances 0.000 description 5
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17465886U JPH0523569Y2 (enExample) | 1986-11-12 | 1986-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17465886U JPH0523569Y2 (enExample) | 1986-11-12 | 1986-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6381864U JPS6381864U (enExample) | 1988-05-30 |
| JPH0523569Y2 true JPH0523569Y2 (enExample) | 1993-06-16 |
Family
ID=31113250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17465886U Expired - Lifetime JPH0523569Y2 (enExample) | 1986-11-12 | 1986-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523569Y2 (enExample) |
-
1986
- 1986-11-12 JP JP17465886U patent/JPH0523569Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6381864U (enExample) | 1988-05-30 |
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