JPH05223097A - Vacuum pump driving canned motor - Google Patents

Abstract

PURPOSE:To provide a vacuum pump driving canned motor which is capable of efficiently removing heat generated by the motor, or heat conducted by the vacuum pump. CONSTITUTION:In a vacuum pump driving canned motor in which a motor-stator 2 is sealed by a frame 1 and a can 7, one end of the frame 1 is fixed to a pump mounting flange 3, and the other end is fixed to an anti-load side flange 4, anda jacket 5, one end of which is fixed to the pump mounting flange 3 and the other end of which is fixed to the anti-load side flange 4, is provided on the outer periphery of the frame 1 with a space A between the frame and its outer peripheral surface. Further, one end of the can 7 is fixed to the pump mounting flange 3, and the other end is fixed to the anti-load side flange 4, and the space A surrounded by the frame 1, the jacket 5, the pump mounting flange 3, and the anti-load side flange 4 is used as a water-cooled chamber. Furthermore, a space B is provided in the pump mounting flange 3, and the space B is also used as a water-cooled chamber.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum pump driving canned motor that shares a shaft with a pump and is directly connected to the pump.

[0002]

2. Description of the Related Art Conventionally, a motor frame and a pump frame are connected via a pump mounting flange attached to one end of a motor frame, the motor shaft and the pump shaft are integrally connected, and the motor stator is connected to the frame and the cam frame. In a canned motor for driving a vacuum pump with a structure sealed by
Generally, the cooling method is to provide a water cooling chamber or cooling fins around the outer periphery of the frame in which the stator is inserted to cool the motor.

[0003]

As described above, in the vacuum pump drive canned motor that shares the shaft with the pump and is directly connected to the pump, in addition to the heat generated from the stator and the rotor, heat is generated by the can. The temperature of the motor rises due to the heat generated (heat due to eddy current loss) and the heat conducted from the vacuum pump. Therefore, as a countermeasure, it is necessary to increase the insulation performance of the motor by thickening the insulation layer of the motor or using a material having excellent insulation performance, and to increase the size (capacity) of the motor. Therefore, there are problems such as increased cost, increased size, and increased weight.

The present invention has been made in view of the above points, and an object of the present invention is to provide a canned motor for driving a vacuum pump capable of effectively removing heat generated by the motor and heat conducted by the vacuum pump. ..

[0005]

In order to solve the above problems, according to the present invention, as shown in FIG. 1, a motor frame 1 and a pump frame 20 are connected via a pump mounting flange 3 attached to one end of the motor frame 1. In addition, in the vacuum pump driving canned motor having a structure in which the motor rotating shaft 12 and the pump shaft are integrally connected, and the motor stator 2 is sealed by the frame 1 and the can 7.
One end of the pump mounting flange 3 is closely adhered to and fixed to the inner peripheral portion of the pump mounting flange 3, and the other end is fixed to the anti-load side flange 4, and one end of the pump is separated from the outer peripheral surface of the frame 1 with a space A between the outer peripheral surface and the outer peripheral surface. A jacket 5 is provided, which is fixed to the mounting flange 3 and the other end is fixed to the anti-load side flange 4. Further, one end of the can is fixed to the pump mounting flange and the other end is fixed to the anti-load side flange 4. A space A surrounded by the frame 1, the jacket 5, the pump mounting flange 3 and the anti-load side flange 4 is a water cooling chamber, and further, a space B is provided inside the pump mounting flange 3 so that the space B is also a water cooling chamber. Characterize.

[0006]

According to the present invention, since the canned motor for driving the vacuum pump is constructed as described above, the water cooling chamber is provided on the outer periphery of the motor frame 1 and the water cooling chamber is also provided inside the pump mounting flange 3. The heat from the pump transferred to the flange 3 and the heat generated in the can 7 and transferred to the pump mounting flange 3 are efficiently discharged, especially by the cold water flowing into the water cooling chamber inside the pump mounting flange 3 to the outside. Therefore, the temperature rise of the entire motor can be suppressed to a low level.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing the structure of a vacuum pump driving canned motor of the present invention. In FIG. 1, reference numeral 1 denotes a motor frame, the motor frame 1 having a cylindrical shape formed by press working, one end of which is fitted (press-fitted) to a side portion of a pump mounting flange 3 and welded, and the other end. Is fitted (press-fitted) to the anti-load side flange 4 and welded.

Reference numeral 5 denotes a jacket, which is cylindrical and is located on the outer periphery of the motor frame 1 and is arranged with a gap A between it and the outer peripheral surface of the motor frame 1. One end of the jacket 5 is fitted (press fit) into the pump mounting flange 3.
And then welded, and the other end is fitted (press-fitted) to the counter-load side flange 4.
Then welded. Two sockets 6 which are screwed and communicate with the space A are welded to the jacket 5. A side surface on the motor side of the pump mounting flange 3 is formed in a concave shape, and a gap B is formed between the side surface and the outer side surface of the throttle portion 1a of the motor frame 1. One of the two sockets is connected to the cooling water inlet pipe, and the other is connected to the cooling water outlet pipe. That is, the space A surrounded by the outer periphery of the motor frame 1, the inner periphery of the jacket 5, the pump mounting flange 3 and the anti-load side flange 4 is a water cooling chamber.

A stator 2 is fixed inside the motor frame 1, and a thin cylindrical can 7 is inserted into an inner cylindrical surface of the stator 2, one end of which is an inner diameter portion of a pump mounting flange 3. (Press-fitting), and the other end is fitted (press-fitting) to the anti-load side flange 4. Further, the can 7 has a pump mounting flange 3 and an anti-load side flange 4 at both ends thereof.
Is welded to.

An annular groove 3b is formed on the side surface of the pump mounting flange 3 on the motor side, and a closing plate 13 is press-fitted into the opening of the annular groove 3b to form a gap B in the inner diameter portion of the pump mounting flange 3. Form. Further, the pump mounting flange 3 is provided with two plug holes 3a communicating with the space B, one of which is connected to the cooling water inlet pipe and the other is connected to the cooling water outlet pipe. That is, the space B in the pump mounting flange 3 is also a water cooling chamber.

A disk-shaped cover 9 on the anti-load side is provided on the outer surface of the flange 4 on the anti-load side with an O-ring 8 interposed therebetween.
It is fixed by 0, and when the vacuum pump is attached, the inside of the pump chamber (not shown) and the can 7 is sealed tightly. The rotor 11 is press-fitted into a rotary shaft 12 directly connected to the rotary shaft of a vacuum pump.

By constructing the canned motor for driving the vacuum pump as shown in FIG. 1, heat from the vacuum pump (not shown) transferred to the pump mounting flange 3 and generated in the can 7 is generated in the pump mounting flange 3. The heat due to the eddy current loss transmitted to the pump mounting flange 3 can be efficiently discharged to the outside by the cold water flowing into the void B in the pump mounting flange 3.
It is possible to keep the temperature rise of the entire motor low.

[0013]

As described above, according to the present invention, the following excellent effects can be obtained. (1) Since the water cooling chamber is provided on the outer periphery of the motor frame and the water cooling chamber is also provided on the pump mounting flange, the heat conducted from the vacuum pump in contact with the pump mounting flange and the heat conducted from the can closely attached to the pump mounting flange. Can be efficiently discharged to the outside, the temperature rise of the entire motor can be suppressed to a low level, the structure is simple and the motor itself can be made compact,
Weight reduction can be achieved.

(2) Further, since the heat can be efficiently released to the outside as described above, it becomes possible to make the distance closer in consideration of heat transfer between the motor and the vacuum pump, which is a high heat source, and thus the vacuum pump. The overall size of the device can be reduced.

(3) Further, in the high frequency operation using the inverter power source in response to the speedup of the vacuum pump, the eddy current loss of the can, which is peculiar to the high frequency operation, increases, but the heat generation due to the increase in the eddy current loss is also efficiently removed. Therefore, the canned motor for driving the vacuum pump can be operated at high speed.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing the structure of a vacuum pump driving canned motor of the present invention.

[Explanation of symbols]

 1 Motor frame 2 Stator 3 Pump mounting flange 3a Plug hole 3b Annular groove 4 Anti-load side flange 5 Jacket 6 Socket 7 Can 8 O-ring 9 Anti-load side cover 10 Bolt 11 Rotor 12 Rotating shaft 13 Closing plate

Claims (1)

[Claims] 1. A motor frame and a pump frame are connected via a pump mounting flange attached to one end of a motor frame, a motor shaft and a pump shaft are integrally connected, and a motor stator is the frame. In a canned motor for driving a vacuum pump, which is sealed with a can, an end of the frame is fixed to the pump mounting flange and the other end is fixed to an anti-load side flange. A jacket having one end fixed to the pump mounting flange and the other end fixed to the anti-load side flange with a gap is further provided, and one end of the can is further closely attached to the inner peripheral portion of the pump mounting flange to be fixed. Together with the other end fixed to the anti-load side flange, the frame, the jacket, the pump mounting flange, and the anti-load side flange. Voids surrounded by Nji a water cooling chamber, further, canned motor for a vacuum pump drive, characterized in that the void is also water-cooled chamber provided voids therein said pump mounting flange.