JPH05232041A - External appearance inspecting device and external appearance inspecting method for solder - Google Patents

External appearance inspecting device and external appearance inspecting method for solder

Info

Publication number
JPH05232041A
JPH05232041A JP3593192A JP3593192A JPH05232041A JP H05232041 A JPH05232041 A JP H05232041A JP 3593192 A JP3593192 A JP 3593192A JP 3593192 A JP3593192 A JP 3593192A JP H05232041 A JPH05232041 A JP H05232041A
Authority
JP
Japan
Prior art keywords
solder
electronic component
camera
light
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3593192A
Other languages
Japanese (ja)
Inventor
Hiroshi Murata
浩 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3593192A priority Critical patent/JPH05232041A/en
Publication of JPH05232041A publication Critical patent/JPH05232041A/en
Pending legal-status Critical Current

Links

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PURPOSE:To provide a means capable of judging accurately the quality of solder to adhere an electrode of a micro electronic part, such as, particularly, a microscopic capacitor chip onto a substrate. CONSTITUTION:An external appearance inspecting device is composed of the first light source 6 to radiate light from above toward an electronic part 5 soldered onto a substrate 1, the second light source 6 to radiate light from the oblique upper direction toward the length direction N of this electronic part 5 and a camera 8 arranged in the oblique upper direction on the opposite side of this second light source 7 so as to observe this electronic part 5.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は半田の外観検査装置及び
外観検査方法に係り、両側部の電極が基板に半田付けさ
れた電子部品に対して上方及び斜上方から光を照射し、
これを斜上方のカメラにより観察して、半田付け状態の
良否を判定するようにしたものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solder visual inspection apparatus and a visual inspection method, and irradiates an electronic component whose electrodes on both sides are soldered to a substrate with light from above and obliquely above.
This is observed by a camera obliquely above and the quality of the soldering state is determined.

【0002】[0002]

【従来の技術】基板に実装された電子部品の電極は一般
に半田付けがなされるが、その中には半田無し、不ヌレ
などの半田状態が不良のものが含まれており、したがっ
て電子部品を基板に実装した後で半田の外観検査が行わ
れる。そこで本出願人は、先にカメラを使用した半田付
状態の外観検査方法を提案した(特開平2−21248
号公報)。
2. Description of the Related Art Electrodes for electronic components mounted on a board are generally soldered, but these include those with a poor soldering state such as no solder or non-wetting, and therefore After mounting on the board, a visual inspection of the solder is performed. Therefore, the present applicant has previously proposed a visual inspection method in a soldering state using a camera (Japanese Patent Laid-Open No. 21248/1990).
Publication).

【0003】この方法は、その第5図に示されているよ
うに、電子部品の電極Qが存在すると予想される位置の
内方に光学走査のスタートラインm1n1を、また外方
にゴールラインm2n2を設定し、スタートラインm1
n1からゴールラインm2n2へ向かって光学走査し、
輝度が明から暗に切り換わる位置を検出することによ
り、電極Qの端面Qbを検出する。そして検出された端
面Qbの外方に、その第2図に示されるチェックエリア
Aを設定し、上方の光源7から光を照射して、上方のカ
メラ6によりその画像を取り込み、チェックエリアAの
画像データから、半田付状態の良否を判定するようにな
っていた。
In this method, as shown in FIG. 5, the optical scanning start line m1n1 is located inward of the position where the electrode Q of the electronic component is expected to exist, and the goal line m2n2 is located outward. Set the start line m1
Optical scanning from n1 toward goal line m2n2,
The end surface Qb of the electrode Q is detected by detecting the position where the brightness switches from bright to dark. Then, a check area A shown in FIG. 2 is set outside the detected end surface Qb, light is emitted from an upper light source 7, and the image is captured by an upper camera 6 to check the check area A. The quality of the soldering state has been determined from the image data.

【0004】[0004]

【発明が解決しようとする課題】ところで近年、基板は
益々高密度化する傾向にあり、これに伴ってコンデンサ
チップなどの電子部品は益々小型化しており、一辺が
0.5mm若しくはそれよりも小さい超小型の電子部品
も基板に実装されるようになってきた。このような超小
型電子部品にあっては、その両側部の電極もきわめて小
さいことから、上記従来手段のようにこの電極の画像を
カメラに取り込んだ場合、この電極の輝度はきわめて不
安定であって上記端面Qbを正確に検出しづらく、ひい
てはチェックエリアAの設定位置も狂いやすく、その結
果半田付状態の良否を誤判定しやすい問題点があった。
また電極を基板に接着する半田もきわめて少量であるた
め、チェックエリアAもきわめて小さく設定せねばなら
ないが、チェックエリアAを小さくすると、入手される
輝度データなどの画像データも少なくなり、的確な良否
判定を行いにくい問題点があった。
By the way, in recent years, substrates are becoming more and more dense, and along with this, electronic parts such as capacitor chips are becoming smaller and smaller, and one side is 0.5 mm or smaller. Ultra-small electronic components have also been mounted on boards. In such a microelectronic component, the electrodes on both sides are also extremely small. Therefore, when the image of this electrode is captured by the camera as in the conventional means, the brightness of this electrode is extremely unstable. As a result, it is difficult to accurately detect the end surface Qb, and the set position of the check area A is likely to be misaligned. As a result, there is a problem that the quality of the soldering state may be erroneously determined.
Also, since the amount of solder that adheres the electrodes to the substrate is extremely small, the check area A must be set to be extremely small. There was a problem that it was difficult to judge.

【0005】したがって本発明は、電子部品、殊に超小
型の電子部品の画像データを十分に取り込んで、その半
田付状態の良否を的確に判定できる手段を提供すること
を目的とする。
Therefore, it is an object of the present invention to provide means for sufficiently capturing image data of an electronic component, particularly a microminiature electronic component, and accurately determining the quality of the soldered state.

【0006】[0006]

【課題を解決するための手段】このために本発明は、両
側部の電極を基板に半田付けされた電子部品に向かって
上方から光を照射する第1の光源と、この電子部品の長
さ方向における斜上方向から光を照射する第2の光源
と、この第2の光源と反対側の斜上方に設けられてこの
電子部品を斜上方から観察するカメラとを設けている。
To this end, the present invention provides a first light source which emits light from above toward an electronic component whose electrodes on both sides are soldered to a substrate, and the length of the electronic component. A second light source that emits light obliquely from above, and a camera that is provided obliquely above and opposite to the second light source and that observes the electronic component from above obliquely.

【0007】[0007]

【作用】上記構成によれば、上方及び電子部品の長さ方
向における斜上方から光を照射し、反対側の斜上方のカ
メラにより半田及び電極を含むチェックエリアの画像を
取り込んで、その画像データから半田の外観の良否を判
定する。
According to the above structure, light is emitted from above and obliquely in the lengthwise direction of the electronic component, the image of the check area including the solder and the electrode is captured by the camera on the opposite obliquely upper side, and the image data is obtained. The quality of the appearance of the solder is judged from.

【0008】[0008]

【実施例】以下、図面を参照しながら本発明の実施例を
説明する。図1は電子部品の外観検査装置の斜視図であ
って、1はXテーブル2及びYテーブル3から成る位置
決め部4上に位置決めされた基板であり、その上面に電
子部品5が実装されている。この電子部品5は、両側部
に電極P,Qを有するコンデンサチップである。基板1
の上方にはリング状の第1の光源6が設けられており、
また電子部品5の長さ方向Nにおける斜上方には、ハロ
ゲンランプのような第2の光源7が設けられている。ま
たこの第2の光源7と反対側の斜上方にはカメラ8が設
けられている。図2において、電子部品5の両側部の電
極P,Qは、半田13により基板1の電極11に接着さ
れている。次に上記装置による半田の外観検査方法を説
明する。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of an appearance inspection apparatus for electronic components, in which 1 is a substrate positioned on a positioning unit 4 composed of an X table 2 and a Y table 3, and an electronic component 5 is mounted on the upper surface thereof. .. The electronic component 5 is a capacitor chip having electrodes P and Q on both sides. Board 1
A ring-shaped first light source 6 is provided above the
A second light source 7 such as a halogen lamp is provided obliquely above the electronic component 5 in the length direction N. A camera 8 is provided obliquely above the second light source 7. In FIG. 2, the electrodes P and Q on both sides of the electronic component 5 are bonded to the electrodes 11 of the substrate 1 with solder 13. Next, a method for inspecting the appearance of solder by the above device will be described.

【0009】図3(a)はカメラ8により斜上方から観
察した電子部品5の全体画像、図3(b)は観察状態の
側面図である。図3(a)において、Aはチェックエリ
アであり、電極Q及び半田13を含むように大きく設定
されており、このようにチェックエリアAを大きく設定
することにより、良否判定のための十分な画像データを
入手することができる。このチェックエリアAの大きさ
や位置は、既知の電子部品座標データや寸法データに基
いて設定される。電極P,Qおよび半田13は金属であ
ってその表面は鏡面であり、光を強く反射する。
FIG. 3A is an overall image of the electronic component 5 observed obliquely from above by the camera 8, and FIG. 3B is a side view of the observation state. In FIG. 3A, A is a check area, which is set large so as to include the electrodes Q and the solder 13. By setting the check area A large in this way, a sufficient image for the quality judgment can be obtained. Data is available. The size and position of the check area A are set based on known electronic component coordinate data and dimension data. The electrodes P, Q and the solder 13 are metal and their surfaces are mirror surfaces, and strongly reflect light.

【0010】図3(b)において、L1〜L4は上方の
光源6から照射された光、L1’,L2’は斜上方の光
源7から照射された光である。またこの半田13は電極
Qを基板1の電極11にしっかり接着しており、良品で
ある。電極Qに垂直に照射された光L1は真上へ反射さ
れ、カメラ8には入射しないので暗く観察される。同様
に半田13の頂部に入射した光L2も真上へ反射されて
カメラ8には入射しないので、暗く観察される。また半
田13の頂部近くの傾斜面に入射した光L3は斜上方へ
反射されてカメラ8に入射するので明るく観察され、ま
た半田13の下部に入射した光L4は斜下方に反射され
てカメラ8に入射せず、暗く観察される。また斜上方か
ら電極Qに照射された光L1’は斜上方へ反射されてカ
メラ8に入射し、明るく観察されるが、半田13に入射
した光L2’は上方へ反射され、カメラ8には入射しな
い。なお電子部品5の上面5aは暗色であり、したがっ
てこの上面に入射した光は吸収されるのでカメラ8には
暗く観察される。また同様に、基板1は暗色であって光
を吸収し、また電極11は電子部品5や半田13の影に
なるので、カメラ8には暗く観察される。
In FIG. 3B, L1 to L4 are lights emitted from the upper light source 6, and L1 'and L2' are lights emitted from the obliquely upper light source 7. The solder 13 is a good product because the electrode Q is firmly adhered to the electrode 11 of the substrate 1. The light L1 emitted perpendicularly to the electrode Q is reflected right above and does not enter the camera 8, so that it is observed dark. Similarly, the light L2 that has entered the top of the solder 13 is also reflected directly above and does not enter the camera 8, so it is observed dark. The light L3 incident on the inclined surface near the top of the solder 13 is reflected obliquely upward and enters the camera 8, so that it is observed brightly, and the light L4 incident on the lower portion of the solder 13 is reflected obliquely downward and reflected by the camera 8. It is not incident on and is observed dark. Further, the light L1 ′ irradiated on the electrode Q from obliquely upward is reflected obliquely upward and is incident on the camera 8 and is observed brightly, but the light L2 ′ incident on the solder 13 is reflected upward and is reflected on the camera 8. Does not enter. The upper surface 5a of the electronic component 5 has a dark color, and therefore the light incident on this upper surface is absorbed, so that it is observed as dark by the camera 8. Similarly, since the substrate 1 has a dark color and absorbs light, and the electrode 11 is a shadow of the electronic component 5 and the solder 13, it is observed dark by the camera 8.

【0011】図3(c)は、上記のようにしてカメラ8
に取り込まれたチェックエリアAの画像を示している。
上述のように、光L1’はカメラ8に入射するので電極
Qは明るく観察され、また光L3もカメラ8に入射する
ので半田13の上部は半月状に明るく観察される。これ
に対し、光L4はカメラ8に入射しないので、半田13
の下部は暗く観察される。
FIG. 3C shows the camera 8 as described above.
The image of the check area A taken in is shown.
As described above, since the light L1 ′ is incident on the camera 8, the electrode Q is brightly observed, and since the light L3 is also incident on the camera 8, the upper portion of the solder 13 is brightly observed in a half-moon shape. On the other hand, since the light L4 does not enter the camera 8, the solder 13
The lower part of is observed dark.

【0012】図3(d)は、図3(c)の縦軸YLにお
ける輝度の累積曲線aと、この累積曲線aの立ち下り部
分a’の微分曲線bを示している。立ち下がり部分a’
はやや緩勾配であり、したがって微分曲線bは山形にな
っている。なおこの微分曲線bは正負を逆にしている。
FIG. 3D shows a luminance cumulative curve a on the vertical axis YL of FIG. 3C, and a differential curve b of a falling portion a'of the cumulative curve a. Falling part a '
The gradient is a little gentle and therefore the differential curve b has a mountain shape. The differential curve b has the positive and negative sides reversed.

【0013】図4(a)(b)は、半田13が無しの不
良品を示している。この場合、図4(b)に示すよう
に、斜上方から電極Qに照射された光L1’はカメラ8
に入射するが、真上から照射された光L1は真上に反射
されてカメラ8に入射しない。したがってその画像は図
4(c)に示すとおりであって電極Qだけが明るい。ま
たその輝度特性は図4(d)に示すとおりであって、輝
度の累積曲線aの立ち下がり部分a’はほぼ垂直であ
り、したがって微分曲線bは鋭角的に直立している。
FIGS. 4A and 4B show defective products without the solder 13. In this case, as shown in FIG. 4B, the light L1 ′ radiated on the electrode Q from obliquely above is reflected by the camera 8
However, the light L1 emitted from directly above is reflected directly above and does not enter the camera 8. Therefore, the image is as shown in FIG. 4C, and only the electrode Q is bright. The luminance characteristic is as shown in FIG. 4 (d), and the falling portion a'of the cumulative curve a of luminance is almost vertical, and therefore the differential curve b stands upright at an acute angle.

【0014】また図5(a)(b)は半田不ヌレ(不良
品)を示している。この場合、電極Qに斜上方から照射
された光L1’と、上方から半田13の右側の傾斜部に
照射されたL1だけがカメラ8に入射し、他の光は直上
や側方に反射されてカメラ8には入射しない。したがっ
てその画像は図5(c)に示すとおりであり、またその
輝度特性は図5(d)に示すとおりである。この場合、
図示するように累積曲線aは2個のピークがあり、2つ
の微分曲線b1,b2が得られる。このものも、図3
(d)に示すものと同様に、立ち下がり部分a’はほぼ
垂直であり、したがって微分曲線b1は鋭角的に直立し
ている。
5A and 5B show solder non-wetting (defective product). In this case, only the light L1 ′ emitted obliquely from above the electrode Q and the light L1 emitted from the above to the inclined portion on the right side of the solder 13 are incident on the camera 8, and the other light is reflected right above or sideways. Does not enter the camera 8. Therefore, the image is as shown in FIG. 5 (c), and the luminance characteristic is as shown in FIG. 5 (d). in this case,
As shown in the figure, the cumulative curve a has two peaks, and two differential curves b1 and b2 are obtained. This one is also shown in Figure 3.
Similar to that shown in (d), the falling portion a ′ is almost vertical, and therefore the differential curve b1 is upright at an acute angle.

【0015】半田付状態の良否判定は、図3(c)〜図
5(c)に示す輝度分布の画像データ、又は図3(d)
〜図5(d)に示す累積曲線a若しくは微分曲線bに基
いて行われる。輝度分布に基づく良否判定は、例えば次
のようにして行われる。すなわち図3(c)に示すチェ
ックエリアAの輝度分布をマスターパターンとしてコン
ピュータに登録しておき、検査対象の電子部品5を観察
して得られたチェックエリアの画像を、このマスターパ
ターンとマッチッングさせ、マッチッングが高い場合は
良品と判定し、マッチッグ率が低い場合は不良品と判定
する。勿論、特開平2−21248号公報で開示した方
法と同様の方法、すなわち明るい部分と暗い部分の比率
から良否を判定してもよく、その判定方法は種々考えら
れる。
The quality of the soldered state can be determined by the image data of the luminance distribution shown in FIGS. 3 (c) to 5 (c) or FIG. 3 (d).
~ This is performed based on the cumulative curve a or the differential curve b shown in Fig. 5 (d). The quality determination based on the brightness distribution is performed as follows, for example. That is, the brightness distribution of the check area A shown in FIG. 3C is registered in the computer as a master pattern, and the image of the check area obtained by observing the electronic component 5 to be inspected is matched with this master pattern. If the matching is high, it is determined as a good product, and if the matching rate is low, it is determined as a defective product. Of course, a method similar to the method disclosed in JP-A-2-21248, that is, the quality may be determined from the ratio of the bright portion and the dark portion, and various determination methods can be considered.

【0016】また累積曲線aに基づく良否判定は、立ち
下がり部分a’の勾配の大きさにより行う。勿論、図3
(d)の累積曲線aをマスター曲線としてコンピュータ
に登録しておき、検査対象の電子部品5を観察して得ら
れた累積曲線をこのマスター曲線と比較することによ
り、良否判定を行ってもよい。また微分曲線bに基づく
良否判定は、その先鋭度により行う。勿論このものも、
図3(d)の微分曲線bをマスター曲線としてコンピュ
ータに登録しておき、検査対象の電子部品5を観察して
得られた微分曲線をこのマスター曲線と比較することに
より行ってもよい。勿論、図5に示す半田13の場合、
累積曲線aは2つのピークがあり、且つ2つの微分曲線
b1,b2が存在するので、この特徴から不良品と判定
してもよい。
The quality judgment based on the cumulative curve a is performed by the magnitude of the slope of the falling portion a '. Of course, FIG.
The cumulative curve a in (d) may be registered in the computer as a master curve, and the quality curve may be determined by comparing the cumulative curve obtained by observing the electronic component 5 to be inspected with this master curve. .. The quality determination based on the differential curve b is performed based on the sharpness. Of course, this one also
The differential curve b in FIG. 3D may be registered in a computer as a master curve, and the differential curve obtained by observing the electronic component 5 to be inspected may be compared with this master curve. Of course, in the case of the solder 13 shown in FIG.
Since the cumulative curve a has two peaks and two differential curves b1 and b2 exist, it may be determined as a defective product based on this feature.

【0017】このように良否判定方法はいくつかあり、
何れか1つの方法により良否判定してもよく、複数の方
法により総合的に良否判定をしてもよいものであるが、
本発明者の実験結果によれば、微分曲線bが、良品半田
と不良品半田を最も区別しやすく、最も的確に良否判定
を行える。勿論、図3(c)〜図5(c)に示す画像デ
ータの処理方法は、図3(d)〜図5(d)に示す方法
に限定されないのであって、画像データをどのように処
理して良否判定データとして使用するかは更に種々考え
られる。
As described above, there are several pass / fail judgment methods.
The quality may be determined by any one method, and the quality may be comprehensively determined by a plurality of methods.
According to the results of experiments conducted by the present inventor, the differential curve b is the easiest to distinguish between good solder and bad solder, and the quality determination can be performed most accurately. Of course, the method of processing the image data shown in FIGS. 3 (c) to 5 (c) is not limited to the method shown in FIGS. 3 (d) to 5 (d). It is possible to further consider whether or not to use it as the pass / fail judgment data.

【0018】[0018]

【発明の効果】以上説明したように本発明によれば、チ
ェックエリアを大きく設定し、十分な画像データを入手
して、半田付状態の良否を的確に判定できるものであ
り、殊に超小型の電子部品を基板に接着する少量の半田
の場合も、十分な画像データを入手して良否判定を行う
ことができる。
As described above, according to the present invention, the check area can be set large, sufficient image data can be obtained, and the quality of the soldering state can be accurately determined. Even in the case of a small amount of solder that adheres the electronic component to the substrate, it is possible to obtain sufficient image data and make a pass / fail judgment.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る外観検査装置の斜視図FIG. 1 is a perspective view of an appearance inspection apparatus according to the present invention.

【図2】本発明に係る外観検査装置の側面図FIG. 2 is a side view of the appearance inspection apparatus according to the present invention.

【図3】(a)本発明に係る検査状態の平面図 (b)本発明に係る検査状態の断面図 (c)本発明に係る画像図 (d)本発明に係る輝度特性図3A is a plan view of an inspection state according to the present invention, FIG. 3B is a sectional view of the inspection state according to the present invention, FIG. 3C is an image diagram according to the present invention, and FIG. 3B is a luminance characteristic diagram according to the present invention.

【図4】(a)本発明に係る検査状態の平面図 (b)本発明に係る検査状態の断面図 (c)本発明に係る画像図 (d)本発明に係る輝度特性図4A is a plan view of an inspection state according to the present invention, FIG. 4B is a sectional view of the inspection state according to the present invention, FIG. 4C is an image diagram according to the present invention, and FIG. 4B is a luminance characteristic diagram according to the present invention.

【図5】(a)本発明に係る検査状態の平面図 (b)本発明に係る検査状態の断面図 (c)本発明に係る画像図 (d)本発明に係る輝度特性図5A is a plan view of an inspection state according to the present invention, FIG. 5B is a sectional view of the inspection state according to the present invention, FIG. 5C is an image diagram according to the present invention, and FIG. 5B is a luminance characteristic diagram according to the present invention.

【符号の説明】[Explanation of symbols]

1 基板 5 電子部品 6 第1の光源 7 第2の光源 8 カメラ 13 半田 Q 電極 1 substrate 5 electronic component 6 first light source 7 second light source 8 camera 13 solder Q electrode

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】両側部の電極を基板に半田付けされた電子
部品に向かって上方から光を照射する第1の光源と、こ
の電子部品の長さ方向における斜上方向から光を照射す
る第2の光源と、この第2の光源と反対側の斜上方に設
けられてこの電子部品を斜上方から観察するカメラとか
ら成ることを特徴とする半田の外観検査装置。
1. A first light source that emits light from above toward an electronic component whose electrodes on both sides are soldered to a substrate, and a light source that emits light obliquely in the longitudinal direction of the electronic component. 2. A solder visual inspection apparatus comprising: a second light source; and a camera provided obliquely above the second light source, the camera observing the electronic component obliquely above.
【請求項2】両側部の電極を基板に半田付けされた電子
部品に向かって、上方及び電子部品の長さ方向における
斜上方から光を照射し、これと反対側の斜上方のカメラ
により半田及び電子部品の側部の電極を含むチェックエ
リアの画像を取り込んで、その画像データから半田の外
観の良否を判定することを特徴とする半田の外観検査方
法。
2. Light is emitted from above and obliquely upward in the lengthwise direction of the electronic component toward the electronic component soldered on the substrate, and solder is applied by the camera on the opposite diagonal side. And a method for inspecting the appearance of solder, wherein an image of a check area including electrodes on the side of an electronic component is captured and the quality of the appearance of the solder is determined from the image data.
JP3593192A 1992-02-24 1992-02-24 External appearance inspecting device and external appearance inspecting method for solder Pending JPH05232041A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3593192A JPH05232041A (en) 1992-02-24 1992-02-24 External appearance inspecting device and external appearance inspecting method for solder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3593192A JPH05232041A (en) 1992-02-24 1992-02-24 External appearance inspecting device and external appearance inspecting method for solder

Publications (1)

Publication Number Publication Date
JPH05232041A true JPH05232041A (en) 1993-09-07

Family

ID=12455777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3593192A Pending JPH05232041A (en) 1992-02-24 1992-02-24 External appearance inspecting device and external appearance inspecting method for solder

Country Status (1)

Country Link
JP (1) JPH05232041A (en)

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