JP3165453B2 - Method for manufacturing plasma display panel - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a plasma display panel (PDP), and more particularly, to an exhaust process for cleaning an internal discharge space.

[0002] In PDPs, the residual impurities in the discharge space affect the reliability and lifetime of the display operation. Therefore, it is necessary to form a high-quality discharge space in which residual impurities are removed as much as possible.

[0003]

2. Description of the Related Art As is well known, a PDP has a pair of transparent substrates on a display surface side and a rear surface side disposed opposite to each other with a discharge space provided therebetween, and is defined at an intersection of an electrode group provided inside the transparent substrate. The discharge cells are configured to selectively emit light.

In manufacturing a PDP, a plurality of band-shaped electrodes, a dielectric layer, and the like are sequentially formed on the respective surfaces of a pair of glass substrates, and both glass substrates are arranged facing each other with a gap of about 100 μm. The surroundings are sealed with sealing glass.

Then, after the inside is cleaned by an exhaust process, a discharge gas is sealed so as to have a predetermined pressure.
Finish the DP assembly.

Conventionally, as an exhaust process, a pair of glass substrates are heated (baked) to about 350 ° C., and the internal gas is sucked from one vent hole provided in the rear glass substrate using a vacuum pump. I was

[0007]

In particular, in a large-sized PDP and a PDP having a partition for partitioning a discharge space,
It is difficult to evacuate the part away from the vent, and the air tends to remain inside. Further, the impurity gas adsorbed on the inner surface or the impurities contained in the inner surface layer could not be sufficiently removed. That is, there is a problem that the internal cleaning is likely to be insufficient.

[0008] If the inside is not sufficiently cleaned, the discharge gas to be sealed thereafter is mixed with the air and impurities remaining inside, so that the composition of the discharge gas changes and the display operation becomes unstable.

The present invention has been made in view of the above problems, and has as its object to enable sufficient cleaning of an internal space.

[0010]

According to a first aspect of the present invention, there is provided a manufacturing method, wherein a pair of substrates provided with partition walls for partitioning a discharge space are arranged to face each other, and at least two diagonal corners of one substrate are provided at two corners. The periphery is hermetically sealed with two or more air holes provided one by one, the internal space is exhausted by the air hole in one corner, and the internal space is cleaned from the air hole in the other corner. This is a method for manufacturing a plasma display panel in which a discharge is generated in the internal space after introducing a use gas.

[0011] The manufacturing method according to a second aspect of the present invention is the manufacturing method according to the second aspect.
The two ventilation holes 41 and 42 are alternately used for exhausting the internal space 30 and introducing the cleaning gas 60.

According to a third aspect of the present invention, there is provided a plasma display panel manufacturing method, wherein a pair of substrates provided with partition walls for partitioning a discharge space are opposed to each other, and two diagonals of one of the substrates are provided .
In a state where at least one vent hole is provided in each of the two corners , the periphery is hermetically sealed, and the pair of substrates is heated.
To perform evacuation of the interior space by one of the corners of the vents in the state, in which subsequently introducing other clean gas from the corner of the vent hole to the inner space, the discharge occurs in this internal space .

[0013] the production method according to the invention of claim 4, wherein Kiyoshi
A discharge gas is used as a cleaning gas.

[0014]

With the pair of substrates 11 and 21 being heated, the one and the other ventilation holes 41 and 42 are alternately switched so that the exhaust of the internal space 30 and the introduction of the cleaning gas 60 are performed sequentially or in parallel. Will be

The cleaning gas 60 permeates the internal space 30 and precipitates impurities in the internal space 30 by a physical action such as collision with the inner surface or a chemical reaction. The deposited impurities are discharged to the outside together with the cleaning gas 60.

The impurities are further precipitated in the internal space 30 by the cleaning by the discharge in the internal space 30.

[0017]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 2 is a sectional view of the PDP 1 according to the present invention.

The PDP 1 comprises a display-side glass substrate 11, a rear-side glass substrate 21, a pair of discharge sustaining electrodes 12 composed of a pair of transparent electrodes extending in the horizontal direction, a bus electrode 15, a dielectric layer 17 composed of low-melting glass, Protective film 1 made of MgO
8, a grid-like partition wall 19 composed of a horizontal wall 19a and a vertical wall 19b, an address electrode 22 and a partition wall 25 extending in the vertical direction, a phosphor 28 provided in a predetermined arrangement pattern, and glass substrates 11 and 21. Sealing glass 3 to seal around
The discharge space 30 is filled with a discharge gas in which, for example, a mixture of neon and xenon is mixed.

In the manufacturing stage of the PDP 1, a pair of ventilation holes 41 and 42 (see FIG. 1) are provided in the glass substrate 21 on the rear side for the exhaust processing described later.

FIG. 1 shows an exhaust device 5 for carrying out the present invention.
It is a figure which shows the structure of No. 0 typically.

The exhaust device 50 is provided with a baking furnace 51 capable of heating a large number of PDPs 1a at a stage after the sealing process with the sealing glass 31 at a time, and a PDP via a pipe (not shown).
Vacuum pump 52 for sucking gas in discharge space (internal space) 30a, valve device 53, gas cylinder 54 filled with cleaning gas 60, pressure regulating valve 55, and power supply for applying discharge voltage to PDP 1a It comprises a device 56.

As the cleaning gas 60, a gas that does not contain impurities such as moisture and is hardly adsorbed on the inner surface, for example, the above-described discharge gas, nitrogen, oxygen, argon, xenon, or the like can be used.

Next, the exhaust process for the PDP 1a will be described.

As described above, the glass substrate 21 is provided with the ventilation holes 41 and 42 at two diagonal corners of the four corners so as to avoid the display area.
Glass tubes 43 and 44 are attached to 1 and 42, respectively.

First, the PDP 1a is placed in the baking furnace 51, and the glass tubes 43, 44 are connected to the piping connected to the valve device 53 by glass processing or the like.

Next, the flow path to the gas cylinder 54 is closed by switching the internal flow path of the valve device 53. Then, the gas in the internal space 30 is sucked from one of the ventilation holes (for example, the ventilation hole 41) using the vacuum pump 52. That is, the exhaust is started.

When the internal space 30 is evacuated to about 10 ^-4 [Torr], heating is started by the baking furnace 51 while continuing the evacuation, and the temperature of the PDP 1a is raised. The heating makes the movement of the residual gas in the internal space 30 active, and the residual gas is easily sucked by the vacuum pump 52.

When the temperature in the baking furnace 51 reaches about 350 ° C., a flow path from the gas cylinder 54 to the other ventilation hole (for example, the ventilation hole 42) is opened while maintaining the temperature, and a solid line arrow in FIG. As shown, a cleaning gas 60 is introduced into the internal space 30 in parallel with the exhaust.

The introduced cleaning gas 60 is supplied to the vent 42
While flowing to the inside space 30 toward the vent hole 41, the residual gas in the inside space 30 is absorbed and the inside space 30 is cleaned.

After the exhaust of the internal space 30 and the introduction of the cleaning gas 60 are continued for about 30 minutes, the internal flow path of the valve device 53 is switched, and as shown by the broken line arrow in FIG. The cleaning gas 60 is introduced into the internal space 30 from the ventilation hole 41 while exhausting air from the ventilation hole 42. This allows
The inside of the internal space 30 is uniformly cleaned.

Thereafter, every 30 minutes, the ventilation holes 41 and 42 are alternately switched between the exhaust hole and the gas introduction hole, and the exhaust of the internal space 30 and the introduction of the cleaning gas 60 are performed in parallel.
The cleaning of the internal space 30 is continued for about 2 hours.

Next, the introduction of the cleaning gas 60 is stopped, and the PDP 1a is naturally cooled while evacuating. After the PDP 1a returns to room temperature, the exhaust is stopped.

Subsequently, when the cleaning gas 60 is a discharge gas, the cleaning gas 60 is introduced into the internal space 30, and when the cleaning gas 60 is other than the discharge gas, the discharge gas is introduced from a gas cylinder (not shown). .

Then, a predetermined voltage is applied to the PDP 1 a via the belt-shaped conductive members 71 and 72 by the power supply device 56, thereby causing a discharge in the internal space 30. Thereby, impurities are precipitated from the inner surface layer of the inner space 30.

Thereafter, after the discharge gas is once exhausted, the discharge gas is again supplied to the internal space 30 by 500 to 600 [T
orr]. Then, the glass tubes 43 and 44 are blown so as to close the ventilation holes 41 and 42 by glass processing, and the assembly of the PDP 1 is completed.

According to the above-described embodiment, since the flow of the cleaning gas 60 is generated in the internal space 30, the internal space 30 can be uniformly cleaned in a short time.
Impurities can be efficiently removed by using both the heating and discharging of a.

In the above-described embodiment, the exhaust gas and the introduction of the cleaning gas 60 are described as being performed in parallel.
After exhausting from one of the vents 41, the exhaust may be stopped temporarily and the cleaning gas 60 may be introduced from the other vent 42.

In the above embodiment, the glass substrate 21 may be provided with three or more air holes. Further, the present invention is not limited to the surface discharge type PDP 1, but can also be applied to the manufacture of a counter discharge type PDP and a segment display type PDP.

[0040]

According to the present invention, the internal space can be sufficiently and uniformly cleaned.

According to the second aspect of the present invention, the efficiency of cleaning the internal space can be improved.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing a configuration of an exhaust device for carrying out the present invention.

FIG. 2 is a sectional view of a PDP according to the present invention.

[Explanation of symbols]

 Reference Signs List 1 PDP (plasma display panel) 11, 21 Glass substrate (substrate) 30 Discharge space (internal space) 41, 42 Vent 60 Cleaning gas

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hiroyuki Nakahara 1015 Uedanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture Inside Fujitsu Limited (56) References JP-A-3-25826 (JP, A) JP-A-55-76545 (JP, A) Japanese Utility Model Showa 55-21556 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) H01J 9/38 H01J 11/02

Claims (4)

(57) [Claims] 1. A state in which a pair of substrates provided with partitions for partitioning a discharge space are arranged to face each other, and at least two vent holes are provided at least one at two diagonal corners of one of the substrates. The surrounding area is hermetically sealed, the internal space is exhausted through the vent hole in one corner, and after the cleaning gas is introduced into the internal space through the vent hole in the other corner, discharge occurs in the internal space. A method for manufacturing a plasma display panel. Wherein the pre-Symbol vents, the 請 Motomeko 1 exhaust of the internal space and Ru used alternately switched to the introduction of the cleaning gas
A manufacturing method of the plasma display panel according to the above. 3. A pair of substrates provided with partition walls for partitioning a discharge space are opposed to each other, and a small number of diagonal corners of one of the substrates are provided.
In a state where at least one air hole is provided at least one at a time , the peripheral portion is hermetically sealed, and the pair of substrates is heated.
It was evacuated internal space by one of the corners of the vents, the
The other corner of the introduced cleaning gas from the vent hole to the interior space, a method of manufacturing a plasma display panel, characterized in that the discharge occurs in this internal space after. 4. A use of a discharge gas as the cleaning gas 請
The method for manufacturing a plasma display panel according to claim 1.