JPH05234512A - Manufacture of gas electric discharge display panel - Google Patents
Manufacture of gas electric discharge display panelInfo
- Publication number
- JPH05234512A JPH05234512A JP3383792A JP3383792A JPH05234512A JP H05234512 A JPH05234512 A JP H05234512A JP 3383792 A JP3383792 A JP 3383792A JP 3383792 A JP3383792 A JP 3383792A JP H05234512 A JPH05234512 A JP H05234512A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- panel
- substrate
- temperature
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、表示デバイスなどに用
いるガス放電表示パネルに関するものである。更に詳し
くは、表示デバイスに必要な良好な放電特性を有するガ
ス放電表示パネルを得ることを目的とした、ガス放電表
示パネルの製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas discharge display panel used for a display device or the like. More specifically, the present invention relates to a gas discharge display panel manufacturing method for obtaining a gas discharge display panel having good discharge characteristics required for a display device.
【０００２】[0002]
【従来の技術】ガス放電表示パネルは、図５に示すよう
に第１の基板（１）及び第２の基板（２）に、誘電体
（４ａ），（４ｂ）に覆われた電極（３ａ）及び電極
（３ｂ）からなる電極対を形成し、さらに酸化マグネシ
ウムなどからなる保護層（５ａ），（５ｂ）を形成し、
この２枚の基板を画素に対応する放電セルをそれぞれ分
離するように隔壁（６ａ），（６ｂ）を挟んで向かい合
わせて貼り合わせ、フリットガラス（９）により加熱封
着し、さらに基板のいずれかの画素部以外の場所に形成
され、放電空間とつながったガラス管（７）を真空排気
・ガス導入装置に接続し、このガラス管（７）を通して
排気しながら真空加熱し、最後に放電ガスを封入してガ
ス放電表示パネルとしている。2. Description of the Related Art In a gas discharge display panel, as shown in FIG. 5, electrodes (3a) covered with dielectrics (4a) and (4b) are provided on a first substrate (1) and a second substrate (2). ) And an electrode (3b) are formed, and protective layers (5a) and (5b) made of magnesium oxide or the like are further formed,
The two substrates are faced to each other with the partition walls (6a) and (6b) sandwiched therebetween so as to separate the discharge cells corresponding to the pixels, and heat-sealed with a frit glass (9). A glass tube (7) formed in a place other than the pixel part and connected to the discharge space is connected to a vacuum exhaust / gas introduction device, vacuum heated while exhausting through this glass tube (7), and finally the discharge gas. Is enclosed to form a gas discharge display panel.
【０００３】従来法によるパネルの封着，活性化及びガ
ス導入手順を図６に示す。排気しながらの真空加熱は活
性化と呼ばれ、交流型ガス放電表示パネルに不可欠なも
のであり、加熱排気を完全に且つ短時間に行うために隔
壁に段差や穴を付けた構造も提案されている。この活性
化は、大気中でパネルを完全に封着した後に行われてい
る。このように、交流型ガス放電表示パネルに於いて
は、パネル内放電空間に吸着し残った溶剤やガスを取り
除くこと、及び酸化マグネシウムの清浄表面を生じせし
めることがパネル特性の向上に重要である。特に，２枚
の基板を封着するのに用いるフリットガラスからは、前
処理温度以下でもガス放出が認められ、ガス通過の容易
度が小さいパネルではフリットガラスから放出したガス
がフリットガラス近傍のパネル内に残る可能性が高い。FIG. 6 shows the procedure for sealing, activating and introducing gas into a panel according to the conventional method. Vacuum heating while evacuating is called activation, which is indispensable for AC-type gas discharge display panels, and a structure with steps or holes in the partition walls has also been proposed in order to completely and quickly heat and evacuate. ing. This activation is done after the panels have been completely sealed in air. As described above, in the AC type gas discharge display panel, it is important to improve the panel characteristics by removing the solvent and gas adsorbed and left in the discharge space in the panel and by generating a clean surface of magnesium oxide. .. In particular, from the frit glass used to seal the two substrates, gas emission is recognized even at a temperature lower than the pretreatment temperature, and in the panel where gas passage is small, the gas emitted from the frit glass is near the frit glass. It is likely to remain inside.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、ガス放
電表示パネルが大型化、大容量化、高精細化するに従
い、封着後のパネル内のガス通過の容易度（コンダクタ
ンス）は著しく低下する。また、カラー化に伴い色クロ
ストークや放電クロストークを小さくするために、隔壁
による画素あるいは放電空間分離を充分にすればさらに
ガス通過の容易度は低下する。パネル内のガス通過の容
易度が小さくなれば、活性化に長時間を要するだけでな
く、封着初期にパネル内部に残った吸着物を十分排気す
ることができず、素子の放電特性の劣化やパネル内の大
きなばらつきの原因となる。本発明の目的は、活性化を
実行するときのガス通過の容易度の低下に起因するパネ
ル内部の吸着物を低減させ、ひいては良好なパネル特性
を有する交流型ガス放電表示パネルの製造方法を提供す
ることにある。However, as the gas discharge display panel becomes larger, has a larger capacity, and has a higher definition, the ease of gas passage (conductance) in the panel after sealing is significantly lowered. Further, in order to reduce color crosstalk and discharge crosstalk with colorization, if the pixels or discharge space are sufficiently separated by the partition walls, the ease of gas passage is further reduced. If the ease of gas passage through the panel is reduced, not only will it take a long time to activate, but the adsorbed substances remaining inside the panel at the initial stage of sealing cannot be exhausted sufficiently, and the discharge characteristics of the element will deteriorate. It also causes a large variation within the panel. An object of the present invention is to provide a method for manufacturing an AC-type gas discharge display panel that reduces adsorbed substances inside the panel due to a reduction in ease of gas passage when performing activation, and thus has good panel characteristics. To do.
【０００５】[0005]
【課題を解決するための手段】本発明は、第１及び第２
の基板間に、誘電体に覆われた電極対、放電ガス及び放
電空間を有する交流駆動型ガス放電表示素子の製造方法
であって、放電ガスを封入するために第１、第２の基板
を封着してパネルを形成し、このパネル内に放電ガスを
封入する工程において、該基板に接続したガラス管を真
空排気・ガス導入装置に接続せしめ、パネル内部または
周囲を乾燥したガス雰囲気としながら該基板を封着温度
以下の温度で加熱し、その後パネルを封着温度に加熱し
て封着し、引き続き真空排気しながら加熱温度を下げ活
性化したのち、パネル内に放電ガスを封入することを特
徴とするガス放電表示パネルの製造方法である。The present invention includes first and second aspects.
A method of manufacturing an AC drive type gas discharge display device having an electrode pair covered with a dielectric material, a discharge gas and a discharge space between the substrates, wherein first and second substrates are provided to seal the discharge gas. In the step of forming a panel by sealing and enclosing the discharge gas in the panel, the glass tube connected to the substrate is connected to a vacuum exhaust / gas introducing device, while the inside or the periphery of the panel is kept in a dry gas atmosphere. The substrate is heated at a temperature lower than the sealing temperature, then the panel is heated to the sealing temperature for sealing, and then the heating temperature is lowered and activated while evacuation is performed, and then the discharge gas is sealed in the panel. And a method for manufacturing a gas discharge display panel.
【０００６】[0006]
【作用】本発明の作用を図１をもとに説明する。まず、
フリットガラスの軟化点以下の温度では、パネル内はフ
リットガラスを付けたパネル外縁部でもパネル外とガス
通過が可能である。また、パネル内も隔壁が封着後のよ
うに近接していないため、十分なガス通過の容易度を持
っている。このため加熱により脱離したガスは、容易に
パネル外に放出され、パネル内の吸着ガスは大きく減少
する。また、保護層が酸化マグネシウムの場合、水酸化
マグネシウムからの水の解離は、摂氏１６０度程度で１
気圧となるため、大気圧下でも清浄酸化マグネシウム表
面層を得ることができる。また、ガスをパネル内部に導
入することによりガスの流れがパネル内部から外部に向
かうため、パネル内部で放出されたガスやフリットガラ
スからの放出ガスはパネル外部に拡散する傾向を持ち、
上記効果を著しく高める。さらに、パネル外の雰囲気が
乾燥ガスであれば、パネル外からのガス吸着を排除する
こともできる。フリットガラスの軟化点以下の温度で、
パネルが封着される前の温度を維持することによって、
上記効果を更に高めることができる。引き続いて加熱温
度をフリットガラス軟化点以上に上げ、パネルを封着
し、真空排気しながら加熱すれば、パネル内部は外気に
触れることもないため良好な状態を維持する。この後、
放電ガスを封入することにより、封着後のパネル内ガス
通過容易度の低いパネルでも、充分な活性化ができ、ひ
いては良好な特性を持つガス放電表示パネルを得ること
が可能になる。The operation of the present invention will be described with reference to FIG. First,
At a temperature equal to or lower than the softening point of frit glass, gas can pass through the inside of the panel to the outside of the panel even at the outer edge of the panel provided with the frit glass. Further, since the partition walls are not close to each other inside the panel as after sealing, the gas has a sufficient ease of gas passage. Therefore, the gas desorbed by heating is easily released to the outside of the panel, and the adsorbed gas in the panel is greatly reduced. When the protective layer is magnesium oxide, the dissociation of water from magnesium hydroxide is about 160 degrees Celsius.
Since the pressure is atmospheric pressure, a clean magnesium oxide surface layer can be obtained even under atmospheric pressure. Further, since the gas flow is directed from the inside of the panel to the outside by introducing the gas into the panel, the gas released inside the panel or the gas released from the frit glass tends to diffuse outside the panel,
Remarkably enhances the above effect. Furthermore, if the atmosphere outside the panel is a dry gas, gas adsorption from outside the panel can be eliminated. At a temperature below the softening point of frit glass,
By maintaining the temperature before the panels were sealed,
The above effect can be further enhanced. Subsequently, if the heating temperature is raised above the softening point of the frit glass and the panel is sealed and heated while being evacuated, the inside of the panel is kept in good condition because it is not exposed to the outside air. After this,
By enclosing the discharge gas, it is possible to sufficiently activate even a panel having a low gas passage easiness in the panel after sealing, and thus it is possible to obtain a gas discharge display panel having good characteristics.
【０００７】[0007]
【実施例】次に、本発明の第１の実施例を図面を参照し
て説明する。Next, a first embodiment of the present invention will be described with reference to the drawings.
【０００８】図４は本発明の第１の実施例に用いた交流
面放電型ガス放電表示素子の構造の断面図である。第１
のガラス基板（１）上にＡｌよりなる電極（３ａ）を蒸
着及びフォトリソグラフィにより形成し、その上に酸化
鉛を主成分とする誘電体グレーズ層（４ａ）を２０μｍ
形成し、更にその上に酸化マグネシウム保護層（５ａ）
を成膜した。放電の拡がりやクロストークを抑えるため
に、各放電セルを分離する隔壁（６ａ）を形成し、第１
の基板とした。同様に、第１の基板の電極（３ａ）に直
交するように配置された電極（３ｂ）及び誘電体グレー
ズ層（４ｂ）、酸化マグネシウム層（５ｂ）、隔壁（６
ｂ）を第２のガラス基板（２）に形成し、第２の基板と
した。第２の基板には、本発明の実施可能なように画素
部以外に排気用ガラス管（７）及びガス導入用ガラス管
（８）を取り付けている。第１及び第２の基板の外周部
に、貼り合わせ可能なように軟化温度４０５℃のガラス
フリット（９）をスクリーン印刷により塗布し、１２０
℃で乾燥し、４５０℃で溶融させた後位置合わせして仮
貼り合わせを行った。この段階では、パネル内のガス通
過の間隙は１００μｍ以上ある。次に排気用ガラス管
（７）を、図２の本発明の実施が可能な真空排気・ガス
導入装置（２０）に接続し、ガス導入用ガラス管（８）
をガス導入装置（３０）に接続した。パネルはオーブン
（４０）内に配置されている。まず、逃げ弁（２１）を
解放し、排気弁（２２）を閉じ、ガス導入弁（３１）を
調節してパネル内に２００ｓｃｃｍの乾燥窒素ガスを導
入したのち、オーブンの温度を上昇させてパネル温度を
３８０℃とし、１時間維持した。その後、パネル温度を
４５０℃に上げ、第１の基板と第２の基板とを封着し、
パネルを形成した。ガス流量を、パネル内部圧力によっ
てフリットガラスの散逸や第１及び第２の基板間の間隔
のばらつきが発生しないような値に下げ２０分維持し
た。その後、ガス導入弁（３１）及び逃げ弁（２１）を
閉じ、パネル温度を３８０℃に下げて、排気弁（２２）
を開けて真空排気した。この加熱排気過程を図１に示し
ている。この真空排気中に、四重極ガス分析器による残
留ガス分析を行ったところ、炭素系ガスの量が従来の真
空排気中の値に比べ著しく低下しており、到達真空度も
約１桁向上し、到達時間も５分の１以下となっていた。
この後、パネル内に放電ガスを封入するとガス放電表示
パネルが出来上がる。このようにして作製したガス放電
表示パネルは、従来の製造方法によるガス放電表示パネ
ルと比較して、放電特性及びパネル内の均一性が著しく
向上していた。FIG. 4 is a sectional view of the structure of an AC surface discharge type gas discharge display element used in the first embodiment of the present invention. First
An electrode (3a) made of Al is formed on the glass substrate (1) by vapor deposition and photolithography, and a dielectric glaze layer (4a) containing lead oxide as a main component thereon is 20 μm in thickness.
And a magnesium oxide protective layer (5a) formed thereon
Was deposited. In order to suppress the spread of discharge and crosstalk, a partition wall (6a) for separating each discharge cell is formed.
Substrate. Similarly, the electrode (3b) and the dielectric glaze layer (4b) arranged so as to be orthogonal to the electrode (3a) of the first substrate, the magnesium oxide layer (5b), and the partition wall (6).
b) was formed on the second glass substrate (2) to obtain a second substrate. On the second substrate, an exhaust glass tube (7) and a gas introducing glass tube (8) are attached in addition to the pixel portion so that the present invention can be carried out. A glass frit (9) having a softening temperature of 405 ° C. is applied to the outer peripheral portions of the first and second substrates by screen printing so that they can be bonded to each other.
It was dried at ℃, melted at 450 ℃, then aligned and temporarily bonded. At this stage, the gas passage gap in the panel is 100 μm or more. Next, the evacuation glass tube (7) is connected to the evacuation / gas introduction device (20) capable of carrying out the present invention shown in FIG. 2, and the gas introduction glass tube (8) is connected.
Was connected to a gas introduction device (30). The panel is placed in the oven (40). First, the relief valve (21) is opened, the exhaust valve (22) is closed, the gas introduction valve (31) is adjusted to introduce 200 sccm of dry nitrogen gas into the panel, and then the temperature of the oven is increased to increase the temperature of the panel. The temperature was 380 ° C. and maintained for 1 hour. After that, the panel temperature is raised to 450 ° C., the first substrate and the second substrate are sealed,
A panel was formed. The gas flow rate was lowered to a value such that the frit glass was not dissipated and the gap between the first and second substrates was not varied due to the internal pressure of the panel, and was maintained for 20 minutes. After that, the gas introduction valve (31) and the escape valve (21) are closed, the panel temperature is lowered to 380 ° C., and the exhaust valve (22).
Opened and evacuated. This heating and evacuation process is shown in FIG. Residual gas analysis by a quadrupole gas analyzer was performed during this evacuation, and the amount of carbon-based gas was significantly reduced compared to the value during conventional evacuation, and the ultimate vacuum was improved by about an order of magnitude. However, the arrival time was less than 1/5.
After that, when a discharge gas is filled in the panel, a gas discharge display panel is completed. The gas discharge display panel manufactured in this manner had significantly improved discharge characteristics and uniformity within the panel, as compared with a gas discharge display panel manufactured by a conventional manufacturing method.
【０００９】次に本発明の第２の実施例を図３を参照し
て説明する。上記、本発明の第１の実施例と同様に排気
用ガラス管（７）を有するパネルを作製した。このパネ
ルの排気用ガラス管（７）を真空排気・ガス導入装置
（２０）に接続し、パネルを排気管（５１）及びガス導
入管（５２）をもち充分密閉された外容器（５０）に入
れた。ガス導入管（５２）より、乾燥窒素を導入し、充
満させながらパネル温度を３８０℃とし、２時間維持し
た。その後、パネル温度を４５０℃に上げ第１の基板と
第２の基板とを封着し、パネルとした。封着を確認した
後、パネル温度を３８０℃に下げて、排気弁（２２）を
開けて真空排気した。四重極ガス分析器による炭素系ガ
スの量が従来例に比べ減少していた。また、到達真空度
も向上し到達時間も同様に減少した。この後、パネル内
に放電ガスを封入するとガス放電表示パネルが出来上が
る。このガス放電表示パネルも、第１の実施例と同様な
パネル特性の改善がみられた。Next, a second embodiment of the present invention will be described with reference to FIG. A panel having an exhaust glass tube (7) was prepared in the same manner as in the first embodiment of the present invention. The exhaust glass tube (7) of this panel is connected to a vacuum exhaust / gas introduction device (20), and the panel is put into an outer container (50) that has an exhaust pipe (51) and a gas introduction pipe (52) and is hermetically sealed. I put it in. Dry nitrogen was introduced through the gas inlet pipe (52) to keep the panel temperature at 380 ° C. for 2 hours while being filled. After that, the panel temperature was raised to 450 ° C. and the first substrate and the second substrate were sealed to form a panel. After confirming the sealing, the panel temperature was lowered to 380 ° C., the exhaust valve (22) was opened, and vacuum exhaust was performed. The amount of carbon-based gas measured by the quadrupole gas analyzer was smaller than that of the conventional example. In addition, the ultimate vacuum was improved and the arrival time was similarly reduced. After that, when a discharge gas is filled in the panel, a gas discharge display panel is completed. This gas discharge display panel also showed the same improvement in panel characteristics as in the first embodiment.
【００１０】また、上記２つの本発明を組み合わせて用
いた場合、効果は更に顕著であった。上記実施例を、乾
燥窒素以外の酸素、水素、希ガスあるいは窒素も含むこ
れらのガスの混合ガスで行っても同様な効果がみられ
た。Further, when the above two inventions are used in combination, the effect is more remarkable. Similar effects were observed when the above-mentioned example was carried out with a mixed gas of oxygen, hydrogen, a rare gas or a gas containing nitrogen other than dry nitrogen.
【００１１】[0011]
【発明の効果】以上説明したように、本発明は、第１，
第２の基板間に、誘電体に覆われた電極対、放電ガス及
び放電空間を有する交流駆動型ガス放電表示素子の製造
方法に於いて、放電ガスを封入するために第１、第２の
基板を封着する際、該基板に接続したガラス管を真空排
気・ガス導入装置に接続せしめ、パネル内部または周囲
を乾燥したガス雰囲気としながら該基板を封着温度以下
の温度で加熱し、その後パネルを封着温度に加熱して封
着し、引き続き真空排気しながら加熱温度を下げ活性化
したのち、放電ガスを封入することにより、大面積、高
精細、大容量のガス放電表示パネルでも充分な活性化が
容易になり、良好な表示特性を有するガス放電表示パネ
ルを得ることが可能である。本発明は、上述のガス放電
表示素子の製造方法を用いることにより、良好な発光特
性，信頼性を有するガス放電表示パネルを得ることを可
能にしたものである。As described above, according to the present invention,
In a method of manufacturing an AC drive type gas discharge display device having an electrode pair covered with a dielectric material, a discharge gas and a discharge space between a second substrate, first and second electrodes are provided to seal the discharge gas. When sealing the substrate, the glass tube connected to the substrate is connected to a vacuum exhaust / gas introduction device, and the substrate is heated at a temperature not higher than the sealing temperature while maintaining a dry gas atmosphere inside or around the panel, and then. The panel is heated to the sealing temperature for sealing, the heating temperature is lowered while being evacuated and activated, and then the discharge gas is filled in, so that a large-area, high-definition, large-capacity gas discharge display panel is sufficient. It is possible to obtain a gas discharge display panel having good display characteristics by facilitating various activations. INDUSTRIAL APPLICABILITY The present invention makes it possible to obtain a gas discharge display panel having good emission characteristics and reliability by using the above-described method for manufacturing a gas discharge display element.
【図１】本発明によるガス放電表示パネルの加熱排気過
程を示した図である。FIG. 1 is a diagram showing a process of heating and exhausting a gas discharge display panel according to the present invention.
【図２】本発明のの一実施例のガス放電表示パネルとそ
の製造装置を示した図である。FIG. 2 is a diagram showing a gas discharge display panel and an apparatus for manufacturing the same according to one embodiment of the present invention.
【図３】本実施例の一実施例のガス放電表示パネルとそ
の製造装置を示した図である。FIG. 3 is a diagram showing a gas discharge display panel and a manufacturing apparatus therefor according to an embodiment of the present invention.
【図４】本発明の一実施例が可能なガス放電表示パネル
の断面図である。FIG. 4 is a sectional view of a gas discharge display panel according to an embodiment of the present invention.
【図５】従来のガス放電表示パネルの断面図である。FIG. 5 is a cross-sectional view of a conventional gas discharge display panel.
【図６】従来のガス放電表示パネルの加熱排気過程を示
した図である。FIG. 6 is a view showing a heating and exhausting process of a conventional gas discharge display panel.
１ 第１のガラス基板 ２ 第２のガラス基板 ３ａ，３ｂ 電極 ４ａ，４ｂ 誘電体グレーズ層 ５ａ，５ｂ 酸化マグネシウム保護層 ６ａ，６ｂ 隔壁 ７ 排気用ガラス管 ８ ガス導入用ガラス管 ９ 封着用フリットガラス ２０ 真空排気・ガス導入装置 ２１ 逃げ弁 ２２ 排気弁 ３０ ガス導入装置 ３１ ガス導入弁 ４０ オーブン ５０ 外容器 ５１ 排気管 ５２ ガス導入管 1 1st glass substrate 2 2nd glass substrate 3a, 3b Electrode 4a, 4b Dielectric glaze layer 5a, 5b Magnesium oxide protective layer 6a, 6b Partition wall 7 Exhaust glass tube 8 Gas introduction glass tube 9 Sealing frit glass 20 vacuum exhaust / gas introducing device 21 escape valve 22 exhaust valve 30 gas introducing device 31 gas introducing valve 40 oven 50 outer container 51 exhaust pipe 52 gas introducing pipe
Claims (1)
れた電極対、放電ガス及び放電空間を有する交流駆動型
ガス放電表示素子の製造方法に於いて、第１の基板と第
２の基板とを封着してパネルを形成し、これら基板間に
形成された空間に放電ガスを封入する際、該基板に接続
したガラス管を真空排気・ガス導入装置に接続せしめ、
パネル内部または周囲を乾燥したガス雰囲気としながら
該基板を封着温度以下の温度で加熱し、その後パネルを
封着温度に加熱して封着し、引き続き真空排気しながら
加熱温度を下げ活性化したのち、パネル内に放電ガスを
封入することを特徴とするガス放電表示パネルの製造方
法。1. A method of manufacturing an AC drive type gas discharge display device having an electrode pair covered with a dielectric material, a discharge gas and a discharge space between a first substrate and a second substrate. When a panel is formed by sealing the second substrate and the discharge gas is sealed in the space formed between the substrates, the glass tube connected to the substrate is connected to the vacuum exhaust / gas introduction device,
The substrate was heated at a temperature not higher than the sealing temperature while keeping the inside or the periphery of the panel in a dry gas atmosphere, and then the panel was heated to the sealing temperature for sealing, and then the heating temperature was lowered and activated while evacuating. After that, a method for manufacturing a gas discharge display panel is characterized in that a discharge gas is filled in the panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3383792A JPH05234512A (en) | 1992-02-21 | 1992-02-21 | Manufacture of gas electric discharge display panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3383792A JPH05234512A (en) | 1992-02-21 | 1992-02-21 | Manufacture of gas electric discharge display panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05234512A true JPH05234512A (en) | 1993-09-10 |
Family
ID=12397605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3383792A Withdrawn JPH05234512A (en) | 1992-02-21 | 1992-02-21 | Manufacture of gas electric discharge display panel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05234512A (en) |
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Legal Events
| Date | Code | Title | Description |
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| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990518 |